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The)8(r)5(e are t)4(w)5(o ki)10(nd)5(s of)5( )]TJ 0.1075 Tw -13.373 -1.15 Td [(cor)6(ro)5(s)2(i)4(o)5(ns i)10(n)-1( )6(e)8(l)4(ect)4(roni)4(c)8( pac)8(k)5(ages.)7( T)7(h)-1(e)8( fi)4(rst)10( ki)10(nd)5( i)4(s)8( t)4(h)-1(e)8( m)6(e)2(t)4(a)2(l )]TJ 0.0005 Tc 0.0255 Tw 0 -1.15 TD [(dent)8(ritic growth at t)8(h)-3(e cat)8(hode )]TJ -0.0007 Tc 0.0267 Tw 12.587 0 Td [(side on t)7(h)-5(e surf)]TJ -0.0009 Tc 0.0209 Tw 6.209 0 Td [(ace of )-6(substrate )]TJ -0.0006 Tc 0.0446 Tw -18.796 -1.144 Td [(\(e.g. copper tra)5(ce\). )]TJ 0.0023 Tc 0.0417 Tw 7.895 0 Td [(El)4(ect)4(rol)4(y)4(t)4(i)4(c)2( di)4(ss)8(ol)4(ut)4(i)10(o)-2(n)4( )6(o)4(f)-1( c)8(o)4(ppe)8(r)5( at)4( a)8(n)-2(o)4(d)-2(e)8( )]TJ -0.0012 Tc 0.2312 Tw -7.895 -1.15 Td [(w)-5(ill create m)9(e)-1(tal io)-5(n)-5(s)4(. )6(Th)-5(e )6(metal io)-5(n)-5(s)-2( t)7(h)-5(en)-5( m)9(i)1(g)-5(r)-4(ate to t)7(h)-5(e )]TJ -0.0009 Tc 0.2908 Tw T* [(cath)-5(o)1(d)-5(e)5( sid)-5(e)5( )6(as m)9(o)-5(istu)-5(re )6(prov)-5(id)-5(es t)7(h)-5(e tran)-5(sp)-5(ort )6(p)-5(a)-1(th \(e.g)-5(.)9( )]TJ -0.0017 Tc 0.0937 Tw 0 -1.144 TD [(m)8(o)-6(istu)-6(re ab)-6(sorb)-6(ed )6(b)-6(y so)-6(ld)-6(er )6(resist m)8(a)-2(terial\))-11(.)-4( )6(W)-6(h)-6(en th)-6(e m)8(e)-8(tal)-6( )]TJ -0.001 Tc 0.6689 Tw 0 -1.15 TD [(io)-5(n)-5(s)4( reach t)7(h)-5(e cat)7(h)-5(o)1(d)-5(e)5(, )6(d)-5(e)-1(ndritic grow)-5(th can )6(o)-5(c)-1(cu)-5(r. )]TJ -0.0019 Tc 0.2678 Tw T* [(Co)-6(n)-6(tinuo)-6(u)-6(s)3( red)-6(u)-6(c)-2(tion)-6( )6(of )6(d)-6(isso)-6(lv)-6(ed)-6( m)8(e)-2(tal i)-6(o)-6(n)-6(s)3( lead)-6(s to)-6( t)6(h)-6(e )]TJ -0.0014 Tc 0.1054 Tw 0 -1.144 TD [(n)-5(u)-5(c)-1(leation)-5( and grow)-5(th of m)9(e)-1(tal )]TJ -0.0021 Tc 0.1061 Tw [(d)-6(e)-2(nd)-6(rites, an)-6(d ev)-6(en)-6(t)6(u)-6(ally th)-6(e)-8( )]TJ 0.0024 Tc 0.2635 Tw 0 -1.15 TD [(fo)5(rm)12(ati)4(on )6(of)5( )6(ano)5(d)-1(e)8(-)-1(cat)4(h)5(ode)8( sh)5(ort)10( fai)4(l)4(u)5(re)8( [)5(11])5(.)6( T)7(h)-1(e se)8(con)5(d)5( )]TJ 0.0011 Tc 0.0969 Tw 0 -1.144 TD [(kind of c)7(o)-3(rrosi)9(on )6(occ)7(u)-3(rs i)9(n)-3( s)6(u)-3(b-s)6(u)-3(rface ass)6(o)-3(ciated wit)9(h)-3( gl)9(ass )]TJ 0.0002 Tc 0.3857 Tw 0 -1.15 TD [(fibers/epoxy resin )-6(interface, )]TJ 0.0006 Tc 0.3913 Tw 12.611 0 Td [(so-called C)8(o)3(nductive )6(Anodic )]TJ 0.0023 Tc 0.3416 Tw -12.611 -1.15 Td [(Fi)4(l)4(a)-4(m)12(e)2(nt)4( \(CAF\) g)4(r)5(owt)10(h)-2(. T)7(h)-2(e CA)5(F g)4(r)-1(o)4(w)5(s fr)5(om)12( anode)8( t)4(o)4( )]TJ 0.0007 Tc 0.5832 Tw 0 -1.144 TD [(cathode)7( )-6(along delam)11(i)3(nate)-5(d fibe)7(r/epoxy )-6(interfaces)6( whe)7(n)3( )]TJ 0.0027 Tc 0.0773 Tw 0 -1.15 TD [(m)13(o)-1(i)5(s)2(t)5(u)-1(re i)5(s)2( pre)9(s)2(ent)5(.)1( A C)10(A)-1(F i)11(s)2( )-6(m)13(a)3(de fr)6(om)13( sol)5(u)5(bl)5(e co)5(ppe)9(r )6(salt )]TJ -0.0019 Tc 0.0579 Tw T* [(at anod)-6(e and bu)-6(ilt at an)-6(od)-6(e )6(by tu)-6(rn)-6(ing to inso)-6(lub)-6(le )6(salt due to )]TJ 0.0011 Tc 0.0309 Tw 0 -1.144 TD [(pH )6(effect. De)7(ndrite occ)7(u)3(rs as )]TJ 0.0004 Tc 0.0316 Tw 12.095 0 Td [(a res)6(u)-3(lt of )6(sol)8(u)3(tion at anode a)6(n)-4(d )]TJ 0.0022 Tc -0.0002 Tw -12.095 -1.15 Td [(pl)4(at)4(i)4(ng at)10( cat)4(h)4(ode)8(. )]TJ -0.0018 Tc 0.1298 Tw 1.44 -1.245 Td [(In ord)-6(e)-2(r to add)-6(r)-5(ess tho)-6(s)-3(e mo)-6(istu)-6(re effects, th)-6(ree )6(k)-6(ind)-6(s )6(of )]TJ -0.0002 Tc 0.5001 Tw -1.44 -1.15 Td [(accelerated m)10(o)-4(isture sensitivity)]TJ 0 Tc 0.4999 Tw 13.595 0 Td [(/reliability tests are )6(often )]TJ -0.0008 Tc 0.2967 Tw -13.595 -1.15 Td [(ap)-5(p)-5(lied)-5( fo)-5(r pack)-5(ag)-5(e reliab)-5(i)7(lity )-6(q)-5(u)-5(alificati)-5(o)-5(n)-5(s)-2( [2)-5(]. )-6(Mo)-5(istu)-5(re )]TJ -0.0013 Tc 0.2073 Tw T* [(sen)-5(s)-2(itiv)-5(ity test is requ)-5(ired)-5( )6(prio)-5(r to reliab)-5(i)1(l)7(ity en)-5(v)-5(i)1(ro)-5(n)-5(m)9(en)-5(tal)-5( )]TJ 0.0006 Tc 0.1994 Tw 0 -1.15 TD [(stresses )6(for all de)7(vices that )]TJ 0.0001 Tc 0.1999 Tw 11.963 0 Td [(are s)5(u)-4(rface mounte)]TJ -0.0001 Tc 0.2001 Tw [(d to )6(boa)6(r)-3(ds)5(. )]TJ -0.0015 Tc 0.1715 Tw -11.963 -1.15 Td [(Mo)-5(istu)-5(re/reflow)-5( sen)-5(s)-2(itiv)-5(ity )-6(t)6(e)-2(st )-6(h)-5(a)-2(s b)-5(e)-2(en)-5( do)-5(cu)-5(m)8(e)-2(n)-5(ted )-6(in th)-5(e )]TJ 0.0002 Tc 0.2357 Tw 0 -1.144 TD [(joi)8(n)-4(t JEDEC/IPC industry st)8(a)]TJ -0.0015 Tc 0.2375 Tw 12.509 0 Td [(n)-5(d)-5(a)4(rd)-5( J-STD-)-4(020)-5(C [1)-5(2)-5(])2(. Th)-5(is )]TJ -0.0012 Tc 0.4471 Tw -12.509 -1.15 Td [(test sp)-5(ecificatio)-5(n)-5( )6(h)-5(a)-1(s establish)-5(e)-1(d)-5( ex)-5(po)-5(sure cond)-5(itio)-5(n)-5(s)4( o)-5(f)2( )]TJ -0.0006 Tc 0.4105 Tw 0 -1.15 TD [(te)-7(m)9(p)-4(eratu)-4(r)-4(e, )6(h)-4(u)-4(m)9(id)-4(ity, an)-4(d ti)-5(m)9(e)-1( fo)-4(r wh)-4(ich)-4( t)7(h)-4(e m)9(o)-4(i)-5(s)-1(tu)-4(re )]TJ 0.0005 Tc 0.1155 Tw 0 -1.144 TD [(sensitivity rating )6(of s)6(u)-3(rface )6(m)10(ount de)6(vices)6( are)6( classifie)6(d)-3( )6(and)9( )]TJ -0.0012 Tc 0.6091 Tw 0 -1.15 TD [(referen)-5(c)-1(ed)-5(. )6(Mo)-5(istu)-5(re sensitiv)-5(ity lev)-5(e)-1(ls)-8( \(MSL\) and th)-5(e )]TJ -0.0005 Tc 0.0145 Tw 0 -1.144 TD [(estab)-4(lish)-4(e)-1(d)-4( test)7( co)-4(nd)-4(itio)-4(ns fo)-4(r )6(th)-4(eir m)9(easu)-4(r)-3(emen)-4(t are sho)-4(w)2(n)-4( in )]TJ 0.0025 Tc 0.4494 Tw 0 -1.15 TD [(Tabl)4(e )6(1.)7( De)8(f)6(i)4(ned)5( are)8( si)4(x)5( l)4(e)2(vel)4(s)2( )6(ra)8(ngi)10(ng)5( f)6(r)6(o)-1(m)12( )-6(m)12(o)-1(ist)4(u)-1(re)8( )]TJ -0.0012 Tc 0.2311 Tw T* [(in)-5(sen)-5(s)-2(itiv)-5(e \(Lev)-5(el )6(1)-5(\))2( to ex)-5(t)7(r)-4(em)9(el)-5(y sen)-5(s)-2(itiv)-5(e )6(\(Lev)-5(el )6(6)-5(,)3( )6(b)-5(a)-1(k)-5(e)5( )]TJ -0.0004 Tc 0.2723 Tw 0 -1.144 TD [(fro)-4(m)10( u)-4(s)-1(e\). M)7(o)-4(istu)-4(re/)8(r)-3(eflow)-4( )6(sen)-4(s)-1(itiv)-4(ity test in)-4(sures t)8(h)-4(at )6(th)-4(e )]TJ 0.0029 Tc 0.2031 Tw 0 -1.15 TD [(t)5(e)-3(m)13(p)-1(erat)5(ure)9(,)1( h)5(u)-1(m)13(i)5(di)5(ty)5( )-6(and/)11(or)6( )]TJ 0.0002 Tc 0.2118 Tw 12.569 0 Td [(the s)5(h)-4(ipping )6(requirem)10(ents are )]TJ -0.0004 Tc 0.0804 Tw -12.569 -1.15 Td [(met b)-4(efo)-4(re assessin)-4(g)-4( t)8(h)-4(e u)-4(s)-1(e )6(reliab)-4(ility. Th)-4(e so)-4(-called)-4( )6(H)-4(i)2(gh)-4(ly )]TJ 0.0003 Tc 0.0017 Tw 0 -1.144 TD [(Accelerated St)8(ress Test )6(\(HAST\) \(w)]TJ 0.0016 Tw 14.225 0 Td [(ithout ele)6(ctrical bias\) is t)8(h)-3(e )]TJ 0.0007 Tc 0.1393 Tw -14.225 -1.15 Td [(second )6(kind )6(of the accelerat)9(ed te)]TJ 0.0001 Tc 0.1399 Tw 13.775 0 Td [(st to eval)8(uate non-hermetic)-6( )]TJ 0.0022 Tc 0.1138 Tw -13.775 -1.15 Td [(packa)8(g)-2(e)8(d)-2( )6(devi)10(ces i)4(n)-2( h)4(u)-2(m)12(i)4(d envi)10(ro)4(nm)12(ent)4(s)1(. The t)4(e)2(st)4( em)12(pl)4(oy)4(s )]TJ 0.0004 Tc 0.3075 Tw T* [(te)-6(m)10(p)-3(erature a)6(n)-3(d hum)10(i)2(dity to )]TJ 0.0002 Tc 0.3077 Tw 12.839 0 Td [(accelerate t)8(h)-4(e )6(penetrati)8(o)-4(n of )]TJ -0.0007 Tc 0.0567 Tw -12.839 -1.15 Td [(m)9(o)-5(istu)-5(re th)-5(roug)-5(h)-5( t)7(h)-5(e ex)-5(tern)-5(al)7( p)-5(r)]TJ 0.0005 Tc 0.0555 Tw 13.109 0 Td [(otective m)10(aterial or along the )]TJ -0.0015 Tc 0.1655 Tw -13.109 -1.15 Td [(in)-5(tern)-5(al )6(bu)-5(ild)-5(-u)-5(p )6(o)-5(r)-4( )6(jo)-5(in)-5(ed)-5( i)6(n)-5(terfaces. Bias is no)-5(t app)-5(lied in )]TJ -0.0008 Tc 0.5787 Tw T* [(th)-5(is test to)-5( )6(en)-5(su)-5(re t)7(h)-5(e )6(failu)-5(re m)9(ech)-5(an)-5(ism)9(s)-2( p)-5(o)-5(t)1(en)-5(tially)-5( )]TJ 0.002 Tc 0.144 Tw 0 -1.15 TD [(ove)8(rs)7(had)4(o)4(w)-2(ed)4( by)10( bi)4(as)7( ca)8(n )6(b)4(e)2( det)4(ect)4(e)8(d)-2(.)6( T)7(h)-2(i)4(s)1( t)4(e)2(st)4( i)4(s)7( )6(use)8(d)-2( t)10(o)4( )]TJ -0.0014 Tc 0.2493 Tw T* [(id)-5(en)-5(tify )6(failu)-5(re m)9(ech)-5(an)-5(ism)9(s)-8( in)-5(tern)-5(al t)7(o)-5( t)7(h)1(e p)-5(a)-1(ck)-5(ag)-5(e )6(and)-5( is )]TJ -0.0015 Tc 0.1535 Tw 0 -1.144 TD [(d)-5(e)-2(stru)-5(ctiv)-5(e. )6(An)-5( au)-5(to)-5(clav)-5(e test or )6(steam)8( tes)-8(t is sim)8(ilar to)-5( )6(th)-5(e )]TJ 0.0001 Tc 0.1159 Tw 0 -1.227 TD [(HAST test. Stea)-6(m)10( test has )6(a fixe)6(d tem)10(p)-4(erature )6(\(121)]TJ /C2_0 1 Tf 0 Tc 0 Tw 21.85 0 Td <0071>Tj /TT0 1 Tf -0.0046 Tc 0.1146 Tw 0.402 0 Td [(C\))-8( a)-5(n)-8(d )]TJ 0.001 Tc 0.103 Tw -22.252 -1.144 Td [(fixe)7(d RH \(100%\). )6(During )6(HAST)]TJ 0.0003 Tc 0.1037 Tw 13.553 0 Td [(, the )6(pac)6(k)2(ages a)6(r)-3(e )6(placed in )]TJ 0.0026 Tc 0.2513 Tw -13.553 -1.15 Td [(t)5(h)-1(e e)9(nvi)5(r)6(o)5(nm)13(ent)5(a)3(l)5( cham)13(ber )6(wi)5(t)5(h)-1( )6(h)5(u)-1(m)13(i)5(di)5(ty an)5(d t)5(e)3(m)13(p)-1(erat)5(ure)15( )]TJ 0.0025 Tc 0.2155 Tw 0 -1.144 TD [(cont)10(rol)4(s)2( )6(fo)5(r c)8(e)2(rt)4(ai)4(n )6(peri)4(o)5(d)-1( )6(of t)4(i)4(m)12(e. Bot)4(h)5( st)4(eam)12( and )6(H)5(A)-1(ST)7( )]TJ 0.0021 Tc 0.4558 Tw 0 -1.15 TD [(rem)12(a)2(i)4(n)-2( st)4(anda)8(rds)7( )6(based)4( re)8(qui)10(rem)12(e)2(nt)4(s. L)7(a)2(st)4(l)4(y)4(, t)4(h)-2(e )6(bi)4(ased)4( )]TJ -0.0008 Tc 0.3027 Tw T* [(te)-7(m)9(p)-5(eratu)-5(r)-4(e/)7(h)-5(u)1(mid)-5(ity \(TH)-5(\))2( test is a m)9(o)-5(istu)-5(re test used to )]TJ -0.0016 Tc 0.2196 Tw 0 -1.144 TD [(si)-6(m)8(u)-5(late th)-5(e )6(reliab)-5(ility o)-5(f)-5( a pow)-5(ered d)-5(e)4(v)-5(i)6(ce in an elev)-5(ated)-11( )]TJ 0.0025 Tc 0.0535 Tw 0 -1.15 TD [(t)4(e)-4(m)12(p)-1(erat)4(ure)8( a)8(n)5(d )6(hi)4(g)5(h)5( h)5(u)-1(m)12(i)4(di)4(ty)5( en)5(vi)4(r)6(onm)12(ent)4( u)5(n)5(d)-1(er)6( at)4( )6(nom)12(inal)4( )]TJ 0.0022 Tc 0.0778 Tw T* [(ru)4(n st)4(at)4(e st)4(at)4(i)4(c)2( bi)4(as \()5(r)-1(an)4(gi)10(ng )6(fr)5(om)12( 0.1 t)4(o)-2( )6(7)4(V)-2(\).)6( T)7(h)-2(ere a)8(r)-1(e)8( t)4(w)-2(o)4( )]TJ 0.0024 Tc 0.4135 Tw 0 -1.144 TD [(st)4(anda)8(rd)5( fo)5(rm)6(s of)5( )-6(t)4(h)-1(e)8( bi)4(as)8(ed )]TJ -0.001 Tc 0.4229 Tw 13.673 0 Td [(m)9(o)-5(istu)-5(re t)7(e)-1(st th)-5(at)7( can )6(b)-5(e)-1( )]TJ 0.0002 Tc 0.3737 Tw -13.673 -1.15 Td [(e)-6(m)10(ployed. The tem)10(p)-4(erature, hum)10(i)2(dity bias \(THB)7(\) test)8( is )]TJ 0.0011 Tc 0.0849 Tw 0 -1.15 TD [(perform)11(e)1(d at atm)11(o)-3(sphe)7(ric pre)7(ssure)7( and temperat)9(ures )6(between )]TJ 0.0039 Tc 0 Tw 0 -1.222 TD (30)Tj /C2_0 1 Tf 0 Tc 1.002 0 Td <0071>Tj /TT0 1 Tf 0.0017 Tc 0.1083 Tw 0.402 0 Td [(C an)4(d )6(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 3.828 0 Td <0071>Tj /TT0 1 Tf 0.0022 Tc 0.1078 Tw 0.396 0 Td [(C and t)10(h)-2(e r)5(e)2(l)4(a)2(t)4(i)4(v)-2(e h)4(u)-2(m)12(i)4(di)4(ty)4( )-6(\(RH\))5( f)5(r)-1(om)12( 50)4(% t)4(o)4( )]TJ 0.0006 Tc 0.1274 Tw 20.866 67.958 Td [(85%. The)7( highly )-6(accelerate)7(d)-3( )-6(st)9(ress)]TJ -0.0004 Tc 0.1344 Tw 14.429 0 Td [( test with bias)5( \(HAST\) is)5( )]TJ 0.0019 Tc 0.318 Tw -14.429 -1.144 Td [(per)5(f)-1(o)4(r)-1(m)12(e)2(d at)4( l)4(e)2(ss t)4(h)-2(an)4( 3 a)8(t)-2(m)12(o)-2(sphe)8(res )6(of)5( pre)8(ssu)4(re a)8(n)4(d)4( at)4( )]TJ 0.0004 Tc 0.0016 Tw T* [(te)-6(m)10(p)-3(eratures)6( between )6(110)]TJ /C2_0 1 Tf 0 Tc 0 Tw 10.499 0 Td <0071>Tj /TT0 1 Tf -0.0014 Tc -0.0026 Tw 0.402 0 Td [(C an)-5(d )-6(160)]TJ /C2_0 1 Tf 0 Tc 0 Tw 4.11 0 Td <0071>Tj /TT0 1 Tf -0.0003 Tc 0.0023 Tw 0.402 0 Td (C. )Tj 0 Tc 0 Tw -13.973 -1.252 Td ( )Tj 0.002 Tc 0.0018 Tw 8.7134 0 0 8.73 331.719 678.972 Tm [(Tabl)6(e)-2( 1)8( JEDEC )7(specifi)6(ed m)5(o)1(istu)8(re sensit)6(ivit)6(y )7(l)6(e)-2(v)8(e)-2(l \(MSL\) )7(and )]TJ 0.0017 Tc 0.0021 Tw 7.013 -1.153 Td [(corresponding f)7(l)6(oor lif)7(e )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 674.1 227.04 -141.72 re W* n q 225.5996697 0 0 3.1199937 328.3195375 670.5591002 cm /Im0 Do Q q 225.8396885 0 0 14.3999843 328.3195375 656.1591631 cm /Im1 Do Q q 225.5996697 0 0 122.3998112 328.3195375 533.7593519 cm /Im2 Do Q q 225.8396885 0 0 0.2400031 328.0795501 533.5193016 cm /Im3 Do Q q 225.5996697 0 0 0.7199937 328.3195375 532.7993236 cm /Im4 Do Q q 225.8396885 0 0 0.2400031 328.0795501 532.5593362 cm /Im3 Do Q q 225.5996697 0 0 0.2400031 328.3195375 532.3193487 cm /Im5 Do Q Q BT /TT0 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 547.0008 528.4086 Tm ( )Tj -24.141 -1.018 Td ( )Tj 0.0002 Tc 0.3377 Tw 1.44 -1.252 Td [(The m)10(o)-4(st crit)8(ical and c)6(ont)8(ri)]TJ -0.0019 Tc 0.3398 Tw 12.383 0 Td [(b)-6(u)-6(tor)-5(y )6(f)-5(actor fo)-6(r m)8(o)-6(st o)-6(f)-5( )]TJ -0.0015 Tc 0.1355 Tw -13.823 -1.144 Td [(m)8(o)-5(istu)-5(re-in)-5(d)1(u)-5(c)4(ed)-5( )6(failu)-5(res is t)6(h)-5(e ad)-5(h)-5(e)4(sion)-5( )6(deg)-5(r)-4(ad)-5(ation)-5( )6(d)-5(u)-5(e to)-5( )]TJ -0.0012 Tc 0.6871 Tw 0 -1.15 TD [(m)9(o)-5(istu)-5(re, )6(d)-5(e)-1(sp)-5(ite th)-5(e )6(failu)-5(re m)9(ech)-5(an)-5(ism)9(s)-2( an)-5(d)-5( testi)7(n)-5(g)-5( )]TJ 0.0006 Tc 0.4693 Tw T* [(conditions. )6(F)5(o)-3(r e)7(x)-3(am)11(ple, )6(during s)6(u)-3(rfac)7(e m)11(ount process,)-7( )]TJ -0.0008 Tc 0.0448 Tw 0 -1.144 TD [(in)-5(terfacial delamin)-5(a)-1(tio)-5(n)-5( w)-5(ill )6(o)-5(ccur )6(d)-5(u)1(e to)-5( t)7(h)1(e co)-5(m)9(b)-5(in)-5(atio)-5(n)-5(s)4( o)-5(f)2( )]TJ 0.002 Tc 0.3239 Tw 0 -1.15 TD [(vap)4(o)4(r)-1( )6(pre)8(ssu)4(r)5(e)2(, t)4(h)-2(e)8(r)-1(m)12(a)2(l)4( and )6(hy)4(g)4(r)-1(o)4(s)1(co)4(pi)4(c)8( st)4(resses)7(, )6(b)4(u)-2(t)4( t)4(h)-2(e)8( )]TJ -0.0018 Tc 0.0338 Tw 0 -1.144 TD [(p)-6(ack)-6(ag)-6(e wou)-6(ld rem)8(a)-2(in)-6( in)-6(tact i)6(f)-5( th)-6(e ad)-6(h)-6(e)4(sion)-6( )6(streng)-6(th is stron)-6(g )]TJ -0.0016 Tc 0.1896 Tw 0 -1.15 TD [(en)-5(oug)-5(h. Dur)-5(ing)-5( unb)-5(iased HA)-5(ST, th)-5(e )6(r)-5(e)-2(sistan)-5(ce of)-5( ad)-6(h)-5(e)-2(sio)-6(n)1( )]TJ 0.0023 Tc 0.4016 Tw T* [(st)4(ren)4(g)-2(t)4(h)-2( t)10(o)-2( h)4(u)-2(m)12(i)4(di)4(ty)4(/)4(t)4(e)-4(m)12(p)-2(erat)4(ure)8( agi)10(ng i)10(s)2( a key)4( f)5(o)4(r )6(t)4(h)-2(e )]TJ 0 Tc 0.014 Tw 0 -1.144 TD [(packa)6(g)-4(e i)8(n)-4(tegrity since significan)]TJ 0.0016 Tc 0.0124 Tw 13.451 0 Td [(t)4( hy)4(g)4(r)-1(o)4(s)1(co)4(pi)4(c st)4(resses)7( ca)8(n )6(be )]TJ 0.0027 Tc 0.3832 Tw -13.451 -1.15 Td [(devel)11(ope)9(d.)7( F)7(o)5(r co)5(n)5(duct)5(i)5(v)-1(e)9( )6(ano)5(d)-1(i)5(c)3( fi)5(l)5(a)3(m)13(e)-3(nt)5( g)5(ro)5(w)-1(t)5(h)-1( )6(u)5(n)5(der )]TJ -0.002 Tc 0.154 Tw 0 -1.15 TD [(b)-6(iased H)-6(AST co)-6(nd)-6(itio)-6(n, )-6(th)-6(e d)-6(e)-2(lamin)-6(a)-2(tio)-6(n)-6(/vo)-6(id)-6(s b)-6(e)-2(tw)-6(een)-6( )-6(t)6(h)-6(e )]TJ 0.0006 Tc 0.2114 Tw 0 -1.144 TD [(fiber/e)7(p)-3(o)3(x)-3(y)9( int)9(e)1(rface)7( is )6(res)6(p)3(onsi)9(b)-3(le )6(fo)3(r)4( th)3(e failu)3(re.)5( )6(W)-9(i)3(t)9(h)-3(o)3(u)-3(t )]TJ -0.0017 Tc 0.3276 Tw 0 -1.15 TD [(d)-6(e)-2(fects )6(o)-6(r)-5( )6(d)-6(e)-2(la)-8(m)8(in)-6(a)-2(tio)-6(n)-6(,)-4( th)-6(e CA)-5(F grow)-5(th w)-5(ill n)-6(o)-6(t o)-6(c)-2(cu)-6(r. )]TJ 0.0001 Tc 0.0199 Tw T* [(There)6(f)3(ore, it is critical)]TJ 0.0003 Tc 0.0197 Tw 8.993 0 Td ( to characterize the ad)Tj 0.0005 Tc 0.0195 Tw 8.855 0 Td [(hesion stre)6(ngth of )]TJ -0.0003 Tc 0.0563 Tw -17.848 -1.144 Td [(th)-4(e in)-4(terested)-4( i)8(n)-4(terfaces as fun)-4(ctio)-4(n)-4( )6(of m)10(o)-4(is)-7(tu)-4(re, in)-4( )6(p)-4(a)6(rticular, )]TJ 0.0006 Tc 0.0014 Tw T* [(at elevated temperat)9(ures)6(. )6( )]TJ 0.0023 Tc 0.3116 Tw 1.44 -1.245 Td [(In)4( t)4(h)-2(i)4(s)2( )6(pa)8(per)5(,)6( seve)8(ral)4( a)8(dhe)8(si)4(on)4( an)4(d)4( f)5(r)-1(act)4(ure)8( t)4(o)4(ug)4(h)4(n)-2(ess)8( )]TJ 0 Tc 0.5239 Tw -1.44 -1.15 Td [(characte)6(r)-3(ization m)10(ethods a)6(r)-3(e i)8(n)-4(troduce)6(d and applied to )]TJ -0.001 Tc 0.2249 Tw T* [(in)-5(v)-5(e)-1(stig)-5(ate th)-5(e influ)-5(e)5(n)-5(ce )6(of )6(m)9(o)-5(istu)-5(re on in)-5(terfacial)7( fractu)-5(r)-4(e)11( )]TJ 0.0006 Tc 0.5233 Tw 0 -1.144 TD [(toughness )6(or adhe)7(sion stre)]TJ 0.0016 Tc 0.5163 Tw [(ngt)10(h. )-6(B)9(o)-2(th interface fract)10(ure)8( )]TJ 0.0008 Tc 0.1152 Tw 0 -1.15 TD [(mechanics bas)6(e)1(d fract)9(ure)7( )-6(toughn)]TJ 0.1212 Tw 13.493 0 Td [(ess)6( m)11(easure)-5(m)11(ent techni)9(ques )]TJ 0.0024 Tc 0.0116 Tw -13.493 -1.15 Td [(and t)10(h)-1(e )6(qui)4(c)8(k)-1(-t)10(ur)5(n m)12(e)2(t)4(hod s)8(u)4(ch as )6(di)4(e shea)8(r)5( t)4(e)2(st)4( are ap)5(pl)4(i)4(e)2(d t)4(o)5( )]TJ 0.0002 Tc 0.1698 Tw 0 -1.144 TD [(investigate t)8(h)-4(e)6( interface )6(behavior)]TJ 0.0007 Tc 0.1633 Tw 13.805 0 Td [(s with )-6(m)11(o)-3(isture)7(. Details )-6(of )]TJ 0.0022 Tc 0.1498 Tw -13.805 -1.15 Td [(expe)8(ri)4(m)12(e)2(nt)4(al)4( test)4( set)4(up, )6(sam)6(p)-2(l)4(e)2( p)4(r)-1(epa)8(r)-1(at)4(i)4(o)4(ns a)8(n)-2(d )6(key)4( re)8(sul)4(t)4(s)1( )]TJ -0.0012 Tc 0.2072 Tw 0 -1.15 TD [(are presen)-5(ted)-5(.)3( N)-5(e)5(x)-5(t)1(, th)-5(e )6(h)-5(y)7(g)-5(r)2(o)-5(s)-2(co)-5(p)-5(i)1(c sw)-5(ellin)-5(g)-5( m)9(easu)-5(r)-4(emen)-5(t )]TJ -0.0038 Tc 0.1438 Tw 0 -1.144 TD [(te)-4(c)-4(h)-8(n)-8(i)-2(qu)-8(e)-4(s)-5( ar)-7(e r)-7(e)-4(v)-8(i)-2(ew)-8(e)-4(d)-2(.)-6( Unf)-7(o)-2(r)-7(t)-2(un)]TJ -0.0001 Tc 0.1401 Tw 14.249 0 Td (ately, there is no standard )Tj -0.0017 Tc 0.2796 Tw -14.249 -1.15 Td [(h)-6(ygro)-6(s)-2(cop)-6(ic sw)-5(ellin)-6(g m)8(easu)-6(r)-5(em)8(en)-6(t )-6(m)8(e)-2(th)-6(o)-6(d)-6(. )6(Th)-6(e )6(p)-6(o)-6(tential)-6( )]TJ 0.001 Tc 0.2169 Tw T* [(expe)7(rim)11(e)1(ntal errors)6( ass)6(o)-3(ciat)]TJ -0.0021 Tc 0.22 Tw 11.645 0 Td [(ed)-6( )6(w)-6(ith th)-6(e TG)-6(A-TMA m)8(e)-2(t)-6(h)-6(od )]TJ -0.0013 Tc 0.0273 Tw -11.645 -1.15 Td [(are id)-5(en)-5(tified)-5( an)-5(d)-5( )6(stud)-5(ied)-5( an)-5(al)7(yticall)-5(y)1(. A)-5( simp)-5(le pro)-5(c)-1(edu)-5(r)-4(e )6(fo)-5(r )]TJ 0.0212 Tw 0 -1.15 TD [(o)-5(b)-5(tain)-5(i)7(n)-5(g)-5( t)7(h)-5(e co)-5(efficien)-5(t of hyg)-5(r)2(o)-5(s)-2(cop)-5(i)1(c swellin)-5(g)-5( is d)-5(e)-1(v)-5(e)-1(l)7(o)-5(p)-5(e)5(d )]TJ 0.3631 Tw 0 -1.144 TD [(to)-5( elim)9(in)-5(ate th)-5(e )6(no)-5(n-u)-5(n)-5(i)7(form)9( )-6(m)9(o)-5(istu)-5(re distrib)-5(u)-5(tion effect.)-9( )]TJ 0.0029 Tc 0.221 Tw 0 -1.15 TD [(Bot)5(h)-1( T)8(G)5(A-T)8(M)4(A m)13(e)3(t)5(hod a)9(n)-1(d)5( M)4(o)-1(i)5(r\351 i)11(n)-1(t)5(e)3(rfe)9(rom)13(e)3(t)5(ry)5( )-6(m)13(e)-3(t)5(h)-1(o)5(d)5( )]TJ -0.0011 Tc 0.0751 Tw T* [(are app)-5(lied)-5( t)7(o)-5( )6(measu)-5(r)-4(e t)7(h)-5(e )6(hyg)-5(r)2(o)-5(s)-2(cop)-5(i)1(c swellin)-5(g)-5( )6(b)-5(e)-1(h)-5(a)5(v)-5(i)1(ors of )]TJ 0.0027 Tc 0.1013 Tw 0 -1.144 TD [(several)5( )6(un)5(de)9(rfi)11(l)5(l)5(s)2(. A m)13(e)3(t)5(hodo)5(l)5(ogy)5( t)5(o)-1( al)5(l)5(o)5(w )6(a t)5(i)-1(m)13(e)3(-depen)5(d)5(e)3(nt)5( )]TJ 0.0001 Tc 0.0379 Tw 0 -1.15 TD [(finite elem)10(ent )-6(nonlinea)6(r analys)]TJ 0.0009 Tc 0.0371 Tw 12.467 0 Td [(is for pac)7(k)-3(a)7(g)3(e deform)11(ation )6(and )]TJ 0.0005 Tc 0.0795 Tw -12.467 -1.15 Td [(stress i)8(n)-3(duce)6(d )6(by )6(hygrosc)6(o)3(pic as )6(well as t)8(h)3(erm)10(al )-6(mis)-6(m)10(a)-6(t)2(c)-6(h)-3(es)6( )]TJ -0.0008 Tc 0.5427 Tw 0 -1.144 TD [(is p)-5(r)-4(esen)-5(ted)-5(.)3( Th)-5(e )6(nu)-5(m)9(e)-1(ri)-5(cal resu)-5(lts )6(ob)-5(tain)-5(ed fro)-5(m)9( th)-5(e )]TJ -0.0012 Tc 0.0152 Tw 0 -1.15 TD [(in)-5(teg)-5(r)-4(ated)-5( non)-5(l)7(in)-5(ear )6(fin)-5(ite elem)]TJ 0.0002 Tc 0.0138 Tw 12.611 0 Td (ent analysis are )Tj 0.0014 Tc 0.0066 Tw 6.461 0 Td [(com)11(p)-2(are)7(d)-3( with )]TJ -0.0005 Tc 0.5184 Tw -19.072 -1.15 Td [(th)-4(e Mo)-4(ir\351 i)7(n)2(terfero)-4(m)9(e)-1(try )-6(meas)]TJ 0.0013 Tc 0.5166 Tw 13.793 0 Td [(urem)11(ent. 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Th)-5(e )]TJ -0.0002 Tc 0.0562 Tw 0 -1.15 TD [(p)-4(articu)-4(l)2(ar )6(d)-4(i)2(ffi)8(cu)-4(lties in)-4( t)8(h)-4(e )6(meas)]TJ -0.0008 Tc 0.0568 Tw 13.427 0 Td [(u)-5(r)-4(em)9(en)-5(t of in)-5(terface fractu)-5(re )]TJ 0.0009 Tc 0.283 Tw -13.427 -1.15 Td [(toughness)6( are)7( the sam)11(p)-3(le pre)7(p)]TJ 0.0018 Tc 0.2821 Tw 13.187 0 Td [(arat)4(i)4(o)4(n,)6( a)8(n)-2(d)4( t)4(h)-2(e )6(desi)10(gn)4( an)4(d)4( )]TJ -0.0011 Tc 0.303 Tw -13.187 -1.144 Td [(i)-5(m)9(p)-5(l)1(e)-7(m)9(en)-5(tatio)-11(n)-5( of test proced)-5(ures th)-5(at )6(p)-5(r)2(ov)-5(id)-5(e co)-5(n)-5(t)1(ro)-5(lled, )]TJ 0.0002 Tc 0.2897 Tw T* [(stable growth of t)8(h)-4(e inte)6(rface )]TJ 0.0006 Tc 0.2893 Tw 13.415 0 Td (crack. Four-point)Tj 0.0009 Tc 0.283 Tw 7.235 0 Td [( be)7(nd )-6(test )]TJ 0.0014 Tc 0.5285 Tw -20.65 -1.15 Td [(specim)11(e)1(n has)7( bee)7(n)-2( s)7(u)-2(cces)7(sfully use)7(d)-2( i)9(n)-2( sem)11(i)3(conduc)7(tor )]TJ -0.0018 Tc 0.1058 Tw 0 -1.144 TD [(in)-6(du)-6(str)-5(ies t)6(o)-6( ch)-6(ar)-5(acter)-5(ize th)-6(e in)-6(terf)-5(acial fr)-5(actu)-6(r)-5(e)-2( t)6(o)-6(ughn)-6(ess at )]TJ -0.0007 Tc 0.1467 Tw 0 -1.15 TD [(silico)-5(n)-5( lev)-5(e)-1(l with)-5( )-6(m)9(u)-5(lti-stack)-5( layers o)-5(f)-4( th)-5(i)7(n)1( fil)-5(m)9(s. H)-4(o)1(w)-4(e)-1(ver, )]TJ 0.0005 Tc 0.2534 Tw T* [(the fracture t)8(o)3(ughness )6(at pa)6(ck)]TJ 0.002 Tc 0.2519 Tw [(age)8( l)4(e)2(vel)10( u)4(s)1(ual)4(l)4(y)4( has)7( hi)10(g)4(h)-2(er)5( )]TJ -0.002 Tc 0.2319 Tw 0 -1.144 TD [(f)-5(r)-5(actur)-5(e tou)-6(ghn)-6(ess \()-5(e)4(.g. > )6(20)-6( )6(J/m)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 194.1924 380.4642 Tm (2)Tj 0.0005 Tc 0.2294 Tw 9.701 0 0 9.7194 197.3352 376.0992 Tm [( for PI/)8(U)-3(F\).)5( Most)8( often,)5( )]TJ 0.0004 Tc 0.0976 Tw -14.591 -1.15 Td [(whe)6(n)3( the)6( inte)6(rface )6(strength i)8(s )]TJ -0.0002 Tc 0.0982 Tw 12.491 0 Td [(strong, t)8(h)-4(e)6( c)6(r)-3(ack )6(using 4-point )]TJ -0.0005 Tc 0.0685 Tw -12.491 -1.144 Td [(bend s)5(p)-4(ecim)9(e)-1(n)-10( tends)5( not t)7(o)2( stay )]TJ 0.0002 Tc 0.0678 Tw 13.385 0 Td [(at the)6( inte)6(rface but)8( goes)5( int)8(o)2( )]TJ -0.0007 Tc 0.7466 Tw -13.385 -1.15 Td [(th)-5(e silico)-5(n)-5(,)-3( )6(rend)-5(eri)7(n)-5(g)-5( t)7(h)-5(e in)-5(terfacial fracture en)-5(erg)-5(y)1( )]TJ 0.0005 Tc 0.2594 Tw 0 -1.15 TD [(measurem)10(ent meaningless. )12(This)]TJ 0.0013 Tc 0.2526 Tw 13.319 0 Td [( has )6(bec)7(o)3(me a )-6(m)11(a)1(jor issue)7( )]TJ -0.0012 Tc 0.1232 Tw -13.319 -1.144 Td [(w)-5(h)-5(en)-5( t)7(h)-5(e test is p)-5(e)-1(rform)9(e)-1(d)-5( in)]TJ 0.0004 Tc 0.1216 Tw 12.245 0 Td [( an environmental cham)10(ber )6(for )]TJ -0.0012 Tc 0.5851 Tw -12.245 -1.15 Td [(an)-5( in-)-4(s)-2(itu)-5( measu)-5(r)-4(em)9(en)-5(t. In)-5( th)-5(e )6(f)-4(o)-5(llowin)-5(g)-5(,)-3( t)7(h)-5(e doub)-5(le )]TJ -0.0014 Tc 0.2793 Tw T* [(can)-5(tilev)-5(e)-1(r b)-5(e)-1(am)9( \(D)-5(CB\) sp)-5(eci)-5(m)9(en)-5( stru)-5(ct)7(u)-5(r)2(e w)-5(a)-1(s ap)-5(p)-5(lied to )]TJ 0.0004 Tc 0.6675 Tw 0 -1.144 TD [(measure)6( the)6( interfacial )6(fr)]TJ 0.0002 Tc 0.6677 Tw 12.017 0 Td [(acture)6( toughne)6(ss. The )6(DCB)7( )]TJ -0.001 Tc 0.171 Tw -12.017 -1.15 Td [(silico)-5(n)-5(/)1(un)-5(d)-5(e)5(rfil)7(l/silico)-5(n)-5( \(Si/UF/Si\) sp)-5(ecim)9(e)-7(n)-5( )6(p)-5(r)-4(ep)-5(aratio)-5(n )6(w)-5(a)-1(s )]TJ 0.0034 Tc 0.0346 Tw 0 -1.15 TD [(sho)6(w)6(n i)11(n Fi)11(g. )6(1 i)5(n)6( t)5(he)9( f)6(ol)5(l)5(o)6(w)6(i)5(ng m)13(a)3(nne)9(r )6([1)6(8])6(. Fi)5(r)6(s)3(t)5(,)1( c)9(ut)5( s)9(h)6(im)13(s )]TJ 0.0025 Tc 0.0775 Tw 0 -1.144 TD [(and)5( di)4(ce )6(Si)4( wa)8(fers a)8(s)2( t)4(h)-1(e)8( di)4(m)6(e)2(nsi)4(o)5(ns s)8(h)5(ow)5(n)5( i)4(n)-1( Fi)10(g. )6(1. )6(A)5(p)5(pl)4(y)5( )]TJ -0.0006 Tc 0.0806 Tw 0 -1.15 TD [(PTFE typ)-4(e)-1( m)9(o)-4(ld)-4( release ag)-4(ent to)-5( th)-4(e b)-5(o)-4(tto)-4(m)9( Si su)-4(b)-4(s)-1(t)7(r)-4(ate, th)-4(e )]TJ -0.0015 Tc 0.1295 Tw T* [(ap)-5(p)-5(lied area is 30 mm)8( fro)-5(m)8( th)-5(e )6(fron)-5(t ed)-5(g)-5(e)4(. Place th)-5(e top Si)6( )]TJ 0.0011 Tc 0.1749 Tw 0 -1.144 TD [(substrate, the )6(shim)11(, and the )6(bo)]TJ -0.0006 Tc 0.1766 Tw 13.025 0 Td [(tto)-4(m)9( Si su)-4(bstrate to)-4(g)-4(e)-1(ther as )]TJ 0.0002 Tc 0.0438 Tw -13.025 -1.15 Td [(shown and )-6(fix them)10( )-6(in )-6(place)6( using )-6(two binder )-6(clips)5(.)-2( Place the )]TJ 0.0006 Tc 0.1754 Tw 0 -1.15 TD [(assem)11(b)-3(ly on a hot )6(plate set at certain temperat)9(ure. Usi)9(n)3(g a )]TJ -0.0017 Tc 0.2676 Tw 0 -1.144 TD [(syrin)-6(g)-6(e)4(, pu)-6(m)8(p)-6( und)-6(erfill m)8(a)-2(t)-6(e)-2(rial in)-6(to t)6(h)-6(e )6(g)-6(a)-2(p )6(b)-6(e)-2(tw)-5(een th)-6(e )]TJ 0 Tc 0.3019 Tw 0 -1.15 TD [(substrates from)10( )-6(the rear )6(e)6(n)-4(d )]TJ -0.002 Tc 0.3039 Tw 12.857 0 Td [(of th)-6(e asse)-8(m)8(b)-6(ly an)-6(d)-6( let)6( th)-6(e)-8( )]TJ -0.0013 Tc 0.1893 Tw -12.857 -1.15 Td [(u)-5(n)1(d)-5(e)5(rfill m)9(a)-1(te)-7(rial flow to the fron)-5(t end)-5( )6(of th)-5(e assem)9(b)-5(ly b)-5(y)1( )]TJ -0.0007 Tc 0.2906 Tw 0 -1.144 TD [(cap)-5(illary action)-5(.)3( Cure t)7(h)-5(e )6(un)-5(d)-5(e)5(rfill )6(fo)-5(llowin)-5(g)1( th)-5(e stand)-5(a)5(rd)-5( )]TJ 0.0027 Tc 0.1133 Tw 0 -1.15 TD [(curi)11(ng )6(p)5(roce)9(d)5(u)5(re. C)10(u)-1(t)5( t)5(h)-1(e s)8(h)-1(i)11(m)13( from)13( t)5(h)-1(e fr)6(ont)5( e)9(d)5(ge a)9(n)-1(d)5( )6(pul)5(l )]TJ -0.0014 Tc 0.2793 Tw 0 -1.144 TD [(th)-5(e sh)-5(im)9( o)-5(u)-5(t)1( )6(fro)-5(m)9( th)-5(e tw)-5(o sid)-5(e)-1(s of t)7(h)-5(e assem)9(b)-5(ly. A)-5(ttach)-5( )]TJ 0.0027 Tc 0.0293 Tw 0 -1.15 TD [(al)5(um)7(i)5(num)13( end)5(-)6(bl)5(oc)9(ks)8( t)5(o)5( t)5(h)-1(e)9( t)5(o)-1(p)5( a)9(n)-1(d)5( )6(bot)5(t)5(o)-1(m)13( sub)5(s)2(t)5(rat)5(es )6(usi)11(n)5(g a)9( )]TJ 0.0029 Tc 0.257 Tw T* [(ro)5(om)13(-t)5(em)13(perat)5(u)-1(re)9(-cu)5(re)9(d)-1( ep)5(o)5(x)-1(y)5(.)1( Al)11(um)13(i)5(num)7( en)5(d-)6(bl)5(oc)9(ks e)9(ach )]TJ -0.0015 Tc 0.0515 Tw 0 -1.144 TD [(w)-5(ith)-5( )6(an ex)-5(tended)-5( )6(arm)8( w)-5(e)-2(re )6(used to rei)6(n)-5(fo)-5(rce th)-5(e silicon)-5( )6(bea)-8(m)2( )]TJ 0.0028 Tc 0.3831 Tw 0 -1.15 TD [(and)5( )6(pre)9(v)-1(e)9(n)-1(t)5( i)11(t)5( fr)6(om)13( cracki)11(n)-1(g)5( )6(du)5(ri)5(n)5(g)-1( t)5(e)3(s)8(t)5(i)5(ng )6(o)5(f Si)5(/)5(U)5(F)7(/)5(Si )]TJ 0.0021 Tc -0.0001 Tw T* [(sam)12(p)-2(l)4(e)2(s, as sh)4(ow)4(n i)10(n)-2( Fi)10(g. )6(2.)6( )6( )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 498.3 229.62 246.24 re W n q 229.9797074 0 0 246.5996539 327.5995281 497.9393896 cm /Im0 Do Q Q BT /TT0 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 549.5034 495.351 Tm ( )Tj -0.0015 Tc 0.0053 Tw 8.7134 0 0 8.73 338.1792 481.6158 Tm [(Fig.)-5( 1 Sc)-5(he)-5(ma)-5(tic of the)-5( )7(a)-5(sse)-5(mb)]TJ 0.0005 Tc 0.0033 Tw 12.517 0 Td [(ly)-7( )7(parts for)6( a DCB)6( )7(Si/UF/Si )]TJ 0.001 Tc 0.0028 Tw -6.038 -1.153 Td (sandwiching specimen )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 297.06 219.06 168.6 re W n q 219.4197106 0 0 168.9597609 327.5995281 296.6996382 cm /Im1 Do Q Q BT /TT0 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 539.2602 300.1483 Tm ( )Tj -0.0006 Tc 0.0044 Tw 8.7134 0 0 8.73 334.338 286.3549 Tm [(Fig.)-4( 2 Sc)-4(he)-4(ma)-4(tic of a Si/UF/Si sandwic)-4(h)-2(ing spec)-4(ime)-4(n)-1( for the)-4( )]TJ 0.0005 Tc 0 Tw 10.447 -1.153 Td (DCB )Tj -0.0005 Tc 0.1405 Tw 9.701 0 0 9.7194 326.772 259.4665 Tm [(A)-4(ltern)-4(ativ)-4(ely, th)-4(e )-6(Si/U)-4(F/Si )]TJ 0.0004 Tc 0.1456 Tw 11.441 0 Td [(s)6(p)-3(ecim)10(en can be prepa)6(r)-3(ed by)8( )]TJ 0.0496 Tw -12.881 -1.15 Td [(dispensing the )6(underf)]TJ -0.0003 Tc 0.0503 Tw [(ill before the t)8(o)-4(p silicon )6(part)8( was )6(placed )]TJ 0.0017 Tc 0.0423 Tw 0 -1.144 TD [(\(re)8(fer)5(r)-1(ed)4( to \221)5(o)4(pen)4( face)8(\222 m)12(e)2(thod)4(\).)6( H)4(o)4(weve)8(r,)6( )6(it has )6(bee)8(n)-2( s)7(h)4(o)4(w)-2(n )]TJ -0.0007 Tc 0.0147 Tw 0 -1.15 TD [(th)-5(at u)-5(n)1(d)-5(e)5(rfill fillin)-5(g)-5( b)-5(y)1( cap)-5(illary force m)9(e)-1(th)-5(o)-5(d)-5( show)-4(n)-5( i)7(n)-5( Fig. 1 )]TJ 0.0003 Tc 0.1037 Tw T* [(resulted in m)10(u)-4(ch less scattered )]TJ 0.0008 Tc 0.1032 Tw 12.983 0 Td [(data for t)9(h)-3(e)7( interface )6(fracture)7( )]TJ 0.0003 Tc 0.0077 Tw -12.983 -1.144 Td [(energy m)10(easure)-6(m)10(ent than the)6( )]TJ 0.0027 Tc -0.0007 Tw 12.017 0 Td [(\221)6(ope)9(n face)9(\222 di)5(spe)9(n)-1(sat)5(i)5(o)-1(n)5( )-6(m)13(e)3(tho)5(d)5( )]TJ -0.0016 Tc 0.2675 Tw -12.017 -1.15 Td [([19)-5(])1(. Th)-5(is i)6(ndicates th)-5(at usin)-5(g cap)-5(illary fo)-5(rce d)-5(isp)-6(en)-5(sat)6(io)-6(n)-5( )]TJ 0 Tc 0.038 Tw T* [(method to prepare sam)10(p)-4(les for )]TJ -0.0015 Tc 0.0395 Tw 12.587 0 Td [(D)-5(CB co)-5(nfiguratio)-5(n is a critical )]TJ 0 Tc 0.104 Tw -12.587 -1.144 Td [(process step ensuring )6(good )6(qua)]TJ -0.0006 Tc 0.1046 Tw 12.905 0 Td [(lity of i)7(n)-4(terfaces under study. )]TJ -0.0014 Tc 0.0694 Tw -12.905 -1.15 Td [(Su)-5(ch)-5( )6(an assem)9(b)-5(ly )6(p)-5(r)2(o)-5(cess also)-5( m)9(i)-5(m)9(i)1(cs th)-5(e actu)-5(al )6(u)-5(n)1(d)-5(e)-1(rfillin)-5(g)-5( )]TJ 0.0021 Tc -0.0001 Tw T* [(pr)5(ocess)7(. )]TJ 0.001 Tc 0.109 Tw 1.44 -1.245 Td [(The s)6(p)-3(ecim)11(e)1(n was the)7(n)-3( )6(place)7(d in a)7( hum)11(i)3(dity/te)-5(m)11(p)-3(erature )]TJ 0.0002 Tc 0.6977 Tw -1.44 -1.15 Td [(cham)10(ber attached to a )6(mech)]TJ -0.0012 Tc 0.6991 Tw [(an)-5(ical tester fo)-5(r in-situ)-5( )]TJ 0 Tc 0.05 Tw 0 -1.144 TD [(measurem)10(ent. Typical )-6(loa)6(d)-4(-dis)]TJ 0.0012 Tc 0.0548 Tw 12.455 0 Td [(placem)11(ent plots )6(were)7( s)6(h)3(own i)9(n)-3( )]TJ 0.0005 Tc 0.3854 Tw -12.455 -1.15 Td [(Figure )6(3 for a Si/UF/Si )6(speci)]TJ 0.0013 Tc 0.3846 Tw 13.457 0 Td [(m)11(e)1(n. )6(W)-9(h)3(en the l)9(o)-3(ad-point)9( )]TJ 0.0006 Tc 0.1274 Tw -13.457 -1.15 Td [(displacem)11(ent increase)7(d)3( at a)7( )6(constant )6(rate, t)9(h)-3(e )6(pea)7(k)-3( l)9(o)-3(ad )6(was )]TJ 0.0008 Tc 0.1572 Tw T* [(associated with )-6(the onset of )]TJ 0.001 Tc 0.163 Tw 12.125 0 Td [(the crack )6(growth, a)7(n)3(d the l)9(o)-3(ad )]TJ 0.0003 Tc 0.2476 Tw -12.125 -1.15 Td [(drop was)6( associated with th)]TJ 0.0011 Tc 0.2408 Tw [(e )-6(crack jum)11(p)-3(/arrest. 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After stable crac)7(k )6(gr)]TJ 0.0014 Tc 0.2705 Tw 12.995 0 Td [(owt)9(h)-2( )6(occu)4(rr)4(ed \(c)7(rac)7(k)-2( len)4(g)-2(th)4( )]TJ 0.0005 Tc 0.4814 Tw -12.995 -1.227 Td [(increase )6(from a to a+)]TJ /C2_0 1 Tf 0 Tc 0 Tw 10.379 0 Td <0027>Tj /TT0 1 Tf 0.0003 Tc 0.4816 Tw 0.612 0 Td [(a\), the displace)6(ment ram)10(p)-4( )-6(was)6( )]TJ -0.001 Tc 0.021 Tw -10.991 -1.144 Td [(in)-5(terru)-5(p)-5(t)1(ed)-5(, t)7(h)-5(e sp)-5(ecim)9(e)-1(n)-5( w)-5(a)-1(s )6(allo)-5(w)-5(e)-1(d to)-5( )6(return)-5( t)7(o)-5( th)-5(e )6(o)-5(r)-4(i)7(g)-5(inal)-5( )]TJ 0.0023 Tc 0.2396 Tw 0 -1.144 TD [(un)4(de)8(fo)4(rm)12(ed st)4(at)4(e an)4(d)4( wa)8(s )6(r)5(e)2(-l)4(oa)8(ded)4( a)8(g)-2(ai)4(n)4( wi)4(t)10(h)-2( a)8( c)8(o)4(nst)4(a)2(nt)10( )]TJ 0.0007 Tc 0.3192 Tw 0 -1.15 TD [(displacem)11(ent rate. C)8(o)-3(m)11(p)-3(lia)-5(nce C)8( and )6(peak l)9(o)-3(ad Pc)7( )6(were)7( )]TJ 0.0009 Tc 0.1931 Tw T* [(determ)11(ined from)11( each loading )]TJ 0.0005 Tc 0.1935 Tw 13.049 0 Td [(c)6(u)-3(rve. The)6( )6(crack length )6(was)6( )]TJ 0.0024 Tc 0.0296 Tw -13.049 -1.144 Td [(m)6(easured)5( )6(du)5(ri)10(ng)5( t)4(h)-1(e)8( re)8(-l)4(oa)8(di)10(ng)5( )6(pr)5(ocess)8( w)5(h)5(en t)10(h)-1(e i)10(n)-1(t)4(e)2(rfac)8(e)2(s i)4(n)-1( )]TJ 0.0006 Tc 0.2353 Tw T* [(front)9( of t)9(h)-3(e c)7(r)-2(ack tip )6(were)7( ope)7(n)-3(ed, a)7(n)-3(d )6(the crac)7(k tip )6(was)6( )]TJ 0.0003 Tc 0.4216 Tw T* [(located via microscopy. It )-6(sh)]TJ -0.0025 Tc 0.4304 Tw 13.229 0 Td [(ou)-6(ld b)-6(e)3( )6(n)-6(o)-6(t)-1(ed)-6( th)-6(at i)5(n th)-6(e)-9( )]TJ 0.0025 Tc 0.0535 Tw -13.229 -1.144 Td [(begi)10(nni)10(ng)5( )6(of a)8( fe)8(w cy)5(cl)4(es )6(fo)5(r)6( l)4(o)-1(adi)10(n)5(g a)8(n)-1(d)5( u)5(n)-1(l)4(o)-1(a)8(d)-1(i)4(n)5(g,)7( t)4(h)-1(e )6(d)5(a)2(t)4(a)2( )]TJ -0.0022 Tc 0.0162 Tw T* [(sh)-6(ou)-6(l)6(d)-6( b)-6(e)-2( d)-6(iscar)-5(d)-6(e)4(d )-6(b)-6(ecau)-6(s)-3(e th)-6(e p)-6(r)-5(e-)-5(cr)-5(ack )-6(is )-6(no)-6(t sh)-6(ar)-5(p )-6(en)-6(ou)-6(gh )]TJ -0.001 Tc 0.177 Tw T* [(an)-5(d th)-5(e in)-5(itial stress-state of th)-5(e system)9( w)-5(a)-1(s no)-5(t calibrated)-5(.)3( )]TJ -0.0012 Tc 0.0452 Tw 0 -1.144 TD [(W)-5(h)-5(en crack)-5( )6(g)-5(r)2(o)-5(w)-5(t)7(h)-5( )6(b)-5(e)-1(co)-5(m)9(e)-1(s su)-5(bstan)-5(tially larg)-5(e, lin)-5(ear elastic)-7( )]TJ 0.0019 Tc 0.1081 Tw 0 -1.15 TD [(fract)4(u)4(r)-1(e)8( )-6(m)12(echani)4(c)2(s )-6(i)4(s)7( )-6(n)4(o)-2(t)4( val)10(i)4(d. The)8(r)-1(ef)5(ore)8(, t)4(hose)8( dat)4(a)2( )-6(s)7(h)-2(o)4(u)-2(l)4(d)4( )]TJ 0.0021 Tc -0.0001 Tw T* [(be )6(di)4(scar)5(ded)4( t)4(o)4(o. )6(O)4(n)-2(l)4(y)4( t)4(h)-2(e m)12(i)-2(ddl)4(e )6(p)4(o)-2(rt)4(i)4(o)4(n )6(of)5( t)4(h)-2(e )6(dat)4(a)2( sh)4(o)4(w)4(n i)4(n)4( )]TJ 0.0839 Tw 0 -1.144 TD [(Fi)4(g. )6(3 )6(was)7( use)8(d)-2( t)4(o)4( ext)10(r)-1(act)4( t)4(h)4(e fract)10(ure)8( t)4(o)4(ug)4(hne)8(ss. )6(The)8( det)10(a)2(i)4(l)4(s)1( )]TJ 0.0023 Tc 0.1797 Tw 0 -1.15 TD [(of fract)10(ure par)5(a)-4(m)12(e)2(t)4(e)2(r )-6(ext)4(r)-1(act)4(i)4(on fr)5(om)12( )-6(t)4(h)-2(e )-12(expe)8(ri)4(m)12(e)2(nt)4(al)4( )-12(dat)4(a)8( )]TJ -0.0014 Tc -0.0026 Tw T* [(can)-5( b)-5(e)-1( f)-4(oun)-5(d )-6(in)-5( r)-4(e)-1(f)-4(.)3( )-6([18)-5(])2(. )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 0 0 0 RG 0.06 w 65.1 504.9 218.04 -157.02 re B* Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 91.5 382.62 182.52 88.68 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 393.48 182.52 0.12 re W n 1 0 0 1 91.5 393.5999685 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 404.52 182.52 0.12 re W n 1 0 0 1 91.5 404.6399717 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 415.56 182.52 0.12 re W n 1 0 0 1 91.5 415.6799591 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 426.54 182.52 0.12 re W n 1 0 0 1 91.5 426.6599654 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 438.12 182.52 0.12 re W n 1 0 0 1 91.5 438.2399717 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 449.16 182.52 0.06 re W n 1 0 0 1 91.5 449.2199622 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 460.14 182.52 0.12 re W n 1 0 0 1 91.5 460.2599654 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 471.18 182.52 0.12 re W n 1 0 0 1 91.5 471.2999685 cm 0 0 0 RG 0.06 w 0 0 m 182.52 0 l S Q q 0.8817291 0 0 -1.0671082 97.7548523 469.1629944 cm 0.5 0.5 0.5 RG 0.5 w 1 j 1 J 0 0 m 200.791 0 l 200.791 80.61 l 0 80.61 l 0 0 l S Q q 0.9700012 0 0 0.9700012 97.7551117 469.1615448 cm 0 0 0 RG 0.06 w 1 j 1 J 0 0 m 0 -88.68 l -1.8 -88.68 m 0 -88.68 l -1.8 -77.7 m 0 -77.7 l -1.8 -66.66 m 0 -66.66 l -1.8 -55.62 m 0 -55.62 l -1.8 -44.64 m 0 -44.64 l -1.8 -33.06 m 0 -33.06 l -1.8 -22.08 m 0 -22.08 l -1.8 -11.04 m 0 -11.04 l -1.8 0 m 0 0 l 0 -88.68 m 182.52 -88.68 l 0 -90.9 m 0 -88.68 l 22.8 -90.9 m 22.8 -88.68 l 45.54 -90.9 m 45.54 -88.68 l 68.28 -90.9 m 68.28 -88.68 l 91.5 -90.9 m 91.5 -88.68 l 114.24 -90.9 m 114.24 -88.68 l 137.04 -90.9 m 137.04 -88.68 l 159.78 -90.9 m 159.78 -88.68 l 182.52 -90.9 m 182.52 -88.68 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 0.36 1.38 re W n 0.908998 0 0 -1.1001101 91.0797703 383.7007708 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.462 0.49 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 0.36 2.46 re W n 0.908998 0 0 -1.1001101 91.4997326 383.1617115 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 -1.472 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 384.36 0.36 0.78 re W n 0.908998 0 0 -1.1001101 91.4997326 384.781076 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.36 2.58 re W n 0.908998 0 0 -1.1001101 91.4997326 384.781076 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 1.963 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.36 2.04 re W n 0.908998 0 0 -1.1001101 91.4997326 382.6215668 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.462 -1.472 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 383.82 0.36 1.32 re W n 0.908998 0 0 -1.1001101 91.0797703 384.2409313 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.462 -0.491 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.84 2.58 re W n 0.908998 0 0 -1.1001101 91.4997326 384.781076 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 1.963 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.84 3.66 re W n 0.908998 0 0 -1.1001101 91.9796759 382.6215668 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.528 -2.999 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 384.36 1.26 1.86 re W n 0.908998 0 0 -1.1001101 91.4997326 385.920796 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 1.056 1.036 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.68 382.56 1.14 2.58 re W n 0.908998 0 0 -1.1001101 92.459635 384.781076 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.528 2.454 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.68 382.56 0.72 3.12 re W n 0.908998 0 0 -1.1001101 91.9796759 382.0814063 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 -2.999 l S Q q 0.8817291 0 0 -1.0671082 98.2203979 385.8197174 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 1.527 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.84 1.5 re W n 0.908998 0 0 -1.1001101 91.9796759 383.7007708 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.528 0.981 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.36 2.04 re W n 0.908998 0 0 -1.1001101 91.4997326 382.6215668 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 -1.472 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 1.26 1.92 re W n 0.908998 0 0 -1.1001101 91.4997326 384.2409313 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 1.056 0.981 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 1.26 0.84 re W n 0.908998 0 0 -1.1001101 92.459635 383.1617115 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -1.056 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 0.84 1.92 re W n 0.908998 0 0 -1.1001101 91.4997326 383.1617115 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 -0.981 l S Q q 0.8817291 0 0 -1.0671082 98.2203979 384.7141876 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 -0.491 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 383.82 0.84 1.32 re W n 0.908998 0 0 -1.1001101 91.9796759 384.781076 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.528 0.491 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 383.82 0.36 1.32 re W n 0.908998 0 0 -1.1001101 91.4997326 384.2409313 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 -0.491 l 0 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.36 2.04 re W n 0.908998 0 0 -1.1001101 91.4997326 384.2409313 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 1.472 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.56 0.84 0.96 re W n 0.908998 0 0 -1.1001101 91.4997326 382.6215668 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 -0.491 l S Q q 0.8817291 0 0 -1.0671082 98.2203979 383.6673584 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 -1.472 l 0 -0.49 l 0 -1.472 l 0 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 0.84 1.38 re W n 0.908998 0 0 -1.1001101 91.9796759 383.1617115 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.528 -0.49 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 383.28 0.84 2.4 re W n 0.908998 0 0 -1.1001101 91.4997326 383.7007708 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 -1.527 l S Q q 0.8817291 0 0 -1.0671082 98.2203979 385.8197174 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 2.017 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 0.84 0.84 re W n 0.908998 0 0 -1.1001101 91.9796759 383.1617115 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.528 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.56 382.68 0.84 1.92 re W n 0.908998 0 0 -1.1001101 91.4997326 383.1617115 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 -0.981 l S Q q 0.8817291 0 0 -1.0671082 98.2203979 384.7141876 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 0.491 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.68 382.56 1.14 1.5 re W n 0.908998 0 0 -1.1001101 92.459635 383.7007708 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.528 0.981 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 91.68 382.56 1.14 3.12 re W n 0.908998 0 0 -1.1001101 91.9796759 382.6215668 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.528 -2.508 l S Q q 0.8817291 0 0 -1.0671082 98.6859589 385.8197174 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 1.036 l -0.528 1.527 l -0.528 0 l 0 1.036 l -0.528 1.036 l 0 1.036 l -0.528 0.545 l 0 1.527 l -0.528 -0.491 l 0 1.036 l 0.462 0.545 l 0.462 1.036 l 0 1.036 l 0 0 l 0 2.017 l -0.528 -0.491 l 0.462 2.017 l 0 -0.491 l 0.462 2.017 l 0 0 l 0 -1.473 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 92.16 382.56 1.14 4.8 re W n 0.908998 0 0 -1.1001101 92.459635 387.0011011 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.462 3.981 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 92.16 382.56 1.14 0.96 re W n 0.908998 0 0 -1.1001101 92.8795973 382.6215668 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m -0.462 -0.491 l S Q q 0.8817291 0 0 -1.0671082 98.6859589 383.6673584 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 -3.981 l 0.99 -1.472 l 0 -2.508 l 0.462 -2.508 l 0.462 -3.49 l 0 -0.981 l 0 -2.017 l 0.462 -2.017 l 0.462 -0.981 l 0 -3.49 l 0.462 -2.999 l 0.99 -0.49 l 0.462 -3.981 l 0.99 -2.999 l 0.462 -0.981 l 0 -5.508 l 0.99 -2.017 l 0.462 -2.017 l 0.462 -3.981 l 0.99 -0.49 l 0.462 -2.508 l 0.462 -2.999 l 0.462 -0.49 l 0.462 -5.017 l 0.99 -5.017 l 0.99 -0.981 l 0.462 -2.508 l 0.99 -5.999 l 0.99 -2.508 l 0.462 -2.999 l 0.462 -5.999 l 1.452 -2.017 l 0.462 -2.508 l 0.99 -5.017 l 1.452 -2.508 l 0.462 -4.526 l 0.99 -5.999 l 0.99 -5.508 l 1.452 -2.508 l 0.99 -5.999 l 1.452 -5.999 l 0.99 -3.49 l 0.99 -6.49 l 1.452 -4.526 l 0.99 -2.508 l 0.99 -6.981 l 1.452 -6.49 l 1.452 -2.999 l 0.462 -3.981 l 0.99 -6.49 l 1.452 -3.981 l 0.99 -5.999 l 1.452 -6.49 l 1.98 -3.49 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1 J 0 0 m 0 -1.963 l S Q q 0.8817291 0 0 -1.0671082 246.5713043 385.2381439 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0.462 -0.545 l 0.99 1.472 l 0.99 0.982 l 0.462 -0.545 l 0.462 1.472 l 0.462 0.982 l 0.99 -0.545 l 0.99 1.472 l 0.99 0 l 1.518 0.982 l 1.518 0.491 l 0.99 -0.545 l 1.518 0.982 l 1.518 0.491 l 1.518 1.472 l 1.98 1.472 l 1.98 -0.545 l 1.98 0.982 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 246.42 382.56 0.72 1.5 re W n 0.908998 0 0 -1.1001101 246.7184049 383.7007708 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 0.981 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 246.42 382.56 0.72 2.04 re W n 0.908998 0 0 -1.1001101 246.7184049 382.6215668 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 -1.472 l S Q q 0.8817291 0 0 -1.0671082 248.3171387 384.7141876 cm 0 0 0.5 RG 0.5 w 1 j 1 J 0 0 m 0 0.491 l 0.528 0 l 0 0.491 l 0.528 0 l 0.528 0.981 l 0.99 0.491 l 0.99 0 l 0.99 0.981 l 0.528 0.981 l 0.99 -1.036 l 0.99 0.981 l 0.99 0 l 0.99 0.981 l 1.98 -0.491 l 1.518 -0.491 l 1.518 0 l 1.98 -0.491 l 1.518 0 l 1.98 0 l 1.98 0.491 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14.22 l 9.3 13.68 l 8.46 13.02 l 7.68 12.42 l 6.9 11.7 l 6.18 11.04 l 5.52 10.32 l 4.32 8.76 l 3.78 7.98 l 3.3 7.14 l 2.88 6.3 l 2.52 5.46 l 2.16 4.62 l 1.92 3.72 l 1.74 2.82 l 1.56 1.92 l 1.44 0.96 l 1.44 0 l f Q q 0.9700012 0 0 0.9700012 163.3465881 422.2522888 cm 0.004 0.004 0.004 rg 0 0 m 16.74 13.38 l 17.04 12.96 l 0.3 -0.42 l h 15.18 14.28 m 19.38 15.18 l 17.58 11.28 l f Q BT /TT3 1 Tf -0.044 Tc 0.1534 Tw 6.061 0 0 6.0619 145.5954 439.8864 Tm [(R)-40(e)-63(g)-35(io)-52(n)-26( f)-153(o)-52(r)-78( )231(d)-35(a)-68(t)-34(a)-58( )77(c)-61(o)-52(lle)-63(c)-61(t)-34(io)-52(n)]TJ /TT0 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 286.614 346.4754 Tm ( )Tj 0.0011 Tc 0.0027 Tw 8.7134 0 0 8.73 80.1204 332.7402 Tm [(Fig. 3 )7(Ty)-6(pical lo)7(ading-unlo)7(a)-3(ding )7(curve fo)7(r a Si/U)9(F/Si DCB )]TJ 0.0024 Tc 0 Tw 9.258 -1.153 Td [(s)4(p)1(ecim)5(e)-1(n )]TJ 0.0026 Tc 0.0714 Tw 9.701 0 0 9.7194 69.7608 305.8518 Tm [(Fi)5(g. )6(4 )6(pl)5(ot)5(t)5(e)9(d t)11(h)-1(e t)5(e)3(st)5( re)9(sul)5(t)5(s)2( )6(i)5(n)-1( t)5(h)5(ree )6(di)5(ffe)9(re)9(nt)5( co)5(n)5(d)-1(i)5(t)5(i)5(ons)8(. )]TJ 0.0009 Tc 0.349 Tw -1.44 -1.15 Td [(The \221case 2\222 )-6(represe)7(n)-3(ted )-6(t)9(h)-3(e )]TJ -0.0002 Tc 0.3561 Tw 13.301 0 Td (fracture toughness at room )Tj -0.0011 Tc 0.393 Tw -13.301 -1.15 Td [(co)-5(nd)-5(itio)-5(n after th)-5(e sam)9(p)-5(le w)-5(a)-1(s assem)9(b)-5(led)-5(.)-3( )6(A)-5( )6(sign)-5(ifi)7(can)-5(t)-5( )]TJ 0.002 Tc 0.186 Tw 0 -1.144 TD [(di)4(ffe)8(re)8(nce was)7( obse)8(r)5(ved )6(fo)4(r )6(t)4(h)-2(e fract)10(ure t)10(o)4(ug)4(h)4(n)-2(ess at)4( r)5(o)4(o)-8(m)6( )]TJ -0.0018 Tc 0.1418 Tw 0 -1.227 TD [(co)-6(nd)-6(itio)-6(n and)-6( )6(th)-6(e )6(o)-6(n)-6(e)4( after )6(1)-6( )6(ho)-6(ur b)-6(a)4(k)-6(e)4( at 130)]TJ /C2_0 1 Tf 0 Tc 0 Tw <0071>Tj /TT0 1 Tf -0.0014 Tc 0.1414 Tw 20.038 0 Td [(C. This )6(was )]TJ -0.001 Tc 0.2909 Tw -20.038 -1.144 Td [(p)-5(o)-5(s)4(sib)-5(l)1(y du)-5(e to)-5( th)-5(e m)9(o)-5(istu)-5(re effect at roo)-5(m)9( co)-5(n)-5(d)-5(itio)-5(n, in)-5( )]TJ -0.0006 Tc 0.0146 Tw 0 -1.15 TD [(w)-4(h)-4(ich)-4( a ~30)-4(%)5(RH)-4( w)-4(a)-1(s ex)-4(p)-4(ect)7(ed)-4(. Si)7(n)-4(ce th)-4(e un)-4(d)-4(e)5(rfill w)-4(a)-1(s cured )]TJ -0.0018 Tc 0.0638 Tw 0 -1.144 TD [(fo)-6(llow)-6(ing)-6( ex)-6(act th)-6(e cu)-6(ring)-6( )6(sch)-6(e)-2(du)-6(le, t)6(h)-6(e su)-6(sp)-6(icio)-6(n of )6(wh)-6(eth)-6(e)-2(r )]TJ -0.0015 Tc 0.3994 Tw 0 -1.15 TD [(o)-5(r)2( no)-5(t th)-5(e un)-5(d)-5(e)4(fill w)-5(a)-2(s fu)-5(lly cu)-5(red)-5( )6(was eli)-6(m)8(in)-5(ated)-5(. A)-5(s)10( )]TJ 0.0001 Tc 0.3798 Tw T* [(expecte)6(d)-4(, the)6( fracture toughne)]TJ 0.0005 Tc 0.3794 Tw 13.235 0 Td [(ss )6(decrea)6(s)6(es after m)10(o)-3(isture )]TJ -0.0018 Tc 0.0758 Tw -13.235 -1.222 Td [(p)-6(r)-5(econ)-6(d)-6(ition)-6(ing)-6( at)6( 85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 8.699 0 Td <0071>Tj /TT0 1 Tf -0.0022 Tc 0.0762 Tw 0.402 0 Td [(C/)6(8)-6(5%RH)-6( )6(f)-5(or 5 )6(d)-6(a)-2(ys, as show)-6(n in Fig)-6(.)-4( )]TJ 0.0026 Tc -0.0006 Tw -9.101 -1.15 Td (4. )Tj 0 Tc 0 Tw 1.44 -1.245 Td ( )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 338.7 608.7 221.28 132.6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 361.74 631.26 191.34 102.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.527 0.527 0.527 rg 361.5 643.2 191.76 -0.48 re 361.5 654.24 191.76 -0.42 re 361.5 665.76 191.76 -0.42 re 361.5 677.28 191.76 -0.48 re 361.5 688.32 191.76 -0.42 re 361.5 699.84 191.76 -0.48 re 361.5 711.36 191.76 -0.48 re 361.5 722.4 191.76 -0.48 re 361.5 733.92 191.76 -0.48 re f Q q 0.9700012 0 0 0.9700012 359.4226074 723.6704407 cm 0.313 0.508 0.742 rg 0 0 m 0 0.12 0.12 0.24 0.24 0.24 c 192 0.24 l 192.18 0.24 192.24 0.12 192.24 0 c 192.24 -102.24 l 192.24 -102.36 192.18 -102.42 192 -102.42 c 0.24 -102.42 l 0.12 -102.42 0 -102.36 0 -102.24 c h 0.48 -102.24 m 0.24 -102 l 192 -102 l 191.82 -102.24 l 191.82 0 l 192 -0.24 l 0.24 -0.24 l 0.48 0 l f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.313 0.508 0.742 rg 380.64 727.02 25.8 -95.76 re 444.72 654.24 25.38 -22.98 re 508.32 645.06 25.86 -13.8 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.527 0.527 0.527 rg 361.26 631.44 0.48 102.24 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.527 0.527 0.527 rg 359.22 631.68 2.28 -0.42 re 359.22 643.2 2.28 -0.48 re 359.22 654.24 2.28 -0.42 re 359.22 665.76 2.28 -0.42 re 359.22 677.28 2.28 -0.48 re 359.22 688.32 2.28 -0.42 re 359.22 699.84 2.28 -0.48 re 359.22 711.36 2.28 -0.48 re 359.22 722.4 2.28 -0.48 re 359.22 733.92 2.28 -0.48 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.527 0.527 0.527 rg 361.5 631.26 191.76 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.527 0.527 0.527 rg 361.26 631.44 0.48 -2.76 re 361.74 631.44 m h 425.34 631.44 0.48 -2.76 re 425.82 631.44 m h 489 631.44 0.42 -2.76 re 489.42 631.44 m h 553.08 631.44 0.42 -2.76 re f Q BT /TT4 1 Tf 7.1666 0 0 7.1659 349.8192 621.8778 Tm (0)Tj -0.0115 Tc -0.755 1.543 Td [(0.)-11(5)]TJ 0 Tc 0.755 1.543 Td (1)Tj -0.0115 Tc -0.755 1.551 Td [(1.)-11(5)]TJ 0 Tc 0.755 1.543 Td (2)Tj -0.0115 Tc -0.755 1.543 Td [(2.)-11(5)]TJ 0 Tc 0.755 1.543 Td (3)Tj -0.0115 Tc -0.755 1.551 Td [(3.)-11(5)]TJ 0 Tc 0.755 1.543 Td (4)Tj -0.0115 Tc -0.755 1.543 Td [(4.)-11(5)]TJ 0.0157 Tc 5.246 -15.496 Td [(ca)-9(s)33(e)]TJ /C2_1 1 Tf 0 Tc 1.811 0 Td <0003>Tj /TT4 1 Tf 6.1524 Tc 0.187 0 Td (1c)Tj 7.098 0 Td (a)Tj 0.504 0 Td (s)Tj 0.374 0 Td (e)Tj /C2_1 1 Tf 0 Tc 0.495 0 Td <0003>Tj /TT4 1 Tf 6.1524 Tc 0.187 0 Td (2c)Tj 7.098 0 Td (a)Tj 0.504 0 Td (s)Tj 0.373 0 Td (e)Tj /C2_1 1 Tf 0 Tc 0.503 0 Td <0003>Tj /TT4 1 Tf 0.187 0 Td (3)Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 394.5 602.22 137.82 12.9 re f Q BT /TT4 1 Tf 0.0012 Tc 8.5104 0 0 8.5097 396.2628 597.8994 Tm [(di)19(f)-8(f)-8(e)27(r)-19(e)27(nt)]TJ /C2_1 1 Tf 0 Tc 3.529 0 Td <0003>Tj /TT4 1 Tf 0.0007 Tc 0.157 0 Td [(e)26(nv)-19(i)18(r)-20(o)2(nm)13(e)26(nt)14(a)8(l)-187(condi)18(t)21(i)18(ons)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 328.08 623.88 16.14 120.18 re f Q BT /TT4 1 Tf 0 8.5097 -8.5104 0 339.8088 618.7933 Tm [(nor)-13(m)6(a)8(l)18(i)18(z)-21(e)20(d)-158(e)26(ne)26(r)-20(gy)]TJ /C2_1 1 Tf 0 Tc 7.468 0 Td <0003>Tj /TT4 1 Tf 0.0207 Tc 0.157 0 Td [(re)40(l)45(e)40(a)28(s)43(e)]TJ /C2_1 1 Tf 0 Tc 2.845 0 Td <0003>Tj /TT4 1 Tf 0.0139 Tc 0.267 0 Td [(ra)14(t)34(e)]TJ /C2_1 1 Tf 0 Tc 1.628 0 Td <0003>Tj /TT4 1 Tf -0.0064 Tc 9.4093 0 0 9.4103 421.1142 704.6964 Tm (Case)Tj /C2_1 1 Tf 0 Tc 1.862 0 Td <0003>Tj /TT4 1 Tf 0.0189 Tc 0.235 0 Td (1:)Tj /C2_1 1 Tf 0 Tc 0.81 0 Td <0003>Tj /TT4 1 Tf 0.0127 Tc 0.241 0 Td [(13)-6(0)]TJ /C2_0 1 Tf 0 Tc 1.571 0 Td <0071>Tj /TT4 1 Tf 0.377 0 Td (C)Tj /C2_1 1 Tf 0.526 0 Td <0003>Tj /TT4 1 Tf -0.0012 Tc 0.235 0 Td [(bak)27(e)]TJ /C2_1 1 Tf 0 Tc 1.905 0 Td <0003>Tj /TT4 1 Tf -0.0145 Tc 0.284 0 Td [(fo)-7(r)]TJ /C2_1 1 Tf 0 Tc <0003>Tj /TT4 1 Tf 1.385 0 Td (1)Tj /C2_1 1 Tf 0.52 0 Td <0003>Tj /TT4 1 Tf 0.0004 Tc 0.241 0 Td [(ho)8(ur)]TJ -0.0064 Tc -10.194 -1.237 Td (Case)Tj /C2_1 1 Tf 0 Tc 1.862 0 Td <0003>Tj /TT4 1 Tf 0.0189 Tc 0.235 0 Td (2:)Tj /C2_1 1 Tf 0 Tc 0.81 0 Td <0003>Tj /TT4 1 Tf -0.0016 Tc 0.241 0 Td [(r)19(oom)]TJ /C2_1 1 Tf 0 Tc 2.19 0 Td <0003>Tj /TT4 1 Tf -0.0002 Tc 0.235 0 Td [(condi)-6(ti)-6(on)]TJ -0.0064 Tc -5.573 -1.187 Td (Case)Tj /C2_1 1 Tf 0 Tc 1.862 0 Td <0003>Tj /TT4 1 Tf 0.0189 Tc 0.235 0 Td (3:)Tj /C2_1 1 Tf 0 Tc 0.81 0 Td <0003>Tj /TT4 1 Tf 0.0127 Tc 0.241 0 Td (85)Tj /C2_0 1 Tf 0 Tc 1.045 0 Td <0071>Tj /TT4 1 Tf -0.0051 Tc 0.377 0 Td [(C/8)-18(5)-24(%)-8(R)18(H)]TJ /C2_1 1 Tf 0 Tc <0003>Tj /TT4 1 Tf -0.0206 Tc 4.101 0 Td [(fo)-13(r)]TJ /C2_1 1 Tf 0 Tc 1.138 0 Td <0003>Tj /TT4 1 Tf 0.291 0 Td (5)Tj /C2_1 1 Tf 0.52 0 Td <0003>Tj /TT4 1 Tf -0.0043 Tc 0.241 0 Td [(day)-28(s)]TJ /TT0 1 Tf 0 Tc 9.701 0 0 9.7194 553.1117 595.2804 Tm ( )Tj 0.0002 Tc 0.0036 Tw 8.7134 0 0 8.73 326.8302 581.487 Tm [(Fig. 4 Fractur)6(e)-3( )7(toughness for a S)]TJ 0.001 Tc 0.0028 Tw 13.105 0 Td [(i/UF/Si assembly)-7( )7(under d)7(i)-2(ffer)7(e)-3(nt )]TJ 0.0015 Tc -0.0044 Tw -5.878 -1.147 Td [(environm)5(e)-2(nta)5(l)-1( c)5(o)1(nditions )]TJ /TT5 1 Tf 0.0019 Tc -0.0059 Tw 9.701 0 0 9.7194 312.804 554.4822 Tm [(2.)6(2 )-6( Frac)8(ture tou)6(g)-2(h)6(ness )-6(me)8(asureme)8(nt)5( )-6( )-6(us)7(i)4(ng )]TJ 0.0005 Tc 0.0015 Tw 0 -1.144 TD [(photomechani)8(cs measureme)6(n)-1(t )6(techniques)6( )]TJ /TT0 1 Tf -0.0002 Tc 0.0322 Tw 1.44 -1.239 Td [(A)-4(n)2( in)-4(tegrated)-4( )6(m)10(u)-4(l)-4(ti-fu)-4(n)-4(cti)8(o)-4(n)2(al )-6(m)10(i)2(cro)-4(-)-3(m)10(o)-4(ir\351 in)-4(terfero)-4(m)10(etry )]TJ 0.003 Tc 0 Tw -1.44 -1.144 Td (\(M)Tj 0 Tc 6.2736 0 0 6.2856 324.6768 524.5674 Tm (3)Tj 0.0014 Tc 0.3425 Tw 9.701 0 0 9.7194 327.8196 520.2024 Tm [(I\))4( system)11(, w)4(h)-2(ich c)7(o)-2(m)11(b)-2(ines m)11(o)-3(ir\351 i)9(n)-3(terfe)7(rom)11(e)1(try)4( \()4(M)3(I\))4( )]TJ 0.0004 Tc 0.1456 Tw -1.548 -1.15 Td [(technique )6(with therm)10(o)-3(electric h)]TJ -0.0021 Tc 0.1481 Tw 13.127 0 Td [(eating)-6( an)-6(d )6(co)-6(o)-6(ling)-6(,)2( hu)-6(m)8(i)-6(d)-6(ity)-6( )]TJ 0.0026 Tc 0.0534 Tw -13.127 -1.15 Td [(sy)5(st)5(em)13(, and m)13(i)-1(crosc)9(o)5(pi)5(c im)13(agi)5(ng )]TJ 0.0007 Tc 0.0553 Tw 13.865 0 Td [(system)11( [20], was applied )6(to )]TJ -0.0008 Tc 0.0208 Tw -13.865 -1.144 Td [(o)-5(b)-5(tain th)-5(e )6(d)-5(e)-1(form)9(at)-5(io)-5(n)-5( field to)-5( )]TJ 0.0006 Tc 0.0134 Tw 12.569 0 Td [(e)7(x)-3(tract )-6(the fracture param)11(e)1(ters)6(. )]TJ -0.0008 Tc 0.2547 Tw -12.569 -1.15 Td [(A)-5( m)9(i)1(n)-5(i)1(atu)-5(r)-4(ized)-5( m)9(o)-5(istu)-5(re cha)-7(m)9(b)-5(e)-1(r )6(w)-5(ith)-5( )6(u)-5(l)7(trason)-5(ic )6(h)-5(u)-5(m)9(i)-5(d)-5(ity )]TJ 0.0029 Tc 0.623 Tw 0 -1.15 TD [(exci)5(t)5(a)3(t)5(i)5(o)-1(n)5( wa)9(s )6(devel)11(o)-1(pe)9(d)5( t)5(o)5( c)9(ont)5(r)6(o)-1(l)11( t)5(h)-1(e)9( )6(hy)5(gr)6(ot)5(h)5(e)3(rm)13(al )]TJ -0.0022 Tc 0.0402 Tw 0 -1.144 TD [(co)-6(nd)-6(itio)-6(ns )6(w)-6(ith)-6(in th)-6(e erro)-6(r of )]TJ -0.0011 Tc 0.0391 Tw 12.143 0 Td [(0.1\260C and)-5( )6(1)-5(%)4(RH)-5(. Micro-d)-5(i)7(gital)-5( )]TJ 0.001 Tc 0.019 Tw -12.143 -1.15 Td [(im)11(age spec)7(kle )6(correla)]TJ -0.0021 Tc 0.0221 Tw 8.753 0 Td [(tio)-6(n \(\265)-6(-D)-6(iSC\) )6(w)-6(a)-2(s also)-6( app)-6(lied)-6( to )6(o)-6(btain)-6( )]TJ -0.0013 Tc 0.1173 Tw -8.753 -1.144 Td [(th)-5(e )6(fract)7(u)-5(r)-4(e tou)-5(ghn)-5(ess of investig)-5(ated)-5( )6(sam)9(p)-5(les. In th)-5(is stud)-5(y, )]TJ -0.0006 Tc 0.1406 Tw 0 -1.15 TD [(silico)-4(n)-4(/)1(un)-4(d)-4(e)5(rfil)7(l/FR-4)-4( assem)9(b)-4(lies w)-4(e)-1(re )6(p)-4(r)-4(epared)-4( as show)-4(n in)-5( )]TJ 0.0022 Tc 0.0118 Tw T* [(Fi)4(g.)6(5. T)7(h)-2(e at)4(t)4(e)2(nt)4(i)4(on )6(was )6(dra)8(w)4(n o)4(n)-2( t)4(h)-2(e i)4(n)-2(t)4(e)8(rfa)8(ci)4(al)4( del)4(a)-4(m)12(i)4(nat)4(i)-2(on)4( )]TJ -0.0009 Tc 0.0449 Tw 0 -1.144 TD [(b)-5(e)-1(h)-5(a)5(v)-5(i)1(or )6(b)-5(e)-1(tween)-5( silicon)-5(/un)-5(d)1(erfill. Th)-5(e assem)9(b)-5(l)-5(y)1( co)-5(n)-5(s)-2(isted o)-5(f)8( )]TJ 0.0021 Tc 0.3598 Tw 0 -1.15 TD [(t)4(h)-2(ree m)12(a)2(t)4(e)2(ri)4(als, nam)12(e)2(l)4(y)4(, si)4(li)4(con, )6(u)4(nde)8(rfi)4(l)4(l)10( and )6(FR-)5(4)-2(. )6(The )]TJ 0.0026 Tc 0.1914 Tw T* [(di)5(m)13(e)3(nsi)5(o)-1(ns )6(of)6( t)5(h)-1(e as)8(sem)13(b)-1(l)5(y)-1( we)9(re )6(8 m)7(m)13(\()-6(L)2(\)x)5(5 m)7(m)13(\(W\) )6(x1)5(.8)11( )]TJ -0.001 Tc 0.165 Tw 0 -1.144 TD [(mm\(H)-5(\))-4(. Th)-5(e th)-5(ickn)-5(ess )6(o)-5(f)-4( the u)-5(n)1(d)-5(e)5(rfill w)-5(a)5(s 0)-5(.)3(5)-5( mm)9(. A)-5( )-6(p)-5(r)-4(e-)]TJ -0.0008 Tc 0.0208 Tw 0 -1.15 TD [(crack was )6(p)-5(r)-4(epared at the silico)-5(n)-5(/)7(u)-5(n)1(d)-5(e)5(rfill in)-5(t)7(e)-1(rface b)-5(y)7( u)-5(s)-2(i)7(n)1(g)-5( a )]TJ 0 Tc 0.2179 Tw T* (piece of silicon rubber film)Tj 0.0006 Tc 0.2173 Tw 11.753 0 Td [( with thickness of )6(20 )]TJ /TT6 1 Tf 0 Tc 0 Tw (\265)Tj /TT0 1 Tf -0.0079 Tc 0.2318 Tw [(m.)-10( T)-9(h)-12(e )]TJ -0.0013 Tc 0.3512 Tw -11.753 -1.144 Td [(len)-5(g)-5(t)1(h)-5( and)-5( the lig)-5(a)-7(m)9(en)-5(t o)-5(f)2( ah)]TJ 0.0013 Tc 0.3486 Tw [(ead )6(of t)9(h)3(e crack tip )6(were )]TJ 0.0026 Tc 0.0894 Tw T* [(respect)5(i)5(v)-1(el)5(y)5( )6(2.)7(7 m)7(m)13( and 5.)7(3 )6(m)7(m)7(,)]TJ 0.0005 Tc 0.0915 Tw 13.835 0 Td [( respectively. The select)8(ion )]TJ 0.0026 Tc 0.0354 Tw -13.835 -1.15 Td [(of t)11(h)-1(ese )6(di)5(m)13(e)3(nsi)5(ons)8( was)8( t)5(o)-1( )6(n)5(e)3(gl)]TJ 0.0001 Tc 0.0379 Tw 12.929 0 Td [(ect edge effects on loa)6(d)-4(ing. A )]TJ 0.001 Tc 0.199 Tw -12.929 -1.144 Td [(dispe)7(n)-3(se)7(r a)7(n)3(d )6(a curing ove)7(n)3( we)7(re)7( em)11(ployed t)9(o)3( prepare)7( )6(the )]TJ -0.001 Tc 0.027 Tw T* [(assem)9(b)-5(ly. By th)-5(e cap)-5(illary effect, und)-5(e)-1(rfill was )6(d)-5(i)1(sp)-5(en)-5(sed)-5( i)7(n)1(to)-5( )]TJ 0.201 Tw T* [(th)-5(e g)-5(a)5(p)-5( )6(b)-5(e)-1(tw)-5(een)-5( th)-5(e silico)-5(n)1( and)-5( FR)6(-4. )6(Wh)-5(en th)-5(e )6(sp)-5(eci)7(men)-5( )]TJ 0.0024 Tc 0.0416 Tw 0 -1.144 TD [(was p)4(a)2(rt)4(i)4(a)2(l)4(l)4(y)4( cure)8(d, t)10(h)-1(e r)5(u)-1(b)5(b)-1(e)8(r)-1( was )6(q)5(u)-1(i)4(c)2(kl)4(y)5( r)5(e)-4(m)12(oved )6(fr)5(om)12( the )]TJ 0.0015 Tc 0.0725 Tw 0 -1.15 TD [(specim)11(e)1(n and )6(a sha)7(r)5(p c)7(r)-1(ack )6(was )6(fa)]TJ 0.0003 Tc 0.0737 Tw 14.249 0 Td [(bricated. After )6(fa)6(brication, )]TJ 0.0005 Tc 0.0255 Tw -14.249 -1.15 Td [(each as)6(sem)10(b)-3(ly was ca)6(refully )6(polis)6(hed with )6(a fine)6( SiC )6(pa)6(per to )]TJ -0.0011 Tc 0.603 Tw 0 -1.144 TD [(rem)9(o)-5(v)-5(e)-1( ex)-5(cessiv)-5(e)-1( )6(u)-5(n)1(d)-5(e)-1(rfill and)-5( to ob)-5(t)7(a)-1(in)-5( th)-5(e )6(d)-5(e)-1(sired )]TJ 0.0022 Tc 0.3837 Tw 0 -1.15 TD [(di)4(m)12(e)2(nsi)4(o)-2(ns.)6( S)6(p)-2(eci)4(m)12(e)2(n grat)4(i)10(n)-2(g)4( )6(wi)4(t)4(h)4( a )6(fr)5(eque)8(ncy)10( o)4(f)-1( )6(1)4(2)-2(0)4(0)4( )]TJ 0.0007 Tc 0.1333 Tw 0 -1.144 TD [(lines/mm)11( was replicated )6(ont)9(o the )]TJ 0.0002 Tc 0.1338 Tw 14.134 0 Td [(surface)6( of the assem)10(b)-4(ly )-6(at )]TJ 0.0005 Tc 0.4154 Tw -14.134 -1.15 Td [(room)10( te)-6(m)10(p)-3(erature. The)6( ass)6(e)-6(m)10(b)-3(ly was t)8(h)-3(en put int)8(o)3( the )]TJ 0.0009 Tc 0.0311 Tw 0 -1.15 TD [(miniaturized m)11(o)-3(isture)7( c)7(h)-3(am)11(ber )]TJ -0.0008 Tc 0.0328 Tw 12.827 0 Td [(w)-5(ith)-5( t)7(h)-5(e )6(h)-5(y)1(gro)-5(t)1(h)-5(e)5(rm)9(al lo)-5(ad)-5(in)-5(g)-5( )]TJ 0.0029 Tc 0.0771 Tw -12.827 -1.222 Td [(con)5(d)-1(i)5(t)5(i)5(one)9(d at)5( )6(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 7.103 0 Td <0071>Tj /TT0 1 Tf 0.0019 Tc 0.0721 Tw 0.402 0 Td [(C/8)4(5)-2(%RH fo)4(r 16)4(8 ho)4(u)4(r)-1(s. The )-6(m)12(o)-2(ir\351 )-6(fri)10(n)4(g)-2(e)8( )]TJ 0.0025 Tc 0.0235 Tw -7.505 -1.15 Td [(pat)4(t)4(e)2(rns)8( )6(were)8( c)8(a)2(pt)4(u)5(red)5( at)4( t)10(h)-1(e t)10(i)-2(m)12(e)2(s of)6( 0)5(,)1( )6(1,)7( )6(3,)7( 7)5(,)1( )6(1)5(1)-1(,)7( 2)5(4)-1(,)7( )6(48)5(, )6(96)5( )]TJ 0.0029 Tc 0.2031 Tw 0 -1.144 TD [(and 1)5(68 ho)5(u)5(r.)7( )-6( )-6(In or)6(der )-6(t)5(o)-1( el)]TJ 0.0008 Tc 0.2112 Tw 12.707 0 Td [(iminate the tim)11(e)1( and thermal )]TJ -0.0007 Tc 0.1827 Tw -12.707 -1.15 Td [(effect, i.e. creep)-5( )6(o)-5(f)2( )6(u)-5(n)1(d)-5(e)-1(rfill m)9(a)-1(terial, a parallel test on th)-5(e )]TJ -0.0011 Tc 0.0451 Tw 0 -1.15 TD [(sam)9(e)-1( sa)-7(m)9(p)-5(le )-6(w)-5(ith)-5(ou)-5(t m)9(o)-5(istu)-5(re ab)-5(sorp)-5(ti)7(o)-5(n)1( )6(w)-5(a)-1(s carried)-5( out an)-5(d )]TJ 0.001 Tc 0.2829 Tw 0 -1.144 TD [(the m)11(o)-3(ir\351 fri)9(nge )6(patterns)6( were ac)7(qui)9(red )6(at the sam)11(e)1( tim)11(e)-5( )]TJ -0.0002 Tc 0.0022 Tw 0 -1.15 TD [(in)-4(terv)-4(als. )]TJ ET Q BT /GS1 gs /TT7 1 Tf 10 0 0 10 296 40.29 Tm (1057)Tj /TT8 1 Tf 2.954 0 Td (2008 Electronic Components and Technology Conference)Tj ET endstream endobj 24 0 obj <>stream HUyXSW/{ٕ%Aٹ A I (nUł ,eD܊(X@eX JEY"Vgo{ww=s@ oeWoƙ@s-Ȃꕘ{00xWS@ҙo+BWѼ.# 0dL|Jt#> bʵ#%[2,dzݎ0wh\&x<HF28ch޴5\>+bya+`X"Y9,1yCmhzbO5ni:AI8;"+k`e8|I`$Iք5!h;|Q84  $AiThkdx:9kLfŸs1)R|ds+¯q",!bCdU vLJ' ?Ko,9>(> Ls)4,͒aABNAXl& r:mOC}}\||}kQWwwJSԐidk~ h5PPhM]nikiw^82GcMEUrBMk[n|LĊY^o;&(if00%A\/g 4:lC!a,J9LDE0;jL~F-hnq|v*qGL˘j $X\ϜZT(+kݠj1_.P喉*)k3v3*z:+L1޺9-%0?^`ճښוdrn6^I1̻?w6hR3c8h`_yjY5dB1Mex)Irq^qQb T eg&o3 T:h4QBB4V( ,,7c؜Xy IBY $xE=#zX(/#hIel=Ygjh1dV)ەش,/Sv4Q)ڻO=LeٺũCi{uoOa 4 ɥ[pdKЮ"2ex۷XvxX_ZÜK)MDq]vi9ëءAK]g&[x*+m6Ջ^ӌVWDmonۖnrlӠcM7VQG)UQ#8H`Y`^8)tܛcEyJ3Pt N$Ja"`52"X a`EQŚW%uF<54?6Tx1 C&xi('a*x_L 3T+}цs1Y-8=ڸ:)<'mcm{/G9 W7F-qx ^i6>x0viQi=dl Mk mխ/S`|0N~8,wq2EZ_fhƠZdUcuX>;[ ;2Tr2 47mݴZE!d.menQH7&/(=ޱJq =@jk@T~zߤPt%GP?C)7ZfI=s7  ˵دa 7Iyb]$ '9mv/C*56v{+:{V^#ec/iVntSGiOk5X]`ViȬxM'mQKpJ͈N +<"8Rdiy>gҿiKl9֦I}@gn]U-z-&=—$N˖yٳ|׫bm_biU/WgTS$' HQ@$ FsB&4"R UiYH@ R,D4|y:k֞=3goQm9 ,%SIKH!"֓( bCJQڛm\4(򰬸H\ c3LwЂg\mWÖ6 TjJ5*l,6 &$o3p~T;Tۧ>]~y bQrm ~(ݫd~JUvRMZu}pqpCXꖺ-s+݊^3'AY7m{Fݰow!m@YedmAhGa""d5ʃIIC{?Ȍ8ҐT ,+ۈC< c58DׂLTJl|߄ϯO5p/D~iETNu^x-LXXn3W ב`qA' F*F*R} FKWǺ%ZwkhSѩ븯uo끗erYux\p8QK|hZA~K?'_DJGKAϵ1 qסd {q3U,n$p2P{kjv#WFڍ/7aeTT~:[nnnد~Hy3WOބ.zoy]iz`Us"Ft!yӭ:ϖpaQz:%n g Zji VߠْXqtD=#ZaaPJu? e1qjdU趂3_T]B]aG,C+qQݟ%`181G00I6UƠG< NLPB2j` h,')ļqh#me$DGP}Zt?V`wJwBsl (-{ ԶnX*enN띋ۓٛ%9 :L=wX"Q-3!/f`Ţ䚁)33g[h2\ol'6^XGmj* -$izGWe%$ыJi"\t/EVh麶zSV7Ճbۜ3.g2}dZ.:WT Aj,X4E$]d~{y9Jm; vn҉QS#>e/hƒ# ޥ)z6QmG\=,l@7f%.ÍTEsڱ㜊Z;VŒ va:FD>mBNoXedt~aΪXrKD?TGa7VaY_32oCj(73 6@mmo n5+Ce+~LTL582ɒUO2䱔u+i.LImon)ŋig"1Q[5Y֚eKs2P+5CJ )ʖsdw'Cnn7PJ.SӶvW mpXQgd ȕ(Ǎ.1j!CzC _y_WE"Sl_Mzո8:}rSן9yr|㞜cC~G9"FK1)Cd5qGgv 4V(wd{ŝRrLm<|Ediqg'r~tWȜGakdz\FzeRbm_7;k !N#Rs>;m:#e8].^?]@s4}Nt]$p]Hmjڢjy) 0" Q|=|ꚗ>##ye.ma_;د}B޶,uHޏ6 si<T*bXDzԝO7ZV]>ߣsCQ;NmMk?=KYZݗ3gN-$ .9jY,tȅ5rY,vWLMO_Q Eo8"|C4Ũ0KmNgAzz:V&?[TbM j**K.9*bQ D,@DŽX, F"EN(T«i/- rWFwFG6 +.qR.s5{Y@Nv۱dEe~;**;&, /o.$Q'Tu`VOVWEPk:ycSHbL&&1VTcGˉ,.࿮OÑ$%ŐɜtD$;o>D{>$dQ=dcX&ܣ=~j8 NЇ!8ll0a+`g1 yllbo1E4EJ=>d =zcz +iWޡ?o?= m?Mjf.k&u3M5m*"#t )|%@U%HC׉d.)3tӦxjU;3ԪY4k;>A8$[Oc7sr ՘'u5c u6p1o$Zkg9cY:)B\wfNOT_[N #Լr^"*r= '8ŅIj%$VRy #&/82CgCVAA3 ȡ+z&,ǐaNW{lS?k'88ƄG΂B$Ӧ4вh5m%<*jЍnhR'GI0ڮ+ĶNƴ PVҵe땾y8vwP[}997LOS9WAx ox2@!83,[yLAI֩ dc[ap^ɏuMUrX{o#Fr sH#|#}ءbC借89 k[dxVߋ)OK|">̉6:uݽ*O<-_?J8co=Υyi)|\&y ,;'Ȱ>rA޻n~ҫ] Rkd!)98￉ bA@-Ȝ-R̝řqA)g4N] uAzH㱆sׯAw0pi&.'W8-]:i@d&921fXYBG@l7dV>Ul "L&"531Y?u 1ɪTLdXL>{L?]&R:Oz)|,Ϝ}tz5SSOƌ'%5d4ٔ|*ɤdNL'z]35T@Ьc4=c+7P|5%4NX[V%>|}_UUq[ߏ/f|1{AKKz@$ןm, Ľ @ _4DOa1Q`%ob\c-BOSD &Q"O6-uQ?O][a)uB~a+h tz[4ΐLBb"PAP4*J٣xTDMcN'tPhdqJ;֒"U66[,Bz,٨?(IMsQk PnGY}:o$Zȫt|m- iC=V;͜5sk F"www/omhY^ȷeq^/WE<:kl*bOVz-x/w\K?/-%6o, ٵsUZڦitڴ¨[S.묰@褂qbI\""$)گ(VD 2#AUTӁ&q[Ka9 *ńC*8؀ 4qMz#E\`ljQRBV[,W>k67p06ND'*V4,7+6EQ#3!0〉pƨE7Tf^6;Nuli}7V~?٫ra%D6?zp6!_K~[R Y{q*-x?T7f!GoK&ei<.lMzs}Aa0+[h9bEqFU:ɫ ^Ș5ԟF]@Q*mvxWG3⛎@gGu"с8B74=G/dݥH/l!\3 "Rus+˿fCc3I=<у՛s % |oEf[oWRXBm$5 ߻JJ+ْ0JXeJ1Q H V-٘&ē'n'P!x:i3S qZhNN4th$i%LJm] 4w:{~;@y@} me_)}u͕)lW uz!^Fҫx׎/Al&ߍlw"  ca.@U$}l$TZdMV=ebZYf##t|ܑI$2cڴ8p#u Ü]3RkNt ׏6Rͻ=;U?j^]4^6=g~i֩wa"JDojV#w|)(p-~L,)ℐ~Qh&)荈!Vb!"8ƆA7FO7nr)ڮ^1rr3Z~3r1iX.tLvaޭm>#~,\G?Oz9;>\Q^~_ z^gNmfg2+OYS b娕]"nN8g7ES. 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0.9700012 9 12 cm 0 0 m 612 0 l 612 792 l 0 792 l 0 0 l W n q /GS0 gs 253.4396413 0 0 106.4398458 62.6399088 638.1592103 cm /Im0 Do Q 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT 0 0 0 rg /GS0 gs /TT0 1 Tf 9.701 0 0 9.7194 315.6558 630.957 Tm ( )Tj 0.0011 Tc 0.0027 Tw 8.7134 0 0 8.73 71.7978 617.1636 Tm [(Fig. 5 Sch)7(e)-3(mati)5(c diagr)7(a)-3(m of th)7(e )]TJ 0.0015 Tc 0.0023 Tw 13.112 0 Td [(s)10(ilicon)7(/underf)7(ill)6(/)6(F)3(R-4 assembl)6(y)-13( )]TJ 0.0003 Tc 0.3196 Tw 9.701 0 0 9.7194 69.7608 600.2856 Tm [(The DIC )-6(technique was)6( )-6(com)10(b)]TJ -0.0012 Tc 0.3271 Tw 13.229 0 Td [(in)-5(ed)-5( w)-5(ith )6(a sandw)-5(ich)-5(e)5(d )]TJ -0.0008 Tc 0.0688 Tw -14.669 -1.144 Td [(b)-5(r)-4(azil-n)-5(it \(SB)6(N)-5(\) fi)7(x)-5(t)1(ure )6(for th)-5(e )]TJ 0.0003 Tc 0.0677 Tw 12.905 0 Td [(c)6(h)-4(a)6(r)-3(acteriza)6(tion )6(of t)8(h)-4(e c)6(r)-3(itical )]TJ 0.3856 Tw -12.905 -1.15 Td (interfacial fracture)Tj -0.0006 Tc 0.3865 Tw 7.799 0 Td ( toughness of silic)Tj 0.0005 Tc 0.3854 Tw 8.399 0 Td [(on/)8(underfill interface )]TJ 0.003 Tc 0.3589 Tw -16.198 -1.15 Td [(un)5(de)9(r )6(di)5(f)6(fere)9(n)5(t)5( m)13(i)5(xed-m)13(ode l)5(o)-1(a)9(d)-1(i)5(n)5(g)5( co)5(n)5(d)-1(i)5(t)5(i)5(ons)8( )6([2)5(0])6(. )6(The)9( )]TJ -0.0013 Tc 0.1053 Tw 0 -1.144 TD [(sand)-5(w)-5(i)1(ch)-5( stru)-5(ctu)-5(r)-4(e )6(w)-5(a)-1(s m)9(a)-1(d)-5(e)-1( o)-5(f)2( silico)-5(n)-5(/)7(u)-5(nderfill/silico)-5(n)-5( with)-5( )]TJ 0.5792 Tw 0 -1.15 TD [(a 4)-5(m)3(m)9( p)-5(r)-4(e-crack m)9(a)-1(n)-5(u)-5(f)-4(actu)-5(red)-5( at t)7(h)-5(e silico)-5(n)-5(/)1(und)-5(erfill)-5( )]TJ -0.0009 Tc 0.0749 Tw T* [(in)-5(terface. Th)-5(e )6(th)-5(ick)-5(n)-5(e)5(ss )6(o)-5(f)-4( t)7(h)1(e un)-5(d)-5(e)5(rfill w)-5(a)-1(s cho)-5(s)-2(en to)-5( )6(b)-5(e)-1( )6(0)-5(.)3(5)-5( )]TJ -0.0025 Tc 0.3224 Tw 0 -1.144 TD [(mm, w)-6(h)-6(ich)-6( is co)-6(n)-6(s)-3(isten)-6(t)-1( )6(w)-6(ith)-6( t)5(h)-6(e t)5(h)-6(ickn)-6(ess in t)5(h)-6(e m)7(o)-6(i)-7(r)-5(\351 )]TJ 0.0011 Tc 0.1929 Tw 0 -1.227 TD [(expe)7(rim)11(e)1(nt. The )6(SBNs)6( )6(were)7( age)7(d)3( under )6(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 18.382 0 Td <0071>Tj /TT0 1 Tf 0.0008 Tc 0.1932 Tw 0.402 0 Td [(C/85%R)8(H i)9(n)-3( a )]TJ 0.0017 Tc 0.2342 Tw -18.784 -1.144 Td [(hy)4(g)4(r)-1(ot)10(herm)12(al )-6(cham)12(ber fo)4(r 1)4(6)-2(8)4( ho)4(u)4(r)-1(s)7( )-6(be)8(fo)4(reha)8(n)4(d)-2(.)6( )-6(A)4(r)-1(tificial )]TJ 0.0122 Tw 0 -1.15 TD [(spec)8(kl)4(e pat)4(t)4(e)2(r)5(n)4(s were)8( su)4(bse)8(q)4(u)4(e)2(nt)4(l)4(y)4( gene)8(rat)4(e)8(d o)4(n)-2( t)10(h)-2(e s)7(p)-2(eci)4(m)6(e)2(n)-8( )]TJ 0.0001 Tc 0.3858 Tw 0 -1.144 TD [(surface )6(usi)8(n)-4(g white pai)8(n)-4(t )6(and )]TJ -0.0004 Tc 0.3863 Tw 13.889 0 Td [(carbon )6(particles to c)6(r)3(eate)-6( )]TJ 0.0014 Tc 0.3845 Tw -13.889 -1.15 Td [(im)11(ages with )6(high contrast)9( of)]TJ 0.0001 Tc 0.3858 Tw 12.935 0 Td [( )6(gray level. The interfacial )]TJ 0.0003 Tc 0.0737 Tw -12.935 -1.15 Td [(fracture)6( tests )6(on t)8(h)-4(e sam)10(p)-4(les )]TJ 0.0736 Tw 11.927 0 Td [(were)6( c)6(o)-3(nducted )6(with INSTR)8(O)-3(N )]TJ 0 Tc 0.038 Tw -11.927 -1.144 Td [(micro-tensile machine )-6(at room)10( )]TJ 0.0001 Tc 0.0439 Tw 12.653 0 Td [(te)-6(m)10(p)-4(erature. A hi)8(gh resol)8(u)-4(tion )]TJ 0.0008 Tc 0.0492 Tw -12.653 -1.15 Td [(CCD cam)11(era was )6(use)7(d)-3( t)9(o)-3( ca)7(pture s)6(p)-3(ec)7(kle )6(patterns)6( at )6(different)9( )]TJ -0.002 Tc 0.196 Tw 0 -1.15 TD [(lo)-6(ad lev)-6(e)-2(ls. )6(With)-6( th)-6(e cu)-6(rv)-6(e, )6(th)-6(e sp)-6(eck)-6(le )6(p)-6(a)4(ttern)-6( at)6( th)-6(e load)-6( )]TJ 0.0006 Tc 0.0014 Tw 0 -1.144 TD [(level where t)9(h)-3(e)7( interface c)7(r)-2(ac)7(k ope)7(n)-3(e)7(d)-3( could be )6(obtaine)7(d. This )]TJ -0.0013 Tc 0.6152 Tw 0 -1.15 TD [(p)-5(a)-1(ttern and)-5( )6(th)-5(e in)-5(itial sp)-5(eck)-5(le )6(p)-5(a)-1(ttern)-5( )6(w)-5(e)-1(re u)-5(s)-2(ed as )]TJ 0.0016 Tc 0.4683 Tw T* [(unde)8(form)12(ed and de)8(form)12(ed im)12(ages. )6(W)-8(i)4(t)10(h)-2( the c)8(o)4(rrela)8(tion )]TJ 0.0008 Tc 0.1632 Tw 0 -1.144 TD [(soft)9(ware)7(, t)9(h)-3(e )6(displacem)11(ent fields around t)9(h)-3(e c)7(r)-2(ac)7(k-tip c)7(oul)9(d )]TJ 0.0023 Tc -0.0063 Tw 0 -1.15 TD [(be det)4(e)2(rm)12(i)4(n)-2(ed.)6( )-6( )]TJ 0.0026 Tc 0.2873 Tw 1.44 -1.245 Td [(Fi)5(g.)7(6 pl)11(ot)5(t)5(e)3(d )6(t)5(h)-1(e m)13(ode I and M)10(ode )6(II s)8(t)5(ress i)5(n)-1(t)5(e)3(nsi)5(t)5(y)5( )]TJ 0.0025 Tc 0.2394 Tw -1.44 -1.15 Td [(fact)4(or)6(s at)10( )6(di)4(ff)6(erent)10( hy)11(gr)6(ot)4(he)]TJ -0.0016 Tc 0.2435 Tw 11.903 0 Td [(r)-5(m)8(al ag)-5(in)-5(g times b)-5(a)-2(sed on th)-5(e)10( )]TJ 0.0011 Tc 0.4388 Tw -11.903 -1.144 Td [(m)11(o)-3(ir\351 fringe)7( )6(measurem)11(ent. It)9( ca)7(n )6(be)7( )6(obs)6(erved t)9(h)-3(at the)7( )]TJ -0.0012 Tc 0.4291 Tw T* [(h)-5(ygro)-5(s)-2(cop)-5(i)1(c stresses increase w)-5(ith th)-5(e ti)-5(m)9(e)-1( o)-5(f)-4( m)9(o)-5(istu)-5(re )]TJ 0.0006 Tc 0.0794 Tw T* [(abs)6(o)-3(rption, the)7(r)-2(efore t)9(h)-3(e stres)6(s )]TJ 0.0004 Tc 0.0796 Tw [(intensity factors i)8(n)-3(crease )6(with )]TJ -0.0005 Tc 0.1885 Tw 0 -1.144 TD [(ti)-5(m)9(e)-1(. Th)-4(en)-4( the stress in)-4(ten)-4(s)5(ity facto)-4(r)-3(s level o)-4(f)3(f to)-4( )6(reach an )]TJ -0.001 Tc 0.4889 Tw 0 -1.15 TD [(asy)-5(m)9(p)-5(t)1(o)-5(tic v)-5(a)5(lu)-5(e, )6(wh)-5(ich in)-5(d)-5(i)1(cates th)-5(at)7( th)-5(e )6(assem)9(b)-5(ly is)-8( )]TJ -0.0012 Tc 0.3391 Tw T* [(satu)-5(rated)-5( )6(w)-5(ith )-6(m)9(o)-5(istu)-5(re ab)-5(so)-5(rp)-5(tion)-5(.)-3( Th)-5(e )6(asy)-5(m)9(p)-5(t)1(o)-5(tic cu)-5(rv)-5(e )]TJ 0.0007 Tc 0.0553 Tw 0 -1.144 TD [(suggeste)7(d t)9(h)-3(at )6(the c)7(h)-3(ange )6(of )]TJ 0.001 Tc 0.049 Tw [(t)9(h)-3(e fract)9(ure be)7(havior )-6(induced by )]TJ -0.0012 Tc 0.0812 Tw 0 -1.15 TD [(m)9(o)-5(istu)-5(re ab)-5(sorp)-5(tio)-5(n)-5( )6(w)-5(a)-1(s )6(g)-5(r)-4(adu)-5(a)-1(l rath)-5(er th)-5(an in)-5(stan)-5(t, altho)-5(u)1(g)-5(h)1( )]TJ 0.0005 Tc 0.0915 Tw T* [(the in-plane surface m)10(easured )]TJ -0.0003 Tc 0.0923 Tw 12.587 0 Td [(was in t)8(h)-4(e bo)]TJ -0.0008 Tc 0.0928 Tw 5.579 0 Td (undary condition )Tj -0.0015 Tc 0.0035 Tw -18.166 -1.144 Td [(o)-5(f)-4( )6(satu)-5(rated)-5( mo)-5(istu)-5(re con)-5(c)-2(en)-5(tratio)-5(n. It sho)-5(u)-5(l)6(d)-5( )6(b)-5(e)-2( no)-5(ted)-5( th)-5(at)6( th)-5(e )]TJ -0.001 Tc 0.7349 Tw T* [(resu)-5(lts )6(p)-5(l)1(o)-5(tted)-5( i)7(n)-5( Fi)7(g)-5(.)3(6 w)-5(e)5(re co)-5(m)9(b)-5(in)-5(ed effect )6(w)-5(ith)-5( )]TJ 0.0006 Tc 0.5473 Tw T* [(hygrosc)7(o)3(pic s)6(t)3(resses and t)9(h)-3(erm)11(a)1(l stresses. In orde)7(r to)-9( )]TJ 0.0003 Tc 0.1697 Tw 0 -1.144 TD [(eliminate the t)8(h)-4(erm)10(al effect, )6(drie)6(d sam)10(p)-4(le was tested in )6(the )]TJ 0.0024 Tc 0.2036 Tw 0 -1.15 TD [(sam)12(e)2( way)5(, as pl)10(ot)4(t)4(e)2(d i)10(n)-1( Fi)10(g.)6( 7)5(. B)10(o)-1(t)4(h)-1( )6(K)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 220.6152 184.4466 Tm (1)Tj 0.0015 Tc 0.2045 Tw 9.701 0 0 9.7194 223.6998 185.9016 Tm [( and )6(K)]TJ 0 Tc 0 Tw 6.2736 0 0 6.2856 253.5564 184.4466 Tm (2)Tj 0.001 Tc 0.199 Tw 9.701 0 0 9.7194 256.6992 185.9016 Tm [( started )-6(t)9(o)3( )]TJ -0.001 Tc 0.105 Tw -20.71 -1.15 Td [(d)-5(ecrease )6(w)-5(ith)-5( )6(ti)-5(m)9(e)-1( d)-5(u)-5(e)-1( t)7(o)-5( the creep)-5( )6(b)-5(e)5(h)-5(a)-1(v)-5(i)7(o)-5(r)2( of )6(un)-5(d)-5(e)5(rfill fo)-5(r)8( )]TJ -0.0009 Tc 0.1529 Tw 0 -1.144 TD [(d)-5(r)-4(y sam)9(p)-5(les. )6(Th)-5(e assem)9(b)-5(ly )-6(w)-5(a)-1(s co)-5(m)9(p)-5(lex)-5(l)1(y relax)-5(e)5(d)-5( after th)-5(e )]TJ -0.0003 Tc 0.2782 Tw 0 -1.15 TD [(certain)-4( p)-4(e)6(riod o)-4(f)-3( tim)10(e. Ti)-4(me e)]TJ 0.0009 Tc 0.277 Tw 13.331 0 Td [(ffect was )6(significa)7(nt in )6(the )]TJ 0.0008 Tc 0.2711 Tw -13.331 -1.15 Td [(hygrot)9(herm)11(al aging, )6(es)6(pecia)7(lly )]TJ 0.0009 Tc 0.265 Tw 13.397 0 Td [(at the high tem)11(p)-3(erature. In )]TJ -0.0016 Tc 0.2735 Tw -13.397 -1.144 Td [(ad)-5(d)-5(ition)-5(,)-4( it can)-5( )6(b)-5(e)-2( seen)-5( t)6(h)-5(at th)-5(e m)8(a)-2(g)-5(n)-5(itud)-5(e)-2( )6(o)-5(f)1( stresses or )]TJ 0.0006 Tc 0.0854 Tw T* [(fracture )6(param)11(e)1(ters on tim)11(e e)-5(ffect)]TJ -0.0042 Tc 0.0902 Tw 13.889 0 Td [( )6(w)-8(a)-4(s)-5( co)-8(mp)-8(a)-4(r)-7(ab)-8(le)-4( to)-8( th)-8(a)-4(t)4( on)-8( )]TJ 0.0024 Tc 0.7195 Tw -13.889 -1.144 Td [(hy)5(g)5(r)-1(ot)10(herm)12(al i)4(n)5(duce)8(d)5( s)8(w)-1(el)4(l)4(i)4(ng.)6( T)7(h)-1(e)8(r)5(efo)5(r)-1(e,)6( t)4(h)-1(e)8( r)5(e)2(sul)4(t)4(s)2( )]TJ -0.0015 Tc 0.0395 Tw T* [(in)-5(d)-5(icated th)-5(at t)6(h)-5(e in)-5(terface tou)-5(ghn)-5(ess i)6(n)-5(du)-5(ced)-5( )6(b)-5(y)1( th)-5(e m)8(o)-5(is)-8(tu)-5(re )]TJ -0.0003 Tc 0.1523 Tw T* [(sw)-4(ellin)-4(g)-4( )6(w)-4(as )6(p)-4(o)-4(s)5(sib)-4(l)2(e to)-4( )6(b)-4(e)6( o)-4(v)-4(e)6(restim)10(ated)-10( if th)-4(e ti)-4(m)10(e effect )]TJ 0.0012 Tc 0.0008 Tw 0 -1.144 TD [(was )6(not)9( considered. )]TJ 0 Tc 0 Tw 1.44 -1.252 Td ( )Tj ET q 224.4395905 0 0 173.3777771 326.7719574 560.8260193 cm /Im1 Do Q BT /TT0 1 Tf 9.701 0 0 9.7194 551.2494 560.7678 Tm ( )Tj 0.0015 Tc -0.0055 Tw -22.318 -1.521 Td (Fig. 6)Tj /TT1 1 Tf 0.002 Tc 0 Tw 2.34 0 Td ( K)Tj 0 Tc 6.2736 0 0 6.2856 366.348 544.53 Tm (1)Tj /TT0 1 Tf -0.004 Tc 0.006 Tw 9.701 0 0 9.7194 369.4908 545.985 Tm [( and)-8( )]TJ /TT1 1 Tf 0 Tc 0 Tw 1.938 0 Td (K)Tj 6.2736 0 0 6.2856 394.7496 544.53 Tm (2)Tj /TT0 1 Tf 0.0019 Tc 0.0001 Tw 9.701 0 0 9.7194 397.8924 545.985 Tm [( with )6(respect)10( to )6(diffe)8(re)8(nt hy)10(gr)5(othe)8(rm)12(al )]TJ 0.0025 Tc -0.0005 Tw -1.698 -1.15 Td [(agi)4(n)5(g t)4(i)4(m)12(e \(85 )6(\272C/)4(85%R)10(H)-1(\) )]TJ ET q 219.6800537 0 0 169.7693787 326.7719574 357.0678101 cm /Im2 Do Q BT /TT0 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 546.4187 357.0678 Tm ( )Tj 0.0003 Tc 0.0035 Tw 8.7134 0 0 8.73 333.6396 343.2744 Tm [(Fig.)-3( )7( 7 )]TJ /TT1 1 Tf 0 Tc 0 Tw 3.099 0 Td (K)Tj 5.8088 0 0 5.82 366.4644 341.8194 Tm (1)Tj /TT0 1 Tf 0.0028 Tc 0.001 Tw 8.7134 0 0 8.73 369.3162 343.2744 Tm [( and)9( )]TJ /TT1 1 Tf 0 Tc 0 Tw 1.95 0 Td (K)Tj 5.8088 0 0 5.82 392.0724 341.8194 Tm (2)Tj /TT0 1 Tf 0.0023 Tc 0.0015 Tw 8.7134 0 0 8.73 394.9824 343.2744 Tm [( with r)8(e)-1(spec)5(t to)8( )7(differen)8(t th)8(erm)5(a)-1(l)6( aging)8( tim)5(e)5( )]TJ 0.0003 Tc -0.0032 Tw 3.059 -1.147 Td [(\(85 \272)-10(C)-1(\) )]TJ ET q 213.7993774 0 0 164.1821899 326.7719574 161.1666107 cm /Im3 Do Q BT /TT0 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 540.4242 161.1666 Tm ( )Tj 0.0005 Tc 0.0033 Tw 8.7134 0 0 8.73 338.703 146.7331 Tm [(Fig. 8 Fractur)6(e)-3( )7(toughness of dr)6(y)-7( )7(and wet \(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 17.841 0 Td <0071>Tj /TT0 1 Tf 0.0009 Tc 0.0029 Tw 0.401 0 Td [(C/8)7(5%\) SBN )]TJ 0.0024 Tc 0 Tw -9.164 -1.153 Td [(s)4(p)1(ecim)5(e)-1(n )]TJ 0.0006 Tc 0.4693 Tw 9.701 0 0 9.7194 326.772 112.104 Tm [(Based )6(on the)7( \265-DiSC syst)9(e)-5(m)11( and i)9(n)-3(terface fracture )]TJ 0.0003 Tc 0.3496 Tw -1.44 -1.15 Td [(mechanics, the )-6(m)10(easured )6(results)]TJ -0.0019 Tc 0.3518 Tw 13.937 0 Td [( of)-5( f)-5(r)1(actu)-6(r)-5(e)-2( toug)-6(hn)-6(ess in)-6( )]TJ 0.001 Tc 0.085 Tw -13.937 -1.15 Td [(term)11(s o)-3(f)-2( )6(K)]TJ 0 Tw 6.2736 0 0 6.2856 355.9302 88.3002 Tm (1C)Tj -0.004 Tc 0.09 Tw 9.701 0 0 9.7194 363.2634 89.7552 Tm [( an)-8(d )6(K)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 390.7338 88.3002 Tm (2C)Tj 0.085 Tw 9.701 0 0 9.7194 398.067 89.7552 Tm [( we)7(re)7( presente)7(d i)9(n)-3( )6(Fig.8. It)9( can )6(be se)7(en )]TJ 0.0005 Tc 0.5354 Tw -8.789 -1.144 Td [(the critical interfacial )6(frac)6(t)2(ure t)8(o)-3(ughnes)6(s K)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 504.9803 77.184 Tm (1C)Tj -0.004 Tc 0.5399 Tw 9.701 0 0 9.7194 512.3135 78.639 Tm [( an)-8(d )6(K)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 548.514 77.184 Tm (2C)Tj 0 Tc 9.701 0 0 9.7194 555.8471 78.639 Tm ( )Tj 0.008 Tw -25.053 -1.15 Td [(fo)-4(llow)-4(e)6(d)-4( th)-4(e el)8(lip)-4(se law)-4( )6(w)-4(ith)-4( )6(resp)-4(ect t)8(o)-4( d)-4(i)8(fferen)-4(t)2( )6(p)-4(h)-4(a)6(se ang)-4(l)8(es. )]TJ ET Q BT /GS1 gs /TT2 1 Tf 10 0 0 10 296 40.29 Tm (1058)Tj /TT3 1 Tf 2.954 0 Td (2008 Electronic Components and Technology Conference)Tj ET endstream endobj 38 0 obj <>stream HtHtHߜHttߜHtߜHtttHHtHHH endstream endobj 39 0 obj <>stream H엉v(EN'ΞYOǶ7 Dn*D,R`́DCm}ٜʝ5=t}ﰾAյx0 :hXF c|f Ufl n(yM]@3r#OCxi~Uy*$8;]9Hە7~dWU?~-fj,\}UC y@lݵ^|7Nh&2^`Uwp~*)f{>Ǘ׷K^FAޑ=/6!8>.kff7}]Ȏ6Nne|O-GsN?pgp~v-~}_M3&3I5yV"qpFtb8Ow8}=BOGf B5|p'-=Mu@[sǷ0ķ.͙|7߱#҃!;2Ѹuׄ2%LP^4Pʖܥ|6;_[m~ Cͩ1LvlzKkNCW2Yqd]OWNv vhRzqֆDܵ! ݨ!⠺OןnTm9(9 rڏ•6]1#x8_n9_u=/tOу3l2KάtŝŐ<_nrpusQp>==&ת{=ytn·1a+p>i[ޓF^oV0χ1a+p>i[aLsJs=wvu.4w 0]f*e"]R)V j䚃]{ V l`ˋwgR#r^^Rd2LLy^ѻoʺCq]Xq\>sҧnl|w;w"ɡ]zΜ{=uuל#csAαEA9=}sQ@md(KW8' 't]\W 0F 84 VT]j̾P읓.@H{_ū܌ y1sElW|99 .@H/VW/2ژԹ-Bl7/A"7s^$tnQsEjtRG\R)rq^k$ZR|=HsӪbw>ȍVUsWGFΩ9"52qljiVZxaȌ|mbSd sHIssEnd8 C68Bͬta0gyND){ d'f^oPr`N1܌^3ٺ# {HsxvC\',?*f 粶pmhN;5)i{6>stream Adobed     $$''$$53335;;;;;;;;;; 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an)-5(g)-5(l)7(es, d)-5(i)1(fferen)-5(t mo)-5(d)-5(e)-1( m)9(i)1(x)-5(ities w)-5(e)-1(re )]TJ 0.003 Tc 0.3709 Tw 0 -1.144 TD [(achi)5(e)3(ve)9(d.)7( Ho)5(weve)9(r,)7( )-6(t)5(h)-1(e)9( K)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 167.7114 712.6698 Tm (1C)Tj 0.0003 Tc 0.3736 Tw 9.701 0 0 9.7194 175.0446 714.1248 Tm [( )-6(dec)6(r)-3(eased slowly when K)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 291.5028 712.6698 Tm (2C)Tj 0 Tc 9.701 0 0 9.7194 298.836 714.1248 Tm ( )Tj 0.0023 Tc 0.0177 Tw -25.053 -1.15 Td [(i)4(n)-2(crease)8(d)-2( )6(by)4( c)8(h)-2(an)4(gi)4(n)4(g)-2( t)10(h)-2(e l)10(o)4(adi)4(n)4(g a)8(ngl)4(e)8( f)5(r)-1(o)4(m)12( 90\260 t)4(o)4( 2)4(0)-2(\260)6(. )6(Thi)4(s)2( )]TJ 0.0006 Tc 0.3733 Tw 0 -1.15 TD [(indicated that)9( the K)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 142.9764 690.321 Tm (1C)Tj -0.0007 Tc 0.3746 Tw 9.701 0 0 9.7194 150.3096 691.776 Tm [( p)-5(l)1(ays a )-6(m)9(o)-5(re critical ro)-5(le in)-5( th)-5(e)-7( )]TJ 0.2546 Tw -9.743 -1.144 Td [(d)-5(e)-1(term)9(in)-5(atio)-5(n)-5( )6(o)-5(f)2( critical in)-5(te)]TJ -0.0001 Tc 0.254 Tw 12.167 0 Td [(rfacial fracture toughness t)8(h)-4(an )]TJ 0 Tc 0 Tw -12.167 -1.15 Td (K)Tj 0.001 Tc 6.2736 0 0 6.2856 62.835 668.0304 Tm (2C)Tj 0.3369 Tw 9.701 0 0 9.7194 70.1682 669.4854 Tm [(. )6(Afte)7(r t)9(h)3(e hy)9(grothe)7(rm)11(a)-5(l)3( agi)9(n)-3(g, t)9(h)-3(e )6(critical interfa)7(cial )]TJ 0.0002 Tc 0.0978 Tw -1.482 -1.15 Td [(fracture)6( toughness)5( dec)6(r)-3(ease)6(d)2( sign)]TJ -0.0012 Tc 0.0992 Tw 13.751 0 Td [(ifican)-5(tly co)-5(m)9(p)-5(ared w)-5(ith )6(th)-5(e )]TJ 0.0002 Tc 0.0198 Tw -13.751 -1.144 Td [(critical interfac)6(i)2(al fract)8(ure)6( toughn)]TJ 0.0004 Tc 0.0196 Tw 13.517 0 Td [(ess)6( )6(of )6(dry)9( s)6(p)-3(ecim)10(en tested at )]TJ 0.0021 Tc 0.2698 Tw -13.517 -1.15 Td [(t)4(h)-2(e r)5(oom)12( t)4(e)-4(m)6(p)-2(erat)10(ure. )6(A)4(f)-1(t)4(e)2(r 1)4(68 )6(h)4(o)-2(u)4(r)-1(s )6(o)4(f)-1( ex)4(po)4(su)4(re at)10( 85 )]TJ 0.0007 Tc 0.0073 Tw T* [(\260C/85%R)8(H)-3(, t)9(h)3(e interfacial adhesi)]TJ 0.0011 Tc 0.0009 Tw 13.421 0 Td [(on was )-6(de)7(c)7(r)-2(eased on )-6(a)7(v)-3(erage )]TJ -0.0003 Tc 0.1043 Tw -13.421 -1.144 Td [(34.9% for )-6(the silicon/underfil)8(l)2( )-6(in)]TJ -0.0011 Tc 0.1111 Tw 13.559 0 Td (terface. This is because that )Tj -0.0006 Tc 0.2305 Tw -13.559 -1.15 Td [(th)-4(e m)9(o)-4(istu)-4(re co)-4(u)-4(l)7(d)-4( inv)-4(a)-1(d)-4(e)-1( i)7(n)-5(to)-4( th)-4(e )6(d)-4(e)5(fects and)-4( rem)9(a)-1(rk)-5(ab)-5(ly )]TJ 0.0006 Tc 0.0674 Tw 0 -1.144 TD [(decrease)7( t)9(h)-3(e i)9(n)3(terfacial stre)7(ngth )]TJ -0.0022 Tc 0.0702 Tw 13.187 0 Td [(b)-6(y in)-6(tercep)-6(t)6(in)-6(g th)-6(e in)-6(ter- an)-6(d)-6( )]TJ 0.0032 Tc 0.1548 Tw -13.187 -1.15 Td [(i)5(n)-1(t)5(ra-m)13(o)-1(l)5(ecul)5(a)3(r hy)5(d)5(r)6(oge)9(n )6(bo)5(ndi)11(ng )6(p)5(ro)5(v)-1(i)5(d)-1(e)9(d)-1( by)5( t)5(h)-1(e )6(hy)5(d)5(r)6(oxy)5(l)11( )]TJ 0.0034 Tc 0 Tw 0 -1.15 TD [(gr)6(o)6(ups)9(. )]TJ /TT1 1 Tf 0.0023 Tc -0.0003 Tw 0 -1.754 TD [(2.)6(3 )6(Di)4(e s)8(h)1(ear)8( )6(test)5( )]TJ /TT0 1 Tf 0.0005 Tc 0.3674 Tw 1.44 -1.239 Td [(Although inte)6(rfacial )6(fract)8(ur)]TJ 0.0015 Tc 0.3604 Tw 11.723 0 Td [(e )-6(m)11(echanics base)7(d fract)9(ure)7( )]TJ -0.0013 Tc 0.4772 Tw -13.163 -1.144 Td [(to)-5(ug)-5(hn)-5(ess m)9(e)-7(asu)-5(r)-4(em)9(en)-5(t pro)-5(v)-5(i)7(d)-5(e)-1(s )6(rigo)-5(rou)-5(s)-2( )6(d)-5(e)5(fin)-5(itio)-5(n and )]TJ -0.0006 Tc 0.7705 Tw 0 -1.15 TD [(results)5( for )6(evaluating inte)]TJ 0.0013 Tc 0.7626 Tw 12.485 0 Td [(rface stre)7(ngth, t)9(h)-3(e sa)7(m)11(p)-3(le)-5( )]TJ 0.0024 Tc 0.2215 Tw -12.485 -1.15 Td [(pre)8(p)-1(arat)4(i)4(o)5(n i)4(s)8( very)5( t)4(e)8(di)4(o)5(u)-1(s,)6( an)5(d t)4(h)-1(e )6(pr)5(oc)8(edu)5(r)-1(e )6(oft)4(e)8(n i)4(s)8( n)5(o)-1(t)4( )]TJ -0.0013 Tc 0.2133 Tw 0 -1.144 TD [(co)-5(m)9(p)-5(atib)-5(le )-6(w)-5(ith)-5( p)-5(ack)-5(ag)-5(ing)-5( assem)9(b)-5(ly )-6(p)-5(r)-4(o)-5(c)5(ess. O)-5(n)1( )-6(th)-5(e )-6(o)-5(t)7(h)-5(e)-1(r)8( )]TJ 0.0023 Tc 0.1617 Tw 0 -1.15 TD [(han)4(d)-2(,)6( )6(di)4(e s)8(h)-2(ea)8(r t)4(e)2(st)4(,)6( )6(by)4( )6(whi)10(c)2(h t)10(h)-2(e)8( sam)12(p)-2(l)4(e)-4(s ca)8(n )6(be)8( m)12(a)2(de by)10( )]TJ 0.0022 Tc 0.4017 Tw T* [(st)4(anda)8(rd )6(pac)8(k)4(agi)4(n)4(g an)4(d as)7(sem)12(b)-2(l)4(y)4( proce)8(sses, )6(pr)5(ovi)10(des)7( an )]TJ 0.0008 Tc 0.0312 Tw 0 -1.144 TD [(effective )6(way for a )6(quick asse)7(ssm)]TJ 0.0026 Tc 0.0294 Tw 13.619 0 Td [(ent)5( of t)5(h)-1(e a)9(dhe)9(si)5(o)5(n)-1( st)5(re)9(ngt)11(h.)7( )]TJ -0.0023 Tc 0.2203 Tw -13.619 -1.15 Td [(A)-6( )6(n)-6(e)4(w)-6( m)8(e)-2(th)-6(od)-6( )6(fo)-6(r sam)8(p)-6(le p)-6(r)-5(ep)-6(aration is in)-6(trod)-6(u)-6(c)-2(ed in th)-6(e )]TJ -0.0006 Tc 0.4285 Tw 0 -1.15 TD [(fo)-4(llow)-4(i)1(ng)-4( to)-4( )6(g)-4(e)-1(n)-4(e)5(rate a larg)-4(e )6(qu)-4(an)-4(tity o)-4(f)-4( sam)9(p)-4(les. )6(Th)-4(e )]TJ 0.0002 Tc 0.3017 Tw 0 -1.144 TD [(interface between polyimide )-6(on)]TJ -0.0002 Tc 0.3081 Tw 13.559 0 Td [( silicon chip and )6(underfill )]TJ -0.001 Tc 0.5909 Tw -13.559 -1.15 Td [(w)-5(e)-1(re ev)-5(al)7(u)-5(a)-1(ted)-5(.)-3( )6(Th)-5(e silico)-5(n)1( ch)-5(i)7(p)-5( )6(o)-5(n)1( silico)-5(n)-5( sub)-5(s)4(trate )]TJ -0.0017 Tc 0.6996 Tw 0 -1.15 TD [(co)-6(nfigu)-6(r)-5(ation w)-5(a)-2(s d)-6(e)4(signed)-6( t)6(o)-6( elimi)-6(n)-6(ate th)-6(e th)-6(erm)8(o)-6(-)]TJ 0.0009 Tc 0.715 Tw 0 -1.144 TD [(mechanical s)6(t)3(resses )6(due )6(to CTE m)11(i)3(s)-6(m)5(atch. Suc)7(h)3( a )]TJ -0.0001 Tc 0.0141 Tw 0 -1.15 TD [(configuration )6(has)5( two i)8(d)-4(entic)6(al in)]TJ 0 Tc 13.481 0 Td [(terfaces )6(on both si)8(des )6(so t)8(h)-4(at )]TJ 0.0022 Tc 0.0718 Tw -13.481 -1.144 Td [(t)4(h)-2(e f)5(r)-1(act)4(ur)5(e m)6(ode)8( can )6(be c)8(o)4(nt)4(r)5(o)-2(l)4(l)4(e)2(d bet)4(t)4(e)2(r)5(.)6( Fi)4(g. )6(9 s)7(h)4(owe)8(d)4( t)4(h)-2(e )]TJ 0.0024 Tc 0.2395 Tw T* [(schem)12(a)2(t)4(i)4(c)2( of sam)12(p)-1(l)4(e)2( prepa)8(r)5(at)4(i)4(on )6(pr)5(ocess)8(.)6( It)4( st)4(art)4(e)2(d)5( f)5(r)-1(o)5(m)12( )-6(a )]TJ -0.0005 Tc 0.0685 Tw T* [(silico)-4(n)-4( w)-4(a)5(fer )6(w)-4(ith)-4( PI )6(p)-4(s)-1(ssivatio)-4(n)-4(.)-2( )6(A)-4( sten)-4(ci)7(l w)-4(a)-1(s d)-4(e)-1(si)7(g)-4(n)-4(e)5(d an)-4(d )]TJ -0.0015 Tc 0.0215 Tw 0 -1.144 TD [(ap)-5(p)-5(lied to co)-5(n)-5(t)6(ro)-5(l)6( th)-5(e area and)-5( )]TJ -0.0017 Tc 0.0157 Tw 12.485 0 Td [(h)-6(e)-2(igh)-6(t of un)-6(derfill )-6(d)-6(isp)-6(en)-6(satio)-6(n.)8( )]TJ 0.0023 Tc 0.0417 Tw -12.485 -1.15 Td [(A )6(fl)4(i)4(p)-2(-c)8(hi)10(p )6(pi)4(c)8(k)-2( a)8(n)4(d)4( pl)4(ace)8( m)6(achi)4(n)-2(e)8( )6(was )6(use)8(d)-2( t)10(o)4( assem)12(b)-2(l)4(e)2( 2x)4(2)4( )]TJ 0.0027 Tc 0.0953 Tw 0 -1.15 TD [(m)7(m)7( sil)5(i)5(c)3(on di)5(e)9(s)2( o)5(n)-1( t)5(h)-1(e )6(wafe)9(r)6(.)1( )]TJ 0.0007 Tc 0.0973 Tw 12.665 0 Td [(The )6(whole as)6(sem)11(b)-3(ly was then )]TJ -0.0003 Tc 0.0263 Tw -12.665 -1.144 Td [(cured according t)8(o)2( each )6(underfill\222s )]TJ 0.0006 Tc 0.0194 Tw 14.297 0 Td [(prescri)9(b)3(ed curing schedule.)11( )]TJ 0.0433 Tw -14.297 -1.15 Td [(Specim)11(e)1(ns were rea)7(d)-3(y for t)9(h)-3(e)7( test after )6(dicing. )6(Suc)7(h)-3( a )6(sample )]TJ -0.0011 Tc 0.537 Tw T* [(p)-5(r)-4(ep)-5(aration)-5( )6(pro)-5(cess cou)-5(l)1(d p)-5(r)2(o)-5(d)1(u)-5(ce a )6(larg)-5(e qu)-5(an)-5(tity o)-5(f)-4( )]TJ 0.0005 Tc 0.0615 Tw 0 -1.144 TD [(specim)10(ens and minim)10(i)2(ze the )-6(sam)10(p)]TJ -0.0007 Tc 0.0627 Tw 13.961 0 Td [(le-to)-5(-)-4(samp)-5(le v)-5(a)5(riatio)-5(n)-5(s)5(. )6(A)-4(ll )]TJ -0.0014 Tc 0.3573 Tw -13.961 -1.15 Td [(sp)-5(ecim)9(e)-1(n)-5(s)-2( h)-5(a)5(v)-5(e)-1( co)-5(nsisten)-5(t)1( w)-5(e)-1(ttin)-5(g area and)-5( lo)-5(cation and )]TJ -0.0003 Tc 0.0143 Tw 0 -1.15 TD [(u)-4(n)2(d)-4(e)6(rfill h)-4(eight. D)-4(i)2(e sh)-4(ear tests w)-4(ere p)-4(e)6(rformed)-4( o)-4(n)-4( a )6(d)-4(i)2(e sh)-4(ear )]TJ 0.0002 Tc 0.0678 Tw 0 -1.144 TD [(tester system)10(: )-6(DAGE)5( Se)6(ries )6(4000)]TJ 0.0022 Tc 0.0598 Tw 13.703 0 Td [( wi)4(t)4(h)4( hot)10( pl)4(at)4(e )-6(\(t)4(em)12(perat)4(u)-2(re)14( )]TJ -0.0012 Tc 0.0092 Tw -13.703 -1.15 Td [(r)-4(a)-1(ng)-5(e )6(25)-5(\260C )6(-)-4( )6(30)-5(0\260C\))-4(. Th)-5(e syste)-7(m)9( h)-5(a)-1(s a )6(f)-4(i)1(x)-5(e)5(d ho)-5(t )6(p)-5(l)1(ate and)-5( t)7(e)-1(st)-5( )]TJ -0.0008 Tc 0.0208 Tw 0 -1.15 TD [(tab)-5(l)1(e w)-5(ith)-5( )6(fu)-5(ll au)-5(to)-5(m)9(a)-1(tic test )-6(p)-5(r)2(o)-5(cess. Sev)-5(e)-1(ral p)-5(a)-1(ram)9(e)-1(ters su)-5(ch)7( )]TJ 0.001 Tc 0.049 Tw 0 -1.144 TD [(as shea)7(r s)6(p)-3(ee)7(d )6(and shea)7(r )6(height can be a)7(d)3(jus)6(t)3(ed to c)7(o)3(ntrol t)9(h)-3(e )]TJ -0.0038 Tc 0.1198 Tw 0 -1.15 TD [(f)-7(r)-7(a)-4(c)-4(t)-2(ur)-7(e mo)-8(d)-8(e)-4(. In th)-8(e pr)-7(e)-4(s)-5(en)-8(t s)-5(t)-2(ud)-8(y, th)-8(e s)-5(h)-2(ea)-4(r)-7( )6(h)-8(e)-4(igh)-8(t)-2( )6(w)-8(a)-4(s )6(s)-5(e)-4(t)-8( )]TJ -0.0002 Tc 0.3141 Tw T* [(eq)-4(u)-4(al t)8(o)-4( t)8(h)-4(e )6(u)-4(n)2(d)-4(e)6(rfill h)-4(ei)8(g)2(h)-4(t)2( and)-4( )6(sh)-4(ear )6(sp)-4(eed)-4( )6(w)-4(as set)8( as )]TJ 0.0039 Tc 0 Tw 0 -1.222 TD [(20)6(0)]TJ /C2_0 1 Tf 0 Tc <0050>Tj /TT0 1 Tf -0.0012 Tc 0.1772 Tw [(m)9(/)1(s. For )6(all exp)-5(e)-1(rim)9(e)-1(n)-5(t)1(al leg)-5(s)4( sh)-5(own later, th)-5(e samp)-5(le )]TJ -0.0001 Tc 0.0081 Tw 0 -1.144 TD [(size was )6(16 )6(units per leg. 100% )]TJ -0.0002 Tc 12.923 0 Td [(failure along the interface )6(was )]TJ 0.0023 Tc 0.0777 Tw -12.923 -1.15 Td [(achi)4(e)2(ve)8(d)4( f)5(o)-2(r)5( al)10(l)4( l)4(e)2(gs.)6( T)7(h)-2(e)8( st)4(a)8(nda)8(r)5(d)-2( )6(de)8(vi)4(at)4(i)4(o)4(n )6(o)4(f)-1( t)10(h)-2(e)8( m)12(easured )]TJ 0.0021 Tc -0.0061 Tw 0 -1.15 TD [(adhe)8(si)4(o)4(n)-2( dat)4(a)2( were)8( )-6(l)4(e)2(ss )-6(t)4(h)-2(a)8(n)-2( 15)4(%. )-6( )]TJ 0 Tc 0 Tw 1.44 -1.245 Td ( )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 387.9 744.06 m 387 744 l 386.28 743.88 l 385.98 743.82 l 385.26 743.7 l 385.02 743.64 l 384.66 743.52 l 384.42 743.46 l 384.24 743.4 l 384 743.34 l 383.64 743.22 l 383.4 743.16 l 383.16 743.04 l 382.98 742.98 l 382.86 742.92 l 382.68 742.86 l 382.44 742.74 l 382.26 742.68 l 382.14 742.62 l 381.96 742.56 l 381.36 742.26 l 381.3 742.2 l 380.7 741.9 l 380.64 741.84 l 380.16 741.6 l 380.1 741.54 l 379.98 741.48 l 379.92 741.42 l 379.8 741.36 l 379.68 741.24 l 379.56 741.18 l 379.5 741.12 l 379.38 741.06 l 379.32 741 l 379.2 740.94 l 379.14 740.88 l 379.02 740.82 l 378.96 740.76 l 378.84 740.7 l 378.72 740.58 l 378.6 740.52 l 378.42 740.34 l 378.3 740.28 l 378 739.98 l 377.88 739.92 l 377.58 739.62 l 377.46 739.56 l 375.84 737.94 l 375.78 737.82 l 375.6 737.64 l 375.54 737.52 l 375.36 737.34 l 375.3 737.22 l 375.12 737.04 l 375.06 736.92 l 374.88 736.74 l 374.82 736.62 l 374.7 736.5 l 374.64 736.38 l 374.58 736.32 l 374.52 736.2 l 374.46 736.14 l 374.4 736.02 l 374.34 735.96 l 374.28 735.84 l 374.22 735.78 l 374.16 735.66 l 374.1 735.6 l 374.04 735.48 l 373.98 735.42 l 373.92 735.3 l 373.86 735.24 l 373.8 735.12 l 373.74 735.06 l 373.68 734.94 l 373.62 734.88 l 373.32 734.28 l 373.26 734.22 l 372.84 733.38 l 372.78 733.32 l 372.66 733.08 l 372.6 732.9 l 372.48 732.66 l 372.42 732.48 l 372.3 732.24 l 372.24 732.06 l 372.18 731.94 l 372.12 731.76 l 372 731.52 l 371.94 731.34 l 371.88 731.22 l 371.7 730.68 l 371.64 730.44 l 371.28 729.36 l 371.22 729.12 l 371.16 728.82 l 371.1 728.58 l 371.04 728.28 l 370.92 727.8 l 370.8 727.2 l 370.74 726.78 l 370.68 726.3 l 370.62 725.88 l 370.56 725.4 l 370.5 724.44 l 370.44 723.12 l 370.5 723.06 l 370.5 721.68 l 370.56 721.68 l 370.56 720.72 l 370.62 720.72 l 370.62 720.3 l 370.68 720.3 l 370.68 719.82 l 370.74 719.82 l 370.74 719.4 l 370.8 719.4 l 370.8 718.98 l 370.86 718.98 l 370.86 718.62 l 370.92 718.62 l 370.92 718.38 l 370.98 718.38 l 370.98 718.14 l 371.04 718.14 l 371.04 717.84 l 371.1 717.84 l 371.1 717.6 l 371.16 717.6 l 371.16 717.3 l 371.22 717.3 l 371.22 717.06 l 371.28 717.06 l 371.28 716.82 l 371.34 716.82 l 371.34 716.64 l 371.4 716.64 l 371.4 716.4 l 371.46 716.4 l 371.46 716.22 l 371.52 716.22 l 371.52 716.04 l 371.58 716.04 l 371.58 715.86 l 371.64 715.86 l 371.64 715.68 l 371.7 715.68 l 371.7 715.5 l 371.76 715.5 l 371.76 715.32 l 371.82 715.32 l 371.82 715.14 l 371.88 715.14 l 371.88 714.96 l 371.94 714.96 l 371.94 714.78 l 372 714.78 l 372 714.66 l 372.06 714.66 l 372.06 714.48 l 372.12 714.48 l 372.12 714.36 l 372.18 714.36 l 372.18 714.24 l 372.24 714.24 l 372.24 714.06 l 372.3 714.06 l 372.3 713.94 l 372.36 713.94 l 372.36 713.76 l 372.42 713.76 l 372.42 713.64 l 372.48 713.64 l 372.48 713.52 l 372.54 713.52 l 372.54 713.34 l 372.6 713.34 l 372.6 713.22 l 372.66 713.22 l 372.66 713.1 l 372.72 713.1 l 372.72 712.98 l 372.78 712.98 l 372.78 712.86 l 372.84 712.86 l 372.84 712.74 l 372.9 712.74 l 372.9 712.62 l 372.96 712.62 l 372.96 712.5 l 373.02 712.5 l 373.02 712.38 l 373.08 712.38 l 373.08 712.26 l 373.14 712.26 l 373.14 712.14 l 373.2 712.14 l 373.26 712.08 l 373.26 711.96 l 373.32 711.96 l 373.32 711.84 l 373.38 711.84 l 373.38 711.72 l 373.44 711.72 l 373.44 711.6 l 373.5 711.6 l 373.5 711.48 l 373.56 711.48 l 373.56 711.36 l 373.62 711.36 l 373.68 711.3 l 373.68 711.18 l 373.74 711.18 l 373.8 711.12 l 373.8 711 l 373.86 711 l 373.92 710.94 l 373.92 710.82 l 373.98 710.82 l 373.98 710.7 l 374.04 710.7 l 374.1 710.64 l 374.1 710.52 l 374.16 710.52 l 374.22 710.46 l 374.22 710.34 l 374.28 710.34 l 374.34 710.28 l 374.34 710.16 l 374.4 710.16 l 374.46 710.1 l 374.46 709.98 l 374.52 709.98 l 374.58 709.92 l 374.58 709.8 l 374.64 709.8 l 374.7 709.74 l 374.7 709.62 l 374.76 709.62 l 374.94 709.44 l 374.94 709.32 l 375 709.32 l 375.18 709.14 l 375.18 709.02 l 375.24 709.02 l 375.42 708.84 l 375.42 708.72 l 375.48 708.72 l 375.66 708.54 l 375.66 708.42 l 375.72 708.42 l 375.9 708.24 l 375.9 708.12 l 375.96 708.12 l 377.46 706.62 l 377.58 706.56 l 377.88 706.26 l 378 706.2 l 378.3 705.9 l 378.42 705.84 l 378.6 705.66 l 378.72 705.6 l 378.84 705.48 l 378.96 705.42 l 379.02 705.36 l 379.14 705.3 l 379.2 705.24 l 379.32 705.18 l 379.38 705.12 l 379.5 705.06 l 379.56 705 l 379.68 704.94 l 379.8 704.82 l 379.92 704.76 l 379.98 704.7 l 380.1 704.64 l 380.16 704.58 l 380.64 704.34 l 380.7 704.28 l 381.3 703.98 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m h 358.2 669.12 0.36 -0.36 re 358.56 669.12 m h 358.56 668.4 m 358.56 667.86 l 358.38 667.86 l 358.38 668.22 l 358.2 668.04 l 358.2 668.4 l h 357.96 667.86 -0.36 0.36 re 357.24 667.86 -0.36 0.36 re 356.52 667.86 -0.36 0.36 re 355.8 667.86 -0.36 0.36 re 355.08 667.86 -0.42 0.36 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.504 0.004 0.504 rg 366.06 668.4 4.38 2.22 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 rg 366.24 668.4 -0.36 0.36 re 365.88 668.4 m h 366.24 669.12 -0.36 0.42 re 365.88 669.12 m h 366.24 669.9 -0.36 0.36 re 365.88 669.9 m h 366.06 670.8 0.36 -0.36 re 366.78 670.8 0.36 -0.36 re 367.5 670.8 0.36 -0.36 re 368.22 670.8 0.36 -0.36 re 369 670.8 0.36 -0.36 re 369.72 670.8 0.36 -0.36 re 370.26 670.62 0.36 -0.36 re 370.62 670.62 m h 370.26 669.9 0.36 -0.42 re 370.62 669.9 m h 370.26 669.12 0.36 -0.36 re 370.62 669.12 m h 370.44 668.22 -0.36 0.36 re 369.72 668.22 -0.42 0.36 re 368.94 668.22 -0.36 0.36 re 368.22 668.22 -0.36 0.36 re 367.5 668.22 -0.36 0.36 re 366.78 668.22 -0.36 0.36 re f Q BT /TT0 1 Tf -0.0318 Tc 0.038 Tw 5.6782 0 0 5.6779 330.555 647.9514 Tm [(S)-39(t)-61(e)-29(n)-24(c)-29(i)-10(l )10(p)-34(r)-16(in)-34(t)-61(i)-10(n)-24(g)-34( f)-68(o)-34(r)-6( u)-34(n)-24(d)-95(e)-29(r)-6(f)-78(il)-10(l)]TJ 0 Tc 0 Tw 9.701 0 0 9.7194 537.6306 607.095 Tm ( )Tj 0.0008 Tc 0.003 Tw 8.7134 0 0 8.73 330.4968 593.3598 Tm [(Fig. 9 Sch)7(e)-3(matic of die shear )7(te)]TJ 0.0023 Tc 0.0015 Tw 12.664 0 Td [(s)4(t)6( )7(s)4(p)1(ecim)5(e)-1(n pr)8(epar)8(ation)8( proces)4(s)4( )]TJ -0.0011 Tc 0.447 Tw 9.701 0 0 9.7194 326.772 576.4818 Tm [(O)-5(u)1(r )6(p)-5(a)5(rticu)-5(l)1(ar in)-5(terest)7( w)-5(a)5(s to ev)-5(al)7(u)-5(a)-1(te th)-5(e adh)-5(e)-1(si)7(on)-11( )]TJ -0.0013 Tc 0.7052 Tw -1.44 -1.15 Td [(streng)-5(th)-5(s )6(fo)-5(r th)-5(ree typ)-5(e)-1(s o)-5(f)-4( )6(un)-5(derfill u)-5(n)1(d)-5(e)-1(r v)-5(a)5(rio)-5(u)-5(s)10( )]TJ -0.0009 Tc 1.0708 Tw 0 -1.144 TD [(m)9(o)-5(istu)-5(re/te)-7(m)9(p)-11(eratu)-5(r)-4(e con)-5(d)1(itio)-5(n)-5(s)-2(. First, th)-5(e m)9(o)-5(ist)-5(u)-5(re )]TJ 0.0004 Tc 0.5055 Tw 0 -1.15 TD [(abs)6(o)-3(rption c)6(h)3(aracteristics )6(were)6( )6(obtaine)6(d for t)8(h)-4(ese t)8(h)-3(ree)6( )]TJ -0.0004 Tc 0.4343 Tw T* [(u)-4(n)2(d)-4(e)6(rfills )6(b)-4(y)2( m)10(o)-4(istu)-4(re )6(w)-4(e)6(ig)-4(h)-4(t)8( g)-4(ai)8(n)-4( experim)10(en)-4(t)2(. Tab)-4(l)8(e 2 )]TJ -0.0008 Tc 0.5847 Tw 0 -1.144 TD [(su)-5(mm)9(arized)-5( t)-5(h)-5(e d)-5(i)7(ffu)-5(s)-2(iv)-5(ity an)-5(d)-5( t)7(h)-5(e satu)-5(rated)-5( m)9(o)-5(istu)-5(re )]TJ -0.001 Tc 0.195 Tw 0 -1.15 TD [(co)-5(n)-5(c)-1(en)-5(tration)-5( at )-6(8)-5(5)1(\260C/85)-5(%)-2(R)6(H)-5(. Th)-5(en)-5( )-6(t)7(h)-5(e m)9(o)-5(istu)-5(re )-6(d)-5(i)1(ffusio)-5(n )]TJ 0.003 Tc 0.5509 Tw T* [(m)13(odel)5(i)5(ng wa)9(s)8( co)5(nd)5(uct)5(e)3(d)5( t)5(o)-1( )6(un)5(de)9(rst)5(a)3(n)5(d)5( t)5(h)-1(e s)8(o)-1(a)9(k)-1( t)5(i)5(m)7(e )]TJ -0.0002 Tc 0.2961 Tw 0 -1.144 TD [(requ)-4(irem)10(en)-4(t. Sin)-4(ce silico)-4(n)-4( )6(ch)-4(ip)-4(s )6(o)-4(n)-4( t)8(h)-4(e )6(b)-4(o)-4(t)8(h)-4( sid)-4(es )6(o)-4(f)3( th)-4(e )]TJ -0.0021 Tc 0.244 Tw 0 -1.15 TD [(sp)-6(ecim)8(e)-2(n)-6( d)-6(o )6(n)-6(o)-6(t ab)-6(so)-6(rb)-6( m)8(o)-6(istu)-6(re, th)-6(e mo)-6(istu)-6(re is )6(d)-6(iffu)-6(s)-3(ed)-6( )]TJ -0.0012 Tc 0.1592 Tw 0 -1.144 TD [(th)-5(ro)-5(ugh)-5( th)-5(e )6(un)-5(d)-5(e)5(rfill on)-5(ly fro)-5(m)9( u)-5(n)1(d)-5(e)-1(rfill sid)-5(e)-1(. )6(A)-5(ccord)-5(ing)-5( to )]TJ -0.0008 Tc 0.0628 Tw 0 -1.15 TD [(th)-5(e m)9(o)-5(istu)-5(re )-6(mo)-5(d)-5(e)-1(ling)-5( )6(resu)-5(lts, it tak)-5(e)-1(s )-6(m)9(o)-5(re th)-5(an)-5( three w)-5(e)5(ek)-5(s )]TJ 0.8667 Tw T* [(for th)-5(e sam)9(p)-5(le fu)-5(lly satu)-5(rated 85)-5(\260C/8)-5(5)-5(%)-2(R)6(H)-5(. )6(Two)-5( )]TJ 0.0031 Tc 0.3828 Tw 0 -1.144 TD [(expe)9(ri)5(m)13(e)3(nt)5(al)5( pl)5(ans)8( we)9(re )6(d)5(e)3(fi)5(ne)9(d. )6(I)6(n)-1( t)11(h)-1(e)9( fi)5(rst)11( g)5(ro)5(u)5(p,)7( )6(t)5(h)-1(e )]TJ 0.0009 Tc 0.349 Tw 0 -1.15 TD [(objective)7( was)6( to c)7(o)-3(m)11(p)-3(are )6(the )]TJ 0.0002 Tc 0.3437 Tw [(adhesi)8(on strength )-6(at roo)-10(m)4( )]TJ 0.0007 Tc 0.0493 Tw T* [(te)-5(m)11(p)-3(erature )6(under )6(differe)7(n)-3(t s)6(o)-3(aki)9(n)-3(g conditions)6(. Ta)7(ble )6(3 listed )]TJ -0.001 Tc 0.171 Tw 0 -1.144 TD [(th)-5(e d)-5(e)-1(tails o)-5(f)-4( )6(th)-5(e exp)-5(e)-1(rim)9(e)-1(n)-5(t)1(al leg)-5(s)-2( for th)-5(e first group)-5(. Th)-5(e )]TJ 0.0016 Tc 0.0664 Tw 0 -1.15 TD [(seco)4(nd)4( g)4(r)-1(o)4(u)4(p)-2( )6(was )6(desi)4(g)4(n)-2(e)8(d)-2( t)10(o)-2( )6(obt)4(ai)10(n t)4(h)-2(e)8( a)8(d)4(hesi)4(o)4(n)-2( st)10(ren)4(g)-2(t)10(h)-2( at)4( )]TJ 0.0039 Tc 0 Tw 0 -1.227 TD [(22)6(0)]TJ /C2_0 1 Tf 0 Tc <0071>Tj /TT0 1 Tf -0.0006 Tc 0.3445 Tw 1.908 0 Td [(C w)-4(ith)-4( m)9(o)-4(istu)-4(re, )-6(as sh)-4(own)-4( )-6(in)-4( Tab)-4(l)1(e )-6(4. )-6(In)-4( o)-4(r)2(der )-6(to)-4( )]TJ 0.0004 Tc 0.1756 Tw -1.908 -1.222 Td [(measure the a)6(dhe)6(sion stre)6(ngth at 220)]TJ /C2_0 1 Tf 0 Tc 0 Tw 15.67 0 Td <0071>Tj /TT0 1 Tf -0.0019 Tc 0.1779 Tw 0.402 0 Td [(C, th)-6(e )6(p)-6(r)-5(econ)-6(d)-6(ition)-6(e)-2(d )]TJ 0.0008 Tc 0.1212 Tw -16.072 -1.144 Td [(sam)11(p)-3(les were )6(placed t)9(o)-3( the )6(hot )]TJ 0.0001 Tc 0.1219 Tw 13.277 0 Td [(plate immediately right )6(after )]TJ -0.0014 Tc 0.0934 Tw -13.277 -1.15 Td [(rem)9(o)-5(v)-5(e)-1(d)-5( fro)-5(m)9( )-6(th)-5(e hu)-5(m)9(i)1(d)-5(ity)-5( ch)-5(am)9(b)-5(e)-1(r. 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rg 63.3 705.84 40.38 0.66 re f Q q 0.9700012 0 0 0.9700012 110.1517181 697.3058014 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 40.38 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 104.28 705.84 40.38 0.66 re f Q q 0.9700012 0 0 0.9700012 149.9605713 697.3058014 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 46.74 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 145.32 705.84 46.8 0.66 re f Q q 0.9700012 0 0 0.9700012 195.9386139 697.3058014 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 44.22 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 192.72 705.84 44.28 0.66 re f Q q 0.9700012 0 0 0.9700012 239.4722748 697.3058014 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 46.14 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 237.6 705.84 46.14 0.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 63.24 695.64 221.16 0.12 re W n 1 0 0 1 63.2399874 695.7599497 cm 0 0 0 RG 0.06 w 0 0 m 221.16 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 63.3 695.1 221.1 0.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 63.24 684.9 221.16 0.12 re W n 1 0 0 1 63.2399874 685.0199465 cm 0 0 0 RG 0.06 w 0 0 m 221.16 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 63.3 684.36 221.1 0.6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 63.24 674.16 221.16 0.12 re W n 1 0 0 1 63.2399874 674.2799434 cm 0 0 0 RG 0.06 w 0 0 m 221.16 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 63.3 673.62 221.1 0.6 re f Q q 0.9700012 0 0 0.9700012 69.7608643 707.7236176 cm 0 0 0 RG 0.06 w 0 0 m 0 -54.36 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 62.64 662.82 0.66 54.42 re f Q q 0.9700012 0 0 0.9700012 109.5115204 707.1416168 cm 0 0 0 RG 0.06 w 0 0 m 0 -53.76 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 103.68 662.82 0.6 53.76 re f Q q 0.9700012 0 0 0.9700012 149.3203583 707.1416168 cm 0 0 0 RG 0.06 w 0 0 m 0 -53.76 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 144.66 662.82 0.66 53.76 re f Q q 0.9700012 0 0 0.9700012 195.2984161 707.1416168 cm 0 0 0 RG 0.06 w 0 0 m 0 -53.76 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 192.12 662.82 0.6 53.76 re f Q q 0.9700012 0 0 0.9700012 238.832077 707.1416168 cm 0 0 0 RG 0.06 w 0 0 m 0 -53.76 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 237 662.82 0.6 53.76 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 63.24 663.36 221.16 0.12 re W n 1 0 0 1 63.2399874 663.4799434 cm 0 0 0 RG 0.06 w 0 0 m 221.16 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 63.3 662.82 221.1 0.66 re f Q q 0.9700012 0 0 0.9700012 284.2281189 707.7236176 cm 0 0 0 RG 0.06 w 0 0 m 0 -54.36 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 283.74 662.82 0.66 54.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 62.64 652.08 0.06 10.8 re W n 1 0 0 1 62.6399874 662.8799434 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 0 -11.4 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 62.64 652.08 0.66 10.74 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 103.62 652.08 0.12 10.8 re W n 1 0 0 1 103.6199937 662.8799434 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 0 -11.4 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 103.68 652.08 0.6 10.74 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 144.66 652.08 0.12 10.8 re W n 1 0 0 1 144.6599811 662.8799434 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 0 -11.4 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 144.66 652.08 0.66 10.74 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 192.06 652.08 0.12 10.8 re W n 1 0 0 1 192.0599811 662.8799434 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 0 -11.4 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 192.12 652.08 0.6 10.74 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 236.94 652.08 0.12 10.8 re W n 1 0 0 1 236.9399874 662.8799434 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 0 -11.4 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 237 652.08 0.6 10.74 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 283.74 652.08 0.12 10.8 re W n 1 0 0 1 283.7399717 662.8799434 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 0 -11.4 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 283.74 652.08 0.66 10.74 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 62.64 652.62 221.76 0.12 re W n 1 0 0 1 62.6399874 652.7399402 cm 0.754 0.754 0.754 RG 0.06 w 0 0 m 222.36 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 0.754 0.754 0.754 rg 62.64 652.08 221.76 0.66 re f Q BT /TT0 1 Tf 0 Tc 9.701 0 0 9.7194 284.9262 644.4594 Tm ( )Tj 0.002 Tc 0.156 Tw -22.18 -1.024 Td [(Fi)4(g. )6(10)4( pl)10(ot)4(t)4(e)2(d t)4(h)-2(e a)8(d)4(hesi)4(o)4(n)4( resul)4(t)4(s)1( at)4( r)5(o)4(o)4(m)6( t)4(e)-4(m)12(p)-2(erat)4(ure )]TJ -0.0012 Tc 0.0212 Tw -1.44 -1.144 Td [(for t)7(h)-5(ree d)-5(i)7(fferen)-5(t)1( )6(u)-5(n)1(d)-5(e)-1(rfills un)-5(d)-5(e)5(r )6(v)-5(a)5(riou)-5(s so)-5(ak)-5(i)7(n)-5(g co)-5(nd)-5(itio)-5(n)-5(s)4(. )]TJ 0.0016 Tc 0.1924 Tw 0 -1.15 TD [(It s)7(h)-2(o)4(w)-2(e)8(d)4( that)10( the)8( )6(diffe)8(re)8(nc)8(es in)4( a)8(d)4(hesio)4(n)4( am)12(ong)4( the)8( t)10(h)4(ree )]TJ -0.001 Tc 0.171 Tw T* [(u)-5(n)1(d)-5(e)5(rfills at ro)-5(o)-5(m)9( te)-7(m)9(p)-5(eratu)-5(r)-4(e are no)-5(t si)7(g)-5(n)-5(i)7(fican)-5(t. )6(It is also )]TJ -0.0021 Tc 0.268 Tw 0 -1.144 TD [(n)-6(o)-6(ted)-6( t)6(h)-6(at th)-6(e adh)-6(e)-2(sion)-6(s fo)-6(r th)-6(ese th)-6(ree )6(un)-6(d)-6(e)4(rfills are )6(no)-6(t )]TJ -0.0002 Tc 0.0022 Tw 0 -1.15 TD [(sen)-4(s)-1(itiv)-4(e to m)10(o)-4(istu)-4(re at )6(roo)-4(m)10( t)-4(e)-6(m)10(p)-4(eratu)-4(r)3(e. )]TJ 0.0017 Tc 0.0021 Tw 8.7134 0 0 8.73 67.782 393.0354 Tm [(Fig. 10 )7(adhesion)7( strength)7( at )]TJ 0.0014 Tc 0.0024 Tw 11.362 0 Td [(room temperatures un)7(der diff)7(eren)7(t )]TJ 0.001 Tc 0.0028 Tw -6.639 -1.153 Td [(moisture conditions for thr)7(ee und)7(erfills )]TJ -0.0011 Tc 0.0811 Tw 9.701 0 0 9.7194 69.7608 366.147 Tm [(Fig)-5(.)3( 11 p)-5(l)7(o)-5(tted th)-5(e test )6(resu)-5(lt)7(s fo)-5(r t)7(h)-5(ese t)7(h)-5(ree und)-5(erfills at )]TJ 0.0039 Tc 0 Tw -1.44 -1.227 Td [(22)6(0)]TJ /C2_0 1 Tf 0 Tc <0071>Tj /TT0 1 Tf -0.001 Tc 0.2909 Tw 1.908 0 Td [(C)6( und)-5(er )6(v)-5(a)-1(ri)7(o)-5(u)-5(s)4( co)-5(nd)-5(itio)-5(n)-5(s)4(. It)7( clearl)7(y)1( sho)-5(w)-5(s th)-5(at )6(th)-5(e )]TJ 0.0023 Tc 0.2876 Tw -1.908 -1.144 Td [(m)12(o)-2(i)4(s)2(t)4(u)-2(re has)8( )6(st)4(ro)4(ng)4( i)4(n)4(fl)4(ue)8(n)4(ce )6(on)4( t)4(h)-2(e)8( a)8(d)4(hesi)4(o)4(n)4( st)4(re)8(ngt)10(h at)10( )]TJ 0.0008 Tc 0.1992 Tw T* [(elevated tem)11(p)-3(erature)7(.)-1( This i)9(m)11(pl)]TJ -0.0011 Tc 0.2011 Tw 13.307 0 Td [(ies th)-5(at th)-5(e adh)-5(e)-1(sion)-5( test at)-5( )]TJ 0.0008 Tc 0.2771 Tw -13.307 -1.15 Td [(high tem)11(p)-3(erature is ne)7(cessa)7(ry )]TJ -0.001 Tc 0.2789 Tw 13.217 0 Td [(for th)-5(e co)-5(rrelatio)-5(n)-5( )6(w)-5(ith)-5( th)-5(e )]TJ -0.0008 Tc 0.2068 Tw -13.217 -1.144 Td [(actu)-5(a)-1(l m)9(a)-7(terial)-5( p)-5(e)-1(rfo)-5(rm)9(an)-5(ce d)-5(u)1(ring)-5( m)9(o)-5(istu)-5(re sen)-5(s)-2(itiv)-5(ity test )]TJ 0.0005 Tc 0.1455 Tw T* [([1,6]. Com)10(p)-3(ared t)8(o)-3( t)8(h)-3(e m)10(o)-3(isture)]TJ 0.0022 Tc 0.1438 Tw 13.403 0 Td [( )6(abs)7(o)-2(r)5(p)-2(t)4(i)4(o)4(n )6(dat)4(a)2( i)10(n)-2( Ta)8(bl)10(e 2)4(, )]TJ 0.0005 Tc 0.1455 Tw -13.403 -1.15 Td [(there was )-6(no correlation for )-6(th)]TJ -0.001 Tc 0.153 Tw 12.839 0 Td [(e adh)-5(e)-1(sion)-5( )6(w)-5(ith)-5( th)-5(e sat)7(u)-5(rated)-5( )]TJ -0.0008 Tc 0.5187 Tw -12.839 -1.144 Td [(m)9(o)-5(istu)-5(re concen)-5(tration)-5( and)-5( )6(d)-5(i)1(ffu)-5(s)-2(i)7(v)-5(ity. Fo)-5(r a )6(p)-5(a)-1(rti)7(c)-1(u)-5(l)1(ar )]TJ 0.0028 Tw T* [(material, ev)-5(en)-5( )6(th)-5(ou)-5(gh)-5( m)9(a)-1(terial is ab)-5(le to)-5( ab)-5(so)-5(rb)-5( m)9(o)-5(re m)9(o)-5(ist)-5(u)-5(re )]TJ 0.0024 Tc 0.0236 Tw T* [(t)4(h)-1(an )6(ot)4(he)8(r m)12(a)2(teri)4(al)4(s, t)4(h)-1(e )6(del)4(a)2(m)6(i)4(nat)4(i)4(on m)12(a)2(y)5( )-6(not)4( )6(be a c)8(once)8(r)-1(n i)4(f)5( )]TJ 0.0005 Tc 0.4694 Tw 0 -1.144 TD [(the a)6(dhe)6(sion at the)6( inte)6(rface )6(of)]TJ -0.0002 Tc 0.4701 Tw 14.627 0 Td [( inte)6(rest after m)10(o)-4(isture)-6( )]TJ -0.0019 Tc 0.3098 Tw -14.627 -1.15 Td [(ab)-6(so)-6(rp)-6(tio)-6(n )-6(at)6( h)-6(igh)-6( )-6(tem)8(p)-6(er)-5(atu)-6(r)-5(e )-6(is str)-5(ong en)-6(oug)-6(h [)-5(6)-6(]. )-6(Th)-6(e )]TJ -0.0016 Tc 0.0156 Tw T* [(ad)-5(h)-5(e)4(sion)-5( at room)8( )-6(te)-8(m)8(p)-5(eratu)-5(r)-5(e )6(may n)-5(o)-6(t b)-5(e)4( ab)-5(le to)-5( )6(represen)-5(t th)-5(e )]TJ -0.0013 Tc 0.5792 Tw 0 -1.15 TD [(in)-5(terface b)-5(e)-1(hav)-5(i)1(or. )-6(On)-5(ly th)]TJ 0.0003 Tc 0.5836 Tw 12.515 0 Td [(e a)6(dhe)6(sion m)10(easurem)10(en)-10(t at )]TJ 0.0002 Tc 0.1098 Tw -12.515 -1.15 Td [(elevated tem)10(p)-4(erature)6( with m)10(o)-4(istu)-3(re effect c)6(o)-4(rrelates with )6(the )]TJ 0.0022 Tc -0.0062 Tw 0 -1.144 TD [(reflo)4(w)-2( pe)8(rf)5(orm)12(a)2(nce. )-6( )]TJ 0 Tc 0 Tw 1.44 -1.252 Td ( )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 344.82 596.88 201.78 144.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0 0 0 RG 0.06 w 546.6 741.6 -201.84 -144.72 re S Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 364.98 614.94 144 102.06 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 365.04 629.16 144 0.12 re W n 1 0 0 1 364.9799748 629.2799434 cm 0 0 0 RG 0.06 w 0 0 m 144 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 365.04 644.22 144 0.12 re W n 1 0 0 1 364.9799748 644.339956 cm 0 0 0 RG 0.06 w 0 0 m 144 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 365.04 658.5 144 0.12 re W n 1 0 0 1 364.9799748 658.6199465 cm 0 0 0 RG 0.06 w 0 0 m 144 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 365.04 673.2 144 0.12 re W n 1 0 0 1 364.9799748 673.3199465 cm 0 0 0 RG 0.06 w 0 0 m 144 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 365.04 687.54 144 0.12 re W n 1 0 0 1 364.9799748 687.6599497 cm 0 0 0 RG 0.06 w 0 0 m 144 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 365.04 702.24 144 0.12 re W n 1 0 0 1 364.9799748 702.3599497 cm 0 0 0 RG 0.06 w 0 0 m 144 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm 365.04 716.94 144 0.06 re W n 1 0 0 1 364.9799748 716.9999371 cm 0 0 0 RG 0.06 w 0 0 m 144 0 l S Q q 0.9715881 0 0 -0.9684143 363.0321045 707.48703 cm 0 0 0 RG 0.368 w 1 j 1 J 0 0 m 143.765 0 l 143.765 102.226 l 0 102.226 l 0 0 l S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P0 scn 370.92 614.94 8.1 73.44 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 370.62 614.94 8.7 73.68 re W n 1.001636 0 0 -0.998364 0 0 cm 1 0 0 RG 0.368 w 1 j 1 J 370.255 -689.505 8.087 73.56 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P1 scn 406.98 614.94 8.1 62.76 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 406.74 614.94 8.7 63.06 re W n 1.001636 0 0 -0.998364 0 0 cm 1 0 0 RG 0.368 w 1 j 1 J 406.316 -678.867 8.087 62.923 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P2 scn 443.1 614.94 8.1 38.16 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 442.8 614.94 8.76 38.46 re W n 1.001636 0 0 -0.998364 0 0 cm 1 0 0 RG 0.368 w 1 j 1 J 442.377 -654.227 8.087 38.282 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P3 scn 479.22 614.94 8.1 34.14 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 478.92 614.94 8.7 34.38 re W n 1.001636 0 0 -0.998364 0 0 cm 1 0 0 RG 0.368 w 1 j 1 J 478.379 -650.14 8.087 34.196 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P4 scn 379.02 614.94 7.74 95.46 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 378.72 614.94 8.34 95.7 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 1 RG 0.368 w 1 j 1 J 378.342 -711.56 7.727 95.616 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P4 scn 415.08 614.94 8.16 86.28 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 414.84 614.94 8.7 86.52 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 1 RG 0.368 w 1 j 1 J 414.403 -702.365 8.087 86.421 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P4 scn 451.2 614.94 7.74 77.82 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 450.96 614.94 8.34 78.12 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 1 RG 0.368 w 1 j 1 J 450.464 -693.952 7.727 78.007 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P4 scn 487.32 614.94 7.74 57.24 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 487.02 614.94 8.34 57.54 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 1 RG 0.368 w 1 j 1 J 486.465 -673.338 7.727 57.394 re S Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 0 rg 386.7 614.94 8.1 79.68 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 386.46 614.94 8.7 79.92 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 0 RG 0.368 w 1 j 1 J 386.069 -695.755 8.087 79.81 re S Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 0 rg 423.18 614.94 7.74 66.84 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 422.94 614.94 8.34 67.08 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 0 RG 0.368 w 1 j 1 J 422.49 -682.894 7.727 66.949 re S Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 0 rg 458.94 614.94 8.1 59.52 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 458.64 614.94 8.76 59.76 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 0 RG 0.368 w 1 j 1 J 458.192 -675.562 8.087 59.617 re S Q q 0.9700012 0 0 0.9700012 9 12 cm 0 1 0 rg 495 614.94 8.1 44.46 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 494.76 614.94 8.7 44.7 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 0 RG 0.368 w 1 j 1 J 494.193 -660.477 8.087 44.533 re S Q q 0.9700012 0 0 0.9700012 363.0310211 707.4908142 cm 0 0 0 RG 0.06 w 1 j 1 J 0 0 m 0 -102.06 l -1.44 -102.06 m 0 -102.06 l -1.44 -87.72 m 0 -87.72 l -1.44 -72.66 m 0 -72.66 l -1.44 -58.38 m 0 -58.38 l -1.44 -43.68 m 0 -43.68 l -1.44 -29.34 m 0 -29.34 l -1.44 -14.64 m 0 -14.64 l -1.44 0 m 0 0 l 0 -102.06 m 144 -102.06 l 0 -103.86 m 0 -102.06 l 36.12 -103.86 m 36.12 -102.06 l 72.18 -103.86 m 72.18 -102.06 l 108.3 -103.86 m 108.3 -102.06 l 144 -103.86 m 144 -102.06 l S Q BT /TT2 1 Tf -0.0213 Tc -0.0601 Tw 5.3324 0 0 5.3426 376.9986 722.0983 Tm [(U)35(F)-22(/)60(P)45(I)-16( )-11(22)66(0\260)40(C)35( )-76( S)35(h)-11(e)66(ar)30( S)-20(p)44(ee)66(d)-11( 20)66(0)-11(u)55(m)71(/)49(s )-76( S)45(h)-22(e)66(ar)40( )-11(H)35(ei)49(g)-11(h)55(t)39( 30u)55(m)]TJ 0 Tc 0 Tw -3.82 -21.602 Td (0)Tj 0 2.593 TD (1)Tj 0 2.669 TD (2)Tj T* (3)Tj 0 2.604 TD (4)Tj 0 2.658 TD (5)Tj 0 2.669 TD (6)Tj T* (7)Tj -0.0868 Tc 3.755 -20.131 Td [(D)-30(r)-36(y)-3482(3)-65(0\260)-25(C)-30(/)-82(60)-65(R)-30(H)-2050(85)-65(\260)-25(C)-30(/)-5(6)-76(0R)-30(H)-1973(8)-76(5)11(\260)-25(C)-41(/)-71(85)-65(R)-41(H)]TJ 0.0818 Tw 0 5.3324 -5.3426 0 353.0202 620.5974 Tm [(A)-30(ve)-65(r)-25(ag)-76(e S)-20(h)-11(e)-65(a)11(r)-101( )65(S)-20(t)-16(r)-36(e)-65(n)-11(g)-76(t)-16(h)-11( \()-16(K)-30(G)25(\))]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 513.18 653.1 32.34 25.62 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0 0 0 RG 0.06 w 1 j 1 J 545.52 678.78 -32.4 -25.68 re S Q q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P2 scn 514.92 672.6 2.94 2.88 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 513.48 669.66 7.26 8.34 re W n 1.001636 0 0 -0.998364 0 0 cm 1 0 0 RG 0.368 w 1 J 517.375 -676.644 -3.295 3.305 re S Q BT /TT2 1 Tf -0.0667 Tc 0 Tw 5.3324 0 0 5.3426 512.7792 664.0147 Tm [(Su)-56(m)15(i)15(t)-7(o)-56(m)80(o)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P4 scn 514.92 664.14 2.94 2.94 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 513.48 661.26 7.26 8.28 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 1 RG 0.368 w 1 J 517.375 -668.17 -3.295 3.305 re S Q BT /TT2 1 Tf -0.0213 Tc 5.3324 0 0 5.3426 512.7792 655.8084 Tm [(JM)80(-)39(A)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 0 1 0 rg 514.92 655.32 3.3 3.3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 513.48 653.82 7.26 7.26 re W n 1.001636 0 0 -0.998364 0 0 cm 0 0 0 RG 0.368 w 1 J 517.375 -659.696 -3.295 3.305 re S Q BT /TT2 1 Tf 5.3324 0 0 5.3426 512.7792 647.6605 Tm [(JM)80(-)39(B)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 0 0 0 RG 0.06 w 1 J 546.6 741.6 -201.84 -144.72 re S Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 516.72 661.98 28.38 10.62 re f Q BT /TT2 1 Tf 0.035 Tc 5.6879 0 0 5.6986 518.832 656.9142 Tm [(UF)22(-)51(1)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 518.22 669.66 28.38 12.84 re f Q BT /TT2 1 Tf 5.6879 0 0 5.6986 518.832 666.5172 Tm [(UF)22(-)51(3)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 517.86 648.36 27.96 12.84 re f Q BT /TT2 1 Tf 5.6879 0 0 5.6986 518.1335 645.8563 Tm [(UF)22(-)51(2)]TJ /TT0 1 Tf 0 Tc 9.701 0 0 9.7194 541.7045 588.5292 Tm ( )Tj 0.0015 Tc 0.0023 Tw 8.7134 0 0 8.73 330.0894 574.0956 Tm [(Fig. 11 )7(adhesion)7( strength)7( at 220)]TJ /C2_0 1 Tf 0 Tc 0 Tw 12.864 0 Td <0071>Tj /TT0 1 Tf 0.0014 Tc 0.0024 Tw 0.394 0 Td [(C under d)7(i)-1(ffer)7(e)-2(n)7(t)-1( moisture )]TJ 0.0018 Tc 0.002 Tw -7.267 -1.147 Td [(conditions)10( for th)8(ree und)8(e)-2(rfi)6(lls )]TJ /TT3 1 Tf -0.001 Tc 0.003 Tw 9.701 0 0 9.7194 312.804 547.0908 Tm [(3)-5( )6( Hyg)-5(r)-1(oscopic Swelling)-5( C)-5(h)3(a)-5(r)-1(a)-5(c)5(teriza)-5(tion a)-5(n)3(d )6(A)-5(n)3(a)-5(l)1(y)-5(s)-2(is )6( )]TJ /TT0 1 Tf 0.0008 Tc 0.1032 Tw 1.44 -1.233 Td [(Hygrosc)7(o)3(pic st)9(resses )6(arise i)9(n)-3( )]TJ 0.0005 Tc 0.1035 Tw 12.233 0 Td [(an electronic package)6( )6(whe)6(n)3( )]TJ -0.0013 Tc 0.0873 Tw -13.673 -1.15 Td [(th)-5(e po)-5(lym)9(e)-1(ric )-6(materials sw)-5(ell up)-5(on)-5( ab)-5(so)-5(rb)-5(ing)-5( m)9(o)-5(istu)-5(re )6(w)-5(h)1(ile )]TJ -0.0008 Tc 0.0928 Tw 0 -1.144 TD [(th)-5(e adj)-5(acen)-5(t)1( no)-5(npo)-5(l)1(y)-5(m)9(eric materials, su)-5(ch as silico)-5(n)-5( ch)-5(i)7(p)-5(, )6(d)-5(o)1( )]TJ -0.0014 Tc 0.2673 Tw 0 -1.15 TD [(n)-5(o)-5(t)7( exp)-5(e)-1(rien)-5(ce sw)-5(elling)-5(.)3( The d)-5(i)1(fferen)-5(tial )6(sw)-5(ellin)-5(g lead)-5(s to )]TJ -0.0009 Tc 0.4408 Tw T* [(h)-5(ygro)-5(s)-2(cop)-5(i)1(c mis)-8(m)9(a)-7(t)1(ch)-5( stresses in)-5( th)-5(e )6(p)-5(ack)-5(ag)-5(e. )6(Sw)-5(ellin)-5(g )]TJ 0.0024 Tc 0.2815 Tw 0 -1.144 TD [(m)6(easurem)12(ent)4(s)2( can )6(be)8( m)12(a)2(de by)5( t)4(h)-1(e)8( )6(use )6(of)5( m)12(a)2(ny)4( di)4(ffe)8(rent)4( )]TJ 0.0028 Tc 0.1852 Tw 0 -1.15 TD [(expe)9(ri)5(m)13(e)3(nt)5(al)5( techni)11(que)9(s [)6(2)5(0-)6(23])6(. )6(H)5(o)-1(we)9(ve)9(r,)7( t)5(h)-1(ere )6(ha)9(ve )6(be)9(en )]TJ -0.0014 Tc 0.5913 Tw T* [(n)-5(o)-5( stand)-5(a)-1(rd)-5(-based)-5( p)-5(r)2(o)-5(cedures )-6(fo)-5(r h)-5(y)1(gro)-5(s)-2(co)-5(p)-5(i)1(c )-6(sw)-5(ellin)-5(g )]TJ 0.0007 Tc 0.0853 Tw 0 -1.144 TD [(measurem)11(ents. A the)7(r)-2(m)11(o)-3(-m)11(e)-5(c)1(hanical a)7(n)-3(alyzer \(TM)8(A)-3(\), which )]TJ 0.0009 Tc 0.1751 Tw 0 -1.15 TD [(uses a)7( deform)11(ation )6(probe, )6(has bee)7(n)-3( )6(use)7(d)-3( t)9(o)-3( m)11(easure le)7(ngth )]TJ -0.0004 Tc 0.2723 Tw T* [(ch)-4(ang)-4(es in)-4( t)8(h)2(e sa)-6(m)10(p)-4(le d)-4(u)-4(e)6( to)-4( m)10(o)-4(istu)-4(re lo)-4(ss at a con)-4(s)-1(t)8(an)-4(t)-4( )]TJ -0.0016 Tc 0.0876 Tw 0 -1.144 TD [(te)-8(m)8(p)-5(eratu)-5(r)-5(e. )-6(Th)-5(e reso)-5(lu)-5(tion)-5( of)]TJ 0.0002 Tc 0.0918 Tw 12.431 0 Td [( the TM)8(A le)6(ngth m)10(easurement )]TJ -0.0016 Tc 0.2795 Tw -12.431 -1.15 Td [(is u)-5(s)4(u)-5(a)-2(lly 0)-5(.)2(00)-5(01)-5( mm)8( o)-5(r)-5( smaller. In each)-5( test, a th)-6(erm)8(o)-5(-)]TJ 0 Tc 0.014 Tw 0 -1.15 TD [(gra)6(v)-4(im)10(etric analyzer \(TGA\) is al)1(so )6(used to )6(measure t)8(h)-4(e i)8(n)2(-situ )]TJ -0.0011 Tc 0.0511 Tw 0 -1.144 TD [(w)-5(e)-1(igh)-5(t)1( lo)-5(ss )6(for an)-5( id)-5(en)-5(tical sam)9(p)-5(le w)-5(ith)-5( id)-5(entical te)-7(m)9(p)-5(eratu)-5(r)-4(e )]TJ 0.4519 Tc 0 Tw 0 -1.15 TD [(r)449(a)452(m)462(p)448( r)449(a)452(t)454(e)452( )6(u)448(s)457(e)452(d)448( i)460(n)448( T)451(M)459(A)448(.)456( I)455(n)448( t)460(h)448(i)454(s)451( c)458(o)448(m)456(b)448(i)454(n)448(e)458(d)448( )6(T)451(G)454(A)448(-)455(T)457(M)453(A)448( )]TJ -0.0012 Tc 0.3331 Tw 0 -1.144 TD [(tech)-5(n)-5(i)1(qu)-5(e, th)-5(e sam)9(p)-5(les are precond)-5(itio)-5(n)-5(e)5(d)-5( )6(u)-5(n)-5(til saturatio)-5(n )]TJ 0.0005 Tc 0.3134 Tw 0 -1.15 TD [(before)6( )6(placed into TM)8(A a)6(n)-3(d TGA c)6(h)-3(a)6(m)10(bers. During the)6( )]TJ 0.0008 Tc 0.5471 Tw T* [(measurem)11(ents, )-6(des)6(o)-3(rption )-6(t)9(a)1(kes place. The dim)11(e)1(nsional )]TJ 0.0022 Tc 0.1858 Tw 0 -1.144 TD [(chan)4(ge )6(\(ave)8(ra)8(ge st)4(rai)4(n)4(\) a)8(n)-2(d)4( wei)4(g)4(ht)4( l)4(o)-2(ss )6(\()5(a)2(vera)8(ge)8(d m)12(o)-2(i)4(s)1(t)4(u)-2(re )]TJ -0.0016 Tc 0.5135 Tw 0 -1.15 TD [(co)-5(n)-5(c)-2(en)-5(tration\) can)-5( )6(b)-6(e)-2( )6(reco)-5(rd)-6(ed)-5( sim)8(u)-5(lta)-8(n)-5(e)-2(ou)-6(sly. Fi)6(g)-6(.)2( 12)-5( )]TJ 0.001 Tc 0.2589 Tw T* [(showe)7(d)-3( t)9(h)-3(e sc)7(hem)11(a)1(tic of T)6(G)]TJ -0.0019 Tc 0.2618 Tw 12.473 0 Td [(A-)-5(TMA m)8(e)-2(t)-6(h)-6(od)-6(, and Fig. 13)-6( )]TJ -0.0045 Tc 0.2704 Tw -12.473 -1.144 Td [(s)-5(h)-8(ow)-8(ed)-8( a)-5( typ)-8(i)3(c)-5(a)-5(l)-3( p)-8(l)-3(o)-8(t)-3( for)-7( av)-8(e)-5(r)-7(ag)-8(ed)-8( s)-5(t)-3(r)-7(a)-5(in v)-8(e)-5(rs)-5(u)-8(s)1( a)-5(v)-8(er)-7(ag)-8(e)-5(d)-8( )]TJ -0.0017 Tc 0.0337 Tw T* [(m)8(o)-6(istu)-6(re con)-6(c)-2(en)-6(tration)-6( )6(b)-6(a)-2(sed)-6( )6(o)-6(n th)-6(e TG)-5(A-TMA)-5( m)8(easu)-6(r)-5(emen)-6(t )]TJ 0.002 Tc 0 Tw T* [(dat)4(a)2(. )]TJ 0 Tc 1.44 -1.245 Td ( )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm /Pattern cs /P5 scn 342.6 179.82 33 53.88 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 0.402 0.004 rg 342.48 233.88 33.24 -54.18 re 342.72 179.82 m 342.6 180 l 375.6 180 l 375.48 179.82 l 375.48 233.7 l 375.6 233.58 l 342.6 233.58 l 342.72 233.7 l f Q q 14.8992004 0 0 0.2910004 352.8455658 233.1600342 cm /Im0 Do Q q 15.1320038 0 0 0.2910004 352.6127472 232.8690338 cm /Im1 Do Q q 15.3647919 0 0 0.2910004 352.3799591 232.5780334 cm /Im2 Do Q q 15.8303986 0 0 0.2910004 351.9143372 232.2870331 cm /Im3 Do Q q 16.0632019 0 0 0.2910004 351.6815491 231.9960327 cm /Im4 Do Q q 16.2960052 0 0 0.2910004 351.448761 231.7050323 cm /Im5 Do Q q 16.5287933 0 0 0.2910004 351.2159729 231.414032 cm /Im6 Do Q q 16.7615967 0 0 0.2910004 350.9831543 231.1230316 cm /Im7 Do Q q 16.9944 0 0 0.2910004 350.7503662 230.8320313 cm /Im8 Do Q q 17.2272034 0 0 0.2910004 350.5175781 230.5410309 cm /Im9 Do Q q 17.4599915 0 0 0.2910004 350.2847443 230.2500305 cm /Im10 Do Q q 17.6927948 0 0 0.2910004 350.0519562 229.9590302 cm /Im11 Do Q q 17.9255981 0 0 0.2910004 349.8191681 229.668045 cm /Im12 Do Q q 18.1584015 0 0 0.2910004 349.5863495 229.3770294 cm /Im13 Do Q q 18.1584015 0 0 0.2910004 349.3535614 229.0860291 cm /Im14 Do Q q 18.1584015 0 0 0.2910004 349.1207733 228.7950287 cm /Im15 Do Q q 18.1584015 0 0 0.2910004 348.8879547 228.5040283 cm /Im15 Do Q q 18.3912048 0 0 0.2910004 348.4223633 228.2130432 cm /Im16 Do Q q 18.3912048 0 0 0.2910004 348.1895447 227.9220276 cm /Im17 Do Q q 18.3912048 0 0 0.2910004 347.9567566 227.6310272 cm /Im17 Do Q q 18.3912048 0 0 0.2910004 347.7239685 227.3400269 cm /Im17 Do Q q 18.3912048 0 0 0.2910004 347.4911499 227.0490265 cm /Im18 Do Q q 18.1584015 0 0 0.2910004 347.4911499 226.7580414 cm /Im19 Do Q q 17.9255981 0 0 0.2910004 347.2583618 226.467041 cm /Im20 Do Q q 17.9255981 0 0 0.2910004 347.0255585 226.1760254 cm /Im20 Do Q q 17.9255981 0 0 0.2910004 346.7927399 225.885025 cm /Im20 Do Q q 17.9255981 0 0 0.2910004 346.5599518 225.5940247 cm /Im20 Do Q q 17.9255981 0 0 0.2910004 346.3271637 225.3030396 cm /Im21 Do Q q 18.1584015 0 0 0.2910004 346.0943451 225.0120392 cm /Im22 Do Q q 17.9255981 0 0 0.2910004 346.0943451 224.7210388 cm /Im23 Do Q q 17.6927948 0 0 0.2910004 346.0943451 224.4300232 cm /Im24 Do Q q 17.4599915 0 0 0.2910004 346.0943451 224.1390228 cm /Im25 Do Q q 17.2272034 0 0 0.2910004 346.0943451 223.8480377 cm /Im26 Do Q q 16.9944 0 0 0.2910004 346.0943451 223.5570374 cm /Im27 Do Q q 16.7615967 0 0 0.2910004 346.0943451 223.266037 cm /Im28 Do Q q 16.5287933 0 0 0.2910004 346.0943451 222.9750366 cm /Im29 Do Q q 16.2960052 0 0 0.2910004 346.0943451 222.684021 cm /Im30 Do Q q 15.8303986 0 0 0.2910004 346.0943451 222.3930359 cm /Im31 Do Q q 15.5975952 0 0 0.2910004 346.0943451 222.1020355 cm /Im32 Do Q q 15.1320038 0 0 0.2910004 346.0943451 221.8110352 cm /Im33 Do Q q 14.8992004 0 0 0.2910004 346.0943451 221.5200348 cm /Im34 Do Q q 14.8992004 0 0 0.2910004 352.8455658 205.8060303 cm /Im0 Do Q q 15.1320038 0 0 0.2910004 352.6127472 205.5150299 cm /Im1 Do Q q 15.3647919 0 0 0.2910004 352.3799591 205.2240295 cm /Im2 Do Q q 15.8303986 0 0 0.2910004 351.9143372 204.9330444 cm /Im3 Do Q q 16.0632019 0 0 0.2910004 351.6815491 204.6420288 cm /Im4 Do Q q 16.2960052 0 0 0.2910004 351.448761 204.3510284 cm /Im5 Do Q q 16.5287933 0 0 0.2910004 351.2159729 204.0600281 cm /Im6 Do Q q 16.7615967 0 0 0.2910004 350.9831543 203.7690277 cm /Im7 Do Q q 16.9944 0 0 0.2910004 350.7503662 203.4780426 cm /Im8 Do Q q 17.2272034 0 0 0.2910004 350.5175781 203.1870422 cm /Im9 Do Q q 17.4599915 0 0 0.2910004 350.2847443 202.8960266 cm /Im10 Do Q q 17.6927948 0 0 0.2910004 350.0519562 202.6050262 cm /Im11 Do Q q 17.9255981 0 0 0.2910004 349.8191681 202.3140259 cm /Im12 Do Q q 18.1584015 0 0 0.2910004 349.5863495 202.0230408 cm /Im13 Do Q q 18.1584015 0 0 0.2910004 349.3535614 201.7320404 cm /Im14 Do Q q 18.1584015 0 0 0.2910004 349.1207733 201.4410248 cm /Im15 Do Q q 18.1584015 0 0 0.2910004 348.8879547 201.1500244 cm /Im15 Do Q q 18.3912048 0 0 0.2910004 348.4223633 200.859024 cm /Im16 Do Q q 18.3912048 0 0 0.2910004 348.1895447 200.5680389 cm /Im17 Do Q q 18.3912048 0 0 0.2910004 347.9567566 200.2770386 cm /Im17 Do Q q 18.3912048 0 0 0.2910004 347.7239685 199.9860382 cm /Im17 Do Q q 18.3912048 0 0 0.2910004 347.4911499 199.6950226 cm /Im18 Do Q q 18.1584015 0 0 0.2910004 347.4911499 199.4040222 cm /Im19 Do Q q 17.9255981 0 0 0.2910004 347.2583618 199.1130371 cm /Im20 Do Q q 17.9255981 0 0 0.2910004 347.0255585 198.8220367 cm /Im20 Do Q q 17.9255981 0 0 0.2910004 346.7927399 198.5310364 cm /Im20 Do Q q 17.9255981 0 0 0.2910004 346.3271637 198.240036 cm /Im21 Do Q q 18.1584015 0 0 0.2910004 346.0943451 197.9490204 cm /Im22 Do Q q 17.9255981 0 0 0.2910004 346.0943451 197.6580353 cm /Im23 Do Q q 17.6927948 0 0 0.2910004 346.0943451 197.3670349 cm /Im24 Do Q q 17.4599915 0 0 0.2910004 346.0943451 197.0760345 cm /Im25 Do Q q 17.2272034 0 0 0.2910004 346.0943451 196.7850342 cm /Im26 Do Q q 16.9944 0 0 0.2910004 346.0943451 196.4940338 cm /Im27 Do Q q 16.7615967 0 0 0.2910004 346.0943451 196.2030334 cm /Im28 Do Q q 16.5287933 0 0 0.2910004 346.0943451 195.9120331 cm /Im29 Do Q q 16.2960052 0 0 0.2910004 346.0943451 195.6210327 cm /Im30 Do Q q 15.8303986 0 0 0.2910004 346.0943451 195.3300323 cm /Im31 Do Q q 15.5975952 0 0 0.2910004 346.0943451 195.039032 cm /Im32 Do Q q 15.3647919 0 0 0.2910004 346.0943451 194.7480316 cm /Im35 Do Q q 15.1320038 0 0 0.2910004 346.0943451 194.4570313 cm /Im33 Do Q q 14.8992004 0 0 0.2910004 346.0943451 194.1660309 cm /Im34 Do Q BT /TT1 1 Tf -0.0144 Tc -0.1043 Tw 4.7531 0 0 5.3967 329.682 177.579 Tm [(M)-26(o)-34(is)-41(t)-6(u)-34(re)-34( a)-34(b)-34(s)-41(o)-46(rp)28(t)-6(io)-34(n)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 392.52 177.9 11.34 9.96 re W n q 11.8799906 0 0 10.4399874 392.3994337 177.4798018 cm /Im36 Do Q Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 392.22 188.16 11.88 -10.5 re 392.76 177.9 m 392.52 178.2 l 403.86 178.2 l 403.56 177.9 l 403.56 187.86 l 403.86 187.56 l 392.52 187.56 l 392.76 187.86 l f Q q 0.9700012 0 0 0.9700012 389.9194489 202.1978302 cm 0.004 0.004 0.004 rg 0 0 m 0.18 -0.18 l 0.06 -0.42 l -0.18 -0.24 l h 0.42 -0.36 m 0.6 -0.54 l 0.48 -0.78 l 0.24 -0.6 l h 0.84 -0.72 m 1.02 -0.9 l 0.84 -1.14 l 0.78 -1.08 l 0.66 -0.96 l h 1.26 -1.14 m 1.44 -1.32 l 1.26 -1.56 l 1.08 -1.32 l h 1.56 -1.56 m 1.68 -1.74 l 1.74 -1.86 l 1.5 -1.98 l 1.44 -1.86 l 1.38 -1.74 l h 1.8 -2.16 m 1.86 -2.34 l 1.86 -2.4 1.86 -2.4 y 1.86 -2.52 l 1.56 -2.46 l 1.62 -2.4 l 1.56 -2.22 l h 1.74 -2.82 m 1.68 -2.94 l 1.56 -3.06 l 1.38 -2.88 l 1.44 -2.76 l 1.5 -2.7 l h 1.38 -3.3 m 1.2 -3.48 l 1.02 -3.3 l 1.08 -3.24 l 1.2 -3.06 l h 0.96 -3.72 m 0.78 -3.9 l 0.6 -3.66 l 0.72 -3.54 l 0.84 -3.48 l h 0.6 -4.08 m 0.42 -4.26 l 0.24 -4.08 l 0.42 -3.84 l h 0.24 -4.5 m 0.18 -4.56 l 0.12 -4.68 l -0.12 -4.56 l 0 -4.38 l 0.06 -4.32 l h 0.06 -4.92 m 0.06 -4.98 l 0.06 -4.92 l 0.06 -5.1 l 0.06 -5.04 l 0.06 -5.16 l -0.18 -5.22 l -0.18 -4.86 l h 0.18 -5.4 m 0.24 -5.52 l 0.3 -5.64 l 0.12 -5.82 l 0 -5.64 l -0.06 -5.52 l h 0.48 -5.82 m 0.66 -6.06 l 0.42 -6.24 l 0.24 -6.06 l h 0.78 -6.24 m 1.02 -6.48 l 0.84 -6.66 l 0.6 -6.48 l h 1.2 -6.66 m 1.38 -6.84 l 1.2 -7.08 l 1.14 -7.02 l 1.02 -6.84 l h 1.56 -7.08 m 1.74 -7.26 l 1.56 -7.5 l 1.38 -7.26 l f Q q 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h)-5(y)7(g)-5(r)2(o)-5(s)-2(co)-5(p)-5(i)1(c sw)-5(elling)-5( \(C)6(HS\) )6(h)-5(a)-1(s )6(b)-5(e)-1(en)-5( )6(d)-5(e)-1(fin)-5(e)-1(d)-5( as fo)-5(llow)-5(s)4( )]TJ /C2_1 1 Tf 0 Tc 0 Tw 24.021 0 Td <0313>Tj /TT5 1 Tf ( )Tj 9.9997 0 0 10.0186 336.957 109.8924 Tm (C)Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 332.16 98.7 6.78 11.52 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /C2_0 1 Tf 9.9997 0 3.4199 10.0186 331.1952 109.8924 Tm <0045>Tj ET Q q 0.9700012 0 0 0.9700012 9 12 cm 314.64 98.7 5.52 11.52 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /C2_0 1 Tf 9.9997 0 3.4199 10.0186 314.2008 109.8924 Tm <0048>Tj ET Q q 0.9700012 0 0 0.9700012 9 12 cm 323.34 98.7 5.64 11.52 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /C2_0 1 Tf 9.9997 0 0 10.0186 322.6398 109.8924 Tm <0020>Tj ET Q BT /TT5 1 Tf 0.002 Tc 9.701 0 0 9.7194 345.978 109.7179 Tm [( )72( )-3348( )-3348( )-3348( )6( )6( )-1596( )]TJ /TT0 1 Tf 0.003 Tc 18.178 0 Td [(\(1)5(\) )]TJ 0.002 Tc 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135.1195526 614.4289093 cm 0.004 0.004 0.504 rg 0 0 m 0.12 0.06 0.18 0.06 0.3 0 c 1.68 -0.84 l 1.8 -0.9 1.8 -0.96 1.8 -1.08 c 1.8 -1.2 1.8 -1.26 1.68 -1.32 c 0.3 -2.16 l 0.18 -2.22 0.12 -2.22 0 -2.16 c -1.38 -1.32 l -1.5 -1.26 -1.56 -1.2 -1.56 -1.08 c -1.56 -0.96 -1.5 -0.9 -1.38 -0.84 c h -1.08 -1.32 m -1.08 -0.84 l 0.3 -1.68 l 0 -1.68 l 1.38 -0.84 l 1.38 -1.32 l 0 -0.48 l 0.3 -0.48 l f Q q 0.9700012 0 0 0.9700012 105.9031067 597.9000854 cm 0.004 0.004 0.504 rg 0 0 m 1.44 -1.14 l 0 -2.22 l -1.38 -1.14 l 0 0 l f* Q q 0.9700012 0 0 0.9700012 105.7285156 598.1328888 cm 0.004 0.004 0.504 rg 0 0 m 0.12 0.06 0.3 0.06 0.36 0 c 1.8 -1.14 l 1.86 -1.2 1.86 -1.26 1.86 -1.38 c 1.86 -1.44 1.86 -1.5 1.8 -1.56 c 0.36 -2.7 l 0.3 -2.76 0.12 -2.76 0 -2.7 c -1.38 -1.56 l -1.44 -1.5 -1.5 -1.44 -1.5 -1.38 c -1.5 -1.26 -1.44 -1.2 -1.38 -1.14 c h -1.02 -1.56 m -1.02 -1.14 l 0.36 -2.28 l 0 -2.28 l 1.44 -1.14 l 1.44 -1.56 l 0 -0.48 l 0.36 -0.48 l f Q BT /TT1 1 Tf 0 Tc 0 Tw 7.0638 0 0 7.0625 81.1098 592.0212 Tm (0)Tj -0.0206 Tc 0 3.684 TD [(0.)-48(0)-8(004)]TJ 0 3.61 TD [(0.)-48(0)-8(008)]TJ 0 3.552 TD [(0.)-48(0)-8(012)]TJ 0.0353 Tc 3.098 -11.652 Td [(0)56(.0)-2885(1)56(.0)-3050(2)56(.)8(0)-2820(3)56(.0)-3058(4)48(.)8(0)-2803(5)56(.0)]TJ /TT0 1 Tf 0.0316 Tc -0.1238 Tw 10.3239 0 0 10.3221 76.221 692.358 Tm [(av)7(e)53(.)22( st)-6(rai)45(n)]TJ -0.0198 Tc -0.0724 Tw 2.463 -11.266 Td [(a)-49(v)-44(e.)-35( m)-31(o)-44(i)-7(s)-48(t)-58(u)-50(re)7( co)-44(n)-50(c)1(e)7(n)-50(t)-58(r)-53(ati)-7(o)-44(n)-151(\()-2(m)-31(g)7(/)-7(c)1(m)]TJ 0 Tc 0 Tw 6.5202 0 0 6.5191 248.9004 579.3336 Tm (3)Tj 10.3239 0 0 10.3221 252.1596 576.0744 Tm (\))Tj ET q 0.9700012 0 0 0.9700012 108.3475189 598.0746918 cm 1 0.004 0.004 rg 0 0 m 146.76 84.06 l 147.36 83.04 l 0.6 -0.96 l f Q BT /TT0 1 Tf 9.701 0 0 9.7194 280.0956 564.7254 Tm ( )Tj 0.0007 Tc 0.0031 Tw 8.7134 0 0 8.73 61.2054 550.9902 Tm [(Fig. 13 A)8( ty)-7(ical )7(avergae str)6(a)-3(in/av)6(e)]TJ 0.0005 Tc 0.0033 Tw 13.8 0 Td [(rage moisture )7(concent plot from )]TJ 0.0011 Tc 0.0027 Tw -5.851 -1.147 Td [(TMA-TGA desorption )7(test )]TJ -0.0008 Tc 0.1288 Tw 9.701 0 0 9.7194 69.7608 524.1019 Tm [(Two)-5( )-6(po)-5(ten)-5(tial so)-5(urces o)-5(f)2( )-6(erro)-5(rs h)-5(a)5(v)-5(e)-1( b)-5(een )-6(id)-5(en)-5(tified )-6(and)-5( )]TJ 0.0005 Tc 0.1035 Tw -1.44 -1.144 Td [(investigate)6(d)-3( i)8(n)3( the)6( above )6(swelling m)10(easure)6(m)4(ent and a)6(n)-3(al)8(ysis)-6( )]TJ 0.0023 Tc 0.1557 Tw 0 -1.15 TD [([2)4(4-)5(2)4(6)-2(])5(:)4( on)4(e )6(was )6(due)8( t)4(o)-2( t)10(h)4(e effect)4( )6(of)5( de)8(f)5(i)4(ni)4(ng)4( t)4(h)-2(e a)8(v)-2(e)8(r)5(aged )]TJ 0.001 Tc 0.079 Tw T* [(strain and the )6(avera)7(g)-3(e)7(d)-3( m)11(o)-3(is)-6(ture conce)7(n)-3(trat)9(ion, a)7(n)3(d the ot)9(her )]TJ 0.0025 Tc 0.2334 Tw 0 -1.144 TD [(was t)4(h)-1(e)8( ef)6(fect)4( of)6( n)5(o)5(n)-1(-)6(uni)10(fo)5(r)6(m)12( )-6(m)12(o)-7(i)4(s)2(t)4(u)-1(re di)10(st)4(ri)4(but)4(i)4(o)5(n )6(d)5(u)-1(ri)10(ng)5( )]TJ 0.001 Tc 0.3489 Tw 0 -1.15 TD [(TGA-TM)8(A measurem)11(ent. Altho)]TJ -0.0013 Tc 0.3512 Tw 13.673 0 Td [(ugh)-5( a linear)-4( r)-4(e)5(gr)-4(ession is )]TJ 0.0029 Tc 0.1071 Tw -13.673 -1.15 Td [(usu)5(a)3(l)5(l)5(y)5( wel)5(l)5( a)9(c)3(hi)5(eve)9(d)-1( a)9(s)2( s)8(h)5(o)5(w)-1(n)5( i)5(n)5( Fi)11(g.)7( 1)5(3)-1(,)7( t)5(h)-1(e)9( hi)11(dde)9(n)5( er)6(r)6(o)-1(rs)8( )]TJ 0.0009 Tc 0.0011 Tw 0 -1.144 TD [(coul)9(d lead to incorrect m)11(a)]TJ 0.0004 Tc 0.0016 Tw 10.439 0 Td [(terial characte)6(r)-3(ization. )]TJ 0.0027 Tc 0.0893 Tw -8.999 -1.252 Td [(There)9( are)9( t)5(w)5(o )6(avera)9(g)-1(e)9(d)-1( m)13(e)3(t)5(hods)8( i)5(n)-1( )6(o)5(rde)9(r t)11(o)5( o)5(b)-1(t)5(a)3(i)5(n)-1( a )6(pl)5(ot)5( )]TJ -0.0023 Tc 0.1843 Tw -1.44 -1.144 Td [(sh)-6(own in Fig. 13)-6(. )6(I)-5(n t)6(h)-6(e m)8(e)-2(th)-6(od I)-5(,)2( t)6(h)-6(e av)-6(er)-5(ag)-6(ed)-6( )6(str)-5(a)-2(in an)-6(d )]TJ 0.0022 Tc 0.2517 Tw 0 -1.15 TD [(m)12(o)-2(i)4(s)1(t)4(u)-2(re co)4(nc)8(ent)4(r)-1(at)4(i)4(o)4(n ca)8(n )6(be )6(defi)10(ned)4( a)8(n)4(d cal)4(c)8(u)-2(l)4(a)2(t)4(e)2(d )6(wi)4(t)4(h)-2( )]TJ -0.0007 Tc 0.0027 Tw T* [(resp)-5(ect t)7(o)-5( )6(d)-5(r)-4(y co)-5(nd)-5(itio)-5(ns. )6(In this case, )6(w)-4(e)-1( )6(h)-5(a)-1(ve )]TJ ET q 0.9700012 0 0 0.9700012 80.0622864 379.7080383 cm 0 0 0 RG 0.382 w 1 j 1 J 0 0 m 32.52 0 l 42.96 0 m 67.68 0 l S Q BT /TT2 1 Tf 0 Tc 0 Tw 5.2164 0 0 5.2262 134.3628 368.2422 Tm (x)Tj -0.346 2.472 Td (x)Tj -6.917 -2.472 Td (x)Tj 2.131 2.472 Td (x)Tj -8.613 0.056 Td (I)Tj -0.156 -1.192 Td (ave)Tj 8.9423 0 0 8.9594 129.6486 370.4538 Tm (h)Tj 1.074 1.449 Td [(t)1554(h)]TJ -5.304 -1.449 Td (h)Tj 1.237 1.449 Td [(h)2134(t)1124(h)]TJ /TT0 1 Tf 4.413 0 Td [(\))1010(\()]TJ -5.701 0 Td [(\))1003(\()]TJ /C2_0 1 Tf 3.469 0 Td <0027>Tj -0.898 -0.669 Td <0020>Tj -2.037 0.669 Td <0010>Tj -2.623 -0.669 Td <0020>Tj 8.9423 0 3.0585 8.9594 56.724 377.4378 Tm <0048>Tj /TT0 1 Tf 0.0019 Tc 0.0001 Tw 9.701 0 0 9.7194 147.9234 380.8134 Tm [( )-1050( )6( )6( )-1596( )6( )-2346( )-3348(\(2\) )]TJ ET q 0.9700012 0 0 0.9700012 80.8188782 340.6557922 cm 0 0 0 RG 0.368 w 1 j 1 J 0 0 m 40.02 0 l 49.86 0 m 88.62 0 l S Q BT /TT0 1 Tf 0 Tc 0 Tw 4.9957 0 0 5.0052 148.5054 329.5392 Tm (0)Tj -1.98 2.547 Td (moisture)Tj -7.573 -2.547 Td (0)Tj 2.924 2.547 Td (0)Tj 8.564 0 0 8.5802 163.521 344.4384 Tm [(\))1013(\()]TJ -7.883 0 Td [(\))1013(\()]TJ /TT2 1 Tf 5.484 -1.485 Td (V)Tj 2.052 1.485 Td [(t)3853(M)]TJ -7.625 -1.485 Td (V)Tj 1.346 1.485 Td [(M)2437(t)1617(M)]TJ -5.831 -0.699 Td (C)Tj 4.9957 0 0 5.0052 64.1154 342.285 Tm (I)Tj -0.175 -1.198 Td (ave)Tj /C2_0 1 Tf 8.564 0 0 8.5802 122.1408 338.4438 Tm <0020>Tj -2.542 0.699 Td <0010>Tj -3.099 -0.699 Td <0020>Tj /TT0 1 Tf 0.0019 Tc 0.0001 Tw 9.701 0 0 9.7194 168.8172 342.285 Tm [( )6( )-1998( )6( )6( )-1848( )-3348(\(3\) )]TJ -0.0011 Tc 0.399 Tw -11.651 -3.018 Td [(w)-5(h)-5(ere, th)-5(e av)-5(erag)-5(e st)7(rain is d)-5(e)5(fin)-5(e)5(d)-5( )6(w)-5(ith)-5( )6(reg)-5(a)5(rd to)-5( th)-5(e)11( )]TJ -0.0017 Tc 0.1297 Tw T* [(referen)-6(c)-2(e po)-6(int in)-6( )6(d)-6(r)-5(y co)-6(nd)-6(it)6(io)-6(n)-6(s)4(. )]TJ /TT2 1 Tf 0 Tc 0 Tw 14.182 0 Td (M)Tj /TT0 1 Tf 0.828 0 Td (\()Tj /TT2 1 Tf 0.336 0 Td (t)Tj /TT0 1 Tf -0.0008 Tc 0.1288 Tw 0.276 0 Td [(\) is t)7(h)-5(e to)-5(tal )6(w)-5(e)-1(ight o)-5(f)2( )]TJ 0.0022 Tc 0.0418 Tw -15.622 -1.144 Td [(speci)4(m)12(e)2(n and )]TJ /TT2 1 Tf 0 Tc 0 Tw 6.101 0 Td (M)Tj /TT0 1 Tf 0.001 Tc 6.2736 0 0 6.2856 123.072 289.2067 Tm (0 )Tj -0.0012 Tc 0.0452 Tw 9.701 0 0 9.7194 127.7862 290.6617 Tm [(is th)-5(e sp)-5(ecimen)-5( w)-5(e)-1(igh)-5(t)1( in)-5( d)-5(r)-4(y cond)-5(itio)-5(n. )]TJ /TT2 1 Tf 0 Tc 0 Tw (M)Tj 6.2736 0 0 6.2856 296.799 289.2067 Tm (-)Tj /TT0 1 Tf 0.0008 Tc -38.416 -1.778 Td [(m)9(o)-9(isture)]TJ 0 Tc 9.701 0 0 9.7194 77.7924 279.4873 Tm (\()Tj /TT2 1 Tf 0.336 0 Td (t)Tj /TT0 1 Tf -0.0005 Tc 0.0925 Tw 0.276 0 Td [(\) is th)-4(e m)9(o)-4(istu)-4(re w)-4(e)-1(igh)-4(t)1( at ti)-5(m)9(e)-1( )]TJ /TT2 1 Tf 0 Tc 0 Tw 13.331 0 Td (t)Tj /TT0 1 Tf 0.0026 Tc 0.0894 Tw 0.276 0 Td (, and )Tj /TT2 1 Tf 0 Tc 0 Tw (V)Tj /TT0 1 Tf 6.2736 0 0 6.2856 244.8264 278.0323 Tm (0)Tj -0.001 Tc 0.093 Tw 9.701 0 0 9.7194 247.9692 279.4873 Tm [( is th)-5(e i)7(n)-5(itial)-5( )]TJ 0.0013 Tc 0.0007 Tw -19.81 -1.15 Td [(specim)11(e)1(n vol)9(ume, i.e., )]TJ ET q 0.9700012 0 0 0.9700012 104.2153168 258.3608856 cm 0 0 0 RG 0.409 w 1 j 1 J 0 0 m 0 -14.04 l S Q BT /TT0 1 Tf 0 Tc 0 Tw 5.574 0 0 5.5847 105.9612 244.2763 Tm (dry)Tj -7.81 0.438 Td (0)Tj /TT2 1 Tf 6.693 0 Td [(z)1987(y)2073(x)]TJ 9.5558 0 0 9.5739 94.4958 249.1068 Tm [(h)1456(h)1420(h)2620(V)]TJ /C2_0 1 Tf -2.668 0 Td <0020>Tj /TT0 1 Tf 0.0019 Tc 0.0001 Tw 9.701 0 0 9.7194 114.8076 250.8529 Tm [( )-864( )-3348( )6( )6( )6( )6( )6( )6( )-2196( )-3348(\(4\) )]TJ -0.0029 Tc 0.2928 Tw -6.083 -2.515 Td [(in)-7( w)-7(h)-7(ich)-7(,)]TJ /TT2 1 Tf 0.2899 Tc 0 Tw 4.02 0 Td ( h)Tj 0 Tc 6.2736 0 0 6.2856 104.9136 224.9539 Tm (x)Tj /TT0 1 Tf -0.004 Tc 9.701 0 0 9.7194 107.7072 226.4089 Tm (, )Tj /TT2 1 Tf 0 Tc 0.786 0 Td (h)Tj 0.0015 Tc 6.2736 0 0 6.2856 120.2202 224.9539 Tm (y,)Tj 0 Tc 9.701 0 0 9.7194 124.5852 226.4089 Tm ( )Tj /TT0 1 Tf -0.0059 Tc 0.546 0 Td [(an)-10(d)]TJ /TT2 1 Tf 0.2959 Tc 1.44 0 Td ( h)Tj 0 Tc 6.2736 0 0 6.2856 154.0344 224.9539 Tm (z)Tj 9.701 0 0 9.7194 156.4206 226.4089 Tm ( )Tj /TT0 1 Tf -0.0003 Tc 0.2962 Tw 0.546 0 Td [(are)6( lengths)5( of the plate i)8(n)-4( t)8(h)-4(ree )]TJ -0.0006 Tc 0.0746 Tw -10.919 -1.15 Td [(d)-4(i)1(rection)-4(s)-1( )6(respectiv)-4(ely. Th)-4(e su)-4(p)-4(e)5(rscrip)-4(t )]TJ /TT2 1 Tf 0 Tc 0 Tw 16.264 0 Td (I)Tj /TT0 1 Tf 0.0013 Tc 0.0727 Tw 0.33 0 Td [( de)7(note t)9(h)-3(e a)7(v)-3(era)7(g)-3(ed)9( )]TJ 0.0011 Tc 0.5708 Tw -16.594 -1.15 Td [(method )6(with respect to )6(dr)]TJ 0.0001 Tc 0.5718 Tw 12.515 0 Td [(y c)6(o)-4(nditions. The a)6(v)-4(e)6(r)-3(a)6(g)-4(ed )]TJ -0.0017 Tc -0.0023 Tw -12.515 -1.144 Td [(co)-6(efficien)-6(t o)-6(f)-5( hyg)-6(ro)-6(scop)-6(ic )-6(swellin)-6(g)-6( )-6(can)-6( )-6(th)-6(en)-6( b)-6(e)-2( o)-6(b)-6(tain)-6(e)4(d)-6( b)-6(y)6( )]TJ /TT2 1 Tf 0 Tc 0 Tw 5.072 0 0 5.0816 99.9666 178.2774 Tm (I)Tj -0.184 -1.203 Td (ave)Tj -2.502 1.203 Td (I)Tj -0.23 -1.203 Td (ave)Tj -4.475 1.203 Td (I)Tj -0.161 -1.203 Td (ave)Tj 8.695 0 0 8.7116 92.7498 174.3781 Tm (C)Tj /C2_0 1 Tf 8.695 0 2.9739 8.7116 79.5384 174.3781 Tm [<0045>3172<0048>]TJ 8.695 0 0 8.7116 72.2634 174.3781 Tm <0020>Tj /TT0 1 Tf 0.0026 Tc -0.0006 Tw 9.701 0 0 9.7194 107.7072 175.8331 Tm [( )-1596( )-3348( )-3348( )6( )6( )-2100( )-3348(\(5)5(\) )]TJ 0.0035 Tc 0 Tw -5.351 -1.617 Td (or )Tj ET q 0.9700012 0 0 0.9700012 80.9934845 138.0613556 cm 0 0 0 RG 0.377 w 1 j 1 J 0 0 m 16.26 0 l S Q BT /TT2 1 Tf 0 Tc 5.1361 0 0 5.1459 88.734 132.474 Tm (I)Tj -0.17 -1.199 Td (ave)Tj 0.023 3.811 Td (I)Tj -0.159 -1.187 Td (ave)Tj -4.453 0 Td (I)Tj -0.227 -1.199 Td (ave)Tj 8.805 0 0 8.8219 81.3426 128.5165 Tm (C)Tj /C2_0 1 Tf 8.805 0 3.0114 8.8219 81.9246 141.9606 Tm <0048>Tj -2.566 -0.693 Td <0045>Tj 8.805 0 0 8.8219 73.8348 135.8497 Tm <0020>Tj /TT0 1 Tf 0.0019 Tc 0.0001 Tw 9.701 0 0 9.7194 98.919 139.6326 Tm [( )-2502(. )-3096( )-3348( )-3348( )6( )6( )-2100(\(6\) )]TJ -0.0014 Tc 0.5253 Tw -3.006 -3.114 Td [(A)-5(ltern)-5(ativ)-5(ely, in)-5( m)9(e)-1(th)-5(o)-5(d)1( )6(II, th)-5(e av)-5(erag)-5(e strai)7(n)-5( and)-5( )]TJ -0.0005 Tc 0.8664 Tw -1.44 -1.15 Td [(m)9(o)-4(istu)-4(re co)-4(ncen)-4(tration)-4( can)-4( b)-4(e)-1( )6(d)-4(e)-1(fi)7(ned)-4( as fo)-4(llow)-4(s)-1(, )]TJ 0.0005 Tc 0 Tw 0 -1.144 TD (respectively, )Tj ET q 0.9700012 0 0 0.9700012 337.0155792 721.5752411 cm 0 0 0 RG 0.382 w 1 j 1 J 0 0 m 36.18 0 l S Q BT /TT2 1 Tf 0 Tc 5.2164 0 0 5.2262 353.1366 710.0508 Tm (sat)Tj -2.064 2.528 Td (sat)Tj -4.318 0.011 Td (II)Tj -0.156 -1.192 Td (ave)Tj 8.9423 0 0 8.9594 348.4224 712.2624 Tm (h)Tj 1.933 1.481 Td [(t)1124(h)2791(h)]TJ /TT0 1 Tf 0.338 0 Td [(\))1003(\()]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 353.28 733.56 5.1 11.04 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /C2_0 1 Tf 8.9423 0 0 8.9594 351.6816 725.5319 Tm <0010>Tj ET Q BT /C2_0 1 Tf 8.9423 0 0 8.9594 329.7984 719.3047 Tm <0020>Tj 8.9423 0 3.0585 8.9594 313.7352 719.3047 Tm <0048>Tj /TT0 1 Tf 0.0019 Tc 0.0001 Tw 9.701 0 0 9.7194 374.0304 722.6802 Tm [( )-636( )-3348( )-3348( )6( )6( )-1848( )6( )-2346(\(7\) )]TJ ET q 0.9700012 0 0 0.9700012 336.1425781 690.5545959 cm 0 0 0 RG 0.343 w 1 j 1 J 0 0 m 41.22 0 l S Q BT /TT0 1 Tf 0 Tc 0 Tw 4.589 0 0 4.5978 356.6286 680.3688 Tm (0)Tj 7.867 0 0 7.8818 373.041 693.9876 Tm [(\))1028(\()]TJ /TT2 1 Tf -2.745 -1.477 Td (V)Tj 2.39 1.477 Td [(t)1647(M)3711(M)]TJ -7.176 -0.694 Td (C)Tj 4.589 0 0 4.5978 345.0468 692.0088 Tm (sat)Tj -5.327 0.013 Td (II)Tj -0.178 -1.202 Td (ave)Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 355.14 701.34 4.44 9.66 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /C2_0 1 Tf 7.867 0 0 7.8818 353.4858 693.9875 Tm <0010>Tj ET Q BT /C2_0 1 Tf 7.867 0 0 7.8818 329.5656 688.5168 Tm <0020>Tj /TT0 1 Tf 0.0019 Tc 0.0001 Tw 9.701 0 0 9.7194 377.8716 693.231 Tm [( )-240( )-3348( )-3348( )6( )6( )6( )6( )6( )6( )-2448(\(8\) )]TJ -0.001 Tc 0.207 Tw -6.707 -3.018 Td [(in)-5( wh)-5(ich, th)-5(e )6(av)-5(erag)-5(e st)7(rain is d)-5(e)5(fin)-5(e)5(d)-5( and)-5( calcu)-5(lated )6(w)-5(ith)-5( )]TJ -0.0005 Tc 0.0625 Tw 0 -1.15 TD [(reg)-4(a)5(rd)-4( t)7(o)-4( th)-4(e referen)-4(ce po)-4(in)-4(t )6(in)-4( fu)-4(lly satu)-4(rat)7(e)-1(d)-4( cond)-4(itio)-4(n)-4(s)5(. )]TJ /TT2 1 Tf 0 Tc 0 Tw 23.835 0 Td (h)Tj /TT0 1 Tf 0.001 Tc 6.2736 0 0 6.2856 548.9213 651.2688 Tm (sat)Tj 0 Tc 9.701 0 0 9.7194 555.8471 652.7238 Tm ( )Tj 0.003 Tc -25.053 -1.144 Td (and )Tj /TT2 1 Tf 0 Tc 1.758 0 Td (M)Tj /TT0 1 Tf 0.001 Tc 6.2736 0 0 6.2856 337.9464 640.1526 Tm (sat)Tj -0.001 Tc 0.063 Tw 9.701 0 0 9.7194 344.9304 641.6076 Tm [( are the th)-5(ickn)-5(ess and)-5( th)-5(e m)9(o)-5(istu)-5(re )-6(m)9(a)-1(ss o)-5(f)-4( sp)-5(eci)7(men)-11( )]TJ -0.0003 Tc 0.0023 Tw -3.312 -1.15 Td [(at ti)-4(m)10(e zero)-4( wh)-4(en th)-4(e )6(sp)-4(ecimen)-4( is )6(fu)-4(lly saturated)-4(.)4( )]TJ 0.0004 Tc 0.6615 Tw 1.44 -1.245 Td [(Sim)10(ilarily, the ave)6(r)-3(a)6(g)-3(ed )6(co)]TJ 0.0007 Tc 0.6552 Tw [(efficient of )-6(hy)9(grosc)7(o)-3(pic)7( )]TJ -0.0008 Tc 0.0028 Tw -1.44 -1.15 Td [(sw)-5(ellin)-5(g can be ob)-5(tain)-5(ed b)-5(y)1( )]TJ ET q 0.9700012 0 0 0.9700012 341.6133881 583.1754761 cm 0 0 0 RG 0.429 w 1 j 1 J 0 0 m 18.6 0 l S Q BT /TT2 1 Tf 0 Tc 0 Tw 5.8638 0 0 5.875 350.5176 576.7728 Tm (II)Tj -0.179 -1.199 Td (ave)Tj 0.02 3.824 Td (II)Tj -0.159 -1.199 Td (ave)Tj -4.456 0 Td (II)Tj -0.218 -1.199 Td (ave)Tj 10.0525 0 0 10.0716 342.0204 572.2333 Tm (C)Tj /C2_0 1 Tf 10.0525 0 3.4381 10.0716 342.7188 587.6562 Tm <0048>Tj -2.571 -0.693 Td <0045>Tj 10.0525 0 0 10.0716 333.465 580.6722 Tm <0020>Tj /TT0 1 Tf 0.0026 Tc -0.0006 Tw 9.701 0 0 9.7194 362.1576 582.7674 Tm [( )-1860( )-3348( )-3348( )6( )6( )-2100( )-3348(\(9)5(\) )]TJ -0.0015 Tc 0.2194 Tw -3.648 -3.12 Td [(N)-5(o)1(w)-5(,)3( th)-5(e effect o)-5(f)2( non)-5(-)2(un)-5(ifo)-5(r)-4(m)8( )-6(m)8(o)-5(istu)-5(re )6(d)-5(istribu)-5(tio)-5(n is )]TJ 0.0002 Tc 0.5297 Tw -1.44 -1.15 Td [(considere)6(d)-4(. Assum)10(e )]TJ 0.0023 Tc 0.5336 Tw 9.365 0 Td [(t)4(h)-2(at)4( t)4(h)-2(e t)4(r)5(ue)8( hy)10(gr)5(osc)8(opi)4(c )6(swel)4(l)10(i)4(ng )]TJ 0 Tc 0.032 Tw -9.365 -1.222 Td (coefficient is )Tj /C2_0 1 Tf 0 Tw <0045>Tj /TT0 1 Tf 0.0004 Tc 0.0316 Tw 6.053 0 Td [(, and t)8(h)-4(en the )6(ratio R)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 454.3464 533.763 Tm (I )Tj -0.0001 Tc 0.0321 Tw 9.701 0 0 9.7194 458.013 529.398 Tm (and R)Tj 0.001 Tc 0 Tw 6.2736 0 0 6.2856 481.2348 533.763 Tm (II)Tj 0.002 Tc 0.024 Tw 9.701 0 0 9.7194 485.4252 529.398 Tm [( can be defi)10(ned)10( a)8(s)7( )]TJ 0.0025 Tc 0 Tw -17.794 -1.144 Td [(bel)4(o)5(w, )]TJ ET q 0.9273071 0 0 -1.0146637 333.6399994 495.0032349 cm 0 0 0 RG 0.416 w 1 j 1 J 0 0 m 16.569 0 l S Q BT /C2_0 1 Tf 0 Tc 10.1772 0 3.4807 10.1965 338.412 484.293 Tm <0045>Tj -0.881 1.438 Td <0045>Tj /TT2 1 Tf 5.9366 0 0 5.9479 341.322 503.5572 Tm (I)Tj -0.206 -1.203 Td (ave)Tj -3.235 0.098 Td (I)Tj 10.1772 0 0 10.1965 314.4918 492.3829 Tm (R)Tj /C2_0 1 Tf 1.167 0 Td <0020>Tj /TT0 1 Tf 3.3496 Tc 9.701 0 0 9.7194 350.7504 494.0706 Tm [( )312( \()3347(1)3352(0)3346(\))3347( )]TJ ET q 0.7942047 0 0 -1.1847076 330.2645111 464.4457245 cm 0 0 0 RG 0.353 w 1 j 1 J 0 0 m 14.363 0 l S Q BT /C2_0 1 Tf 0 Tc 10.03 0 3.4304 10.049 333.8142 453.8544 Tm <0045>Tj -0.801 1.477 Td <0045>Tj /TT2 1 Tf 5.8509 0 0 5.8618 335.9676 473.1768 Tm (II)Tj -0.149 -1.191 Td (ave)Tj -2.775 0.04 Td (II)Tj 10.03 0 0 10.049 314.0262 461.9442 Tm (R)Tj /C2_0 1 Tf 1.05 0 Td <0020>Tj /TT0 1 Tf 3.3496 Tc 9.701 0 0 9.7194 343.2426 463.923 Tm [( )3138( \()3347(1)3352(1)3346(\))3347( )]TJ -0.001 Tc 0.7949 Tw -1.698 -3.012 Td [(Th)-5(ree-d)-5(i)1(m)9(e)-1(n)-5(s)-2(i)-5(o)-5(n)-5(a)-1(l m)9(o)-5(istu)-5(re d)-5(i)1(ffu)-5(s)-2(i)7(o)-5(n so)-5(lu)-5(tion)-5( )6(was )]TJ 0.0028 Tc 0.1312 Tw -1.44 -1.15 Td [(em)13(pl)5(oy)5(ed t)5(o)-1( c)9(onsi)11(d)-1(er t)11(h)-1(e n)5(o)5(n-)6(u)5(n)-1(i)5(fo)5(rm)13( )-6(m)13(o)-1(ist)5(u)-1(re )6(di)5(st)5(ri)5(b)5(u)-1(t)5(i)5(o)-1(n)5(.)]TJ /TT2 1 Tf 0 Tc 0 Tw 25.053 0 Td ( )Tj /TT0 1 Tf 0.0009 Tc 0.235 Tw -25.053 -1.15 Td [(The a)7(n)-3(alytical expressi)9(ons)6( of )]TJ -0.0042 Tc 0.2402 Tw 12.887 0 Td [(bo)-8(th)-8( av)-8(er)-7(a)-4(g)-2(e)-4(d)-8( me)-4(th)-8(o)-8(d)-8(s)-5( )6(we)-4(r)-7(e)2( )]TJ -0.0016 Tc 0.0036 Tw -12.887 -1.144 Td [(o)-5(b)-6(tain)-5(ed)-5( as fo)-5(l)6(lo)-5(w)-5(s, )]TJ ET q 0.9273071 0 0 -1.0146637 345.8034821 379.3599854 cm 0 0 0 RG 0.416 w 1 j 1 J 0 0 m 15.315 0 l -18.891 42.561 m -8.472 42.561 l S Q q 0.9273071 0 0 -1.0146637 354.7084198 350.8418427 cm 0 0 0 RG 0.208 w 1 j 1 J 0 0 m 26.674 0 l 50.147 0 m 60.315 0 l S Q BT /C2_0 1 Tf 1.1108 Tc 0 Tw 7.6992 0 0 11.4574 465.4044 354.1578 Tm <000B000C>Tj 2.3581 Tc -0.378 -1.062 Td <000B000C>Tj ET q 0.9273071 0 0 -1.0146637 461.8550262 350.8418427 cm 0 0 0 RG 0.208 w 1 j 1 J 0 0 m 25.607 0 l 49.08 0 m 59.248 0 l -120.002 28.967 m -89.374 28.967 l -65.901 28.967 m -55.796 28.967 l -0.502 28.967 m 30.126 28.967 l 53.599 28.967 m 63.704 28.967 l S Q q 0.9273071 0 0 -1.0146637 339.2854462 336.174881 cm 0 0 0 RG 0.416 w 1 j 1 J 0 0 m 240.004 0 l S Q BT /C2_0 1 Tf 6.5546 Tc 15.2477 0 0 15.2765 339.9252 316.5024 Tm <00A600A6>Tj 6.3141 Tc 0.271 1.928 Td <00A600A6>Tj 0 Tc 5.9296 0 0 5.9407 342.777 329.2482 Tm <0066>Tj 0.108 -3.4 Td <0020>Tj 18.58 3.4 Td <0066>Tj 0.108 -3.4 Td <0020>Tj -18.099 8.347 Td <0066>Tj 0.108 -3.39 Td <0020>Tj 17.962 3.39 Td <0066>Tj 0.108 -3.39 Td <0020>Tj 8.4708 0 0 8.4869 558.2915 317.6664 Tm <00BB>Tj 0 -0.946 TD <00BC>Tj 0 1.906 TD <00BA>Tj -6.603 -0.96 Td <00AB>Tj 0 -0.946 TD <00AC>Tj 0 1.906 TD <00AA>Tj 3.793 -0.768 Td [<000E>3963<0010>]TJ -7.09 -0.864 Td <000E>Tj -3.181 -0.144 Td <00BB>Tj 0 0.96 TD <00BB>Tj 0 -1.234 TD <00BC>Tj 0 2.201 TD <00BA>Tj -6.603 -1.927 Td <00AB>Tj 0 0.96 TD <00AB>Tj 0 -1.234 TD <00AC>Tj 0 2.201 TD <00AA>Tj 3.793 -0.919 Td [<000E>3963<0010>]TJ -7.09 -0.864 Td <000E>Tj 22.494 4.135 Td <00BB>Tj 0 -0.939 TD <00BC>Tj 0 1.906 TD <00BA>Tj -6.61 -0.967 Td <00AB>Tj 0 -0.939 TD <00AC>Tj 0 1.906 TD <00AA>Tj 3.8 -0.775 Td [<000E>3963<0010>]TJ -6.603 -0.795 Td <000E>Tj -0.783 1.44 Td <0010>Tj -2.343 -1.653 Td <00BB>Tj 0 0.967 TD <00BB>Tj 0 -1.241 TD <00BC>Tj 0 2.201 TD <00BA>Tj -6.603 -1.927 Td <00AB>Tj 0 0.967 TD <00AB>Tj 0 -1.241 TD <00AC>Tj 0 2.201 TD <00AA>Tj 3.793 -0.919 Td [<000E>3963<0010>]TJ -6.658 -0.795 Td <000E>Tj -0.728 1.44 Td <0010>Tj 0.124 2.716 Td [<0020>3310<0020>]TJ /TT0 1 Tf 18.1881 Tc 5.9296 0 0 5.9407 346.6764 309.0528 Tm (00)Tj 0 Tc 35.089 2.361 Td [(2)1972(2)]TJ -6.409 -1.225 Td (2)Tj -5.202 0 Td (2)Tj -7.077 1.225 Td [(2)1972(2)]TJ -6.409 -1.225 Td (2)Tj -5.202 0 Td (2)Tj 17.5599 Tc -4.083 3.821 Td (00)Tj 0 Tc 33.676 2.361 Td [(2)1972(2)]TJ -6.399 -1.234 Td (2)Tj -11.503 1.234 Td [(2)1972(2)]TJ -6.409 -1.234 Td (2)Tj -12.191 -0.323 Td (2)Tj 8.4708 0 0 8.4869 543.1595 319.296 Tm [(\))738(1)2252(2)837(\()4016(exp)]TJ -7.091 -0.864 Td [(\))738(1)2259(2)837(\()]TJ -1.106 1.502 Td (1)Tj -4.885 -0.638 Td [(\))738(1)2252(2)837(\()4016(exp)]TJ -7.097 -0.864 Td [(\))732(1)2259(2)837(\()]TJ -1.099 1.502 Td (1)Tj 20.784 2.825 Td [(\))732(1)2259(2)837(\()4009(exp)]TJ -7.001 -0.795 Td [(1)2259(2)]TJ -0.797 1.44 Td (1)Tj -4.734 -0.645 Td [(\))732(1)2259(2)837(\()4009(exp)]TJ -6.658 -0.795 Td [(\))738(1)2252(2)837(\()]TJ -0.845 1.44 Td [(\))738(1)1352(\()]TJ -4.48 -3.168 Td (4)Tj /TT2 1 Tf 18.1881 Tc 5.9296 0 0 5.9407 340.158 309.0528 Tm (nn)Tj 0 Tc 29.71 0.137 Td (z)Tj -18.629 0 Td (y)Tj 17.5698 Tc -10.384 4.82 Td (nn)Tj 0 Tc 28.317 0.127 Td (z)Tj -5.653 3.204 Td (n)Tj -12.19 -3.204 Td (y)Tj -5.781 3.145 Td (n)Tj -3.318 4.8 Td (I)Tj -0.196 -0.999 Td (ave)Tj -2.945 0.088 Td (I)Tj 8.4708 0 0 8.4869 528.8423 319.296 Tm (n)Tj -1.931 -0.864 Td (h)Tj -0.007 1.502 Td (Dt)Tj -5.153 -1.502 Td (n)Tj -5.991 0.864 Td (n)Tj -1.937 -0.864 Td (h)Tj 0 1.502 TD (Dt)Tj -5.153 -1.502 Td (n)Tj 19.684 4.327 Td (n)Tj -1.937 -0.857 Td (h)Tj -0.007 1.502 Td (Dt)Tj -4.658 -1.44 Td (n)Tj -5.929 0.795 Td (n)Tj -1.937 -0.857 Td (h)Tj -0.007 1.502 Td (Dt)Tj -4.72 -1.44 Td (n)Tj -3.978 4.156 Td (R)Tj /C2_0 1 Tf 8.4708 0 2.897 8.4869 549.0959 319.296 Tm <0053>Tj -13.082 0 Td <0053>Tj 11.403 3.463 Td <0053>Tj -12.532 0 Td <0053>Tj -12.647 -1.09 Td <0053>Tj 1.347 3.655 Td <0045>Tj -0.944 1.433 Td <0045>Tj /TT0 1 Tf 3.3496 Tc 9.701 0 0 9.7194 312.804 296.7726 Tm [( \()3347(1)3352(2)3346(\))3347( )]TJ ET q 0.7954102 0 0 -1.1829224 340.0425415 281.5264893 cm 0 0 0 RG 0.32 w 1 j 1 J 0 0 m 11.927 0 l S Q q 0.7954102 0 0 -1.1829224 338.5288849 255.8014679 cm 0 0 0 RG 0.16 w 1 j 1 J 0 0 m 9.805 0 l 19.903 0 m 40.756 0 l 59.122 0 m 66.951 0 l S Q BT /C2_0 1 Tf 1.1438 Tc 5.0839 0 0 10.2902 428.622 258.8263 Tm <000B000C>Tj 2.4145 Tc -0.378 -1.069 Td <000B000C>Tj ET q 0.7954102 0 0 -1.1829224 426.2952271 255.8014679 cm 0 0 0 RG 0.16 w 1 j 1 J 0 0 m 20.048 0 l 38.414 0 m 46.243 0 l S Q BT /C2_0 1 Tf 5.0839 0 0 10.2902 497.9963 246.9534 Tm <000B000C>Tj ET q 0.7954102 0 0 -1.1829224 497.5902252 255.8014679 cm 0 0 0 RG 0.16 w 1 j 1 J 0 0 m 23.195 0 l 41.561 0 m 49.39 0 l -204.217 22.681 m -193.827 22.681 l -183.803 22.681 m -159.73 22.681 l -141.364 22.681 m -133.535 22.681 l -90.145 22.681 m -66.146 22.681 l -47.78 22.681 m -39.951 22.681 l 3.439 22.681 m 27.512 22.681 l 45.804 22.681 m 53.634 22.681 l S Q q 0.7954102 0 0 -1.1829224 327.762207 242.4155273 cm 0 0 0 RG 0.32 w 1 j 1 J 0 0 m 301.826 0 l S Q BT /C2_0 1 Tf 0 Tc 13.6946 0 0 13.7205 493.1658 224.5465 Tm <00A6>Tj 4.7227 Tc -10.871 0 Td <00A600A6>Tj 9.7461 Tc 0.212 1.955 Td <00A600A6>Tj 0 Tc 5.253 0 Td <00A6>Tj 5.3255 0 0 5.3356 495.0863 236.0118 Tm <0066>Tj 0.077 -3.403 Td <0020>Tj -28.042 3.403 Td <0066>Tj 0.077 -3.403 Td <0020>Tj 13.901 3.403 Td <0066>Tj 0.087 -3.403 Td <0020>Tj -13.508 8.432 Td <0066>Tj 0.077 -3.403 Td <0020>Tj 26.818 3.403 Td <0066>Tj 0.077 -3.403 Td <0020>Tj -13.464 3.403 Td <0066>Tj 0.077 -3.403 Td <0020>Tj 7.6081 0 0 7.6224 565.5084 219.5995 Tm <00BB>Tj 0 0.802 TD <00BB>Tj 0 -0.977 TD <00BC>Tj 0 1.939 TD <00BA>Tj -4.949 -1.764 Td <00AB>Tj 0 0.802 TD <00AB>Tj 0 -0.977 TD <00AC>Tj 0 1.939 TD <00AA>Tj 2.838 -0.786 Td [<000E>3111<0010>]TJ -5.309 -0.87 Td <000E>Tj -2.364 -0.099 Td <00BB>Tj 0 0.794 TD <00BB>Tj 0 -0.97 TD <00BC>Tj 0 1.932 TD <00BA>Tj -4.949 -1.756 Td <00AB>Tj 0 0.794 TD <00AB>Tj 0 -0.97 TD <00AC>Tj 0 1.932 TD <00AA>Tj 2.838 -0.786 Td [<000E>3111<0010>]TJ -5.309 -0.87 Td <000E>Tj -2.364 -0.122 Td <00BB>Tj 0 0.962 TD <00BB>Tj 0 -1.268 TD <00BC>Tj 0 2.229 TD <00BA>Tj -4.957 -1.924 Td <00AB>Tj 0 0.962 TD <00AB>Tj 0 -1.268 TD <00AC>Tj 0 2.229 TD <00AA>Tj 2.846 -0.932 Td [<000E>3111<0010>]TJ -5.309 -0.87 Td <000E>Tj -3.825 0.87 Td <0010>Tj 30.37 2.543 Td <00BB>Tj 0 0.802 TD <00BB>Tj 0 -0.977 TD <00BC>Tj 0 1.939 TD <00BA>Tj -4.949 -1.764 Td <00AB>Tj 0 0.802 TD <00AB>Tj 0 -0.977 TD <00AC>Tj 0 1.939 TD <00AA>Tj 2.838 -0.786 Td [<000E>3111<0010>]TJ -5.271 -0.909 Td <000E>Tj -2.318 -0.069 Td <00BB>Tj 0 0.794 TD <00BB>Tj 0 -0.97 TD <00BC>Tj 0 1.932 TD <00BA>Tj -4.957 -1.756 Td <00AB>Tj 0 0.794 TD <00AB>Tj 0 -0.97 TD <00AC>Tj 0 1.932 TD <00AA>Tj 2.846 -0.779 Td [<000E>3111<0010>]TJ -4.934 -0.802 Td <000E>Tj -0.597 1.443 Td <0010>Tj -1.729 -1.634 Td <00BB>Tj 0 0.962 TD <00BB>Tj 0 -1.268 TD <00BC>Tj 0 2.229 TD <00BA>Tj -4.949 -1.924 Td <00AB>Tj 0 0.962 TD <00AB>Tj 0 -1.268 TD <00AC>Tj 0 2.229 TD <00AA>Tj 2.838 -0.932 Td [<000E>3111<0010>]TJ -4.98 -0.802 Td <000E>Tj -0.543 1.443 Td <0010>Tj -3.221 -0.641 Td <0010>Tj 2.173 3.375 Td [<0020>2522<0020>]TJ /TT0 1 Tf 5.3255 0 0 5.3356 497.7053 217.8534 Tm (0)Tj 12.284 2.367 Td [(2)1604(2)]TJ -4.809 -1.243 Td [(2)4380(2)]TJ 13.4775 Tc -35.43 -1.123 Td (00)Tj 0 Tc 26.25 2.367 Td [(2)1593(2)]TJ -4.809 -1.243 Td [(2)4369(2)]TJ -9.169 1.243 Td [(2)1604(2)]TJ -4.809 -1.243 Td [(2)4380(2)]TJ -9.136 0 Td (6)Tj 26.395 Tc 2.219 3.905 Td (00)Tj 0 Tc 39.048 2.367 Td [(2)1593(2)]TJ -4.798 -1.254 Td [(2)4380(2)]TJ -20.742 -1.113 Td (0)Tj 11.682 2.367 Td [(2)1604(2)]TJ -4.809 -1.254 Td (2)Tj -8.579 1.254 Td [(2)1593(2)]TJ -4.809 -1.254 Td (2)Tj -8.623 0 Td (4)Tj 7.6081 0 0 7.6224 555.3234 227.0491 Tm 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Whe)7(n)]TJ 0.0005 Tc 0.1395 Tw 13.961 0 Td [( the)6( ave)6(r)4(aged m)10(ethod II is)6( )]TJ -0.0012 Tc 0.2971 Tw -13.961 -1.15 Td [(u)-5(s)-2(ed)-5(, t)7(h)-5(e )6(d)-5(a)-1(ta shou)-5(ld b)-5(e)5( co)-5(llected)-5( after )6(a lon)-5(g)1( )6(p)-5(e)-1(ri)7(o)-5(d)1( of )]TJ 0.0025 Tc 0.2934 Tw 0 -1.144 TD [(des)8(o)-1(r)6(p)-1(t)4(i)4(o)-1(n)5(.)1( T)7(h)5(ese t)4(w)-1(o m)12(e)2(t)4(hods)8( gi)10(ve t)4(h)-1(e )6(up)5(pe)8(r an)5(d l)4(o)5(wer)6( )]TJ -0.0013 Tc 0.0753 Tw 0 -1.15 TD [(b)-5(oun)-5(d estim)9(at)-5(es of th)]TJ 0.0004 Tc 0.0736 Tw 8.795 0 Td [(e)6( coe)6(f)-3(ficient of )6(hygroscopic s)6(w)-3(elling )6(of)9( )]TJ -0.0005 Tc 0.5244 Tw -8.795 -1.15 Td [(materials. It is o)-4(b)2(v)-4(i)1(ou)-4(s t)7(h)-4(at th)-4(e non)-4(-u)-4(n)-4(i)7(form)9( )-6(m)9(o)-4(is)-7(tu)-4(re )]TJ -0.0011 Tc 0.0091 Tw 0 -1.144 TD [(d)-5(i)1(stribu)-5(tio)-5(n during)-5( d)-5(e)-1(sorp)-5(tion co)-5(u)-5(l)7(d)-5( in)-5(trod)-5(uce th)-5(e errors in)-5( t)7(h)-5(e )]TJ 0.0022 Tc 0.1678 Tw 0 -1.15 TD [(coef)5(fi)4(ci)4(ent)4( )-6(o)4(f)-1( hy)4(g)4(r)-1(osc)8(o)4(pi)4(c )-6(s)7(w)-2(el)4(l)4(i)4(ng. A ge)8(neral)4( pr)5(oce)8(d)-2(u)4(r)5(e )-6(i)4(n)-8( )]TJ 0.0007 Tc 0.1333 Tw T* [(determ)11(ining t)9(h)3(e accurate coeffi)]TJ 0.0002 Tc 0.1278 Tw 12.857 0 Td [(cient of hygroscopic )-6(swelling )]TJ 0.0022 Tc -0.0002 Tw -12.857 -1.144 Td [(has )6(bee)8(n)-2( )6(be s)7(u)4(gge)8(st)4(ed as)7( f)5(o)-2(l)4(l)4(o)-2(wi)10(ng)4(, )]TJ 0.0039 Tc 0 Tw 0.36 -1.252 Td (1.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf -0.0014 Tc 0.0034 Tw 1.05 0 Td [(Bak)-5(e)-1( th)-5(e sp)-5(eci)7(men)-5( un)-5(til it is ab)-5(so)-5(lu)-5(tely d)-5(r)-4(y;)7( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td (2.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf -0.0005 Tc 0.0625 Tw 1.05 0 Td [(Let th)-4(e sp)-4(ecimen)-4( absorb)-4( m)9(o)-4(istu)]TJ 0.0004 Tc 0.0616 Tw 12.971 0 Td [(re at certai)8(n)3( te)-6(m)10(p)-3(erature)6( )]TJ -0.0011 Tc 0.0031 Tw -12.971 -1.15 Td [(an)-5(d certain rel)7(a)-1(tiv)-5(e hu)-5(m)9(i)1(d)-5(ity )-6(u)-5(n)-5(til fu)-5(ll saturatio)-5(n)-5(;)1( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td (3.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf 0.0027 Tc 0.2812 Tw 1.05 0 Td [(M)4(easure)9( t)5(h)-1(e)9( l)5(e)3(ngt)11(h )]TJ /TT1 1 Tf 0 Tc 0 Tw 8.759 0 Td (h)Tj 0.0008 Tc 6.2736 0 0 6.2856 166.6056 350.3748 Tm (sat)Tj /TT0 1 Tf 0 Tc ( )Tj -0.0016 Tc 0.2855 Tw 9.701 0 0 9.7194 177.7218 351.8298 Tm [(and w)-5(e)-2(i)6(g)-5(h)-5(t )]TJ /TT1 1 Tf 0 Tc 0 Tw 5.225 0 Td (M)Tj 0.0008 Tc 6.2736 0 0 6.2856 236.5038 350.3748 Tm (sat)Tj /TT0 1 Tf -0.0001 Tc 0.278 Tw 9.701 0 0 9.7194 243.837 351.8298 Tm [( of )-6(s)5(p)-4(ecim)10(en)-10( )]TJ -0.0015 Tc 0.0035 Tw -17.224 -1.15 Td [(in)-5(itially an)-5(d)-5( k)-5(e)4(ep)-5( th)-5(e pro)-5(b)-5(e the sam)8(e)-2( lo)-5(catio)-5(n)-5(; )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td (4.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf -0.0015 Tc 0.0575 Tw 1.05 0 Td [(Let th)-5(e sam)8(p)-5(le dry ou)-5(t co)-5(m)8(p)-5(l)-6(e)-2(tely an)-5(d)-5( )6(record)-5( th)-5(e leng)-5(th )]TJ /TT1 1 Tf 0 Tc 0 Tw T* (h)Tj 6.2736 0 0 6.2856 81.6336 315.9204 Tm (x)Tj /TT0 1 Tf 0.445 0 Td ( )Tj -0.0016 Tc 0.0336 Tw 9.701 0 0 9.7194 85.9986 317.3754 Tm [(and w)-5(e)-2(i)6(g)-5(h)-5(t)6( )]TJ /TT1 1 Tf 0 Tc 0 Tw 4.715 0 Td (M)Tj /TT0 1 Tf -0.002 Tc 0.034 Tw 0.834 0 Td [( of sp)-6(ecim)8(e)-2(n)-6(,)-4( )6(w)-6(h)-6(ich)-6( )6(represen)-6(t th)-6(e )6(v)-6(a)-2(l)6(ues)9( )]TJ -0.0014 Tc -0.0026 Tw -6.503 -1.144 Td [(at )-6(d)-5(r)-4(y )-6(con)-5(d)-5(ition)-5(s)-2(, d)-5(e)5(no)-5(ted)-5( b)-5(y)1( h)]TJ 0.001 Tc 0 Tw 6.2736 0 0 6.2856 196.9278 304.8042 Tm (0 )Tj 0.0015 Tc 0.0005 Tw 9.701 0 0 9.7194 201.642 306.2592 Tm (and M)Tj 0 Tc 0 Tw 6.2736 0 0 6.2856 226.7262 304.8042 Tm (0)Tj -0.0003 Tc -0.0037 Tw 9.701 0 0 9.7194 229.869 306.2592 Tm ( respectively. )Tj -0.0018 Tc 0.4657 Tw -16.504 -1.329 Td [(Th)-6(e )-6(co)-6(efficien)-6(t o)-6(f)-5( h)-6(ygro)-6(s)3(co)-6(p)-6(ic )-6(sw)-6(elling)-6( )]TJ /C2_0 1 Tf 0 Tc 0 Tw 9.701 0 3.3179 9.7194 249.4242 293.3388 Tm <0045>Tj /TT1 1 Tf 9.701 0 0 9.7194 254.7786 293.3388 Tm ( )Tj /TT0 1 Tf -0.0038 Tc 0.4737 Tw 0.72 0 Td [( is th)-8(en)-8( )]TJ 0.0006 Tc -0.0046 Tw -21.232 -1.144 Td (calculated by )Tj ET q 0.9700012 0 0 0.9700012 75.5226746 259.408493 cm 0.45 w 0 0 m 100.02 0 l S Q BT /TT0 1 Tf 0 Tc 0 Tw 10.4753 0 0 10.4953 168.5262 248.5249 Tm [(\))4783(/\()1122(\))4194(\()]TJ -2.833 1.464 Td [(/)789(\))4072(\()]TJ 6.1105 0 0 6.1222 163.7538 245.9058 Tm [(0)2595(0)2691(0)4719(0)]TJ -2.381 2.51 Td [(0)3853(0)]TJ /TT1 1 Tf 1.886 -2.51 Td [(z)2532(y)2616(x)]TJ -9.344 2.51 Td (sat)Tj 10.4753 0 0 10.4953 155.082 248.5249 Tm [(h)1778(h)1745(h)3111(M)2861(M)]TJ -1.067 1.464 Td [(h)2456(h)2917(h)]TJ /C2_0 1 Tf -4.867 -1.464 Td <0010>Tj 2.128 1.464 Td <0010>Tj -4.589 -0.682 Td <0020>Tj 10.4753 0 3.5827 10.4953 57.5388 256.731 Tm <0045>Tj /TT0 1 Tf 3.3496 Tc 9.701 0 0 9.7194 174.579 258.3025 Tm [( )3348( )1698( \()3347(1)3352(8)3346(\))3347( )]TJ -0.0009 Tc 0.0329 Tw -10.805 -3.12 Td [(Th)-5(e co)-5(efficien)-5(t)7( of )6(h)-5(ygro)-5(s)-2(cop)-5(i)1(c sw)-5(elling)-5( )6(d)-5(e)-1(term)9(in)-5(ed)-5( in)-5( t)7(h)-5(is )]TJ 0.0001 Tc 0.1099 Tw -1.44 -1.15 Td [(way is easie)6(r )6(and acc)6(urate, )6(and )]TJ -0.0007 Tc 0.1107 Tw 13.277 0 Td (it can eliminate the effect of )Tj 0.0023 Tc 0.4196 Tw -13.277 -1.144 Td [(no)4(n)4(-)-1(u)4(n)-2(i)4(f)5(orm)12( m)12(o)-2(i)4(s)2(t)4(u)-2(re di)4(st)4(ri)4(but)4(i)4(o)4(n. T)7(h)-2(e )6(err)5(o)-2(rs ca)8(use)8(d)4( by)4( )]TJ -0.0017 Tc 0.2496 Tw T* [(selectin)-6(g)-6( th)-6(e )6(d)-6(a)-2(ta sets i)6(n)-6( certain)-6( tim)8(e ran)-6(g)-6(e fo)-6(r th)-6(e lin)-6(ear )]TJ 0.0022 Tc -0.0062 Tw T* [(reg)4(r)-1(essi)4(o)4(n)-2( )-6(ca)8(n al)4(so be )-6(a)8(voi)10(de)8(d.)]TJ 1 0 0 rg 0 Tc 0 Tw 12.473 0 Td ( )Tj 0 0 0 rg 0.0025 Tc 0.2334 Tw -11.033 -1.245 Td [(M)4(o)-1(i)4(r\351 i)4(n)-1(t)4(e)2(r)6(fer)6(om)12(et)4(ry)5( i)4(s)2( anot)4(her m)12(e)2(t)4(hod )6(r)6(e)2(po)5(rt)4(ed i)10(n)-1( t)4(h)-1(e)8( )]TJ -0.0011 Tc 0.0211 Tw -1.44 -1.15 Td [(literatu)-5(re to measu)-5(r)-4(e th)-5(e )6(h)-5(ygro)-5(s)-2(cop)-5(i)1(c swellin)-5(g [2)-5(0-2)-5(1)-5(])2(. )6( M)6(o)-5(ir\351 )]TJ -0.0005 Tc 0.3624 Tw 0 -1.144 TD [(in)-4(terfero)-4(m)9(e)-1(try )-6(m)9(easu)-4(r)-3(es in-p)-4(lan)-4(e)-1( )6(d)-4(i)1(sp)-4(lacemen)-4(t)1(s w)-4(ith)-4( very)-4( )]TJ -0.0019 Tc 0.3638 Tw 0 -1.15 TD [(h)-6(igh)-6( sen)-6(s)-3(itiv)-6(ity. It )6(h)-6(a)-2(s )6(b)-6(e)-2(en)-6( )6(p)-6(r)-5(acticed)-6( ex)-6(ten)-6(s)-3(i)6(v)-6(ely in )6(th)-6(e )]TJ 0 Tc 0.2179 Tw 0 -1.144 TD [(microelectronics industry t)8(o)2( )]TJ 0.001 Tc 0.2169 Tw 12.113 0 Td [(m)11(easure the)7( )6(ther)]TJ -0.0014 Tc 0.2193 Tw 7.037 0 Td [(m)9(a)-1(ll)-5(y in)-5(duced)-5( )]TJ -0.0015 Tc 0.0575 Tw -19.15 -1.15 Td [(d)-5(e)-2(fo)-5(rm)8(atio)-5(n)-5( )6(o)-5(f)2( electron)-5(ic )6(p)-5(a)-2(ck)-5(ag)-5(es. For h)-5(y)7(gro)-5(s)-2(cop)-5(ic sw)-5(ellin)-5(g )]TJ -0.0009 Tc 0.3928 Tw 0 -1.15 TD [(measu)-5(r)-4(em)9(en)-5(ts, it is v)-5(ital to)-5( elim)9(in)-5(ate t)-5(h)-5(erm)9(a)-1(l ex)-5(p)-5(a)5(nsio)-5(n )]TJ 0.0023 Tc 0.0297 Tw 0 -1.144 TD [(du)4(ri)4(n)4(g)-2( m)12(o)-2(i)4(r)-1(\351 )6(m)6(easurem)12(ent)4(s)2( so t)10(h)-2(at)4( )6(onl)4(y)4( )6(hy)10(gr)5(osc)8(opi)4(c)8( swel)10(l)4(i)4(n)-2(g)4( )]TJ 0.0021 Tc 0.0419 Tw 0 -1.15 TD [(i)4(s)1( d)4(o)-2(c)8(u)-2(m)12(e)2(nt)4(ed. T)7(h)-2(i)4(s)1( )6(was)7( acc)8(o)4(m)12(pli)4(s)1(hed)4( by)10( )6(us)7(i)4(n)-2(g)4( t)4(h)-2(e)8( )6(refe)8(ren)4(ce )]TJ -0.0003 Tc 0.1163 Tw T* [(sam)10(p)-4(le. Th)-4(e referen)-4(ce an)-4(d)-4( t)8(est sa)-6(m)10(p)-4(les were po)-4(sition)-4(ed)-4( )6(sid)-4(e )]TJ -0.0011 Tc 0.279 Tw 26.493 67.329 Td [(b)-5(y)1( sid)-5(e)5( w)-5(ith)-5(i)7(n)-5( th)-5(e )6(v)-5(i)1(ew)-5(ing area )6(of th)-5(e )6(m)9(o)-5(ir\351 setu)-5(p)-5(.)3( )6(Th)-5(is )]TJ 0.0023 Tc 0.0117 Tw 0 -1.144 TD [(pr)5(oce)8(d)-2(u)4(r)-1(e ca)8(nc)8(el)4(ed any)4( t)4(h)-2(e)8(r)-1(m)6(a)2(l)4(l)4(y)4( i)4(nduce)8(d)-2( de)8(fo)4(rm)12(ati)4(o)-2(ns i)4(n)4( t)4(h)-2(e)8( )]TJ 0.0005 Tc 0.1155 Tw 0 -1.15 TD [(test sa)-6(m)10(p)-3(le since the de)6(formed )]TJ 0.0006 Tc 0.1154 Tw 13.163 0 Td [(state o)3(f)-2( the)7( refe)7(rence)7( sam)5(p)-3(le)7( )]TJ 0.0022 Tc 0.5517 Tw -13.163 -1.15 Td [(was)7( use)8(d)4( as)7( a )6(ref)5(e)2(re)8(nce)8( dat)10(u)-2(m)12( fo)4(r )6(zero)4( )6(hy)4(gr)5(osc)8(o)-2(pi)4(c)8( )]TJ -0.0001 Tc 0.0021 Tw 0 -1.144 TD [(d)-4(efo)-4(rm)10(atio)-4(n)-4( )6(o)-4(f)3( th)-4(e test sam)10(p)-4(le. )]TJ -0.0018 Tc 0.2857 Tw 1.44 -1.252 Td [(Bo)-6(th th)-6(e TGA)-6(-)-5(TM)6(A m)8(e)-2(th)-12(o)-6(d an)-6(d M)6(o)-6(ir\351 in)-6(terfero)-6(m)8(etry)-6( )]TJ 0.0016 Tc 0.0424 Tw -1.44 -1.144 Td [(method )6(were a)8(pplied t)10(o)-2( cha)8(r)-1(a)8(c)]TJ 0.0003 Tc 0.0437 Tw 12.449 0 Td [(terize the hygrosc)6(o)2(pic swelling )]TJ -0.0005 Tc 0.0505 Tw -12.449 -1.15 Td [(o)-4(f)-3( t)7(h)-4(ree )6(u)-4(n)2(d)-4(e)5(rfills. Tab)-4(l)1(e 5)-4( g)-4(a)5(v)-4(e)-1( th)-4(e )6(resu)-4(lts co)-4(m)9(p)-4(ariso)-4(n)-4( )6(b)-4(a)-1(sed )]TJ -0.0014 Tc 0.2553 Tw 0 -1.15 TD [(o)-5(n)1( th)-5(e trad)-5(itio)-5(n)-5(a)-1(l lin)-5(ear )6(regressio)-5(n)1( m)9(e)-1(th)-5(o)-5(d)1( and)-5( t)7(h)-5(e )6(sim)9(p)-11(le )]TJ 0.0009 Tc 0.523 Tw 0 -1.144 TD [(proce)7(d)-3(ure sugge)7(sted above. It)]TJ -0.0019 Tc 0.5258 Tw 13.517 0 Td [( in)-6(d)-6(e)-2(ed sh)-6(ow)-6(ed)-6( th)-6(at)6( th)-6(e )]TJ -0.0012 Tc 0.0572 Tw -13.517 -1.15 Td [(trad)-5(itio)-5(n)-5(a)-1(l)7( slope m)9(e)-1(th)-5(o)-5(d)1( ov)-5(eresti)-5(m)9(a)-1(ted)-5( th)-5(e )6(CH)-5(S sign)-5(ifican)-5(tly. )]TJ -0.0007 Tc 0.0147 Tw T* [(Fu)-5(rt)7(h)-5(e)-1(r, t)7(h)-5(e M)7(o)-5(ir\351 i)7(n)-5(terfero)-5(metry m)9(e)-7(th)-5(o)-5(d)1( )6(was u)-5(s)-1(ed to)-5( )6(v)-5(a)-1(li)7(d)-5(a)-1(te)-7( )]TJ 0.0003 Tc 0.0497 Tw 0 -1.15 TD [(the sim)10(p)-4(le procedure )6(using TG)]TJ 0.0002 Tc 0.0498 Tw 12.587 0 Td [(A-TMA m)10(ethod, and e)6(x)-4(cel)8(lent )]TJ 0.0007 Tc 0.0013 Tw -12.587 -1.15 Td [(agreem)11(ent was)6( obtained, as)6( s)6(h)-3(own in Ta)7(ble )6(6. )]TJ 0.0015 Tc 0.0023 Tw 8.7134 0 0 8.73 325.7244 563.3286 Tm [(Tabl)6(e)-2( 5)7( Com)5(pari)6(son of the)5( CHS )7(based on )7(the)5( tr)7(ad)7(itiona)5(l slop)7(e )]TJ 0.0019 Tc 0.0019 Tw 7.02 -1.153 Td [(method and)8( new)9( procedur)8(e )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 535.02 135.42 14.46 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 527.52 3.54 7.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 459.9 527.52 3.54 7.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 525.6 135.42 1.92 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 331.56 527.52 128.34 7.5 re f Q BT /TT3 1 Tf 0.0369 Tc 0.0013 Tw 6.0776 0 0 6.0892 330.6132 525.2076 Tm [(Un)16(d)25(e)-39(r)43(f)54(ill)66( I)66(D)]TJ /TT0 1 Tf 0 Tc 0 Tw 5.545 0 Td ( )Tj 0.0322 Tc 7.2173 0 0 7.2309 474.2508 525.615 Tm (1 )Tj /TT2 1 Tf 0 Tc 9.4964 0 0 9.5143 480.0126 525.615 Tm ( )Tj 7.2173 0 0 7.2309 505.6787 525.2076 Tm (2)Tj /TT0 1 Tf 0.581 0.056 Td ( )Tj /TT2 1 Tf 3.137 -0.056 Td (3)Tj /TT0 1 Tf 0.532 0.056 Td ( )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 547.56 0.42 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 549.48 135.84 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 547.56 135.42 1.92 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 463.44 547.56 0.84 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 464.28 549.48 35.1 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.38 547.56 0.42 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.8 549.48 28.8 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 528.6 547.56 0.42 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 529.02 549.48 25.26 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 547.56 0.42 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 549.48 0.42 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 525.6 135.84 1.92 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 525.6 0.42 21.96 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 463.44 525.6 0.84 21.96 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.38 525.6 0.42 21.96 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 528.6 525.6 0.42 21.96 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 525.6 0.42 21.96 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 511.08 135.42 14.1 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 503.58 3.54 7.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 459.9 503.58 3.54 7.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 501.66 135.42 1.92 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 331.56 503.58 128.34 7.5 re f Q BT /TT3 1 Tf 0.0344 Tc 6.0776 0 0 6.0892 330.6132 501.6366 Tm [(CHS)12( )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 331.56 503.58 66 7.02 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /TT3 1 Tf 0 Tc 6.0776 0 0 6.0892 345.9198 501.6365 Tm (\()Tj ET Q BT /TT3 1 Tf 0.0212 Tc 6.0776 0 0 6.0892 347.8404 501.6366 Tm [(ne)12(w)-24( )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 331.56 503.58 66 7.02 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /TT3 1 Tf 0 Tc 6.0776 0 0 6.0892 362.0412 501.6365 Tm (p)Tj ET Q BT /TT3 1 Tf 6.0776 0 0 6.0892 365.8242 501.6366 Tm [(r)27(oc)12(e)12(dur)-30(e)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 331.56 503.58 66 7.02 re W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT /TT3 1 Tf 0 Tc 6.0776 0 0 6.0892 392.6544 501.6365 Tm (\))Tj ET Q BT /TT0 1 Tf 0 Tc 6.0776 0 0 6.0892 394.575 501.9858 Tm ( )Tj /TT2 1 Tf -0.0239 Tc 7.2173 0 0 7.2309 469.3038 501.9858 Tm [(0.)-61(21)]TJ /TT0 1 Tf 0 Tc 1.96 0 Td ( )Tj /TT2 1 Tf 9.4964 0 0 9.5143 485.367 501.9858 Tm ( )Tj -0.0239 Tc 7.2173 0 0 7.2309 500.6735 501.9858 Tm [(0.)-69(20)]TJ 0.0245 Tc 3.669 0 Td [(0.)36(26)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 523.2 0.42 2.4 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 328.02 525.18 135.42 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 523.2 135.42 1.98 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 463.44 523.2 0.84 2.4 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 464.28 525.18 35.1 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.38 523.2 0.42 2.4 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.8 525.18 28.8 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 528.6 523.2 0.42 2.4 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 529.02 525.18 25.26 0.42 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 523.2 0.42 2.4 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 501.66 135.84 1.92 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 501.66 0.42 21.54 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 463.44 501.66 0.84 21.54 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.38 501.66 0.42 21.54 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 528.6 501.66 0.42 21.54 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 501.66 0.42 21.54 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 486.72 135.42 14.16 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 479.28 3.54 7.44 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 459.9 479.28 3.54 7.44 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 477.3 135.42 1.98 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 331.56 479.28 128.34 7.44 re f Q BT /TT3 1 Tf 0.0097 Tc 0.0285 Tw 6.0776 0 0 6.0892 330.6132 478.4148 Tm [(C)-25(H)-25(S)-13(\()-40(aver)16(a)-66(g)-11(ed)-11( )67(m)-49(e)1(t)27(h)-69(o)46(d)-2( I)-28( )58(an)-11(d s)-9(l)-19(o)-11(p)-11(e)1( )58(f)-31(i)29(t)-31(t)27(i)-28(n)-11(g\))]TJ /TT0 1 Tf 0 Tc 0 Tw 20.292 0 Td ( )Tj /TT2 1 Tf 9.4964 0 0 9.5143 455.5104 478.4148 Tm ( )Tj -0.0239 Tc 7.2173 0 0 7.2309 469.3038 478.4148 Tm [(0.)-61(29)]TJ /TT0 1 Tf 0 Tc 1.96 0 Td ( )Tj /TT2 1 Tf 9.4964 0 0 9.5143 485.367 478.8222 Tm ( )Tj -0.0239 Tc 7.2173 0 0 7.2309 500.6735 478.4148 Tm [(0.)-69(27)]TJ 0.0245 Tc 3.669 0 Td [(0.)36(33)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 498.9 0.42 2.76 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 328.02 500.88 135.42 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 498.9 135.42 1.98 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 463.44 498.9 0.84 2.76 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 464.28 500.88 35.1 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.38 498.9 0.42 2.76 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.8 500.88 28.8 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 528.6 498.9 0.42 2.76 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 529.02 500.88 25.26 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 498.9 0.42 2.76 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.02 477.3 135.84 1.98 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 476.52 0.42 22.38 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 476.52 135.84 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 463.44 476.52 0.84 22.38 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 464.28 476.52 35.1 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.38 476.52 0.42 22.38 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 499.8 476.52 28.8 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 528.6 476.52 0.42 22.38 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 529.02 476.52 25.26 0.78 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 476.52 0.42 22.38 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 554.28 476.52 0.42 0.78 re f Q BT /TT0 1 Tf 0 Tc 5.6979 0 0 5.7086 330.6132 469.2774 Tm ( )Tj 9.701 0 0 9.7194 549.969 467.7642 Tm ( )Tj 0.0017 Tc 0.0021 Tw 8.7134 0 0 8.73 328.518 453.9708 Tm [(Tabl)6(e)-2( 6)7( Com)5(pari)6(s)4(o)1(n between)7( TG)9(A-TMA m)5(e)-2(thod )7(and Moir\351)5( )]TJ 7.621 -1.153 Td [(interf)8(erometr)8(y)-6( m)12(e)-2(thod )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 420.48 163.5 16.02 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 409.98 4.38 10.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 487.32 409.98 4.38 10.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 407.64 163.5 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 332.58 409.98 154.74 10.5 re f Q BT /TT0 1 Tf -0.0002 Tc 0 Tw 8.8785 0 0 8.8896 331.6026 411.834 Tm [(Met)9(h)-5(od )]TJ -0.0043 Tc 18.794 0 Td (CHS )Tj ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 434.1 0.6 3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 436.5 164.1 0.6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 434.1 163.5 2.4 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 491.7 434.1 0.6 3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 492.3 436.5 42.36 0.6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 434.1 0.6 3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 436.5 0.6 0.6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 327.9 407.64 164.1 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 407.64 0.6 26.46 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 491.7 407.64 0.6 26.46 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 407.64 0.6 26.46 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 391.2 163.5 15.84 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 380.7 4.38 10.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 487.32 380.7 4.38 10.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 378.36 163.5 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 332.58 380.7 154.74 10.5 re f Q BT /TT0 1 Tf 0.0037 Tc -0.0046 Tw 8.8785 0 0 8.8896 331.6026 383.4324 Tm [(T)5(M)8(A)5(-)9(T)5(G)11(A)57( w)11(ith n)12(e)2(w)11( pro)12(c)2(e)15(dur)16(e )]TJ /TT2 1 Tf 0 Tc 0 Tw 11.3827 0 0 11.3969 446.6058 383.5488 Tm ( )Tj /TT0 1 Tf 0.0047 Tc 8.8785 0 0 8.8896 499.3349 383.4324 Tm [(0.)6(2)13(1)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 404.7 0.6 2.94 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 328.2 407.04 163.5 0.6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 404.7 163.5 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 491.7 404.7 0.6 2.94 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 492.3 407.04 42.36 0.6 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 404.7 0.6 2.94 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 327.9 378.36 164.1 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 378.36 0.6 26.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 491.7 378.36 0.6 26.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 378.36 0.6 26.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 361.74 163.5 15.9 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 351.24 4.38 10.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 487.32 351.24 4.38 10.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 348.9 163.5 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 332.58 351.24 154.74 10.5 re f Q BT /TT0 1 Tf 0.0026 Tc -0.0035 Tw 8.8785 0 0 8.8896 331.6026 354.8562 Tm [(Mo)11(ir\351 i)12(n)4(ter)8(f)1(er)14(om)20(etry)18( )]TJ 0.0047 Tc 0 Tw 18.885 0 Td [(0.)6(2)13(0 )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 327.6 375.36 0.6 3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 328.2 377.7 163.5 0.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 328.2 375.36 163.5 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 491.7 375.36 0.6 3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 492.3 377.7 42.36 0.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 375.36 0.6 3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0 rg 327.9 348.84 164.1 2.34 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 348.18 0.6 27.18 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 327.6 348.18 164.1 0.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 491.7 348.18 0.6 27.18 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 492.3 348.18 42.36 0.66 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 348.18 0.6 27.18 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 534.66 348.18 0.6 0.66 re f Q BT /TT0 1 Tf 0 Tc 6.2983 0 0 6.3063 331.6026 344.031 Tm ( )Tj 9.701 0 0 9.7194 530.2973 342.4596 Tm ( )Tj 0.0024 Tc 0.3475 Tw -20.98 -1.018 Td [(The e)8(x)4(peri)4(m)12(e)-4(nt)4(al)4( ra)8(w )6(dat)4(a)8( f)5(r)-1(om)12( TG)5(A-T)7(M)4(A t)4(e)2(st)4( )6(was)8( )]TJ 0.0005 Tc 0.1275 Tw -1.44 -1.15 Td [(analyzed )6(using the a)6(b)-3(ove)6( ana)6(l)2(ysis as desc)6(ribed by e)6(q)3(uations)6( )]TJ 0.0024 Tc 0.1976 Tw T* [(\(1)4(2\) a)8(n)4(d \()5(1)5(3\).)6( The t)4(h)-1(e)8(o)5(ret)4(i)4(cal)4( pre)8(d)-1(i)4(c)2(t)4(i)4(ons )6(and e)8(x)5(peri)4(m)12(e)2(nt)4(al)4( )]TJ 0.0021 Tc 0.0839 Tw 0 -1.144 TD [(dat)4(a)2( we)8(re )6(pre)8(s)7(ent)4(e)2(d i)10(n)-2( Fi)10(g. )6(1)4(4)-2(. )6(It)4( ca)8(n )6(be se)8(en t)4(h)-2(at)4( t)10(h)-2(e t)10(h)-2(e)8(o)-2(ry)4( )]TJ -0.0017 Tc 0.2136 Tw 0 -1.15 TD [(co)-6(rrobo)-6(r)-5(ated)-6( )6(w)-5(ith)-6( t)6(h)-6(e exp)-6(e)4(ri)-6(m)8(e)-2(n)-6(tal resu)-6(lts v)-6(e)4(ry )6(w)-5(e)-2(ll. 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Becau)-5(s)-2(e th)-5(e )6(w)-5(a)-1(ter m)9(o)-5(l)-5(ecu)-5(le is )6(po)-5(lar, )6(it is)-8( )]TJ -0.0025 Tc 0.2384 Tw 0 -1.15 TD [(cap)-6(ab)-6(le )-6(of)-5( fo)-6(rmin)-6(g)-6( h)-6(yd)-6(r)1(og)-6(en)-6( bo)-6(nd)-6(s )-6(w)-6(ith h)-6(ydr)-5(ox)-6(yl )-6(gro)-6(up)-6(s)-3(, )]TJ -0.0022 Tc 0.0942 Tw 0 -1.144 TD [(th)-6(er)-5(eb)-6(y d)-6(isrup)-6(tin)-6(g)-6( in)-6(ter)-5(-)-5(c)4(h)-6(a)-2(in h)-6(ydr)-5(og)-6(en)-6( bond)-6(ing)-6( w)-6(ith)-6( t)6(h)-6(e )6(n)-6(e)-2(t )]TJ -0.0015 Tc 0.0215 Tw 0 -1.15 TD [(effect )6(o)-5(f)2( in)-5(creasin)-5(g)1( th)-5(e in)-5(te)]TJ 0.0036 Tc 0.0164 Tw 11.009 0 Td [(r)7(-)1(s)9(e)4(gm)14(ent)6(a)4(l)6( hy)6(dr)7(oge)10(n)6( b)6(o)6(nd)6( l)6(e)4(n)6(gt)6(h.)8( )]TJ -0.0009 Tc 0.0989 Tw -11.009 -1.15 Td [(It rev)-5(eals th)-5(at )6(th)-5(e vo)-5(lu)-5(m)9(e)-1( chan)-5(g)-5(e)5( b)-5(y)1( )6(h)-5(ygroscop)-5(i)1(c sw)-5(elling)-5( is )]TJ 0.001 Tc 0.091 Tw 0 -1.144 TD [(only a sm)11(all fraction of the t)9(o)-3(tal free )6(vol)9(ume. The form)11(ation )]TJ 0.0038 Tc 0.5801 Tw 0 -1.15 TD [(of )6(hy)6(d)6(or)7(ge)10(n)6( bo)6(n)6(d wi)6(t)6(h)6( pol)]TJ 0.0001 Tc 0.5838 Tw 13.007 0 Td [(ym)10(er )-6(materials cause)6(s the )]TJ -0.0011 Tc 0.2191 Tw -13.007 -1.15 Td [(h)-5(ygro)-5(s)-2(cop)-5(i)1(c sw)-5(ellin)-5(g of m)9(a)-1(terial, wh)-5(ile th)-5(e )6(un)-5(bou)-5(nd)-5( )6(water )]TJ -0.0017 Tc 0.3636 Tw 0 -1.144 TD [(liq)-6(u)-6(id)-6(/v)-6(a)4(po)-6(r fi)6(lls in)-6( )6(free )6(v)-6(olu)-6(m)8(e)-2(s, w)-5(h)-6(ich do)-6(es no)-6(t cau)-6(se )]TJ 0.1597 Tw 0 -1.15 TD [(sw)-5(ellin)-6(g if t)6(h)-6(e v)-6(a)4(po)-6(r pressu)-6(re )]TJ -0.0011 Tc 0.1591 Tw 12.857 0 Td [(is low)-5( at)7( low)-5(e)-1(r tem)9(p)-5(eratu)-5(r)-4(es. )]TJ 0.0025 Tc 0.0175 Tw -12.857 -1.144 Td [(There)8(f)6(ore, t)10(h)-1(e )6(equat)4(i)4(o)5(n )6(\(1)5(\) m)6(i)4(ght)4( nee)8(d)-1(s t)10(o)-1( b)5(e)2( )-6(m)12(odi)4(fi)4(ed i)4(f )6(o)5(n)-1(l)4(y)5( )]TJ -0.0008 Tc 0.0688 Tw T* [(a sm)9(a)-7(ll fractio)-5(n)-5( of m)9(o)-5(istu)-5(re i)7(s)-2( resp)-5(on)-5(sib)-5(l)1(e )6(fo)-5(r t)7(h)-5(e sw)-5(ellin)-5(g o)-5(f)2( )]TJ -0.0007 Tc 0.1167 Tw T* [(material. In)-5(stead)-5( of )6(u)-5(s)-1(ing)-5( the to)-5(tal )-6(m)9(o)-5(istu)-5(re co)-5(ncen)-5(trati)7(o)1(n)-5( in)-5( )]TJ 0.0027 Tc 0.0533 Tw 0 -1.144 TD [(equat)5(i)5(o)5(n )6(\(1)5(\), t)11(h)-1(e m)13(o)-1(i)5(s)2(t)5(u)-1(re co)5(ncent)11(rat)5(i)5(on )6(fra)9(ct)5(i)5(on w)5(h)-1(i)5(c)3(h )6(fo)5(rm)13(s )]TJ -0.0008 Tw 0 -1.15 TD [(t)5(h)-1(e hy)11(gr)6(o )6(b)5(o)-1(n)5(d)5(i)5(ng m)13(a)3(y)5( be u)5(s)2(e)9(d)-1(. )]TJ 0 Tc 0 Tw 6.7498 0 0 6.7627 134.0136 531.3769 Tm [(water)4997(bound)]TJ -10.485 -1.196 Td (swelling)Tj /TT1 1 Tf 11.5713 0 0 11.5933 106.0776 526.197 Tm (C)Tj /C2_0 1 Tf 11.5713 0 3.9576 11.5933 99.3264 526.197 Tm [<0045>4205<0048>]TJ 11.5713 0 0 11.5933 90.189 526.197 Tm <0020>Tj /TT0 1 Tf 3.3496 Tc 9.701 0 0 9.7194 151.8228 526.197 Tm [( )2700( \()3347(1)3352(9)3346(\))3347( )]TJ -0.0059 Tc 0.1039 Tw -9.899 -2.222 Td [(w)-10(h)-10(er)-9(e C)]TJ 0.0011 Tc 0.0643 Tw 6.2736 0 0 6.2856 89.316 508.9698 Tm [(bound wa)-10(ter )]TJ -0.001 Tc 0.099 Tw 9.701 0 0 9.7194 123.0138 504.6048 Tm [(is th)-5(e m)9(o)-5(istu)-5(re m)9(a)-1(ss for th)-5(e )6(bo)-5(nd fo)-5(rm)9(atio)-5(n )]TJ -0.0013 Tc 0.0033 Tw -6.929 -1.15 Td [(p)-5(e)-1(r un)-5(it vo)-5(lu)-5(m)9(e)-1(. )]TJ /TT2 1 Tf -0.0028 Tw 0 -1.754 TD [(4)-5(.)-3( )-6(Co)-5(upled No)-5(nlinea)-5(r )-6(Th)]TJ -0.001 Tc 0.003 Tw 10.865 0 Td [(erma)-5(l-Hyg)-5(r)-1(o-Stress Mo)-5(deling )]TJ /TT0 1 Tf 0.0007 Tc 2.197 Tw -9.425 -1.239 Td [(The i)9(n)-3(tegrated st)9(re)7(ss m)11(odeling under )]TJ -0.001 Tc 0.069 Tw -1.44 -1.144 Td [(te)-7(m)9(p)-5(eratu)-5(r)-4(e/)7(h)-5(u)1(mid)-5(ity lo)-5(ad)-5(in)-5(g con)-5(d)-5(ition)-5( )6(requ)-5(ires )6(fiv)-5(e)5( typ)-5(e)5(s of )]TJ -0.0014 Tc 1.0233 Tw 0 -1.15 TD [(m)9(o)-5(d)-5(e)-1(lin)-5(g)-5(,)3( i.e., m)9(o)-5(istu)-5(re )6(d)-5(i)1(ffu)-5(s)-2(ion )6(d)-5(u)1(ring mo)-5(istu)-5(re )]TJ -0.0016 Tc 0.6875 Tw T* [(p)-5(r)-5(econ)-5(d)-5(ition)-5(ing)-5( an)-5(d reflow)-5(, t)6(h)-5(erm)8(a)-2(l m)8(o)-5(d)-5(e)-2(lin)-5(g)-5(,)-4( )6(h)-5(y)1(g)-5(r)1(o)-5(-)]TJ 0.0008 Tc 0.5711 Tw 0 -1.144 TD [(mechanical m)11(odeling, the)7(r)-2(m)11(o)]TJ 0.0002 Tc 0.5777 Tw 13.055 0 Td [(-)-9(m)10(echanic)6(al m)10(odeling, )6(and )]TJ 0.0021 Tc 0.3178 Tw -13.055 -1.15 Td [(vap)4(o)4(r)-1( )6(pres)7(su)4(r)5(e)2( m)12(odel)4(i)4(n)-2(g)4( [)5(2)-2(7)4(-)5(30])5(.)6( Thi)4(s)7( i)10(s)1( a c)8(o)4(upl)4(e)8(d)-2( )6(f)5(i)4(el)4(d)-8( )]TJ -0.0009 Tc 0.2668 Tw 0 -1.15 TD [(m)9(u)-5(l)-5(ti-p)-5(h)-5(y)1(sics )6(p)-5(r)2(ob)-5(lem)9( th)-5(at i)-5(n)-5(vo)-5(lv)-5(es w)-5(i)1(t)7(h)-5( )6(th)-5(erm)9(a)-1(l an)-5(alys)-8(is, )]TJ -0.0016 Tc 0.3575 Tw 0 -1.144 TD [(m)8(o)-5(istu)-5(r)-5(e)-2( d)-5(iff)-5(usio)-5(n, m)8(o)-5(istu)-5(r)-5(e)4( ph)-5(ase ch)-5(ange, an)-5(d non)-5(linear)-5( )]TJ -0.0012 Tc 0.2371 Tw 0 -1.15 TD [(stress an)-5(alysis. Th)-5(ere are ex)-5(ten)-5(s)-2(i)7(v)-5(e st)7(u)-5(d)-5(i)7(e)-1(s in)-5( literature on)-5( )]TJ -0.0011 Tc 0.615 Tw T* [(th)-5(er)-4(m)9(a)-1(l-)-4(h)-5(y)1(g)-5(r)2(o str)-4(e)-1(ss m)9(o)-5(delin)-5(g)-5(.)-3( )6(Ho)-5(w)-5(e)5(ver)-4(,)-3( m)9(o)-5(st of th)-5(e )]TJ -0.0012 Tc 0.2551 Tw 0 -1.144 TD [(p)-5(u)1(b)-5(lish)-5(e)5(d wo)-5(rk)-5( )6(u)-5(s)-2(es lin)-5(ear )6(elastic an)-5(alysis to sim)9(p)-5(lify th)-5(e )]TJ 0.003 Tc 0.029 Tw 0 -1.15 TD [(pr)6(o)5(b)-1(l)5(e)3(m)13(.)1( So t)11(h)5(e su)5(pe)9(rp)5(osi)5(t)5(i)5(o)5(n)5( m)13(e)3(t)5(hod,)7( i)5(n)5( w)5(h)5(i)5(c)3(h a)9(n)-1( e)9(q)5(ui)5(val)5(e)9(nt )]TJ 0.0024 Tc 0.0116 Tw 0 -1.144 TD [(coef)5(fi)4(ci)4(ent)4( o)5(f)-1( t)4(h)-1(erm)12(a)2(l)4( expansi)10(on i)4(s)2( i)4(n)-1(t)4(r)5(o)5(duce)8(d)-1(, ca)8(n be)8( )-6(a)8(ppl)4(i)10(e)2(d.)6( )]TJ 0.0004 Tc 0.3135 Tw 0 -1.227 TD [(For e)6(x)-3(am)10(ple, if )]TJ /C2_0 1 Tf 0 Tc 0 Tw 9.701 0 3.3179 9.7194 126.855 318.5976 Tm <0048>Tj /TT1 1 Tf 0.0005 Tc 6.2736 0 0 6.2856 131.1036 317.1426 Tm (T )Tj /TT0 1 Tf -0.0006 Tc 0.3145 Tw 9.701 0 0 9.7194 138.6696 318.5976 Tm [(is t)7(h)-4(ermal strain)-4(, )]TJ /C2_0 1 Tf 0 Tc 0 Tw 9.701 0 3.3179 9.7194 215.0862 318.5976 Tm <0044>Tj /TT0 1 Tf -0.0041 Tc 0.318 Tw 9.701 0 0 9.7194 221.139 318.5976 Tm [( th)-8(e c)-4(o)-8(ef)-7(f)-7(i)-2(c)-4(i)-2(en)-8(t )6(o)-8(f)-1( )]TJ 0.0025 Tc 0.0595 Tw -17.044 -1.222 Td [(t)4(h)-1(erm)12(a)2(l)4( expan)5(s)8(i)4(on,)7( a)8(n)-1(d)5( )]TJ /C2_0 1 Tf 0 Tc 0 Tw 9.701 0 3.3179 9.7194 150.1932 306.7248 Tm <0027>Tj /TT1 1 Tf 9.701 0 0 9.7194 156.1296 306.7248 Tm (T)Tj /TT0 1 Tf 0.0003 Tc 0.0617 Tw 0.558 0 Td [( is)6( )6(the c)6(h)-4(ange )6(of t)8(e)-6(m)10(p)-4(erature, t)8(h)2(en)-10( )]TJ -0.0007 Tc 0.0027 Tw -10.901 -1.144 Td [(th)-5(e th)-5(erm)9(a)-1(l str)-10(a)-1(in)-5( can b)-5(e)5( written)-5( as )]TJ /C2_0 1 Tf 0 Tc 0 Tw 9.701 0 3.3179 9.7194 55.7928 277.8576 Tm <0048>Tj /TT1 1 Tf 0.0005 Tc 6.2736 0 0 6.2856 60.0414 276.4026 Tm (T )Tj 0 Tc 9.701 0 0 9.7194 65.1048 277.8576 Tm (=)Tj /C2_0 1 Tf 0.0013 Tc 9.701 0 3.3179 9.7194 71.6814 277.8576 Tm <0003004400030027>Tj /TT1 1 Tf 0 Tc 9.701 0 0 9.7194 88.6176 277.8576 Tm (T)Tj /TT0 1 Tf 0.558 0 Td (,)Tj /TT1 1 Tf 3.3496 Tc 0.246 0 Td [( )588( )]TJ /TT0 1 Tf 0.0032 Tc [(\(2)5(0\) )]TJ 0.0003 Tc 0.0017 Tw -2.748 -1.742 Td [(Si)-4(m)10(ilarly, )]TJ /C2_0 1 Tf 0 Tc 0 Tw 9.701 0 3.3179 9.7194 55.7928 243.1705 Tm <0048>Tj /TT1 1 Tf 0.001 Tc 6.2736 0 0 6.2856 60.0414 241.7155 Tm (h )Tj 0 Tc 9.701 0 0 9.7194 64.7556 243.1705 Tm (=)Tj /C2_0 1 Tf 0.002 Tc 9.701 0 3.3179 9.7194 71.3322 243.1705 Tm <00030045>Tj /TT1 1 Tf 3.3496 Tc 9.701 0 0 9.7194 79.131 243.1705 Tm [(C)3357( )3066( )]TJ /TT0 1 Tf 0.0032 Tc 3.3464 Tw [( \(2)5(1\) )]TJ 0.002 Tc 0 Tw -2.406 -1.82 Td [(whe)8(r)-1(e )]TJ /C2_0 1 Tf 0 Tc 9.701 0 3.3179 9.7194 82.9722 225.4776 Tm <0048>Tj /TT1 1 Tf 0.001 Tc 6.2736 0 0 6.2856 87.2208 224.0226 Tm (h )Tj /TT0 1 Tf 0.0024 Tc 0.1016 Tw 9.701 0 0 9.7194 92.4588 225.4776 Tm [(i)4(s)2( t)4(h)-1(e)8( hy)5(g)5(r)-1(osc)8(o)5(pi)4(c s)8(w)-1(el)4(l)4(i)4(ng st)4(rai)10(n)-1(,)6( and )]TJ /TT1 1 Tf -0.0011 Tc 0 Tw 16.204 0 Td (C )Tj /TT0 1 Tf 0.0005 Tc 1.014 0 Td [(rep)3(r)-2(ese)6(n)-3(ts )]TJ -0.0011 Tc 0.237 Tw -20.998 -1.144 Td [(th)-5(e )-6(m)9(o)-5(istu)-5(re co)-5(n)-5(c)-1(en)-5(tration)-5(.)3( W)-5(h)]TJ -0.0037 Tc 0.2456 Tw 13.331 0 Td [(e)-4(n)-2( an)-8( e)-4(l)-2(ec)-4(tr)-7(on)-8(ic)-4( p)-8(a)-4(ck)-8(age)-4( is)-4( )]TJ -0.0013 Tc 0.1953 Tw -13.331 -1.15 Td [(ap)-5(p)-5(lied to bo)-5(t)7(h)-5( th)-5(er)-4(m)9(a)-1(l an)-5(d h)-5(ygro)-5(s)-2(cop)-5(i)1(c l)7(o)-5(ad)-5(i)7(n)-5(gs, t)7(h)-5(e t)7(o)-5(tal)-5( )]TJ 0.0021 Tc -0.0001 Tw 0 -1.15 TD [(expa)8(nsi)10(o)-2(n)4( st)4(rai)10(n)-2( i)4(s)1( )]TJ 0 Tc 0 Tw 0 -1.82 TD ( )Tj /C2_0 1 Tf -0.001 Tc 9.701 0 3.3179 9.7194 58.2372 174.3198 Tm <00480003>Tj /TT1 1 Tf 0 Tc 9.701 0 0 9.7194 64.9302 174.3198 Tm (=)Tj /C2_0 1 Tf 0.002 Tc 9.701 0 3.3179 9.7194 71.5068 174.3198 Tm [<00030044>9<00030027>]TJ /TT1 1 Tf 0.0018 Tc 9.701 0 0 9.7194 88.3848 174.3198 Tm (T+)Tj /C2_0 1 Tf 0 Tc 9.701 0 3.3179 9.7194 100.3158 174.3198 Tm <0045>Tj /TT1 1 Tf 3.3496 Tc 9.701 0 0 9.7194 105.6702 174.3198 Tm [(C)3357( )2202( )]TJ /TT0 1 Tf 0.0032 Tc [(\(2)5(2\) )]TJ 0.0006 Tc 0.4573 Tw -3.702 -1.742 Td [(Consi)9(d)-3(er a )6(s)6(p)-3(ecial case, )6(whe)7(r)-2(e t)9(h)-3(e)7( tem)11(p)-3(erature a)7(n)3(d )]TJ -0.0057 Tc 0.2117 Tw -1.44 -1.15 Td [(mo)-10(is)-6(tu)-10(r)-9(e)-6( a)-6(c)-6(r)-3(o)-10(ss)-6( a ma)-6(te)-6(r)-9(i)-4(a)-6(l)-4( i)-10(n)-10( th)-10(e p)-10(a)-6(ck)-10(ag)-10(e a)-6(r)-9(e )6(u)-10(n)-10(i)2(f)-9(o)-4(r)-9(m)4( \()-9(t)-4(h)-10(e)-6( )]TJ -0.0011 Tc 0.1531 Tw 0 -1.15 TD [(m)9(o)-5(istu)-5(re con)-5(c)5(en)-5(tration)-5( is )6(n)-5(o)1(t n)-5(ecessarily un)-5(ifo)-5(r)-4(m)9( acro)-5(s)4(s )6(th)-5(e )]TJ 0.0004 Tc 0.0916 Tw 0 -1.144 TD [(whole packa)6(g)-3(e)6(\))-3(. )6(Whe)6(n)-3( linea)6(r elas)]TJ -0.0011 Tc 0.0931 Tw 13.883 0 Td [(tic an)-5(alysi)-5(s)-2( is assu)-5(m)9(e)-1(d)-5(,)-3( th)-5(e )]TJ -0.0012 Tc 0.0692 Tw -13.883 -1.15 Td [(h)-5(ygro)-5(s)-2(cop)-5(i)1(c strain)-5( can)-5( )6(b)-5(e)-1( treated)-5( as ad)-5(d)-5(ition)-5(a)-1(l th)-5(erm)9(a)-1(l strain)-5(. )]TJ 0.0022 Tc 0.0898 Tw 0 -1.227 TD [(Th)4(us,)6( an)4( eq)4(ui)10(v)4(a)2(l)4(e)2(nt)4( coe)8(ffi)4(ci)4(e)8(n)-2(t)4( )6(of)5( t)4(h)-2(erm)12(a)2(l)4( expa)8(nsi)10(o)-2(n)4( )]TJ /C2_0 1 Tf -0.0015 Tc 0 Tw 9.701 0 3.3179 9.7194 268.6884 100.8133 Tm <0044000D0003>Tj /TT0 1 Tf -0.0059 Tc 0.0979 Tw 9.701 0 0 9.7194 282.0744 100.8133 Tm [( ca)-6(n)-10( )]TJ 0.0019 Tc -0.0059 Tw -23.326 -1.144 Td [(be defi)10(ned)4( )-6(as f)5(o)-2(l)4(l)4(o)-2(w)4(s)1( )]TJ /C2_0 1 Tf -0.0009 Tc 0 Tw 9.701 0 3.3179 9.7194 55.7928 72.0042 Tm <0044000D>Tj /TT1 1 Tf 0 Tc 9.701 0 0 9.7194 66.7344 72.0042 Tm (=)Tj /C2_0 1 Tf 0.0006 Tc 9.701 0 3.3179 9.7194 73.311 72.0042 Tm <000300440003>Tj /TT1 1 Tf 0 Tc 9.701 0 0 9.7194 84.3108 72.0042 Tm (+)Tj /C2_0 1 Tf 9.701 0 3.3179 9.7194 90.8292 72.0042 Tm <0045>Tj /TT1 1 Tf -0.0011 Tc 0.0031 Tw 9.701 0 0 9.7194 96.1836 72.0042 Tm (C /)Tj /C2_0 1 Tf 0 Tc 0 Tw 9.701 0 3.3179 9.7194 107.7654 72.0042 Tm <0027>Tj /TT1 1 Tf 3.3496 Tc 9.701 0 0 9.7194 113.6436 72.0042 Tm [(T)3348(,)3354( )3168( )]TJ /TT0 1 Tf 0.0032 Tc [(\(2)5(3\) )]TJ -0.0009 Tc 20.53 67.21 Td [(th)-5(en)-5( )]TJ /C2_0 1 Tf -0.001 Tc 9.701 0 3.3179 9.7194 312.804 707.5482 Tm <00480003>Tj /TT1 1 Tf 0 Tc 9.701 0 0 9.7194 319.497 707.5482 Tm (=)Tj /C2_0 1 Tf 0.0003 Tc 9.701 0 3.3179 9.7194 326.0736 707.5482 Tm <00030044000D00030027>Tj /TT1 1 Tf 3.3496 Tc 9.701 0 0 9.7194 347.8404 707.5482 Tm [(T)3354( )564( )]TJ /TT0 1 Tf 0.0033 Tc [(\(2)5(4\) )]TJ 0.0017 Tc 0.1503 Tw -2.172 -1.748 Td [(Eq)4(uat)4(i)4(o)-2(n)4( \()5(2)4(4\))5( )6(i)4(ndi)4(cat)4(es t)10(h)-2(at)4( t)10(h)]TJ 0.0008 Tc 0.1452 Tw [(e )-6(e)7(q)3(uivalent)9( coefficient of )]TJ 0.0025 Tc 0.0235 Tw -1.44 -1.222 Td [(t)4(h)-1(erm)12(a)2(l)4( expan)5(s)8(i)4(on )]TJ /C2_0 1 Tf -0.0027 Tc 0 Tw 9.701 0 3.3179 9.7194 387.1254 678.681 Tm <0044000D00030003>Tj /TT0 1 Tf 0 Tc 0.026 Tw 9.701 0 0 9.7194 402.8976 678.681 Tm (instead of )Tj /C2_0 1 Tf -0.0009 Tc 0 Tw 9.701 0 3.3179 9.7194 443.8122 678.681 Tm <00440003>Tj 0 Tc 9.701 0 0 9.7194 452.3676 678.681 Tm <0003>Tj /TT0 1 Tf 0.001 Tc 0.019 Tw 0.252 0 Td [(ca)7(n be used )-6(t)9(o)-3( )-6(c)7(o)-3(nduct an )]TJ -0.0017 Tc 0.1357 Tw -14.639 -1.144 Td [(in)-6(teg)-6(r)-5(ated)-6( th)-6(ermal an)-6(d)-6( )6(h)-6(ygrosco)]TJ 0.0003 Tc 0.1337 Tw [(pic stress)6( a)6(n)-4(alyses using )6(the )]TJ -0.001 Tc 0.003 Tw 0 -1.15 TD [(co)-5(nv)-5(en)-5(tio)-5(n)-5(a)-1(l)7( th)-5(erm)9(a)-1(l stress an)-5(alysis m)9(e)-7(th)-5(o)-5(d)1(. )]TJ 0.0021 Tc 0.0839 Tw 1.44 -1.245 Td [(As )6(prese)8(n)-2(t)4(e)8(d p)4(r)-1(evi)10(o)-2(usl)4(y)4( i)4(n)4( Fi)10(gs. )6(6 a)8(n)4(d )6(7, )6(w)4(h)-2(en)4( t)4(h)-2(e e)8(ffect)10( )]TJ 0.0026 Tc 0.0894 Tw -1.44 -1.15 Td [(of t)11(h)-1(erm)13(a)3(l)5( agi)5(n)-1(g)5( d)5(u)-1(e t)11(o)-1( t)5(h)-1(e)9( )6(vi)5(scoel)5(a)3(st)5(i)5(c)3( b)5(e)9(havi)11(or)6( o)5(f )6(un)5(de)9(rfi)5(l)5(l)-1( )]TJ -0.0012 Tc 0.2251 Tw T* [(is co)-5(nsid)-5(ered)-5(, a sim)9(p)-5(le su)-5(pe)]TJ -0.0009 Tc 0.2248 Tw 12.083 0 Td [(rpo)-5(s)-2(itio)-5(n of )6(h)-5(ygro-and)-5( t)7(h)-5(ermal)-5( )]TJ -0.0007 Tc 0.0807 Tw -12.083 -1.144 Td [(strain)-5(s is no)-5(t valid)-5( an)-5(ym)9(o)-5(r)-4(e. Ti)-5(m)9(e)-1(-d)-5(ep)-5(end)-5(e)5(n)-5(c)-1(y and)-5( non)-5(linear )]TJ 0.0024 Tc 0.3655 Tw T* [(beha)8(vi)4(o)5(r)-1( o)5(f)-1( m)6(a)2(t)4(e)2(ri)4(al)4(s )-12(m)12(u)-1(st)4( )-6(be )-6(c)8(o)5(nsi)4(d)-1(e)8(r)5(ed. U)5(n)-2(f)5(o)-1(rt)10(un)4(a)8(t)4(el)4(y, )]TJ -0.0016 Tc 0.1596 Tw T* [(co)-5(mm)8(o)-5(n)-5(ly u)-6(s)-2(ed)-5( co)-6(mmercial fin)-5(ite)]TJ 0.0012 Tc 0.1568 Tw 14.159 0 Td [( elem)11(ent soft)9(ware)7( suc)7(h)-3( )6(as )]TJ -0.0018 Tc 0.3577 Tw -14.159 -1.144 Td [(A)-6(B)-1(AQ)-6(US and)-6( )6(A)-6(NSYS do no)-6(t exp)-6(licitly allo)-6(w)-6( th)-6(e fu)-6(lly)-6( )]TJ 0.0024 Tc 0.2515 Tw T* [(cou)5(p)-1(l)4(e)2(d)5( t)4(i)4(m)12(e-)-7(depe)8(n)4(d)-1(ent)10( t)4(h)-1(e)8(r)-1(m)12(a)2(l)4( and hy)11(gr)5(osc)8(opi)4(c )6(n)4(onl)4(i)4(n)5(ear)5( )]TJ 0.0003 Tc 0.0017 Tw T* [(stress a)6(n)-4(alysis. )]TJ -0.0005 Tc 0.6024 Tw 1.44 -1.245 Td [(In)-4( t)7(h)-4(e fo)-4(llow)-4(i)1(ng)-4(, a m)9(u)-4(lti-step)-4( tem)9(p)-4(eratu)-4(r)-3(e/hu)-4(m)9(i)1(d)-4(i)1(t)-5(y)-4( )]TJ -0.0021 Tc 0.22 Tw -1.44 -1.144 Td [(lo)-6(ad)-6(ing pro)-6(f)-5(ile is co)-6(nsid)-6(ered, as sh)-6(own)-6( i)6(n Fig. )6(15)-6(. Su)-6(ch)-6( a )]TJ -0.0012 Tc 0.3091 Tw T* [(lo)-5(ad)-5(ing)-5( )6(profile represen)-5(ts a )]TJ -0.0014 Tc 0.3093 Tw 12.389 0 Td [(typ)-5(i)1(cal lo)-5(ad)-5(i)7(n)-5(g cond)-5(itio)-5(n)-5( )6(th)-5(at )]TJ 0.0019 Tc 0.252 Tw -12.389 -1.15 Td [(st)4(art)4(s)1( f)5(r)-1(om)12( pa)8(ckagi)10(n)-2(g)4( assem)12(b)-2(l)4(y)4( p)4(r)-1(oce)8(ss a)8(n)-2(d)4( t)4(h)-2(e)8(n)4( m)12(ove t)4(o)4( )]TJ -0.0016 Tc 0.0816 Tw 0 -1.144 TD [(H)-5(A)1(ST stress co)-5(nd)-6(itio)-5(n. Mo)-5(istu)-5(re lo)-5(ad)-5(ing)-5( is ap)-6(p)-5(lied)-5( at Step)-5( 4 )]TJ 0.0005 Tc 0.2354 Tw 0 -1.15 TD [(whe)6(n)-3( the)6( pac)6(k)-3(age is )6(place)6(d in)]TJ 0.0006 Tc 0.2353 Tw 13.145 0 Td [(to a )6(HAST cham)11(ber, where )]TJ -0.0013 Tc 0.2073 Tw -13.145 -1.15 Td [(tran)-5(sien)-5(t m)9(o)-5(istu)-5(re )6(d)-5(i)1(ffu)-5(sion)-5( )6(an)-5(d h)-5(y)7(g)-5(r)2(o)-5(s)-2(co)-5(pic sw)-5(ellin)-5(g tak)-5(e)-1(s )]TJ 0.0005 Tc 0.0555 Tw 0 -1.144 TD [(place at a cons)6(tant te)-6(m)10(p)-3(erature. )]TJ 0.0009 Tc 0.0551 Tw 13.169 0 Td [(The )6(objective is to determ)11(ine)7( )]TJ 0.0022 Tc 0.3777 Tw -13.169 -1.15 Td [(t)4(h)-2(e pa)8(cka)8(g)-2(e )6(def)5(o)-2(rm)12(at)4(i)4(on a)8(n)-2(d)4( st)4(ress)7( b)4(u)-2(i)4(l)10(du)4(p )6(hi)4(st)4(o)4(r)-1(y)4( )6(wi)4(t)4(h)-2( )]TJ -0.0011 Tc 0.0451 Tw 0 -1.15 TD [(resp)-5(ect)7( to tim)9(e)-7( during)-5( )6(HA)-5(ST. )]TJ -0.0003 Tc 0.0443 Tw [(The)6( nonlinear a)6(n)-4(d tem)10(p)-4(erature-)]TJ -0.0016 Tc 0.3515 Tw 0 -1.144 TD [(d)-5(e)-2(p)-5(e)4(nd)-5(en)-6(t)6( m)8(a)-8(terial b)-5(e)4(h)-5(a)-2(v)-5(i)6(or su)-5(ch)-5( as )6(u)-5(n)1(d)-6(e)-2(rfill and)-5( )6(sold)-5(er )]TJ -0.0011 Tc 0.423 Tw 0 -1.15 TD [(material n)-5(eed)-5(s to)-5( b)-5(e)-1( con)-5(s)4(id)]TJ 0.0009 Tc 0.421 Tw 12.575 0 Td [(ere)7(d)-3(. The t)9(r)-2(ansie)7(n)-3(t m)11(o)-3(isture)7( )]TJ 0.0027 Tc -0.0007 Tw -12.575 -1.15 Td [(di)5(ff)6(usi)11(o)-1(n)5( d)5(u)-1(ri)11(n)5(g)-1( )6(HA)5(ST s)8(h)5(oul)11(d )6(be i)5(n)-1(c)9(o)5(rp)5(orat)11(ed. )]TJ -0.0013 Tc 0.4052 Tw 1.44 -1.245 Td [(Carefu)-5(l ex)-5(am)9(i)-5(n)-5(atio)-5(n of t)7(h)-5(e lo)-5(ad)-5(i)7(n)-5(g pro)-5(f)2(ile sh)-5(own)-5( in )]TJ 0.0003 Tc 0.0857 Tw -1.44 -1.15 Td [(Fig.15 reveals)6( that )-6(the)6( )-6(tem)10(p)-4(er)]TJ 0.0001 Tc 0.0859 Tw 12.263 0 Td [(ature)6( )-6(loadi)8(n)-4(g can be)6( )-6(decoupled)-10( )]TJ 0.0028 Tc 0.1252 Tw -12.263 -1.144 Td [(fr)6(om)13( )-6(m)13(o)-1(i)5(s)2(t)5(u)-1(re l)5(o)-1(a)9(d)-1(i)5(n)5(g i)11(n)-1( e)9(a)9(c)3(h l)11(o)-1(adi)11(n)-1(g)5( st)5(e)9(p)-1(.)7( I)6(n)-1( )6(St)5(eps)8( )6(1 t)11(o)-1( )6(3,)7( )]TJ -0.0017 Tc 0.2137 Tw T* [(m)8(o)-6(istu)-6(re is n)-6(ot p)-6(r)-5(esen)-6(t, th)-6(er)]TJ 0.0007 Tc 0.2113 Tw 11.981 0 Td [(efore, a c)7(o)3(nve)7(ntional )6(nonlinear )]TJ 0.0025 Tc 0.2574 Tw -11.981 -1.15 Td [(m)12(u)-1(lt)4(i)4(-proc)8(ess )6(st)4(ress m)12(odel)4(i)4(ng m)12(e)2(t)4(hodol)10(og)5(y)5( can be a)8(p)-1(pl)10(i)4(e)2(d)5( )]TJ -0.0013 Tc 0.0873 Tw 0 -1.144 TD [(w)-5(ith)-5( th)-5(e h)-5(e)-1(l)7(p)-5( )6(o)-5(f)2( elem)9(en)-5(t d)-5(eath)-5( and)-5( )6(b)-5(i)1(rt)7(h)-5( and)-5( m)9(u)-5(lti-co)-5(n)-5(s)-2(train)-5(t)1( )]TJ 0.002 Tc 0.06 Tw 0 -1.15 TD [(fu)4(nct)4(i)4(o)4(ns i)4(f)-1( )6(ne)8(cessary)4( [)5(31])5(. )6(At)4( st)4(ep )6(4, t)4(h)-2(e )6(packa)8(g)-2(e i)4(s)1( e)8(x)-2(p)4(o)-2(se)8(d)4( )]TJ -0.0013 Tc 0.2552 Tw 0 -1.144 TD [(to)-5( a m)9(o)-5(istu)-5(re lo)-5(ad)-5(ing)-5( co)-5(nditio)-5(n)-5( at a co)-5(nstan)-5(t)1( te)-7(m)9(p)-5(eratu)-5(r)-4(e. )]TJ 0.3993 Tw 0 -1.15 TD [(Sin)-5(ce th)-5(e h)-5(e)-1(at co)-5(ndu)-5(c)-1(tio)-5(n )6(is )-6(m)9(u)-5(ch)-5( )6(faster th)-5(an)-5( m)9(o)-5(istu)-5(re )]TJ 0.0026 Tc 0.4433 Tw T* [(di)5(ff)6(usi)11(o)-1(n)5( )6(du)5(ri)11(ng)5( )6(HA)5(ST,)7( i)5(t)5( i)5(s)2( )6(reas)8(ona)9(b)-1(l)11(e)3( t)5(o)5( ass)8(u)-1(m)13(e)-3( t)5(h)-1(e)9( )]TJ -0.0003 Tc 0.5122 Tw 0 -1.144 TD [(iso)-4(t)2(h)-4(erm)10(al con)-4(d)-4(ition)-4( at)8( St)8(ep)-4( )6(4)-4(.)4( Th)-4(e t)8(r)3(an)-4(sien)-4(t)8( m)10(o)-4(ist)-4(u)-4(re )]TJ 0.0022 Tc 0.2277 Tw 0 -1.15 TD [(di)4(ff)5(usi)10(o)-2(n)4( an)4(d)4( )6(t)4(h)-2(e s)7(u)-2(b)4(s)1(eq)4(ue)8(n)4(t)4( hy)4(g)4(r)-1(o)4(-)-1(st)4(res)7(s)1( )6(m)12(odel)4(i)4(n)-2(g ca)8(n )6(be )]TJ 0.0028 Tc 0.0772 Tw T* [(per)6(fo)5(rm)13(e)3(d usi)11(n)-1(g)5( t)5(h)-1(e)9( c)9(o)-1(u)5(p)-1(l)5(e)3(d)5( t)5(h)-1(e)9(r)]TJ 0.0001 Tc 0.0799 Tw 13.583 0 Td [(m)10(al stress analysis )6(provi)8(d)-4(ed )]TJ -0.0011 Tc 0.0091 Tw -13.583 -1.144 Td [(in)-5( th)-5(e softw)-5(a)5(re. It is no)-5(ted th)-5(at th)-5(e )6(b)-5(u)-5(ilt-in tem)9(p)-5(eratu)-5(r)-4(e fiel)7(d)-5( in )]TJ 0.0008 Tc 0.0912 Tw T* [(the s)6(o)-3(ftwa)7(re at)9( this ste)7(p)-3( is )6(re)7(placed by t)9(h)-3(e t)9(r)-2(ansie)7(n)-3(t m)11(o)-3(isture)7( )]TJ -0.0022 Tc 0.0342 Tw T* [(field)-6( an)-6(alysis so)-6( t)6(h)-6(at th)-6(e )6(n)-6(on)-6(lin)]TJ 0.0006 Tc 0.0314 Tw 12.617 0 Td [(ear hy)9(grostre)7(ss a)7(n)-3(alysis can be)13( )]TJ -0.0009 Tc 0.0569 Tw -12.617 -1.144 Td [(carried)-5( )6(ou)-5(t. An ad)-5(d)-5(ition)-5(a)-1(l field)-5( v)-5(a)5(riab)-5(le sh)-5(ou)-5(ld)-5( )6(b)-5(e)-1( d)-5(e)5(fin)-5(e)5(d)-5( )6(\(in )]TJ -0.0016 Tc 0.9155 Tw T* [(A)-5(BAQ)-5(US )6(keyw)-5(or)-5(d *FIELD\))-5(,)-4( )6(wh)-5(ich r)-5(e)4(p)-5(r)-5(esen)-5(ts th)-5(e )]TJ 0.0008 Tc 0.3611 Tw T* [(te)-5(m)11(p)-3(erature)7( fi)9(eld. The)7( stres)6(s )]TJ 0.0002 Tc 0.3617 Tw 13.073 0 Td [(state carrie)6(d)-4( )6(over from)10( the )]TJ -0.0015 Tc 0.0695 Tw -13.073 -1.144 Td [(p)-5(r)-4(ev)-5(iou)-5(s)-2( lo)-5(ad)-5(i)6(n)-5(g)-5( step)-5( is con)-5(s)4(id)-5(ered)-5( as in)-5(itial stresses, and)-5( )6(th)-5(e )]TJ -0.0008 Tc 0.0508 Tw T* [(material p)-5(r)-4(o)-5(p)-5(e)5(rties at Step)-5( 4)-5( )6(can)-5( b)-5(e)-1( )6(u)-5(p)1(d)-5(a)-1(ted w)-5(ith)-5( th)-5(e m)9(a)-1(te)-7(rial)-5( )]TJ -0.0003 Tc 0.0923 Tw T* [(p)-4(r)3(op)-4(erties )6(w)-4(ith m)10(o)-4(istu)-4(re effect. )]TJ 0.0014 Tc 0.0846 Tw [(At )-6(Ste)7(p)-2( 5, whe)7(n)-2( )-6(t)9(h)-2(e package)7( )]TJ 0.0023 Tc 0.0477 Tw 0 -1.144 TD [(i)4(s)2( rem)12(o)-2(ved f)5(r)-1(o)4(m)6( t)4(h)-2(e HAST c)8(h)-2(am)12(ber an)4(d ra)8(m)12(p)-2(ed do)4(wn t)10(o)-2( t)4(h)-2(e)8( )]TJ 0.0028 Tc 0.2811 Tw 0 -1.15 TD [(ro)5(om)13( t)5(e)-3(m)13(p)-1(erat)5(ure, t)11(h)-1(e m)13(o)-1(i)5(s)-4(t)5(u)-1(re l)5(o)-1(s)8(s)2( d)5(u)-1(ri)11(ng )6(St)5(ep )6(5 i)5(s)2( no)5(t)11( )]TJ 0.0024 Tc 0.2635 Tw T* [(si)4(gni)4(fi)4(ca)8(nt)4(, t)4(h)4(eref)5(ore)8(, m)12(o)-1(i)4(s)2(ture)]TJ -0.0017 Tc 0.2616 Tw 12.869 0 Td [( d)-6(iffusion)-6( is )-6(n)-6(o)-6(t )-6(con)-6(s)-2(id)-6(ered. )]TJ -0.0013 Tc 0.3392 Tw -12.869 -1.144 Td [(Th)-5(e bu)-5(ilt-in)-5( t)7(e)-7(m)9(p)-5(eratu)-5(r)2(e )6(field)-5( is )6(no)-5(w )6(\221sw)-5(itch)-5(e)-1(d\222 b)-5(a)-1(ck to )]TJ 0.0001 Tc 0.2118 Tw T* [(represe)6(n)-4(t the te)-6(m)10(p)-4(erature fie)6(l)]TJ -0.0017 Tc 0.2137 Tw [(d)-6( to)-6( co)-6(ndu)-6(ct th)-6(e conv)-6(en)-6(tional )]TJ -0.0008 Tc 0.2247 Tw T* [(n)-5(on-lin)-5(ear stress an)-5(alysis. St)7(ep)-5( )6(6 is )6(simila)-7(r t)7(o)-5( )6(Step 4 )6(with)-5( )]TJ -0.0004 Tc 0.0804 Tw 0 -1.144 TD [(tran)-4(sien)-4(t)8( m)10(o)-4(ist)-4(u)-4(re d)-4(e)6(sorp)-4(tion o)-4(c)]TJ 0.0001 Tc 0.0799 Tw [(c)6(u)-4(rring a)6(n)2(d the )6(stress )6(state at )]TJ -0.0009 Tc 0.0029 Tw 0 -1.15 TD [(th)-5(e end)-5( )6(of )6(p)-5(r)-4(evio)-5(u)-5(s)4( step)-5( is th)-5(e in)-5(itial stress st)7(ate. )]TJ ET Q BT /GS1 gs /TT3 1 Tf 10 0 0 10 296 40.29 Tm (1063)Tj /TT4 1 Tf 2.954 0 Td (2008 Electronic Components and Technology Conference)Tj ET endstream endobj 135 0 obj [722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 250 333 408 500 500 833 778 180 333 333 500 564 250 333 250 278 500 500 500 500 500 500 500 500 500 500 278 278 564 564 564 444 921 722 667 667 722 611 556 722 722 333 389 722 611 889 722 722 556 722 667 556 611 722 722 944 722 722 611 333 278 333 469 500 333 444 500 444 500 444 333 500 500 278 278 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Tf 9.701 0 0 9.7194 289.233 665.1786 Tm ( )Tj 0.0013 Tc -0.0042 Tw 8.7134 0 0 8.73 71.274 651.3852 Tm [(Fig. )-7(15 a t)5(y)-6(pical)5( multi-step temperature/humidit)5(y)-6( l)5(oading )-7(prof)7(ile )]TJ 0.0022 Tc 0.1258 Tw 9.701 0 0 9.7194 69.7608 634.5072 Tm [(The a)8(b)-2(o)4(v)-2(e m)12(odel)4(i)4(ng a)8(p)4(pr)5(oac)8(h)-2( wa)8(s ap)4(pl)4(i)4(e)2(d )6(t)4(o)-2( a fl)4(i)4(p)-2( c)8(h)-2(i)4(p)4( )]TJ -0.0022 Tc 0.0522 Tw -1.44 -1.144 Td [(p)-6(ack)-6(ag)-6(e su)-6(bj)-6(ected)-6( t)6(o)-6( a l)6(o)-6(ad)-6(i)6(ng)-6( )6(pr)-5(of)-5(ile )6(d)-6(e)-2(f)-5(i)6(ned in Fig. 15)-6(. )6(Th)-6(e )]TJ 0.0007 Tc 0.6072 Tw 0 -1.15 TD [(m)11(o)-3(ir\351 m)11(easure)-5(m)11(ent )6(was )12(also)]TJ -0.0026 Tc 0.6045 Tw 13.385 0 Td [( ap)-6(p)-6(lied to)-6( m)7(easu)-6(r)-6(e th)-6(e )]TJ 0.0023 Tc -0.0063 Tw -13.385 -1.15 Td [(def)5(o)-2(rm)12(at)4(i)4(on )-6(hi)10(st)4(ory)4( du)4(ri)4(n)4(g)-2( H)5(A)-1(ST )-6(at)4( St)4(ep 4.)6( The )-6(m)12(o)-2(i)4(r)-1(\351 )-6(sy)4(st)4(em)6( )]TJ 0.0025 Tc 0.1975 Tw 0 -1.222 TD [(was t)10(une)8(d at)10( t)4(h)-1(e )6(grat)4(i)4(n)5(g )6(re)8(p)5(l)4(i)4(cat)4(i)4(on t)4(e)2(m)12(p)-1(erat)4(ure)8( )6(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 21.736 0 Td <0071>Tj /TT2 1 Tf -0.001 Tc 0.195 Tw 0.402 0 Td (C. The )Tj 0.001 Tc 0.025 Tw -22.138 -1.227 Td [(packa)7(g)-3(e )6(was then s)6(u)3(bjecte)7(d)-3( to 85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 13.499 0 Td <0071>Tj /TT2 1 Tf -0.0018 Tc 0.0278 Tw 0.402 0 Td [(C /85)-6(%)-3(RH)-6(. Fig. 16)-6( sh)-6(ow)-6(ed)6( )]TJ 0.0013 Tc 0.1807 Tw -13.901 -1.144 Td [(the com)11(p)-3(arison bet)9(w)-2(ee)7(n the)7( fin)]TJ 0.0005 Tc 0.1815 Tw 13.283 0 Td [(ite elem)10(ent analysis and )6(the )]TJ 0.0011 Tc 0.4208 Tw -13.283 -1.144 Td [(m)11(o)-3(ir\351 )-6(m)11(easure)-5(m)11(ent. It is )6(note)7(d)-3( that t)9(h)3(e fri)9(nge )6(patte)7(rns )]TJ -0.0018 Tc 0.0818 Tw 0 -1.15 TD [(r)-5(e)-2(pr)-5(esen)-6(t th)-6(e )6(hyg)-6(ro)-6(scop)-6(ic m)8(i)-6(sm)8(a)-8(tch)-6( d)-6(e)4(f)-5(or)-5(m)2(atio)-6(n)-6( )6(on)-6(ly and do )]TJ 0.0027 Tc 0.3592 Tw T* [(not)5( c)9(ont)5(ai)11(n a)9(n)-1(y)5( t)5(h)-1(erm)13(a)3(l)5(l)5(y)5( )-6(i)5(n)-1(d)5(u)-1(ced )6(de)9(fo)5(r)6(m)7(at)5(i)5(ons. Fi)5(g)5(.)7( 17 )]TJ 0.0024 Tc 0.2635 Tw 0 -1.144 TD [(sho)5(w)-1(e)8(d)-1( t)4(h)-1(e m)6(o)-1(i)4(s)2(t)4(u)-1(re )6(di)4(f)5(f)-1(u)5(s)2(i)4(on )6(hi)4(st)4(o)5(r)-1(y)5( an)5(d t)4(h)-1(e )6(pr)5(og)5(res)8(s)2(i)4(v)-1(e)8( )]TJ -0.0004 Tw 0 -1.15 TD [(hy)5(g)5(r)-1(osc)8(o)5(pi)4(c s)8(w)-1(el)4(l)4(i)4(ng i)10(n)-1(d)5(u)-1(ce)8(d )6(packa)8(g)-1(e )6(de)8(fo)5(rm)12(ati)4(on. )]TJ ET q 185.6334839 0 0 15.5393982 85.2419891 475.2720032 cm /Im0 Do Q q 95.8692932 0 0 11.8728027 83.4959869 455.7749939 cm /Im1 Do Q q 95.8692932 0 0 13.1531982 176.7323608 455.1347961 cm /Im2 Do Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 rg 127.32 470.4 92.28 -12.9 re 127.56 457.62 m 127.44 457.74 l 219.54 457.74 l 219.42 457.62 l 219.42 470.28 l 219.54 470.16 l 127.44 470.16 l 127.56 470.28 l f Q BT /TT0 1 Tf 0.0225 Tc -0.1132 Tw 5.9103 0 0 5.9087 132.966 449.1984 Tm [(T)13(i)-5(m)25(e)27( ze)27(ro)13( be)17(f)31(o)3(re)27( H)6(A)36(S)30(T)3( a)17(t)31( )-79(8)27(5)]TJ 0 0 0 RG 0.116 w /C2_0 1 Tf 0 Tc 0 Tw 2 Tr 13.333 0 Td <0071>Tj /TT0 1 Tf 0 Tr 0.443 0 Td (C)Tj ET q 180.4805756 0 0 19.496994 86.9879913 417.4793854 cm /Im3 Do Q q 107.2869873 0 0 20.1371918 172.5419617 394.7232056 cm /Im4 Do Q q 93.0617981 0 0 17.7509918 79.9457855 396.7020264 cm /Im5 Do Q BT /TT0 1 Tf -0.0048 Tc -0.0859 Tw 5.9103 0 0 5.9087 124.1778 387.9138 Tm [(T)-24(i)-22(me)-10( 168)-10(h)-24( af)-7(t)-7(er)-29( )-29(H)-21(A)8(ST)-24( )-39(at)-7( )-79(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 2 Tr 12.664 0 Td <0071>Tj /TT0 1 Tf 0.0167 Tc 0 Tr 0.453 0 Td [(C/8)21(5)12(RH)]TJ ET q 0.9700012 0 0 0.9700012 81.8082886 459.3257294 cm 0.402 0.004 0.203 rg 0 0 m -0.9 0 l -1.74 0.12 l -2.16 0.24 l -2.52 0.3 l -2.88 0.42 l -3.18 0.54 l -3.48 0.72 l -3.78 0.84 l -4.02 1.02 l -4.2 1.2 l -4.38 1.38 l -4.5 1.62 l -4.56 1.8 l -4.56 1.8 -4.56 1.86 v -4.62 2.04 l -4.62 10.08 l -4.62 10.02 l -4.68 10.2 l -4.8 10.38 l -4.92 10.56 l -5.1 10.74 l -5.34 10.86 l -5.58 11.04 l -6.18 11.28 l -6.54 11.4 l -6.9 11.46 l -7.26 11.58 l -8.1 11.64 l -9 11.7 l -9.06 11.7 -9.12 11.76 -9.12 11.82 c -9.12 11.88 -9.06 11.94 -9 11.94 c -8.1 12 l -7.26 12.06 l -6.9 12.18 l -6.54 12.24 l -6.18 12.36 l -5.88 12.48 l -5.58 12.66 l -5.34 12.78 l -5.1 12.96 l -4.92 13.08 l -4.8 13.26 l -4.68 13.44 l -4.62 13.62 l -4.62 21.6 l -4.56 21.78 l -4.56 21.84 -4.56 21.84 y -4.5 22.02 l -4.5 22.02 -4.5 22.08 v -4.38 22.26 l -4.2 22.44 l -4.02 22.62 l -3.78 22.8 l -3.54 22.92 l -3.24 23.1 l -2.52 23.34 l -2.16 23.4 l -1.74 23.52 l -0.9 23.64 l 0 23.64 l 0 23.46 l -0.9 23.4 l -1.74 23.28 l -2.1 23.22 l -2.46 23.1 l -2.82 22.98 l -3.42 22.74 l -3.66 22.62 l -3.9 22.44 l -4.02 22.26 l -4.2 22.08 l -4.2 22.14 l -4.32 21.96 l -4.38 21.78 l -4.38 13.56 l -4.5 13.32 l -4.62 13.14 l -4.8 12.96 l -4.98 12.78 l -5.22 12.6 l -5.46 12.42 l -5.76 12.3 l -6.84 11.94 l -8.1 11.76 l -9 11.7 l -9 11.94 l -8.1 11.88 l -7.2 11.76 l -6.84 11.7 l -6.42 11.58 l -6.12 11.46 l -5.76 11.34 l -5.46 11.22 l -5.22 11.04 l -4.98 10.86 l -4.74 10.68 l -4.62 10.5 l -4.5 10.32 l -4.38 10.08 l -4.38 1.86 l -4.32 1.68 l -4.32 1.74 l -4.2 1.5 l -4.2 1.56 l -4.08 1.38 l -3.9 1.2 l -3.66 1.08 l -3.42 0.9 l -2.82 0.66 l -2.46 0.54 l -2.1 0.42 l -1.74 0.36 l -0.9 0.24 l 0 0.18 l f Q q 0.9700012 0 0 0.9700012 81.8082886 408.5170746 cm 0.402 0.004 0.203 rg 0 0 m -0.9 0.06 l -2.16 0.24 l -2.52 0.36 l -2.88 0.48 l -3.48 0.72 l -3.78 0.9 l -4.02 1.08 l -4.2 1.26 l -4.38 1.44 l -4.5 1.62 l -4.5 1.62 -4.5 1.68 v -4.56 1.86 l -4.62 2.1 l -4.62 10.08 l -4.68 10.26 l -4.8 10.44 l -4.92 10.62 l -5.1 10.74 l -5.34 10.92 l -5.58 11.04 l -6.18 11.28 l -6.9 11.52 l -7.26 11.58 l -8.1 11.7 l -9 11.76 l -9.06 11.76 -9.12 11.82 -9.12 11.88 c -9.12 11.94 -9.06 11.94 -9 12 c -8.1 12 l -7.26 12.12 l -6.9 12.18 l -6.54 12.3 l -6.18 12.42 l -5.58 12.66 l -5.34 12.84 l -5.1 12.96 l -4.92 13.14 l -4.8 13.32 l -4.68 13.5 l -4.68 13.44 l -4.62 13.68 l -4.62 13.62 l -4.62 21.66 l -4.56 21.84 l -4.56 21.84 -4.56 21.9 v -4.5 22.08 l -4.38 22.26 l -4.38 22.26 -4.38 22.32 v -4.2 22.5 l -4.02 22.68 l -3.78 22.8 l -3.54 22.98 l -3.24 23.1 l -2.88 23.28 l -2.52 23.34 l -2.16 23.46 l -1.74 23.52 l -0.9 23.64 l 0 23.7 l 0 23.46 l -0.9 23.46 l -1.74 23.34 l -2.1 23.22 l -2.46 23.16 l -2.82 23.04 l -3.12 22.92 l -3.42 22.8 l -3.66 22.62 l -3.9 22.5 l -4.02 22.32 l -4.2 22.14 l -4.32 21.96 l -4.32 22.02 l -4.38 21.78 l -4.38 21.84 l -4.38 13.56 l -4.5 13.38 l -4.62 13.2 l -4.62 13.14 l -4.8 12.96 l -4.98 12.78 l -5.22 12.6 l -5.46 12.48 l -5.76 12.3 l -6.48 12.06 l -6.84 12 l -7.26 11.88 l -8.1 11.76 l -9 11.76 l -9 12 l -8.1 11.94 l -7.2 11.82 l -6.84 11.76 l -6.42 11.64 l -6.12 11.52 l -5.76 11.4 l -5.46 11.22 l -5.22 11.1 l -4.98 10.92 l -4.74 10.74 l -4.62 10.56 l -4.5 10.38 l -4.5 10.32 l -4.38 10.14 l -4.38 1.92 l -4.32 1.74 l -4.2 1.56 l -4.08 1.38 l -3.9 1.26 l -3.66 1.08 l -3.42 0.96 l -3.12 0.78 l -2.82 0.66 l -2.46 0.6 l -2.1 0.48 l -1.74 0.42 l -0.9 0.3 l 0 0.24 l f Q BT 0.199 0.199 0.801 rg /TT1 1 Tf 0.0027 Tc -0.0934 Tw 5.9103 0 0 5.9087 73.3692 494.7108 Tm [(Bef)-15(o)7(re)7( H)-14(AST)]TJ 0.0176 Tc -0.1182 Tw 0 -9.121 TD [(A)15(fte)13(r)16( H)-9(A)25(S)15(T)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 rg 121.92 410.82 92.28 -12.84 re 122.16 398.1 m 122.04 398.22 l 214.08 398.22 l 213.96 398.1 l 213.96 410.7 l 214.08 410.58 l 122.04 410.58 l 122.16 410.7 l f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 172.02 407.22 -0.9 6.78 re 171.12 407.22 m h 169.32 413.52 m 171.54 418.02 l 173.82 413.52 l f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 172.02 466.68 -0.66 7.8 re 171.36 466.68 m h 169.98 474.12 m 171.66 477.48 l 173.34 474.12 l f Q BT 0 0 0 rg /TT2 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 279.7464 385.4112 Tm ( )Tj 0.0012 Tc 0.0026 Tw 8.7134 0 0 8.73 58.6446 371.6178 Tm [(Fig. 16 Compar)7(ison between)7( moir\351 )]TJ 0.0008 Tc 0.003 Tw 14.414 0 Td [(measurement )7(and fin)7(ite element )]TJ 0.0041 Tc 0 Tw -2.411 -1.147 Td [(anal)8(ys)6(is)6( )]TJ ET q 95.6495667 0 0 68.5013885 69.9353943 274.8894043 cm /Im6 Do Q q 93.3680267 0 0 66.8717957 180.5735626 276.5189972 cm /Im7 Do Q q 95.7078857 0 0 68.5013885 180.5735626 197.6580353 cm /Im8 Do Q q 95.6495667 0 0 68.5013885 69.9353943 197.6580353 cm /Im9 Do Q BT 0.199 0.199 0.801 rg /TT0 1 Tf 0.0004 Tc -0.0955 Tw 7.3239 0 0 7.342 83.496 344.0892 Tm [(T)-16(i)-16(me z)-24(er)-16(o)-16( at )-40(85)]TJ 0.199 0.199 0.801 RG /C2_0 1 Tf 0 Tc 0 Tw 2 Tr <0071>Tj /TT0 1 Tf 0.0002 Tc -0.0953 Tw 0 Tr 7.517 0 Td (C)Tj 6.238 0 Td [(T)-25(i)-16(m)-1(e 20h)-17( at )-79(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 2 Tr <0071>Tj /TT0 1 Tf 0.0001 Tc 0 Tr 7.192 0 Td [(C)-17(/)-16(85R)-17(H)]TJ 0.0002 Tc -0.0953 Tw -21.241 -10.368 Td [(T)-17(i)-16(me 60h)-17( )-8(a)8(t )-79(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 2 Tr <0071>Tj /TT0 1 Tf 0.0001 Tc 0 Tr 7.184 0 Td [(C)-17(/)-16(85R)-17(H)]TJ 0.0003 Tc -0.0954 Tw 7.033 -0.063 Td [(T)-25(i)-16(me 200h)-17( at )-79(85)]TJ /C2_0 1 Tf 0 Tc 0 Tw 2 Tr <0071>Tj /TT0 1 Tf 0.0001 Tc 0 Tr 7.74 0 Td [(C)-25(/)-16(85R)-17(H)]TJ 0 0 0 rg /TT2 1 Tf 0 Tc 9.701 0 0 9.7194 276.2544 197.4834 Tm ( )Tj 0.001 Tc 0.0028 Tw 8.7134 0 0 8.73 79.7712 183.7482 Tm [(Fig. 17 Moistur)7(e)4( diffusion )7(and p)7(a)4(ckage deformation histor)7(y)-7( )]TJ 8.449 -1.153 Td (during HAST )Tj -0.0009 Tc 0.0449 Tw 9.701 0 0 9.7194 69.7608 156.8598 Tm [(Th)-5(e )6(p)-5(a)-1(rticu)-5(l)1(ar )6(in)-5(terest is th)-5(e stress p)-5(a)-1(ttern)-5( and)-5( )6(d)-5(i)1(stribu)-5(tio)-5(n )]TJ 0.0029 Tc 0.0051 Tw -1.44 -1.15 Td [(of )6(u)5(nde)9(r )6(bum)13(p regi)11(on)5( al)5(o)5(ng t)11(h)-1(e c)9(h)-1(i)5(p)-1( s)8(u)-1(r)6(face)9(, w)5(h)-1(i)5(c)3(h )6(re)9(prese)9(n)-1(t)5(s)8( )]TJ 0.0003 Tc 0.2716 Tw 0 -1.144 TD [(the )6(pac)6(k)-4(agi)8(n)-4(g stresse)6(s e)6(x)-4(e)6(r)-3(ted )6(on the)6( int)8(er-layer dielec)6(tric )]TJ 0.0022 Tc 0.4377 Tw 0 -1.15 TD [(\(IL)7(D\) an)4(d u)4(nde)8(r bum)12(p m)6(e)2(tallurgy)4( )-6(\(U)4(BM\) )-6(struct)10(ure)8(, )-6(o)4(r)-1( )]TJ 0.0018 Tc 0.1802 Tw T* [(ILD/)10(UBM)3(, )-6(st)4(r)5(u)-2(ct)4(u)4(r)-1(es. A gl)4(o)4(b)-2(al)]TJ 0.0021 Tc 0.1859 Tw 13.145 0 Td [(-l)4(ocal)4( m)12(o)-2(d)4(e)2(l)4(i)4(ng sc)8(hem)12(e)2( was)7( )]TJ -0.0021 Tc 0.1181 Tw -13.145 -1.144 Td [(ap)-6(p)-6(lied. Fi)6(g)-6(.)-4( )6(18)-6( sh)-6(ow)-6(ed)-6( th)-6(e )6(b)-6(u)-6(m)8(p)-6( r)-5(e)4(g)-6(ion)-6( str)-5(u)-6(ctur)-5(e an)-6(d local)-6( )]TJ -0.0008 Tc 0.0028 Tw T* [(fin)-5(ite elem)9(en)-5(t )-6(mesh)-5( p)-5(a)-1(ttern)-5(s. )6( )]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 356.1 679.38 179.1 64.92 re W n q 180.5501494 0 0 65.6498506 355.5087935 678.6491269 cm /Im10 Do Q Q BT /TT2 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 528.144 670.9986 Tm ( )Tj ET q 134.6747742 0 0 106.6223907 373.972168 563.3867645 cm /Im11 Do Q BT /TT2 1 Tf 9.701 0 0 9.7194 508.647 563.3868 Tm ( )Tj 0.0021 Tc 0.0017 Tw 8.7134 0 0 8.73 316.1796 549.6516 Tm [(Fig. 18 )7(loc)5(a)-2(l f)8(i)-1(ni)6(te )7(elem)5(en)8(t m)5(o)1(de)5(l of )7(the)5( int)6(e)-2(r-l)6(a)5(y)1(er di)6(ele)5(c)-2(tr)8(ic)5( \(IL)5(D\) )]TJ 0.001 Tc 0.0028 Tw 1.496 -1.153 Td [(and under)7( bump )7(metallurg)7(y)-7( )7(\(UBM\) structure, or)7( )7(ILD/UBM, )]TJ 0 Tw 10.113 -1.147 Td (structures )Tj 0.0025 Tc 0.1195 Tw 9.701 0 0 9.7194 326.772 512.6947 Tm [(Fi)4(gu)5(res)8( 1)5(9)-1( )6(pl)4(o)5(t)4(t)4(e)2(d t)4(h)-1(e m)12(a)2(xi)4(m)12(u)-7(m)12( norm)12(a)2(l)4( st)4(ress a)8(n)-1(d)5( s)8(h)-1(ear)12( )]TJ -0.0039 Tc 0.0479 Tw -1.44 -1.15 Td [(s)-5(t)-2(r)-7(e)-4(s)-5(s)-5( )6(a)-4(t)-2( th)-8(e end of th)-8(e S)-6(t)-2(e)-4(p)-2( )6(4.)-6( Th)-8(e s)-5(t)-2(r)-7(e)-4(ss)-5(e)-4(s)1( )6(w)-8(e)-4(r)-7(e)2( ta)-4(k)-8(e)2(n from )-6(a)-10( )]TJ 0.0004 Tc 0.2356 Tw 0 -1.144 TD [(poi)8(n)-3(t along the under c)6(h)-3(i)8(p)-3( )6(su)]TJ 0.0001 Tc 0.2298 Tw [(rface of )-6(ILD/UBM )-6(struct)8(ure)6(.)-2( )]TJ 0.0026 Tc 0.0954 Tw 0 -1.15 TD [(Al)5(o)5(n)-1(g)5( t)5(h)-1(e )6(UB)10(M)4( or)6( di)5(e/)5(b)5(u)-1(m)7(p)-1( i)5(n)]TJ 0.0021 Tc 0.0899 Tw 13.127 0 Td [(t)4(e)8(rface)8(, hy)4(gr)5(osc)8(o)-2(pi)4(c swel)10(l)4(i)4(n)-2(g)4( )]TJ -0.0007 Tc 0.7886 Tw -13.127 -1.15 Td [(in)-5(du)-5(ces ten)-5(s)-1(i)7(o)-5(n)-5( )6(wh)-5(ile therm)9(a)-1(l )-6(lo)-5(ad)-5(ing)-5( itself causes )]TJ 0.0018 Tc 0.0362 Tw 0 -1.144 TD [(com)12(p)-2(ressi)4(o)4(n)-2(. )6(No)4(rm)12(al)4( st)4(ress )-6(due t)10(o)-2( hy)10(gr)5(osc)8(opi)4(c st)4(res)7(s)1( i)4(s)1( t)4(w)-2(i)4(ce )]TJ 0.0011 Tc 0.2168 Tw 0 -1.15 TD [(as high as t)9(h)-3(e)7( value )6(of t)9(h)-3(er)]TJ 0.0003 Tc 0.2176 Tw 12.023 0 Td [(mal stress. Shear stress )6(due)6( to )]TJ -0.0013 Tc 0.1773 Tw -12.023 -1.144 Td [(h)-5(ygro)-5(s)-2(cop)-5(i)1(c sw)-5(ellin)-5(g also i)7(n)-5(creases. FEA sim)9(u)-5(latio)-5(n)-5( resu)-5(lts )]TJ 0.0025 Tc 0.5994 Tw T* [(reveal)4( t)4(h)-1(e si)10(gni)10(fi)4(cance )6(of)6( cont)4(ri)10(but)4(i)10(on)5( of )6(hy)5(gr)6(osc)8(o)-1(pi)4(c)8( )]TJ -0.0011 Tc 0.0631 Tw T* [(sw)-5(ellin)-5(g ind)-5(u)-5(ced)-5( ten)-5(s)-2(ile stresses und)-5(e)-1(r bu)-5(mp)-5( )6(reg)-5(i)7(o)-5(n)1(. Si)7(n)-5(c)5(e in )]TJ -0.0012 Tc 0.3871 Tw 0 -1.144 TD [(g)-5(e)-1(n)-5(e)5(ral t)7(h)-5(e )6(H)-5(A)1(ST tem)9(p)-5(eratu)-5(r)-4(e is low)-5(e)5(r th)-5(an th)-5(e curing)-5( )]TJ 0.5432 Tw 0 -1.15 TD [(te)-7(m)9(p)-5(eratu)-5(r)-4(e, lo)-5(cally th)-5(erm)9(a)-7(l strain)-5( )6(d)-5(u)-5(e to)-5( th)-5(e t)7(h)-5(ermal )]TJ -0.0008 Tc 0.5427 Tw T* [(mis)-8(m)9(a)-7(t)1(ch)-5( b)-5(e)-1(tw)-5(een)-5( )6(bu)-5(m)9(p)-5( an)-5(d)-5( )6(un)-5(d)-5(e)5(rfill is co)-5(m)9(p)-5(ressiv)-5(e)-1(, )]TJ 0.0005 Tc 0.0435 Tw 0 -1.144 TD [(therefore, appl)8(ies the)6( c)6(o)-3(m)10(p)-3(ressi)8(ve)6( stresses)6( )6(on t)8(h)-3(e)6( under )6(bum)10(p)-9( )]TJ 0.0002 Tc 0.0438 Tw 0 -1.15 TD [(and die )-6(s)5(u)-4(rfac)6(e. During )-6(HAST, )]TJ -0.0015 Tc 0.0515 Tw [(w)-5(ith m)8(o)-5(re )6(m)8(o)-5(istu)-5(re ab)-5(so)-5(rb)-5(ed, )]TJ -0.0011 Tc 0.273 Tw T* [(th)-5(e un)-5(derfill an)-5(d)-5( )6(sub)-5(s)-2(trate )6(sw)-5(ell to)-5( cause th)-5(e h)-5(y)7(g)-5(r)2(o)-5(s)-2(co)-5(p)-5(i)1(c )]TJ 0.001 Tc 0.055 Tw 0 -1.144 TD [(swelling st)9(ress)6(es. The)7(se stres)6(ses)]TJ 0.0005 Tc 0.0555 Tw 13.055 0 Td [( are tensile )6(state under )6(bum)10(p)-3(,)-7( )]TJ 0.0024 Tc 0.1676 Tw -13.055 -1.15 Td [(whi)4(c)8(h ca)8(uses)8( )6(ILD/)10(UBM)4( o)5(p)-1(e)8(n)-2(i)4(n)5(g )]TJ -0.0008 Tc 0.1708 Tw 14.165 0 Td [(failu)-5(re. B)6(o)-5(th)-5( ten)-5(s)-2(ile stress )]TJ 0.0008 Tc 0.3071 Tw -14.165 -1.15 Td [(and shea)7(r st)9(re)7(ss reac)7(h thei)9(r highest )6(value nea)7(r)-2( the )6(upper )]TJ 0.0017 Tc 0.3362 Tw T* [(corner of bum)12(p)-2(, )-6(from)12( )-6(where )]TJ -0.0016 Tc 0.3455 Tw 13.277 0 Td [(th)-5(e p)-5(a)-2(ck)-6(ag)-5(e failure u)-6(s)4(ually)-5( )]TJ -0.0014 Tc 0.1174 Tw -13.277 -1.15 Td [(in)-5(itiates [32)-5(])2(. )6(Bo)-5(th h)-5(y)7(g)-5(r)2(o)-5(s)-2(cop)-5(i)1(c sw)-5(ellin)-5(g ind)-5(u)-5(c)-1(ed ten)-5(s)-2(ile )6(an)-5(d)7( )]TJ -0.0006 Tc 0.0026 Tw 0 -1.15 TD [(sh)-4(ear stresses i)7(m)9(p)-4(o)-4(s)-1(e a po)-4(ten)-4(t)7(ial th)-4(reat to)-4( )6(ILD)-4(/)1(U)-4(B)1(M fail)7(u)-4(r)-4(e. )]TJ ET q 111.8021851 0 0 14.0843964 326.9465485 255.3924408 cm /Im12 Do Q q 111.8022003 0 0 15.3065948 435.6641541 254.9268494 cm /Im13 Do Q q 0.9700012 0 0 0.9700012 9 12 cm 1 1 1 rg 348.54 130.62 200.52 121.92 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 1 1 rg 368.82 144.6 163.14 83.1 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 0.004 0.004 rg 386.16 144.6 23.7 61.2 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 0.004 0.004 rg 467.76 144.6 23.7 74.16 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 rg 409.86 144.6 22.92 28.5 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 rg 491.46 144.6 23.16 54.9 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 368.82 144.48 0.24 83.1 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 367.38 144.36 1.56 0.24 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 367.38 158.04 1.56 0.3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 367.38 171.78 1.56 0.3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 367.38 185.76 1.56 0.3 re f Q q 0.9700012 0 0 0.9700012 365.359024 206.2718353 cm 0.004 0.004 0.004 rg 0 0 m 1.56 -0.24 l 1.56 -0.54 l -0.06 -0.24 l f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 367.38 213.72 1.56 0.3 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 367.38 227.46 1.56 0.24 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 368.94 144.36 163.14 0.24 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 368.82 142.92 0.24 1.56 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 450.42 142.92 0.24 1.56 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 0.004 rg 531.96 142.92 0.3 1.56 re f Q BT /TT0 1 Tf 0.001 Tc -0.0931 Tw 6.8921 0 0 6.9097 389.628 245.9058 Tm [(I)-17(L)-21(D)-20( str)-15(esse)8(s \(M)-10(Pa\) )-34(at )-76(85C)-11( )-42(a)8(f)-4(ter)-15( )-42(H)-11(A)14(ST)]TJ /TT1 1 Tf 0 Tc 0 Tw 4.8499 0 0 4.8624 361.401 150.6906 Tm (0)Tj 0.0199 Tc -0.576 2.753 Td (10)Tj 0 2.753 TD (20)Tj T* (30)Tj 0 2.837 TD (40)Tj 0 2.753 TD (50)Tj T* (60)Tj /TT0 1 Tf -0.0159 Tc -0.0149 Tw 6.1265 0 0 6.1419 386.6016 141.9606 Tm [(No)-32(r)-7(m)-1(al)-33( st)-15(ress)]TJ 13.252 0 Td [(S)-14(h)-32(ear S)-23(t)-15(ress)]TJ 0.0698 Tw 0 6.1419 -6.1265 0 356.0466 170.5368 Tm [(st)-15(r)-6(esse)-9(s \()-15(M)-17(P)-12(a)-9(\))]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 1 1 0.602 rg 401.46 219.78 61.8 16.14 re f Q q 0.9700012 0 0 0.9700012 9 12 cm 1 0.004 0.004 rg 409.08 229.02 3.66 3.96 re f Q BT /TT1 1 Tf -0.003 Tc -0.0377 Tw 6.3815 0 0 6.3979 410.871 233.5675 Tm [(wi)-18(t)-8(h)-12( m)-9(o)-3(i)-27(s)-23(tu)-12(r)11(e)]TJ ET q 0.9700012 0 0 0.9700012 9 12 cm 0.004 0.004 1 rg 409.08 221.64 3.66 4.26 re f Q BT /TT1 1 Tf 0.0035 Tc -0.0442 Tw 6.3815 0 0 6.3979 410.4054 226.4671 Tm [(w)5(i)-11(thout m)-12(o)3(i)-11(s)-16(tur)17(e)]TJ /TT2 1 Tf 0 Tc 0 Tw 9.701 0 0 9.7194 547.6409 137.0136 Tm ( )Tj 0.0011 Tc 0.0027 Tw 8.7134 0 0 8.73 317.6346 123.2202 Tm [(Fig. 19 max)7(i)-2(mum normal and sh)7(ear str)7(e)-3(ss at UBM/ILD region)7( in)7( a )]TJ 0.0028 Tc -0.0057 Tw 9.939 -1.147 Td [(flip chip )-7(p)9(ack)9(ag)9(e )]TJ /TT3 1 Tf 0.0002 Tc 0.0018 Tw 9.701 0 0 9.7194 312.804 96.2154 Tm [( 5. )6(Conclusions )]TJ /TT2 1 Tf -0.0016 Tc 0.0996 Tw 1.44 -1.233 Td [(Th)-5(e influ)-5(e)4(n)-5(c)-2(e )6(o)-5(f)1( m)8(o)-5(istu)-5(re on in)-6(terface fract)6(u)-5(r)-5(e toug)-5(hn)-5(ess )]TJ 0.3395 Tw -1.44 -1.15 Td [(o)-5(r)-5( adh)-5(e)-2(sion)-6( streng)-5(th)-6( is a )6(k)-5(e)-2(y fo)-5(r )6(p)-5(a)-2(ck)-5(ag)-5(e in)-5(tergrity an)-5(d )]TJ -0.001 Tc 0.165 Tw 0 -1.144 TD [(reliab)-5(ility in)-5( sp)-5(ite o)-5(f)-4( )6(failu)-5(re )-6(m)9(ech)-5(an)-5(ism)9(s)-2( )-6(an)-5(d)-5( env)-5(i)1(ro)-5(n)-5(m)9(en)-5(tal)-5( )]TJ ET Q BT /GS1 gs /TT4 1 Tf 10 0 0 10 296 40.29 Tm (1064)Tj /TT5 1 Tf 2.954 0 Td (2008 Electronic Components and Technology Conference)Tj ET endstream endobj 139 0 obj <>stream Adobed     $$''$$53335;;;;;;;;;;  %% ## ((%%((22022;;;;;;;;;;"? 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The adh)-4(e)-1(sion at )6(roo)-4(m)9( te)-7(m)9(p)-4(eratu)-4(r)-4(e )]TJ 0.0006 Tc 0.1694 Tw 0 -1.144 TD [(may not )6(be a)7(b)3(le to fully re)7(present t)9(h)-3(e i)9(n)-3(terface )6(be)7(ha)7(vior at )]TJ 0.5232 Tw 0 -1.15 TD [(higher tem)11(p)-3(erature. )6(Only )-1(the adhesi)9(on )6(measurem)11(ent )-6(at )]TJ 0.0002 Tc 0.1098 Tw T* [(elevated tem)10(p)-4(erature)6( with m)10(o)-4(istu)-3(re effect c)6(o)-4(rrelates with )6(the )]TJ 0.0022 Tc -0.0062 Tw 0 -1.144 TD [(reflo)4(w)-2( pe)8(rf)5(orm)12(a)2(nce. )-6( )]TJ -0.0012 Tc 0.2191 Tw 1.44 -1.252 Td [(Bo)-5(th)-5( )6(TGA)-5(-)2(TMA)-5( m)9(e)-1(th)-5(o)-5(d)1( an)-5(d Mo)-5(i)7(r)-4(\351 i)7(n)-5(terfero)-5(m)9(e)-1(try w)-5(e)5(e)-7( )]TJ 0.0002 Tc 0.1398 Tw -1.44 -1.144 Td [(applied t)8(o)-4( cha)6(r)-3(acterize the )6(hyg)]TJ -0.002 Tc 0.142 Tw 12.827 0 Td [(ro)-6(scop)-6(ic swellin)-6(g)-6( of)-5( und)-6(er)-5(f)-5(il)-6(l)-6( )]TJ -0.0009 Tc 0.0449 Tw -12.827 -1.15 Td [(materials. Th)-5(e p)-5(o)-5(t)1(en)-5(tial so)-5(urce o)-5(f)-4( )]TJ 0.0004 Tc 0.0436 Tw [(e)6(r)-3(ror t)8(h)-3(at is associated )6(with )]TJ 0.0025 Tc 0.1915 Tw 0 -1.15 TD [(t)4(h)-1(e TG)5(A-TM)10(A m)12(e)2(t)4(hod i)4(s)2( due t)10(o)-1( t)4(h)-1(e n)5(o)5(n)-1(-)6(u)5(ni)4(fo)5(rm)12( )-6(m)12(o)-1(ist)4(u)-1(re)8( )]TJ 0.0001 Tc 0.0019 Tw 0 -1.144 TD [(distribution. The a)6(n)-4(alytical re)]TJ -0.0011 Tc 0.0031 Tw 11.831 0 Td [(su)-5(lts show)-5(ed th)-5(at th)-5(e TGA)-5(-)-4(TMA )]TJ 0.0003 Tc 0.1037 Tw -11.831 -1.15 Td [(method could )6(ove)6(restim)10(ate the C)7(H)-3(S as m)10(u)-4(ch as)6( )6(246%)5( if )6(the )]TJ -0.0021 Tc 0.1901 Tw 0 -1.15 TD [(av)-6(erag)-6(ed)-6( m)8(e)-2(th)-6(o)-6(d )6(u)-6(s)-3(es dry co)-6(nd)-6(itio)-6(n as )6(referen)-6(c)-2(e cond)-6(itio)-6(n)-6(,)2( )]TJ 0.0014 Tc 0.0066 Tw 0 -1.144 TD [(while the C)9(H)-2(S coul)9(d be )6(unde)7(restim)11(ated as m)11(u)-2(ch as 27% i)9(f)-2( the)7( )]TJ -0.0012 Tc 0.4111 Tw 0 -1.15 TD [(av)-5(erag)-5(ed)-5( m)9(e)-1(t)-5(h)-5(od)-5( )6(u)-5(s)-2(es )6(fu)-5(ll)7(y satu)-5(rated)-5( )6(po)-5(in)-5(t as referen)-5(c)-1(e)-7( )]TJ -0.001 Tc 0.123 Tw T* [(co)-5(nd)-5(itio)-5(n. In)-5( ord)-5(e)5(r to)-5( ob)-5(tain)-5( )6(th)-5(e tru)-5(e)-1( )6(p)-5(r)2(op)-5(erty o)-5(f)-4( sw)-5(elling)-5(,)3( a )]TJ -0.0023 Tc 0.3162 Tw 0 -1.144 TD [(si)-6(m)8(p)-6(le pro)-6(c)-2(edu)-6(r)-5(e )6(h)-6(a)-2(s b)-6(e)-2(en su)-6(gg)-6(ested, in wh)-6(ich )6(on)-6(ly )6(tw)-6(o)-6( )]TJ -0.0011 Tc 0.0511 Tw 0 -1.15 TD [(p)-5(o)-5(i)7(n)-5(t)1(s are tak)-5(e)5(n)-5(:)1( on)-5(e po)-5(in)-5(t )6(with)-5( fu)-5(lly satu)-5(rated)-5( con)-5(d)-5(ition)-5(,)-3( )6(an)-5(d )]TJ -0.0017 Tc 0.3276 Tw T* [(an)-6(o)-6(t)6(h)-6(e)-2(r po)-6(in)-6(t)6( w)-5(ith fu)-6(lly dr)-5(y cond)-6(itio)-6(n)-6(.)2( )6(Tho)-6(s)-2(e t)6(w)-5(o poin)-6(ts )]TJ -0.0005 Tc 0.7164 Tw 0 -1.144 TD [(satisfy th)-4(e )6(u)-4(n)-4(i)7(form)9( )-6(m)9(o)-4(istu)-4(re d)-4(i)1(stri)7(b)-4(u)-4(t)1(i)7(o)-4(n )6(requ)-4(irem)9(en)-4(t.)-8( )]TJ 0.0013 Tc 0.2526 Tw 0 -1.15 TD [(Excellent a)7(g)-3(re)7(e)-5(m)11(ent has )6(be)7(en )6(reache)7(d)-3( )6(for the)7( hy)9(grosc)7(opic)7( )]TJ 0.0032 Tc 0.3227 Tw 0 -1.144 TD [(swel)5(l)5(i)5(ng c)9(h)-1(a)9(ra)9(c)3(t)5(e)3(ri)5(zat)5(i)5(on )6(by)5( bot)11(h T)8(G)5(A-T)8(M)5(A m)13(e)3(t)5(hod )6(and)5( )]TJ 0.0021 Tc 0.7018 Tw 0 -1.15 TD [(M)3(o)-2(i)4(r)-1(\351 i)10(n)-2(t)4(e)2(rfe)8(rom)12(e)2(t)4(r)-1(y)4( )-6(m)12(e)2(t)4(hods)7(, )6(w)4(h)-2(en)4( t)10(h)-2(e )6(n)4(o)-2(n)4(-)-1(u)4(n)-2(i)4(f)5(o)4(r)-7(m)6( )]TJ 0.0003 Tc 0.0017 Tw T* [(m)10(o)-4(istu)-4(re d)-4(i)2(stri)8(b)-4(u)-4(tion)-4( effect)8( is rem)10(o)-4(v)-4(ed. )]TJ 0.0029 Tc 0.0231 Tw 1.44 -1.245 Td [(A )6(ne)9(w )6(fi)5(ni)5(t)5(e)3( el)11(em)13(ent)5( anal)5(y)5(s)2(i)5(s)8( m)13(e)3(t)5(hodol)11(ogy)11( i)11(s)2( p)5(rese)9(n)-1(t)5(e)3(d)5( i)5(n)-1( )]TJ 0.003 Tc 0.017 Tw -1.44 -1.15 Td [(t)5(h)-1(i)5(s)2( pape)9(r,)7( by)5( whi)5(c)9(h,)7( )-6(t)5(h)-1(e)9( )-6(t)5(i)5(m)7(e-de)9(pe)9(nde)9(nt)5( n)5(onl)5(i)5(n)-1(ea)9(r)6( )-6(anal)5(y)5(s)8(i)5(s)2( )-6(o)5(f )]TJ 0.0027 Tc 0.3292 Tw 0 -1.144 TD [(packa)9(g)-1(e )6(de)9(fo)5(r)6(m)7(at)5(i)5(ons i)5(n)5(duc)9(e)3(d )6(by)5( hy)11(gr)6(os)8(copi)5(c a)9(s)2( w)5(e)3(l)5(l)5( as )]TJ 0.0007 Tc 0.3492 Tw 0 -1.15 TD [(therm)11(a)1(l mis)-6(m)5(atches )6(ca)7(n )12(be)7( )]TJ -0.0004 Tc 0.3443 Tw 12.473 0 Td [(analyzed. The existing linear)-9( )]TJ 0.0022 Tc 0.0838 Tw -12.473 -1.15 Td [(sup)4(e)2(r)5(posi)4(t)4(i)4(o)4(n)4( m)6(e)2(t)4(hod,)6( whi)4(c)8(h)4( )-6(co)4(u)4(p)-2(l)4(e)2(s hy)4(g)4(r)-1(o)4(s)1(co)4(pi)4(c )-6(st)4(ress)7( wi)4(t)4(h)-2( )]TJ -0.0011 Tc 0.0631 Tw 0 -1.144 TD [(th)-5(erm)9(a)-1(l stress )6(an)-5(alysis, can)-5( )6(no)-5(t ap)-5(p)-5(l)1(y t)7(o)-5( th)-5(e prob)-5(lem)9( w)-5(ith)-5( )6(th)-5(e )]TJ 0.0028 Tc 0.1012 Tw 0 -1.15 TD [(no)5(nl)5(i)5(n)-1(ea)9(r m)13(a)3(t)5(e)-3(ri)5(al)5( pr)6(ope)9(rt)5(i)5(e)3(s.)7( The )6(pr)6(op)5(ose)9(d)5( )-6(m)13(e)3(t)5(hod al)5(l)5(o)5(w)5(s)2( a )]TJ -0.0016 Tc 0.4415 Tw T* [(fu)-5(lly in)-5(teg)-5(r)-5(ated)-5( )6(no)-5(n)-5(lin)-5(ear fin)-6(ite elem)8(en)-5(t)-6( stress m)8(o)-5(d)-5(e)-2(lin)-6(g )]TJ -0.0007 Tc 0.0807 Tw 0 -1.144 TD [(d)-5(u)1(ring)-5( H)-4(A)2(ST to)-5( )-6(cap)-5(t)7(u)-5(re )-6(th)-5(e ti)]TJ 0.0025 Tc 0.0835 Tw 12.395 0 Td [(m)12(e)2(-depen)5(de)8(n)5(t)4( def)6(o)-1(rm)12(at)4(i)4(on )6(and)5( )]TJ -0.0014 Tc 0.2313 Tw -12.395 -1.15 Td [(stress )6(b)-5(u)-5(ildup)-5(. Th)-5(e Mo)-5(ir\351 in)-5(terfero)-5(m)9(e)-1(try )-6(measu)-5(r)-4(em)9(en)-5(t w)-5(a)-1(s )]TJ 0.0026 Tc 0.1554 Tw 0 -1.15 TD [(t)5(h)-1(en a)9(ppl)5(i)5(e)3(d t)11(o)-1( a hi)11(gh)5(-)6(d)-1(ensi)11(t)5(y)5( )]TJ 0.0015 Tc 0.1565 Tw 12.923 0 Td [(flip chip )6(pa)7(ckage t)9(o)-2( m)11(eas)-5(ure)7( )]TJ 0.0011 Tc 0.0429 Tw -12.923 -1.144 Td [(the wa)7(rpa)7(g)-3(e a)7(n)3(d the strai)9(n)-3(s of )]TJ 0.0008 Tc 0.0372 Tw 12.479 0 Td [(packa)7(g)-3(e. The num)11(e)1(rical )-6(results)-6( )]TJ 0.0002 Tc 0.0498 Tw -12.479 -1.15 Td [(by nonlinear )6(finite ele)-6(m)10(ent an)]TJ 0.0021 Tc 0.0479 Tw 12.197 0 Td [(al)4(y)4(s)1(i)4(s)1( had)4( ve)8(r)5(y)4( go)4(od )6(ag)4(reem)6(ent)4( )]TJ -0.0014 Tc 0.3153 Tw -12.197 -1.15 Td [(w)-5(ith th)-5(e exp)-5(e)5(rim)9(e)-1(n)-5(t)1(al d)-5(a)-1(ta. )6( The )6(resu)-5(lts of th)-5(e effect)7( of )]TJ -0.0023 Tc 0.0883 Tw 0 -1.144 TD [(h)-6(ygro)-6(s)-3(cop)-6(ic sw)-6(ellin)-6(g)-6( )6(on)-6( th)-6(e in)-6(te)]TJ 0.0005 Tc 0.0795 Tw 13.337 0 Td [(r-layer die)6(l)2(ectric )-6(reveals that )]TJ 0.001 Tc 0.067 Tw -13.337 -1.15 Td [(the overall ILD stresses )6(under HAST ca)7(n )6(be twice as hi)9(gh as)6( )]TJ -0.001 Tc 0.003 Tw 0 -1.15 TD [(th)-5(o)-5(s)-2(e con)-5(s)-2(id)-5(ered)-5( )6(w)-5(ith)-5(ou)-5(t the )6(m)9(o)-5(istu)-5(re effect)7(. )]TJ /TT1 1 Tf 0.0014 Tc 0 Tw 0 -1.754 TD [(Ackn)6(owledgm)7(e)1(nts )]TJ /TT0 1 Tf 0.0022 Tc 0.0358 Tw 1.44 -1.233 Td [(Thi)4(s)1( pa)8(pe)8(r t)4(o)-2(u)4(c)2(hes u)4(p)4(on )6(q)4(u)-2(i)4(t)4(e)2( a num)12(ber o)4(f)-1( )6(researc)8(h)-2( area)8(s,)6( )]TJ 0.0012 Tc 0.7147 Tw -1.44 -1.15 Td [(and re)7(pre)7(sent)9(s the c)7(o)-3(llected contri)9(buti)9(ons)6( of se)7(ve)7(ral )]TJ -0.0014 Tc 0.0154 Tw 0 -1.15 TD [(in)-5(d)-5(i)1(v)-5(i)7(d)-5(u)-5(a)-1(ls, in)-5(stitu)-5(tio)-5(n)-5(s)-2( and)-5( co)-5(m)9(p)-5(an)-5(ies. A)-5(l)7(beit in)-5(co)-5(m)9(p)-5(lete,)-9( I\222d)-5( )]TJ -0.0018 Tc 0.1658 Tw 0 -1.144 TD [(lik)-6(e to no)-6(te t)6(he fo)-6(llow)-6(ing)-6( )6(k)-6(e)4(y in)-6(d)-6(i)6(v)-6(idu)-6(als/men)-6(to)-6(r)-5(s and th)-6(eir )]TJ 0.0023 Tc 0.1497 Tw 0 -1.15 TD [(respect)4(i)4(v)-2(e)8( or)5(g)4(a)2(ni)4(zat)4(i)4(ons:)4(T)7(o)4(n)4(g)-2( Ya)8(n Tee \(A)5(m)12(kor\),)6( )-6(St)4(eve)8( Cho)4( )]TJ 0.0014 Tc 0.0666 Tw T* [(\(I)4(ntel\), Yi He \(I)4(ntel\), X)4(u)-2(efe)7(n)]TJ 0.0027 Tc 0.0713 Tw 11.891 0 Td [(g Z)8(h)-1(a)9(n)-1(g)5( \()6(U)-1(ni)11(v)5(e)3(rsi)5(t)5(y)5( of)6( Tex)5(a)3(s)8( at )]TJ 0.0017 Tc 0.0363 Tw -11.891 -1.144 Td [(Austi)10(n)-2(\), )6(Da)8(niel Shi \(A)4(STRI)5(\),)6( Zhiy)4(ua)8(n Ya)8(ng)4( \(IME\))5(, T.B. L)7(i)-2(m)12( )]TJ 0.0025 Tc 0.3294 Tw 26.493 67.455 Td [(\(IM)4(E)7(\),)7( X)5( )6(Dai)4( \()6(H)-1(P)7(\),)7( I)6(b)-1(ra)8(hi)10(m)12( Bekar \()6(I)6(n)-1(t)4(e)2(l)4(\), a)8(n)5(d )6(Paul)10( H)5(o)5( )]TJ -0.0007 Tc 0.0027 Tw 0 -1.144 TD [(\(Un)-5(i)1(v)-5(e)5(rsity o)-5(f)2( )6(Tex)-5(a)-1(s at )6(Au)-5(stin)-5(\). )]TJ /TT1 1 Tf 0.001 Tc 0 Tw 0 -1.76 TD [(Refere)7(nces )]TJ /TT0 1 Tf 0.0039 Tc 0 -1.233 TD (1.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf -0.0012 Tc 0.5071 Tw 1.05 0 Td [(X)-5(.)-3(J. Fan)-5(,)3( \223Mo)-5(i)1(stu)-5(r)-4(e relat)7(e)-1(d)-5( )6(reliab)-5(ility)-5( in electron)-5(i)7(c )]TJ 0.0008 Tc 0 Tw 0 -1.15 TD (packging\224, )Tj /TT3 1 Tf -0.0016 Tc 0.5915 Tw 5.195 0 Td [(20)-5(05)-5(/200)-5(6)-5(/)6(2)-5(007/2)-5(0)1(0)-5(8)1( ECTC Pro)-6(fession)-5(a)-6(l)6( )]TJ 0.0009 Tc -0.0049 Tw -5.195 -1.15 Td [(Developme)7(nt Course)7( )-6(Notes)]TJ /TT0 1 Tf -0.0014 Tc -0.0026 Tw 10.943 0 Td [(, 2)-5(0)1(05)-5(/20)-5(0)1(6)-5(/)1(2007)-5(/20)-5(0)1(8)-5( )]TJ 0.0039 Tc 0 Tw -12.743 -1.245 Td (2.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf 0.0029 Tc 0.1191 Tw 1.05 0 Td [(G.)7(Q. )-6(Z)8(h)-1(a)9(n)-1(g)5(,)1( W.)7(D. va)9(n Dri)5(e)9(l)5(,)1( )-6(an)5(d X.J.)7( )-6(Fa)9(n, )-6(\223)]TJ /TT3 1 Tf -0.0011 Tc 0 Tw 18.928 0 Td [(Mechan)-5(ics )]TJ 0.0006 Tc 0.0014 Tw -18.928 -1.15 Td [(of Microelectr)6(onics)]TJ /TT0 1 Tf 0.0016 Tc 0.0004 Tw 7.865 0 Td [(\224)8(, S)6(p)-2(ri)10(nger, )6(2006 )]TJ 0.0039 Tc 0 Tw -9.665 -1.245 Td (3.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf 0.0011 Tc 0.6788 Tw 1.05 0 Td [(X.J. Fan, )-6(\223)7(M)2(echanics of )-12(m)11(o)-3(isture )-6(for polym)11(ers: )]TJ 0.0004 Tc 0.5055 Tw T* [(fundam)10(ental conce)6(p)-3(ts)6( and m)10(odel study\224, 8t)8(h )6(IEEE )]TJ -0.0013 Tc 0.3572 Tw 0 -1.144 TD [(In)-5(tern)-5(ation)-5(a)-1(l Co)-5(nferen)-5(ce )-6(on)]TJ 0.0005 Tc 0.3614 Tw 11.939 0 Td [( The)6(r)-2(m)10(al and Mec)6(h)-3(anical)8( )]TJ 0.0024 Tc 0.4255 Tw -11.939 -1.15 Td [(Sim)12(u)-1(l)4(a)2(t)4(i)4(on a)8(n)4(d E)7(x)5(peri)4(m)12(e)2(nt)4(s i)4(n)4( M)4(i)4(cro)4(e)2(l)4(ect)4(ro)5(ni)4(cs a)8(n)-1(d)4( )]TJ 0.0026 Tc -0.0006 Tw T* [(M)4(i)5(crosy)5(s)2(t)5(e)3(m)13(s)2(, \(Eu)5(r)6(oSi)5(m)13(E\), A)5(p)-1(ri)5(l)5( )6(20)5(-2)5(3,)7( 2)5(0)5(0)5(8)-1( )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td (4.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf 0.0027 Tc 0.2093 Tw 1.05 0 Td [(A.)7(A.)7(O.)7( Tay)5(,)1( a)9(n)-1(d)5( T.)7(Y.)7( Li)11(n,)7( )]TJ 0.0006 Tc 0.2054 Tw 11.927 0 Td [(\223Influe)7(n)-3(ce of Tem)11(p)-3(erature, )]TJ -0.0018 Tc 0.5077 Tw -11.927 -1.144 Td [(H)-6(u)-6(m)8(id)-6(ity an)-6(d)-6( D)-6(e)-2(fect Lo)-6(catio)-6(n)-6( on)-6( )6(D)-6(e)-2(la)-8(m)8(in)-6(a)-2(tio)-6(n)-6( in )]TJ 0.0001 Tc 0.1819 Tw 0 -1.15 TD [(Plastics Packa)6(g)-4(es\224, )]TJ /TT3 1 Tf 0.0023 Tc 0.1737 Tw 8.333 0 Td [(IE)7(EE Tr)8(ans)8(act)4(i)4(o)4(ns o)4(n)-2( Com)5(p)-2(o)4(n)-2(e)8(n)-2(t)4(s)2(,)6( )]TJ 0.0007 Tc 0.0913 Tw -8.333 -1.15 Td [(Pack)7(agi)9(ng and )-6(Manufact)9(uring Technologies)]TJ /TT0 1 Tf 0.0014 Tc 0.0906 Tw 18.142 0 Td [(, Part)9( )-6(A, 22,)5( )]TJ 0.0032 Tc -0.0072 Tw -18.142 -1.144 Td [(No)5(. 4, p)5(p)-1(. 5)5(1)-1(2)5(-)6(51)5(8,)7( )-6(1)5(9)5(99 )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td (5.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf -0.0011 Tc 0.0991 Tw 1.05 0 Td [(S. )6(Liu and Y. )6(H)-5(.)3( Mei, \223Beh)-5(av)-5(ior )6(o)-5(f)2( )6(D)-5(e)-1(lam)9(i)-5(n)-5(a)-1(ted Plastic )]TJ 0.0007 Tc 0.6852 Tw 0 -1.144 TD (IC Pac)Tj 3.377 0.018 Td (k)Tj 9.701 0 0 9.7194 330.264 513.8005 Tm 3.881 -1.144 Td [(ages)6( Subjected t)9(o)]TJ -0.0017 Tc 0.6876 Tw 8.37 0 Td [( En)-6(capsu)-6(latio)-6(n)-6( C)5(oo)-6(lin)-6(g, )]TJ -0.0019 Tc 0.6278 Tw -12.251 -1.15 Td [(Mo)-6(istu)-6(re Ab)-6(so)-6(rp)-6(tion)-6(,)-4( and )6(W)-12(a)4(v)-6(e)-2( So)-6(ldering)-6(\224)-2(, )]TJ /TT3 1 Tf 0.0016 Tc 0 Tw 21.088 0 Td [(IEEE)7( )]TJ 0.0026 Tc 1.1872 Tw -21.088 -1.15 Td [(Tra)5(n)-1(s)8(a)-1(ct)5(i)5(o)-1(n)5(s)8( o)5(n)-1( C)4(o)5(m)5(p)-1(o)5(n)-1(e)9(n)-1(t)5(s)2(, P)8(a)5(ckagi)11(ng)5(, )6(an)5(d )]TJ 0.0001 Tc 0.2358 Tw T* [(Manuf)8(a)-4(cturing Technologies)]TJ /TT0 1 Tf -0.0028 Tc 0.2327 Tw 11.819 0 Td [(, )-6( )-6(P)-5(a)3(r)-6(t)-1( A)-7(,)-5( Vo)-7(l.)-5( )-6(18)-7(, N)-7(o)-1(.)-5( 3)-7(,)1( )]TJ 0.0039 Tc 0 Tw -11.819 -1.15 Td [(19)6(9)6(5 )]TJ -1.8 -1.245 Td (6.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf 0.0028 Tc 0.5031 Tw 1.05 0 Td [(X.J.)7( Fa)9(n, )6(G.)7(Q. Z)8(h)-1(a)9(n)-1(g)5(,)1( a)9(nd )]TJ 0.0002 Tc 0.5057 Tw 13.331 0 Td [(L.J. Ernst)8(,)-2( \223Interfacial )]TJ -0.0015 Tc 0.2734 Tw -13.331 -1.15 Td [(d)-5(e)-2(lamin)-5(a)-2(tio)-5(n)-5( )6(mech)-5(an)-5(ism)8(s)-2( d)-5(u)-5(r)-4(i)6(n)-5(g reflow)-5( )6(w)-5(ith)-5( m)8(o)-5(istu)-5(re )]TJ 0 Tw 0 -1.15 TD [(p)-5(r)-5(econ)-5(d)-5(ition)-5(ing)-5(\224, )]TJ /TT3 1 Tf 0.0003 Tc 0.0617 Tw 7.337 0 Td [(IEEE T)5(ransactions of Components )6(and )]TJ 0.0023 Tc -0.0003 Tw -7.337 -1.144 Td [(Pack)8(agi)10(ng)4( Tec)8(h)-2(n)4(o)-2(l)4(o)4(gi)4(es)]TJ /TT0 1 Tf -0.0016 Tc -0.0024 Tw 9.863 0 Td [(, )-6(2008)-5( \(in)-5( p)-5(r)-5(ess\) )]TJ 0.0039 Tc 0 Tw -11.663 -1.252 Td (7.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf 0.0025 Tc 0.4314 Tw 1.05 0 Td [(B. Xi)4(e, )6(X.)7(Q.)7( Shi)4(,)1( )6(X.)7(J. F)7(a)2(n, a)8(n)5(d H)5(.)1( )6(Di)4(n)5(g)-1(, \223)8(D)-1(i)4(rect)10( )]TJ -0.0017 Tc 0.1357 Tw 0 -1.144 TD [(co)-6(n)-6(c)-2(en)-6(tration ap)-6(pro)-6(ach o)-6(f)1( )-6(mo)-6(istu)-6(re d)-6(iffu)-6(s)-2(i)6(o)-6(n )-6(an)-6(d w)-5(ho)-6(le )]TJ 0.0029 Tc 0.0351 Tw 0 -1.15 TD [(fi)5(el)5(d va)9(p)5(o)-1(r )6(pre)9(ssure)9( m)13(ode)]TJ 0.0015 Tc 0.0365 Tw 10.529 0 Td [(ling)4( fo)4(r re)7(flo)4(w)-2( )6(pr)5(ocess\224, )]TJ /TT3 1 Tf -0.0049 Tc 0 Tw 10.175 0 Td [(AS)-9(M)-6(E )]TJ -0.0015 Tc 0.0035 Tw -20.704 -1.144 Td [(Jo)-5(urna)-5(l )6(o)-5(f Electro)-5(n)-5(ic Pa)-5(ckagin)-5(g)]TJ /TT0 1 Tf -0.002 Tc 0.004 Tw 13.079 0 Td [(, 200)-6(8 \()-5(s)3(ubmit)-6(ted)-6(\))-5( )]TJ 0.0039 Tc 0 Tw -14.879 -1.252 Td (8.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf 0.026 Tc 1.05 0 Td [(T)25(.)24(Y)28(.)24( T)25(e)26(e)32(,)24( C)27(.)30( K)28(h)22(o)28(,)24( )6(D)22(.)24( )6(Y)22(a)32(p)22(,)30( C)27(.)30( T)25(o)28(h)22(,)30( X)28(.)24( B)27(a)26(r)23(a)26(t)34(o)22(n)28(,)24( Z)31(.)24( Z)31(h)28(o)22(n)28(g)22(,)30( )]TJ -0.0008 Tc 0.2188 Tw 0 -1.144 TD [(\223Reliab)-5(ilit)-5(y )-6(assessm)9(en)-5(t )-6(an)-5(d)-5( h)-5(ygro)-5(s)4(w)-5(e)-1(llin)-5(g )-12(m)9(o)-5(d)-5(e)-1(lin)-5(g)-5( of )]TJ 0.8127 Tw 0 -1.15 TD [(FCBG)-5(A )-6(w)-5(i)1(t)7(h)-5( no)-5(-flow)-5( u)-5(n)1(d)-5(e)5(rfill\224 )]TJ /TT3 1 Tf 0.0003 Tc 0 Tw 16.426 0 Td [(Mi)8(croelectronics )]TJ -0.0013 Tc -16.426 -1.15 Td [(Relia)-5(b)-5(lity)]TJ /TT0 1 Tf -0.0006 Tc -0.0034 Tw 3.888 0 Td [(, )-6(2003)-4(, pp)-4(. 74)-4(1-7)-4(4)2(9)-4(.)3( )]TJ 0.0039 Tc 0 Tw -5.687 -1.245 Td (9.)Tj /TT2 1 Tf 0 Tc 0.75 0 Td ( )Tj /TT0 1 Tf -0.0007 Tc 0.2606 Tw 1.05 0 Td [(H)-4(.)-3( )6(A)-4(r)2(d)-5(e)5(b)-5(ili, E.H. )6(W)-5(o)1(n)-5(g)1(, an)-5(d)-5( M)7(.)-3( Pech)-5(t, )6(\223H)-4(ygro)-5(scop)-5(ic )]TJ -0.0016 Tc 0.2255 Tw T* [(sw)-5(ellin)-5(g an)-5(d )6(so)-5(rp)-5(tion ch)-5(aracteristics of ep)-5(ox)-5(y m)8(o)-5(ld)-5(ing )]TJ 0.0014 Tc 0.1805 Tw 0 -1.144 TD [(com)11(pounds us)7(ed in electroni)]TJ 0.0009 Tc 0.1811 Tw 12.017 0 Td [(c packa)7(g)-3(ing\224, )6(IEEE T)6(r)-2(ans.)5( )]TJ 0.0004 Tc 0.0736 Tw -12.017 -1.15 Td [(Com)10(p)-3(. Packag. Technol., Vol.)]TJ 0.0014 Tc 0.0726 Tw [( 26, No. )6(1 \(2003\) pp. )6(206-)]TJ 0.0031 Tc -0.0011 Tw 0 -1.15 TD [(21)5(4.)7( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(10)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.0009 Tc 0.7948 Tw 0.552 0 Td [(J. Zho)-5(u)1(, \223In)-5(v)-5(e)5(stig)-5(atio)-5(n )6(o)-5(f)2( non)-5(-un)-5(i)1(form)9( )-6(m)9(o)-5(istu)-5(re )]TJ -0.0016 Tc 0.3455 Tw T* [(d)-5(istribu)-5(tio)-5(n on)-5( d)-5(e)-2(term)8(in)-5(ati)-6(o)-5(n o)-5(f)1( )-6(h)-6(y)7(g)-5(r)1(o)-5(s)4(co)-5(p)-5(ic )-6(sw)-5(ellin)-5(g )]TJ 0.0003 Tc 0.2236 Tw 0 -1.144 TD [(coefficient a)6(n)2(d )6(finite elem)10(e)-6(n)]TJ -0.0015 Tc 0.2254 Tw [(t m)8(o)-5(d)-5(e)-2(lin)-5(g )6(fo)-5(r a )6(flip ch)-5(i)6(p)-5( )]TJ 0.0007 Tc 0 Tw 0 -1.15 TD [(packa)7(g)-3(e, )]TJ /TT3 1 Tf 0.0028 Tc 0.7611 Tw 4.541 0 Td [(I)6(E)2(E)8(E)2( Tr)8(ans)8(act)5(i)5(o)5(ns )6(of)5( Co)5(mp)5(one)9(n)-1(t)5(s)2( )6(an)5(d)5( )]TJ 0.0023 Tc -0.0003 Tw -4.541 -1.15 Td [(Pack)8(agi)10(ng)4( Tec)8(h)-2(n)4(o)-2(l)4(o)4(gi)4(es)]TJ /TT0 1 Tf -0.0012 Tc 0.0032 Tw 9.863 0 Td [(, 2008)-5( )6(\(in press\) )]TJ 0.0039 Tc 0 Tw -11.663 -1.245 Td [(11)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0023 Tc 0.6776 Tw 0.552 0 Td [(J.)6(W. Osen)4(ba)8(ch, \223Co)4(r)-1(r)5(o)-2(si)4(o)4(n)-2(-i)10(nd)4(uce)8(d)-2( de)8(gra)8(d)-2(at)4(i)4(o)4(n of)5( )]TJ 0.0003 Tc 0.5116 Tw T* [(microelectronic de)6(vices\224, )]TJ /TT3 1 Tf 0.003 Tc 0.5029 Tw 11.489 0 Td [(J)9(o)-1(ur)8(n)5(a)-1(l)5( of)5( Se)9(mi)5(co)5(nd)5(. Sci)5(.)7( )]TJ 0.0008 Tc 0 Tw -11.489 -1.144 Td (Technol.)Tj /TT0 1 Tf 0.0032 Tc -0.0072 Tw 3.474 0 Td [(, 11)5(, 1)5(5)-1(5)5(-)6(16)5(2,)7( )-6(1)5(9)5(96 )]TJ 0.0039 Tc 0 Tw -5.274 -1.252 Td [(12)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.0008 Tc 0.4527 Tw 0.552 0 Td [(Mo)-5(istu)-5(re/Refl)7(o)1(w)-5( Sensitiv)-5(ity)-5( )-6(Classification)-5( fo)-5(r )-6(Plastic )]TJ 0.0002 Tc 0.3977 Tw 0 -1.144 TD [(Inte)6(grated Circuit Surface)]TJ 0.0009 Tc 0.397 Tw 11.177 0 Td [( )6(Mount De)7(vic)7(e)1(s, JE)6(DEC/J-)]TJ -0.0007 Tc -0.0033 Tw -11.177 -1.15 Td [(STD-)-4(020)-5(C, 200)-5(4)-5( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(13)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0018 Tc 0.0962 Tw 0.552 0 Td [(T. Fer)5(g)4(uso)4(n)-2( a)8(nd J)7(. Q)4(u)-2(, \223M)9(o)4(i)4(st)4(ure ab)4(so)4(rpt)4(i)10(on a)8(n)-2(al)4(y)4(s)1(i)4(s)1( o)4(f)-1( )]TJ -0.0004 Tc 0.1644 Tw 0 -1.15 TD [(in)-4(terfacial fractu)-4(re test sp)]TJ 0.0008 Tc 0.1632 Tw 10.685 0 Td [(eci)9(mens com)11(pose)7(d)-3( of no-flow )]TJ -0.0001 Tc 0.326 Tw -10.685 -1.144 Td [(u)-4(n)2(d)-4(e)6(rfill m)10(ate)-6(rials\224, )]TJ /TT3 1 Tf 0.001 Tc 0.3249 Tw 8.951 0 Td [(Jour)6(nal of Electronic)7( Pack)7(agi)9(ng)]TJ /TT0 1 Tf 0.002 Tc 0 Tw 14.051 0 Td (, )Tj -0.0019 Tc -0.0021 Tw -23.002 -1.15 Td [(V)-6(o)-6(l. )-6(125)-6(,)-4( pp)-6( 24)-6(-30)-6(,)-4( 20)-6(03)-6(. )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(14)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.2179 Tw 0.552 0 Td [(S. )6(Luo and C)7(.)-2(P. )6(Wong, \223Influe)6(n)-4(ce )6(of te)6(m)10(p)-4(erature a)6(n)2(d )]TJ -0.0001 Tc 0.626 Tw T* [(h)-4(u)-4(m)10(id)-4(ity )-6(o)-4(n)2( )-6(adh)-4(esi)8(o)-4(n)2( of u)-4(n)2(d)-4(e)6(rfills for flip )-6(ch)-4(i)8(p)-4( )]TJ ET Q BT /GS1 gs /TT4 1 Tf 10 0 0 10 296 40.29 Tm (1065)Tj /TT5 1 Tf 2.954 0 Td (2008 Electronic Components and Technology Conference)Tj ET endstream endobj 167 0 obj [722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 250 333 408 500 500 833 778 180 333 333 500 564 250 333 250 278 500 500 500 500 500 500 500 500 500 500 278 278 564 564 564 444 921 722 667 667 722 611 556 722 722 333 389 722 611 889 722 722 556 722 667 556 611 722 722 944 722 722 611 333 278 333 469 500 333 444 500 444 500 444 333 500 500 278 278 500 278 778 500 500 500 500 333 389 278 500 500 722 500 500 444 480 200 480 541 350 744 350 333 500 444 1000 500 500 333 1000 556 333 889 350 611 350 350 333 333 444 444 350 500 1000 333 980 389 333 722 350 444 722 250 333 500 500 744 500 200 500 333 760 276 500 564 333 760 333 400 549 300 300 333 576 453 250 333 300 310 500 750 750 750 444 722 722 722 722 722 722 889 667 611 611 611 611 333 333 333 333 722 722 722 722 722 722 722 564 722 722 722 722 722 722 556 500 444 444 444 444 444 444 667 444 444 444 444 444 278 278 278 278 500 500 500 500 500 500 500 549 500 500 500 500 500 500 500 500] endobj 168 0 obj [722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 250 333 408 500 500 833 778 180 333 333 500 564 250 333 250 278 500 500 500 500 500 500 500 500 500 500 278 278 564 564 564 444 921 722 667 667 722 611 556 722 722 333 389 722 611 889 722 722 556 722 667 556 611 722 722 944 722 722 611 333 278 333 469 500 333 444 500 444 500 444 333 500 500 278 278 500 278 778 500 500 500 500 333 389 278 500 500 722 500 500 444 480 200 480 541 350 744 350 333 500 444 1000 500 500 333 1000 556 333 889 350 611 350 350 333 333 444 444 350 500 1000 333 980 389 333 722 350 444 722 250 333 500 500 744 500 200 500 333 760 276 500 564 333 760 333 400 549 300 300 333 576 453 250 333 300 310 500 750 750 750 444 722 722 722 722 722 722 889 667 611 611 611 611 333 333 333 333 722 722 722 722 722 722 722 564 722 722 722 722 722 722 556 500 444 444 444 444 444 444 667 444 444 444 444 444 278 278 278 278 500 500 500 500 500 500 500 549 500 500 500 500 500 500 500 500] endobj 169 0 obj <>/ProcSet[/PDF/Text]/ExtGState<>>>/Type/Page>> endobj 170 0 obj <>stream q 0.9700012 0 0 0.9700012 9 12 cm 0 0 m 612 0 l 612 792 l 0 792 l 0 0 l W n 1.0309265 0 0 1.0309265 -9.2783388 -12.3711185 cm BT 0 0 0 rg /GS0 gs /TT0 1 Tf 0.0012 Tc 9.701 0 0 9.7194 73.2528 725.241 Tm [(packa)7(g)-3(ing\224, )]TJ /TT1 1 Tf 0.0009 Tc 0.511 Tw 5.561 0 Td [(IEEE )6(Tr)6(ans)6(a)-3(c)7(tions)6( of)9( Compone)7(n)-3(ts )6(and )]TJ 0.0023 Tc -0.0003 Tw -5.561 -1.144 Td [(Pack)8(agi)10(ng)4( Tec)8(h)-2(n)4(o)-2(l)4(o)4(gi)4(es)]TJ /TT0 1 Tf -0.0018 Tc -0.0022 Tw 9.863 0 Td [( ,Vo)-6(l. )-6(28)-6(, No)-6(.1)-6(, 88)-6(-94)-6(,)-4( 20)-6(05)-6( )]TJ 0.0039 Tc 0 Tw -11.663 -1.252 Td [(15)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0029 Tc 1.4929 Tw 0.552 0 Td [(A.)7(G. E)8(v)-1(a)9(n)-1(s)8( and J)8(.)7(W. )6(Hut)5(c)9(hi)5(nso)5(n)-1(, )6(\223The)9( )]TJ -0.0008 Tc 1.0707 Tw 0 -1.144 TD [(th)-5(erm)9(o)-11(m)9(ech)-5(anical in)-5(teg)-5(r)-4(ity o)-5(f)-4( t)7(h)-5(in fil)-5(m)9(s an)-5(d )]TJ -0.0002 Tc 0 Tw 0 -1.15 TD [(m)10(u)-4(l)-4(tilayers,\224 )]TJ /TT1 1 Tf 0.0001 Tc 0.2958 Tw 5.735 0 Td [(Acta)-4(. Met)8(a)-4(ll. Ma)-4(ter.)]TJ /TT0 1 Tf -0.0011 Tc 0.291 Tw [(, )-6(vo)-5(l. 43)-5(, pp)-5(. 2)-5(507)-5(-)]TJ -0.0012 Tc -0.0028 Tw -5.735 -1.15 Td [(2)-5(530)-5(, 19)-5(95)-5( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(16)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0025 Tc 0.0295 Tw 0.552 0 Td [(J.)7(W. )6(Hut)4(c)8(hi)4(ns)8(on)5( a)8(n)-1(d)5( Z.)7(G.)7( S)7(u)-1(o)5(,)1( \223M)4(i)4(x)-1(e)8(d)5( m)12(ode c)8(racki)10(n)-1(g)5( i)4(n)5( )]TJ 0.0003 Tc 0.1517 Tw T* [(layered)-4( m)10(ateri)-4(als,\224 )]TJ /TT1 1 Tf -0.0017 Tc 0.1537 Tw 8.105 0 Td [(Ad)-6(van)-6(ces in)-6( Ap)-6(p)-6(lied Mech)-6(an)-6(ics)]TJ /TT0 1 Tf -0.0034 Tc 0.1554 Tw 13.253 0 Td [(, 29)-7(, )]TJ -0.0017 Tc -0.0023 Tw -21.358 -1.144 Td [(p)-6(p. 6)-6(3\2261)-6(91)-6(, )-6(199)-6(2)-6( )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td [(17)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.0015 Tc 0.1055 Tw 0.552 0 Td [(X)-5(.)-3(J. Fan, )6(H)-5(.)-3(B. )6(W)-12(a)4(ng)-5(; )6(& T.B)6(.)-3( Lim)8(,)-3( \223In)-5(v)-5(e)-2(sti)6(g)-5(atio)-5(n )6(o)-5(f)2( th)-5(e )]TJ 0.0012 Tc 0.0968 Tw 0 -1.144 TD [(unde)7(rfill dela)7(mination and c)7(r)-2(acki)9(ng )6(for )6(flip c)7(h)-3(ip m)11(odule)7( )]TJ -0.0005 Tc 0.3744 Tw 0 -1.15 TD [(d)-4(u)2(ring)-4( t)7(h)-4(erm)9(a)-1(l cyclic lo)-4(ad)-4(in)-4(g)-4(\224)5(, )]TJ /TT1 1 Tf 0.0013 Tc 0.3666 Tw 14.23 0 Td [(IEEE Tr)7(ans)7(a)-3(ction of )]TJ 0.0024 Tc 0.1676 Tw -14.23 -1.144 Td [(Com)5(p)-1(o)5(n)-1(e)8(n)-1(t)4(, )-6(M)8(a)-1(n)5(u)-1(f)4(a)-1(ct)10(uri)4(n)5(g a)5(nd Pack)8(a)5(g)-1(i)4(n)5(g Tech)5(nol)10(ogy)]TJ /TT0 1 Tf 0.002 Tc 0 Tw 23.002 0 Td (, )Tj -0.0022 Tc 0.0042 Tw -23.002 -1.15 Td [(2)-6(4\(1)-6(\))-5(,)2( 84-)-5(91)-6(, 20)-6(01)-6( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(18)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0003 Tc 0.3196 Tw 0.552 0 Td [(X. )6(Dai, \223Mat)8(erials study )6(fo)]TJ 0.0011 Tc 0.3188 Tw 12.161 0 Td [(r i)9(n)-3(terfacial )6(adhe)7(sion and )]TJ -0.0015 Tc 0.1295 Tw -12.161 -1.15 Td [(reliab)-5(ility o)-5(f)-4( )6(micro)-5(e)-2(lectron)-5(ics p)-5(a)-2(ck)-5(ag)-5(ing)-5( )6(stru)-5(ctures\224, Ph)-5(. )]TJ -0.001 Tc -0.003 Tw T* [(D)-5(.)-3( d)-5(i)1(ssertation)-5(,)3( )-6(Un)-5(iv)-5(ersity )-6(o)-5(f)2( Tex)-5(a)-1(s )-6(at Au)-5(stin)-5(, 19)-5(98)-5( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(19)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0006 Tc 0.2473 Tw 0.552 0 Td [(X. Zha)7(n)-3(g, \223C)8(haracterization of i)9(n)-3(terfacial)9( adhe)7(sion by )]TJ -0.0006 Tc 0.1646 Tw T* [(d)-4(oub)-4(le )-6(can)-4(tilev)-4(e)-1(r b)-4(eam)9( )-12(m)9(e)-1(tr)-10(o)-4(l)1(og)-4(y\224, u)-4(npu)-4(blish)-4(e)-1(d)-4( repo)-4(rt,)9( )]TJ -0.0033 Tw 0 -1.144 TD [(In)-5(tel, 20)-5(06)-5( )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td [(20)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0023 Tc 0.0477 Tw 0.552 0 Td [(X.)6(Q. S)7(h)-2(i)4(, Y)5(.L.)6( Zhan)4(g, )6(W. Z)7(h)]TJ 0.0004 Tc 0.0496 Tw 11.975 0 Td (ou, and X.J. Fan, \223Effect of )Tj -0.0005 Tc 0.9264 Tw -11.975 -1.144 Td [(h)-4(ygro)-4(t)7(h)-4(e)-1(rm)9(al)-5( ag)-4(ing)-4( )6(on in)-4(terfacial)7( reliab)-4(ility)-4( o)-4(f)3( )]TJ -0.0001 Tc 0.236 Tw 0 -1.15 TD [(silico)-4(n)-4(/)2(un)-4(d)-4(e)6(rfil)8(l/FR-4)-4( assem)10(b)-4(ly\224, )]TJ /TT1 1 Tf -0.0006 Tc 0.2365 Tw 14.111 0 Td [(IEEE Tran)-4(sactio)-4(n)-5(s)5( o)-4(f)1( )]TJ -0.0018 Tc 0.5077 Tw -14.111 -1.15 Td [(Co)-6(mp)-6(on)-6(en)-6(ts a)-6(nd )-6(Pa)-6(ckag)-6(ing)-6( Techno)-6(log)-6(i)6(es)]TJ /TT0 1 Tf -0.0011 Tc 0.507 Tw 18.382 0 Td [(, 20)-5(08)-5( )6(\()-4(i)1(n )]TJ 0.002 Tc 0 Tw -18.382 -1.144 Td [(press)7(\))-1( )]TJ 0.0039 Tc -1.8 -1.252 Td [(21)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.0012 Tc 0.3391 Tw 0.552 0 Td [(Eric Stellrech)-5(t)1(, Bong)-5(tae )6(H)-5(a)5(n)-5(,)3( and)-5( Mich)-5(ael G)-5(.)3( Pech)-5(t, )]TJ 0.002 Tc 0.192 Tw 0 -1.144 TD [(\223Charact)4(eri)4(zat)4(i)4(o)-2(n)4( o)4(f)-1( )6(Hy)4(g)4(r)5(osc)8(opi)4(c)8( Swel)4(l)4(i)4(n)4(g)4( Beha)8(vi)4(o)4(r)-1( )6(of)5( )]TJ 0.8638 Tw 0 -1.15 TD [(M)3(o)-2(l)4(d)-2( C)9(o)-2(m)12(pou)4(n)4(d)-2(s a)8(n)4(d )6(Pl)4(as)]TJ -0.0005 Tc 0.8664 Tw 13.451 0 Td (tic Packages\224, IEEE )Tj /TT1 1 Tf -0.0028 Tc 1.3186 Tw -13.451 -1.15 Td [(Tran)-7(sa)-7(ctio)-7(ns on)-7( Co)-7(mp)-7(on)-7(en)-7(ts )6(a)-7(n)-1(d)-7( Pa)-7(cka)-7(g)-7(i)5(ng)-7( )]TJ 0.0021 Tc 0 Tw 0 -1.144 TD [(Tech)4(nol)10(ogi)4(es)7(, )]TJ /TT0 1 Tf -0.0014 Tc 0.0034 Tw 5.831 0 Td [(2)-5(7)1(\(3)-5(\))-4(,)3( 499)-5(-50)-5(5)1(, 200)-5(4)-5( )]TJ 0.0039 Tc 0 Tw -7.631 -1.252 Td [(22)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0011 Tc 0.0309 Tw 0.552 0 Td [(Y. He, )-6(and X.J)6(.)-1( )-6(Fa)7(n, )-6(\223)7(I)-2(n-situ characte)7(r)-2(ization of )-6(m)11(o)-3(isture)13( )]TJ -0.0019 Tc 0.1719 Tw T* [(ab)-6(so)-6(rp)-6(tio)-6(n and d)-6(e)-2(so)-6(rp)-6(tion)-6( in a th)-6(in BT core su)-6(bstrate\224, )]TJ /TT1 1 Tf 0.001 Tc 0.115 Tw 0 -1.15 TD [(Electronic C)8(o)3(mponents)6( and )6(Technol)9(ogy)7( C)8(onfere)7(n)-3(ce)]TJ /TT0 1 Tf -0.004 Tc 0.114 Tw 21.394 0 Td [(, p)-8(p)-2(.)-6( )]TJ 0.0037 Tc -0.0017 Tw -21.394 -1.144 Td [(13)6(7)6(5-)7(1)6(38)6(3,)8( 2)6(0)6(07 )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td [(23)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0007 Tc 0.4032 Tw 0.552 0 Td [(E.H. )6(W)-3(o)3(ng, )6(K.C. C)8(h)-3(an, )6(R. Raj)-3(o)3(o, T.B. Li)-3(m)11(,)-1( \223The )]TJ -0.0012 Tc 0.5731 Tw 0 -1.144 TD [(mech)-5(an)-5(ics and)-5( im)9(p)-5(act o)-5(f)2( h)-5(ygro)-5(s)-2(cop)-5(i)1(c sw)-5(ellin)-5(g of )]TJ 0.0005 Tc 0.0975 Tw 0 -1.15 TD [(polym)10(eric m)10(aterials )6(in )]TJ 0.0007 Tc 0.0853 Tw 9.521 0 Td [(electronic pac)7(k)-3(agi)9(n)3(g,\224 )]TJ /TT1 1 Tf 0.003 Tc 0.083 Tw [(Proc)9(. 50t)11(h )]TJ 0.0018 Tc 0.1622 Tw -9.521 -1.15 Td [(El)4(ect)4(ron.)6( C)9(o)-2(m)4(p)-2(.)6( Tec)8(h)-2(n)4(o)-2(l)4(.)6( Conf)4(.)]TJ /TT0 1 Tf -0.0015 Tc 0.1595 Tw 13.235 0 Td [(, Las )-6(V)-5(e)4(gas, NV)-5(, )-6(200)-5(0, )]TJ -0.0005 Tc -0.0035 Tw -13.235 -1.144 Td [(p)-4(p)2(. 5)-4(76\226)-4(580)-4(. )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td [(24)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0011 Tc 0.0609 Tw 0.552 0 Td [(J. Zhou, T.Y. )6(Tee, and J. )6(Luan, \223)7(U)-3(ppe)7(r)-2( and lower )6(bound)9( )]TJ 0 Tc 0.8719 Tw 0 -1.144 TD (theoretical analysis in )Tj 0.0005 Tc 0.8714 Tw 11.579 0 Td [(characte)6(r)-2(izing hygrosc)6(o)3(pic )]TJ -0.0002 Tc 0.5121 Tw -11.579 -1.15 Td [(sw)-4(ellin)-4(g)-4( of p)-4(o)-4(l)2(ym)10(eric )-12(m)10(a)-6(terials,\224 )]TJ /TT1 1 Tf -0.0021 Tc 0 Tw 15.7 0 Td (38)Tj 0.0005 Tc 6.2736 0 0 6.2856 235.2816 262.6092 Tm (th)Tj -0.0012 Tc 0.5191 Tw 9.701 0 0 9.7194 240.1704 258.2442 Tm [( In)-5(tern)-5(a)-5(tiona)-5(l )]TJ 0.0016 Tc -0.0056 Tw -17.206 -1.15 Td [(Sym)4(p)4(osi)4(u)4(m o)4(n)-2( Mi)4(croel)4(ect)4(ro)4(ni)4(cs)]TJ /TT0 1 Tf 0.0033 Tc -0.0073 Tw 12.887 0 Td [(, 20)5(0)5(5)-1(, p)5(p)-1( 67)5(3-)6(6)5(80 )]TJ 0.0039 Tc 0 Tw -14.687 -1.245 Td [(25)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0022 Tc 0.0838 Tw 0.552 0 Td [(J. Z)7(h)-2(o)4(u)-2(,)6( T.)6(Y. )6(Tee, a)8(nd )6(X.)6( Z)7(h)]TJ 0.0004 Tc 0.0856 Tw 12.119 0 Td [(ang, \223Tra)6(nsie)6(nt analysis )6(on )]TJ -0.0015 Tc 0.1535 Tw -12.119 -1.15 Td [(h)-5(ygro)-5(s)-2(cop)-5(ic sw)-5(ellin)-5(g ch)-5(aracterizatio)-5(n)-5( )6(u)-5(s)-2(ing)-5( sequ)-5(en)-5(tially )]TJ 0.6394 Tw T* [(co)-5(up)-5(led m)8(o)-5(istu)-5(r)-4(e)-2( )6(d)-5(iff)-4(usion and)-5( )6(h)-5(ygro)-5(s)4(co)-5(p)-5(ic str)-4(e)-2(ss )]TJ 0.0024 Tc 0.0536 Tw 0 -1.15 TD [(m)12(odel)4(i)4(ng a)8(p)5(pr)5(oach)5(,\224 )]TJ /TT1 1 Tf 0.0018 Tc 0.0482 Tw 8.741 0 Td [(Pro)4(cee)8(di)4(n)4(g)-2(s of)]TJ /TT0 1 Tf 0 Tc 0 Tw 6.077 0 Td ( )Tj /TT1 1 Tf -0.0015 Tc 0.0575 Tw 0.3 0 Td [(ASME In)-5(terna)-5(tion)-5(a)-5(l )]TJ 0.0024 Tc 0.2335 Tw -15.118 -1.15 Td [(Mech)5(ani)4(c)8(a)-1(l)4( E)7(ngi)10(neeri)4(n)5(g C)10(o)5(ngr)8(ess)]TJ /TT0 1 Tf 0 Tc 0 Tw 14.411 0 Td ( )Tj /TT1 1 Tf 0.0031 Tc 0.2328 Tw 0.48 0 Td [(an)5(d R)8(d)-1( )-6(&)19( D Exp)5(o)]TJ /TT0 1 Tf 0.002 Tc 0 Tw 8.111 0 Td (, )Tj -0.001 Tc -0.003 Tw -23.002 -1.144 Td [(2)-5(005)-5(. I)-4(MECE 2)-5(005)-5(-81)-5(847)-5( )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td [(26)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.001 Tc 0.2729 Tw 0.552 0 Td [(J. Zhou)-5(, \223Analytical an)-5(d)-5( nu)-5(m)9(e)-1(r)-4(i)1(cal b)-5(o)-5(und)-5( analysis o)-5(f)-4( )]TJ 0.993 Tw 0 -1.144 TD [(h)-5(ygro)-5(s)-2(cop)-5(i)1(c sw)-5(ellin)-5(g )-6(ch)-5(aracterizatio)-5(n)-5(\224)5(, )]TJ /TT1 1 Tf -0.0001 Tc 0 Tw 19.09 0 Td (Electronic )Tj -0.0017 Tc 0.0037 Tw -19.09 -1.15 Td [(Co)-6(mp)-6(on)-6(en)-6(ts )6(an)-6(d Tech)-6(no)-6(log)-6(y)4( Con)-6(feren)-6(ce)]TJ /TT0 1 Tf 0.0012 Tc -0.0052 Tw 16.528 0 Td [( , ECTC, )-6(2006 )]TJ 0.0039 Tc 0 Tw -18.328 -1.245 Td [(27)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0021 Tc 0.4078 Tw 0.552 0 Td [(X.J.)6( Fa)8(n, )6(J. )6(Zh)4(ou)4(, G)4(.Q)4(. )6(Zha)8(n)-2(g)4( an)4(d L)7(.J. E)7(r)-1(n)4(s)1(t)4(, \223)8(A)4( )]TJ 0.0003 Tc 0.0197 Tw 0 -1.15 TD [(microm)10(echanics based )6(vapor press)6(u)-4(re)6( m)10(ode)6(l in electronic)-6( )]TJ 0.0015 Tc 0 Tw 0 -1.144 TD [(packa)7(g)-2(es\224)7(, )]TJ /TT1 1 Tf 0.0022 Tc 0.1258 Tw 4.739 0 Td [(A)7(S)4(ME Jo)4(ur)7(nal)4( )6(of)10( El)4(ect)4(roni)4(c P)7(a)4(ckagi)10(ng)]TJ /TT0 1 Tf 0.0033 Tc 0.1187 Tw 16.384 0 Td [(, 12)5(7 )]TJ -0.0014 Tc -0.0026 Tw -21.124 -1.15 Td [(\()-4(3)1(\))-4(,)-3( pp)-5(. 26)-5(2-2)-5(6)1(7)-5(,)-3( 20)-5(05)-5(. )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(28)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.0009 Tc 0.0029 Tw 0.552 0 Td [(X)-5(.)-3(J. Fan)-5(,)-3( )6(J. Zho)-5(u)1(, an)-5(d G.Q. Zh)-5(ang)-5(,)3( \223 M)6(u)-5(lti-p)-5(h)-5(y)1(sics )]TJ 0.0026 Tc -0.0006 Tw 0 -1.15 TD [(m)13(odel)5(i)5(ng i)5(n)5( vi)11(rt)5(ual)5( )6(pr)6(ot)5(ot)5(y)5(p)-1(i)11(n)-1(g)5( o)5(f el)5(ect)5(r)6(oni)11(c pac)9(k)-1(age)9(s)2( )6(\226 )]TJ 0.0005 Tc 0.0015 Tw T* [(com)10(b)-3(ined t)8(h)-3(ermal, ther)]TJ 0.0009 Tc 0.0011 Tw 9.305 0 Td [(m)11(o)-3(-mechanical a)7(n)3(d )6(vapor )]TJ 0.0025 Tc -0.0005 Tw 17.188 67.958 Td [(press)8(u)5(re m)12(odel)4(i)4(ng \223)8(,)1( )]TJ /TT1 1 Tf 0.0017 Tc -0.0057 Tw 8.561 0 Td [(J)8(o)-2(u)4(r)1(n)4(a)-2(l)4( of)4( )-6(Mi)4(croel)4(ect)4(r)7(oni)4(cs)7( )]TJ -0.0006 Tc 0 Tw -8.561 -1.144 Td [(Relia)-4(b)-4(ility, )]TJ /TT0 1 Tf -0.0018 Tc 0.0038 Tw 4.668 0 Td [(44)-6(, 19)-6(67-197)-6(6, )6(2)-6(00)-6(4)-6( )]TJ 0.0039 Tc 0 Tw -6.467 -1.252 Td [(29)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.0021 Tc 0.214 Tw 0.552 0 Td [(T.Y. Tee an)-6(d Z.W)-6(.)2( Zh)-6(ong)-6(,)2( \223In)-6(tegr)-5(a)-2(ted vap)-6(or)-5( )6(pr)-5(essu)-6(r)-5(e)4(, )]TJ -0.0009 Tc 0.0629 Tw 0 -1.144 TD [(h)-5(y)1(gro)-5(s)4(w)-5(e)-1(llin)-5(g )6(an)-5(d th)-5(erm)9(o)-5(-m)9(e)-7(c)-1(h)-5(a)-1(n)-5(i)1(cal)7( stress m)9(o)-5(d)-5(e)-1(lin)-5(g )6(o)-5(f)2( )]TJ 0.0015 Tc 0.3844 Tw 0 -1.15 TD [(QF)6(N pac)7(k)-2(a)7(g)-2(e)7( du)4(rin)4(g)-2( re)7(flo)4(w)-2( with i)9(n)-2(terf)5(acial fracture)7( )]TJ 0.0002 Tc 0.2837 Tw T* [(mechanics a)6(n)-4(a)6(l)2(ysis\224, )]TJ /TT1 1 Tf -0.0007 Tc 0.2846 Tw 9.197 0 Td [(Micro)-5(e)5(lectro)-5(n)-5(i)1(cs Reli)7(a)-5(b)-5(ility)]TJ /TT0 1 Tf 0.0013 Tc 0.2766 Tw 11.525 0 Td [(, Vol.)5( )]TJ 0.0035 Tc -0.0015 Tw -20.722 -1.144 Td [(44)6(\()7(1\),)8( p)6(p.)8( 1)6(0)6(5-)7(11)6(4,)8( 2)6(0)6(04 )]TJ 0.0039 Tc 0 Tw -1.8 -1.252 Td [(30)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0008 Tc 0.1332 Tw 0.552 0 Td [(T.Y. Tee)7(,)-1( )6(X.J.)5( Fan a)7(n)-3(d T.)5( B. Lim)11(,)-1( \223Model)9(i)3(ng )6(of )6(whole)7( )]TJ 0.0026 Tc 0.0534 Tw 0 -1.144 TD [(field va)9(po)5(r p)5(re)9(ssure )6(d)5(u)-1(ri)11(ng )6(re)9(fl)]TJ -0.0017 Tc 0.0577 Tw 12.665 0 Td [(ow)-5( fo)-6(r flip)-6( ch)-6(ip)-6( an)-6(d)-6( )6(w)-5(ire-)]TJ 0.0002 Tc 0.2358 Tw -12.665 -1.15 Td [(bond PGBA )6(Packa)6(g)-4(es\224, )]TJ /TT1 1 Tf 0 Tc 0 Tw (1)Tj 0.0005 Tc 6.2736 0 0 6.2856 437.352 627.2904 Tm (st)Tj -0.0011 Tc 0.237 Tw 9.701 0 0 9.7194 441.4842 622.9254 Tm [( In)-5(terna)-5(tio)-5(na)-5(l)7( Wo)-5(rksho)-5(p)1( on)-5( )]TJ 0.0003 Tc 0.0017 Tw -11.465 -1.15 Td [(Electronic M)5(a)-4(t)8(erials )-6(&)16( Packaging)]TJ /TT0 1 Tf -0.0007 Tc -0.0033 Tw 13.859 0 Td [(, 19)-5(99)-5( )]TJ 0.0039 Tc 0 Tw -15.658 -1.245 Td [(31)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf 0.0021 Tc 0.2398 Tw 0.552 0 Td [(Li)4(u, Y.)6(, Ir)5(vi)4(n)4(g)-2(,)6( )-6(S.)6(, )-6(et)4( )-6(al)4(,)6( )]TJ -0.0017 Tc 0.2496 Tw 11.279 0 Td [(Si)-6(m)8(u)-6(latio)-6(n)-6( and An)-6(alysis fo)-6(r)7( )]TJ 0.0002 Tc 0.8657 Tw -11.279 -1.144 Td [(Typical Package )6(Assem)10(b)-4(ly Manufacture Proce)6(ss, )]TJ -0.0011 Tc -0.0029 Tw 0 -1.15 TD [(Eu)-5(ro)-5(Sim)9(E)-2(2)-5(0)1(06)-5(, Ap)-5(r)-4(il, 20)-5(06)-5( )]TJ 0.0039 Tc 0 Tw -1.8 -1.245 Td [(32)6(.)]TJ /TT2 1 Tf 0 Tc 1.248 0 Td ( )Tj /TT0 1 Tf -0.0008 Tc 0.2068 Tw 0.552 0 Td [(J. Zh)-5(ou)-5(, M. )6(Sitlan)-5(i)1(, et.al., \223Inv)-5(estig)-5(ation)-5( )6(o)-5(f)2( inn)-5(e)-1(r-layer )]TJ 0.0008 Tc 0.1572 Tw T* [(dielectric )-6(\()4(I)-2(L)6(D)3(\) failure)7( by)3( h)3(y)3(g)-3(r)4(o)-3(sco)3(p)-3(ic sw)3(elling,\224)7( )]TJ /TT1 1 Tf 0.0021 Tc 0 Tw 21.088 0 Td [(IEE)7(E)1( )]TJ 0.0024 Tc 0.0056 Tw -21.088 -1.15 Td [(55t)10(h El)4(ect)4(ro)4(ni)10(c Com)5(p)5(one)8(nt)4(s )6(an)5(d Tec)8(h)5(nol)10(o)5(g)5(y)2( Conf)4(ere)8(n)-2(ce)]TJ /TT0 1 Tf 0.002 Tc 0 Tw 23.002 0 Td (, )Tj 0.003 Tc -23.002 -1.144 Td [(20)5(0)5(5)-1(. )]TJ 0 Tc 3.24 -1.252 Td ( )Tj -3.6 -1.245 Td ( )Tj ET Q BT /GS1 gs /TT3 1 Tf 10 0 0 10 296 40.29 Tm (1066)Tj /TT4 1 Tf 2.954 0 Td (2008 Electronic Components and Technology Conference)Tj ET endstream endobj 171 0 obj [722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 250 333 408 500 500 833 778 180 333 333 500 564 250 333 250 278 500 500 500 500 500 500 500 500 500 500 278 278 564 564 564 444 921 722 667 667 722 611 556 722 722 333 389 722 611 889 722 722 556 722 667 556 611 722 722 944 722 722 611 333 278 333 469 500 333 444 500 444 500 444 333 500 500 278 278 500 278 778 500 500 500 500 333 389 278 500 500 722 500 500 444 480 200 480 541 350 744 350 333 500 444 1000 500 500 333 1000 556 333 889 350 611 350 350 333 333 444 444 350 500 1000 333 980 389 333 722 350 444 722 250 333 500 500 744 500 200 500 333 760 276 500 564 333 760 333 400 549 300 300 333 576 453 250 333 300 310 500 750 750 750 444 722 722 722 722 722 722 889 667 611 611 611 611 333 333 333 333 722 722 722 722 722 722 722 564 722 722 722 722 722 722 556 500 444 444 444 444 444 444 667 444 444 444 444 444 278 278 278 278 500 500 500 500 500 500 500 549 500 500 500 500 500 500 500 500] endobj 172 0 obj [722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 722 250 333 408 500 500 833 778 180 333 333 500 564 250 333 250 278 500 500 500 500 500 500 500 500 500 500 278 278 564 564 564 444 921 722 667 667 722 611 556 722 722 333 389 722 611 889 722 722 556 722 667 556 611 722 722 944 722 722 611 333 278 333 469 500 333 444 500 444 500 444 333 500 500 278 278 500 278 778 500 500 500 500 333 389 278 500 500 722 500 500 444 480 200 480 541 350 744 350 333 500 444 1000 500 500 333 1000 556 333 889 350 611 350 350 333 333 444 444 350 500 1000 333 980 389 333 722 350 444 722 250 333 500 500 744 500 200 500 333 760 276 500 564 333 760 333 400 549 300 300 333 576 453 250 333 300 310 500 750 750 750 444 722 722 722 722 722 722 889 667 611 611 611 611 333 333 333 333 722 722 722 722 722 722 722 564 722 722 722 722 722 722 556 500 444 444 444 444 444 444 667 444 444 444 444 444 278 278 278 278 500 500 500 500 500 500 500 549 500 500 500 500 500 500 500 500] endobj 173 0 obj [/Indexed/DeviceRGB 255 174 0 R] endobj 174 0 obj <>stream HR[BA ,`X XB,` dz^|qc endstream endobj 175 0 obj <> endobj 176 0 obj [/Indexed/DeviceRGB 16 11 0 R] endobj 177 0 obj [/Indexed/DeviceRGB 133 7 0 R] endobj 178 0 obj <> endobj 179 0 obj [/Indexed/DeviceRGB 181 3 0 R] endobj 180 0 obj [/Indexed/DeviceRGB 141 9 0 R] endobj 181 0 obj <> endobj 182 0 obj <> endobj 183 0 obj [/Indexed/DeviceRGB 169 18 0 R] endobj 184 0 obj <> endobj 185 0 obj <> endobj 186 0 obj <> endobj 187 0 obj <> endobj 188 0 obj <> endobj 189 0 obj <> endobj 190 0 obj <>stream HVyXSW/ ȮA&Ȏ ABIYFIql UADYJE Z-"cŪ\2E,}l37˽;=90d<\ev@;dIS|H@'ㅰL~vi*g( "Ȥ{3&o1܎%btbLBJcg?jfny`Iw16CJmJ$FrE[- sL|JD nLbX7bh"Hhp4yBvl/l~a瓰s~Jw%Dy,7J,L틱qBr D)! 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